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140 results about "Electrowetting" patented technology

Electrowetting is the modification of the wetting properties of a surface (which is typically hydrophobic) with an applied electric field.

Electrowetting-on-dielectric (EWOD) device

Provided is an electrowetting-on-dielectric (EWOD) device. The EWOD device comprises a first substrate and a second substrate opposite to the first substrate. The first substrate comprises a. plurality of first electrodes configured to be respectively controllably connected to signal lines. The first hydrophobic layer disposed over the plurality of first electrodes. The second substrate comprises a second electrode configured to be connected to the signal lines. The second hydrophobic layer disposed over the second electrode. An internal space between the first substrate and the second substrate is provided for receiving a droplet and a surrounding medium. The droplet is surrounded by the surrounding medium.
Owner:CYTESI INC

Devices, systems and methods for droplet manipulation

The present invention relates to an apparatus for droplet manipulation, the apparatus comprising: a drive module configured to receive control signals and operate an electrowetting-on-dielectric (EWOD) chip configured to manipulate droplets; a droplet detection system having a light source and a lens-free imaging device configured to obtain at least one image including a droplet on the electrowetting-on-dielectric chip; and a control unit configured to receive at least one image from the droplet detection system and send control signals to the drive module. The control unit is further configured to adjust at least one of the control signals as a function of the at least one image. The present invention also relates to a system comprising the apparatus and an electrowetting-on-dielectric chip configured to receive signals from the drive module.
Owner:IMEC VESETWAY

Experiment-numerical value-machine learning fusion-based in-oil liquid drop electric field dynamics modeling and regulation method

The invention discloses an experiment-numerical value-machine learning fusion-based in-oil liquid drop electric field dynamics modeling and regulation method, which comprises the following steps of: firstly, constructing a high-voltage electric field liquid drop experiment system, and testing oil liquid drop experiment data in oil; then establishing a multi-physics field coupling model, and describing deformation and flow field evolution of oil drops in oil under a strong electric field; and finally, constructing a BP neural network and optimizing an initial weight and a threshold value to realize rapid prediction of the deformation behavior of the oil drops in the oil under the action of the electric field. According to the method, an experimental characterization-numerical solution-machine learning optimization three-layer collaborative system is constructed, a whole-process closed loop from physical property determination, equation solution to algorithm prediction is realized, and droplet deformation, charge distribution and interface response are rapidly predicted under the conditions of different electric field intensities, temperatures and emulsifier concentrations; and active control of electric field behaviors can be realized through parameter reverse adjustment, and reliable modeling and optimization basis is provided for an electrowetting chip, a flexible EHD pump and a microfluidic liquid drop regulation and control system.
Owner:ZHEJIANG UNIV

Device and method for forming droplets with a predetermined volume by electrowetting

ActiveCN116786179BEngineeringControl circuit
An apparatus for forming a plurality of microdroplets from a droplet includes a substrate, a dielectric layer on the substrate and having a plurality of hydrophilic surface regions spaced apart from each other by a hydrophobic surface, and a plurality of electrodes in the dielectric layer. The electrodes are configured to form an electric field (E) across the droplet in response to a voltage provided by a control circuit to move the droplet across the dielectric layer in a lateral direction (F) while leaving portions of the droplet on the hydrophilic surface regions to form a plurality of microdroplets on the hydrophilic surface regions.
Owner:MGI TECH CO LTD

Split-screen synchronous display method for electrophoresis electronic paper and electrowetting electronic paper

The invention discloses a split-screen synchronous display method for electrophoresis electronic paper and electrowetting electronic paper. The method comprises the following steps: S1, receiving a video stream output by an external video source; s2, converting the video stream into a parallel RGB (Red, Green, Blue) data stream; s3, performing inter-frame difference calculation on the parallel RGB data stream to generate a frame difference data stream; s4, asynchronously caching the frame difference data stream to adapt to the difference between the output frame rate of the external video source and the refresh rate of the electronic paper display equipment; s5, based on the asynchronously cached frame difference data flow, respectively generating driving signals suitable for the electrophoresis electronic paper and the electrowetting electronic paper; and S6, respectively outputting the driving signals to the electrophoresis electronic paper display equipment and the electrowetting electronic paper display equipment so as to realize synchronous split-screen display. According to the invention, multiple problems in real-time dynamic display of the existing electronic paper are solved.
Owner:LIGHT DISPLAY TECH (GUANGDONG) CO LTD

Non-mechanical tomography system

PCT designated stageWO2026102361A1Using optical meansSensorsControl signalGain
A spectral domain optical coherence tomography (OCT) system utilizes an electrowetting prism having four isolated electrodes and configured to deflect a light beam according to an actuating control signal applied to the electrodes. The control signal causes the light beam to laterally scan over a sample. The light beam is produced by a broad bandwidth laser and light from the sample and a reference path is provided to a spectrometer for analysis. The light source may be an all-normal-dispersion fiber laser seeding a gain-managed nonlinear fiber amplifier. The electrowetting prism is capable of scanning up to ±6°. The system is low power and operates at kHz speed.
Owner:THE REGENTS OF THE UNIVERSITY OF COLORADO

Display panel arranged on a motor vehicle body, display system comprising such a panel and method of displaying on said panel

Disclosed is a display panel (20, 50) arranged on a body of a motor vehicle in place of a radiator grill, comprising: - a first electrowetting layer (503) containing a liquid, the liquid being coloured in a first colour chosen from among cyan, magenta and yellow, - a second electrowetting layer (507) containing a liquid, the liquid being coloured in a second colour chosen from cyan, magenta and yellow, - a third electrowetting layer (511) containing a coloured liquid in a third colour chosen from cyan, magenta and yellow, the first (503), second (507) and third (511) electrowetting layers being superposed on one another, above the body (11) of the motor vehicle.
Owner:VALEO VISION SA

Liquid metal alloy composite phase change material and resettable thermal fuse

PendingCN122357087AMetal alloyHemt circuits
This invention provides a liquid metal alloy composite phase change material and a resettable thermal fuse, relating to the field of circuit protection device technology. The material is composed of a liquid metal alloy, micro-phase change material capsules, and elastomer molecular chains. The capsules exhibit phase change characteristics, expanding at a preset operating temperature and contracting at a reset temperature. This material can be used in thermal fuses, filled with a microfluidic matrix and integrated with electrowetting electrode pairs. When the temperature exceeds the limit, the capsules expand, driving the liquid metal to flow and disconnect the circuit. When the temperature drops below the reset temperature, voltage is applied through the electrowetting electrodes to reduce interfacial tension, driving the liquid metal to flow back and achieve active reset. This invention combines phase change driving with electrowetting control, realizing programmable protection, status self-diagnosis, and remote communication, and has the advantages of high operating accuracy, rapid reset, and long cycle life.
Owner:ZHANGZHOU YABAO ELECTRONICS

Method and system for detecting the strongest rayleigh acoustic streaming in a pinned microdroplet

This invention discloses a method and system for detecting the strongest Rayleigh acoustic current in immobilized microdroplets. Specifically, it involves: calculating the acoustic current suppression coefficient through experimental quantitative testing to establish a quantitative mapping relationship between acoustic current intensity and droplet contact angle; utilizing an electrowetting structure composed of interdigitated electrodes, a dielectric layer, and a hydrophobic layer to actively regulate the droplet contact angle through an applied voltage; and dynamically adjusting the applied voltage in real time by monitoring the droplet vibration amplitude, particle velocity, and contact angle through a collaborative control program to maintain the acoustic current intensity at its strongest. This invention also provides a detection system for implementing the above method, including an indium tin oxide transparent interdigitated electrode substrate, a lead zirconate titanate piezoelectric transducer, a laser Doppler vibrometer, a microscope, and a collaborative control module. This invention can maximize and dynamically maintain the Rayleigh acoustic current intensity in immobilized microdroplets, significantly accelerating the solid-liquid interface mass transfer process, and is applicable to biochemical analysis fields such as rapid immunoassay and biological particle mixing.
Owner:NANJING UNIV OF SCI & TECH

A zoom microprojector based on metasurface holography

This invention proposes a zoom microprojector based on metasurface holography, comprising a laser, a transmissive metasurface, and an electrowetting liquid lens. To achieve system miniaturization, the transmissive metasurface and the electrowetting liquid lens are integrated into a single cavity, with the electrowetting liquid lens located behind the transmissive metasurface. During the metasurface fabrication process, a 3D Fourier transform algorithm is proposed to generate a 3D metasurface hologram, thereby fabricating the transmissive metasurface. The liquid lens is a small-aperture liquid lens designed based on the electrowetting principle to cooperate with the transmissive metasurface to achieve zoom microprojection. When the laser emitted from the laser illuminates the transmissive metasurface, the 3D image diffracted by the metasurface passes through the electrowetting liquid lens. The position and size of the 3D image can be adjusted according to the voltage of the liquid lens, thus achieving a 3D zoom projection effect.
Owner:BEIHANG UNIV

Composite digital acoustic flow control chip, preparation method and multi-dimensional processing method

The application discloses a composite digital acoustic flow control chip, a preparation method and a multi-dimensional processing method. The chip comprises detachably connected upper and lower plates and a gap support assembly arranged between the upper and lower plates. The upper plate comprises a piezoelectric substrate, an acoustic surface wave interdigital electrode array arranged on the piezoelectric substrate, a first dielectric layer covering the interdigital electrode array, a conductive layer arranged on the first dielectric layer, and a first hydrophobic layer arranged on the conductive layer. By constructing the multi-dimensional acoustic wave control unit of the upper plate and the electrode array of the lower plate based on the dielectric wetting effect, the programmable and controllable movement of the droplet sample and the action of the acoustic surface wave in the droplet are realized, the digital control of the acoustic flow control technology is realized, and the capacity of the chip for sample enrichment, control, mixing and fixed-point heating is greatly improved through the design of multiple IDTs.
Owner:XIAMEN UNIV

Dielectric hydrophobic membrane layer and preparation method and application thereof

The invention discloses a dielectric hydrophobic film layer and a preparation method and application thereof, the dielectric hydrophobic film layer comprises a substrate, at least one side surface of the substrate contains hydroxyl; the preparation raw materials of the bridging structure comprise an acrylate silane coupling agent, and at least one end part of the acrylate silane coupling agent is chemically connected with the hydroxyl group on the surface of the substrate; the hydrophobic layer is arranged on the surface of the side, away from the substrate, of the bridging structure, and the material of the hydrophobic layer comprises fluorine-containing acrylate. The film layer has excellent dielectric strength and surface hydrophobicity and can replace a traditional laminated structure of a dielectric medium and a hydrophobic layer, chemical surface modification of acrylate silane is carried out on a substrate interface, an upper layer is made of a fluorine-containing acrylate material, the lower layer of the prepared dielectric hydrophobic layer is connected with an inorganic substrate in a covalent bond mode, and the dielectric hydrophobic layer is formed. The breakdown resistance of the interface of the electrowetting device is enhanced; and the exposed fluorine element on the upper layer enables the coating to have good hydrophobic performance.
Owner:SOUTH CHINA NORMAL UNIV +1

Visual indicator and fluid dispenser

A device for fluid display comprising a fluid, wherein the fluid is displaced by an electrowetting process. The device is filled with at least 2 immiscible fluids, whereas one fluid is located within the electrical field generated by a reference electrode and a control electrode and partially within the electrical field generated by the same reference electrode and at least one second control electrode so that the electric activation of the second control electrode generates a deformation or movement of the fluid in the direction of the second control electrode. Also provided is a method of switching the control electrodes of the device above-mentioned device in a sequence so that a portion of the fluid is displaced within the device.
Owner:PRECIFLEX SA

Electrowetting-assisted piezoelectric ink-jet printing circuit combination degree enhancing method

The invention discloses an electrowetting-assisted piezoelectric ink-jet printing circuit combination degree enhancing method, which comprises the following steps of: integrating an interdigital electrode array on the back surface of a ceramic substrate, connecting interdigital electrodes in the interdigital electrode array with a controller through silver paste, and checking the pattern integrity of the interdigital electrodes by using an optical microscope; based on a dielectric wetting theory, establishing a quantitative regulation and control relationship between the electric field intensity and the contact angle, and setting electric field parameters; a single factor variable method and an orthogonal experiment method are combined, line width consistency and edge roughness serve as core evaluation indexes, and key printing parameters are optimized; a sintering procedure is determined based on a temperature-stress-conductivity coupling model, a printed sample is placed in a tubular sintering furnace, gradient sintering is carried out in a reducing atmosphere, and elimination of interface stress and strengthening of the binding degree are achieved through the following thermal field strategy of precise temperature control. The bonding strength of the piezoelectric ink-jet printing circuit and the surface of the ceramic substrate is improved.
Owner:10TH RES INST OF CETC

Electro-wetting display device structure and method of manufacturing the same

The application discloses an electrowetting display device structure and a method for preparing the same. The electrowetting display device structure comprises a first substrate, a second substrate, a sealing frame and a pixel wall. The second substrate is arranged in parallel with the first substrate, and has a first conductive layer on one side close to the first substrate. A hydrophobic insulating layer is arranged on the first conductive layer. The sealing frame is arranged between the first substrate and the second substrate, and a sealed cavity is formed between the first substrate, the sealing frame and the second substrate. The sealed cavity is filled with a polar liquid. The pixel wall is arranged on the hydrophobic insulating layer in the sealed cavity, and defines a pixel grid. The pixel grid is filled with a non-polar liquid which is immiscible with the polar liquid. The pixel wall comprises a second conductive layer, and the second conductive layer and the first conductive layer form a positive electrode and a negative electrode, respectively. The electrowetting display device structure can improve the response time and the conductive efficiency of the electrowetting display device.
Owner:SOUTH CHINA NORMAL UNIV +1

Efficient microfluidic system and microfluid distribution method

The invention discloses an efficient micro-fluidic system and a micro-fluid distribution method, relates to the technical field of micro-fluidic, and solves the problems that a micro-fluidic chip is single in structure and function and generally does not have an automatic sorting function, so that an application scene is limited, and the development of the micro-fluidic chip is restricted; and a gap is easily generated due to difficulty in alignment between the pipeline and the channel, so that liquid leakage is caused. According to the efficient microfluidic system and the microfluid distribution method, the efficient microfluidic system comprises a control machine body, an electrowetting control machine body is arranged on the control machine body, and a control chip is arranged on the electrowetting control machine body. When an arc-shaped conveying pipe in a first flow dividing disc rotates for the third time, an intermittent gear can drive a first rotating rod on a driving gear to rotate for the first time through a gear part, and then the arc-shaped conveying pipe in the first flow dividing disc can rotate clockwise; therefore, more convenience and high efficiency are achieved.
Owner:ZHUHAI PROPRECISION MEDICAL TECHNOLOGY CO LTD

Combination of DLC and PFPE for EWOD actuation

A digital microfluidic (DMF) system based on an electrowetting-on-dielectric mechanism includes a substrate, and at least one dielectric layer comprising diamond-like carbon over the substrate. The DMF system also includes a plurality of electrodes connected to the dielectric layer. A voltage source is selectively couplable to different electrodes of the plurality of electrodes.
Owner:SEAGATE TECH LLC

Apparatus and system using active-matrix electrowetting-on-dielectric (AM-EWOD)

An apparatus and a system are provided. The system includes a top plate electrode, a dielectric layer, a plurality of pixel electrode circuits, and a plurality of detection circuits. A droplet is disposed between the top plate electrode and the dielectric layer. The plurality of pixel electrode circuits are arranged in a two-dimensional array. The pixel electrode circuits in each column of the two-dimensional array are electrically connected to a respective detection circuit of the plurality of detection circuits.
Owner:CYTESI INC

Pattern electrode structure for electro-wetting device

A pattern electrode structure stacked between a base material and a dielectric layer of an electro-wetting device includes a center branch electrode extending in a first direction, and a plurality of sub-branch electrodes extending from the center branch electrode in an inclined direction relative to the first direction. According to the present disclosure, self-cleaning performance can be more efficiently exhibited even for small droplets.
Owner:HYUNDAI MOTOR CO LTD +1

Display unit and display device

The application provides a display unit and a display device. The display unit comprises a first substrate, a second substrate arranged opposite to the first substrate, a pixel wall arranged between the first substrate and the second substrate and surrounded by the first substrate and the second substrate to form an enclosed cavity, a light control plate comprising at least two blades rotatably connected in the enclosed cavity, a surface of the blade being provided with a reflection layer or a light absorption layer of a preset color, two blades of the at least two blades having opposite electric properties or opposite magnetic properties, and a driving electrode arranged at least in two of the first substrate, the second substrate and the pixel wall in a rotation direction of the blade, for driving the light control plate to rotate to a corresponding angle position to display a corresponding brightness. The display unit can avoid the problems of black spots appearing in white display of electrowetting display, splitting of ink shrinkage and coagulation of microcapsules into groups, and the response rate is improved.
Owner:HKC CORP LTD

Electrowetting display

The invention discloses an electrowetting display, and relates to the technical field of display devices. The first conductive layer is used for being electrically connected with the first electrode, the first pixel wall is connected to the first conductive layer, and a plurality of pixel grids are defined by the first pixel wall. The second conductive layer is used for being electrically connected with the second electrode. The second pixel wall is connected to the second conductive layer. Quantum dots are arranged in at least one pixel grid, the quantum dots are mixed with the second non-polar liquid in the corresponding pixel grid, and the color of the quantum dots is matched with that of the corresponding second non-polar liquid. The quantum dots are arranged in the second non-polar liquid, and the color of the quantum dots is matched with that of the corresponding second non-polar liquid. In the process that the electrowetting display displays an image, the quantum dots can absorb light of part of wavelengths and emit light corresponding to the color of the quantum dots, and the light emitted by the quantum dots in the pixel grids can be coupled with the light reflected by the corresponding second non-polar liquid, so that the saturation of the corresponding color is increased.
Owner:SOUTH CHINA NORMAL UNIV +1

Electrowetting pixel unit, driving method thereof and display panel

The invention relates to an electrowetting pixel unit, a driving method thereof and a display panel, and the electrowetting pixel unit is characterized in that an upper substrate, a first pixel wall, a lower substrate and a second pixel wall in the electrowetting pixel unit are sequentially connected to form a closed space; the first transparent electrode is arranged at the position, attached to the upper substrate, in the closed space; the first super-hydrophobic insulating layer is arranged at the position, attached to the first transparent electrode, in the closed space; the second super-hydrophobic insulating layer is arranged at the position, attached to the lower substrate, in the closed space. The first super-hydrophobic insulating layer, the second super-hydrophobic insulating layer, the first pixel wall and the second pixel wall form an electrowetting fluid chamber in the closed space; the second transparent electrode is arranged in the electrowetting fluid chamber and divides the electrowetting fluid chamber into two independent fluid chambers, and the second transparent electrode, the upper substrate and the lower substrate form an asymmetric microstructure.
Owner:HKC CORP LTD

Lighting device arranged on a front face or on a rear face of a motor vehicle and comprising a display panel, display system comprising such a lighting device, and method for displaying on said device

The invention relates to a lighting device arranged on a front face or on a rear face of a motor vehicle, the lighting device comprising: - a light source; - a surface transparent to the light emitted by the source; - a transparent display panel arranged on the transparent surface; which transparent display panel comprises: - a first electrowetting layer (503) formed of cells which each contain a droplet of a liquid; - a second electrowetting layer (507) formed of cells which each contain a droplet of a liquid; - a third electrowetting layer (511) formed of cells which each contain a droplet of a liquid; - the first, second and third electrowetting layers being stacked on one another, and each droplet being in an expanded state or in a contracted state, the state being respectively determined by an electrical voltage of the first, second or third electrodes.
Owner:VALEO VISION SA

Electro-wetting display panel and electro-wetting display device

The application discloses an electrowetting display panel and an electrowetting display device, and relates to the technical field of display, wherein the electrowetting display panel comprises a first substrate and a second substrate, an electrode layer, a first insulating layer and a second insulating layer, the first substrate is provided with a plurality of pixel units, the pixel units have a first direction and a second direction which are perpendicular to each other, the pixel units comprise a plurality of sub-pixel units, each of the sub-pixel units extends along the first direction, the electrode layer is arranged on the surface of the first substrate, the first insulating layer is arranged on the surface of the electrode layer, the second insulating layer is arranged on the surface of the second substrate and encloses the first insulating layer to form a plurality of accommodation cavities, the accommodation cavities comprise a receiving bin and a sub-pixel flow channel which are connected in communication, the sub-pixel flow channel is arranged corresponding to the sub-pixel unit, the receiving bin is filled with a liquid, the liquid spreads over the sub-pixel flow channel when the electrode layer is not electrified, and the liquid is accommodated in the receiving bin when the electrode layer is electrified. The technical scheme provided by the application can realize the effect of foldable display.
Owner:HKC CORP LTD

Magnetic particle extraction in an EWOD instrument

A method of operating an EWOD device to employs a magnetic field to separate magnetically responsive particles from a polar liquid droplet. The method includes the steps of dispensing a liquid droplet onto an element array of the EWOD device, wherein the liquid droplet includes magnetically responsive particles; performing an electrowetting operation to move the liquid droplet along the element array to a location relative to a magnet element in proximity to that location of the EWOD device; operating the magnet element to apply a magnetic field to the liquid droplet, wherein at least a portion of the magnetically responsive particles aggregate within the liquid droplet in response to the magnetic field; and separating the aggregated magnetically responsive particles from the liquid droplet with the magnetic field, wherein the aggregated magnetically responsive particles move in response to the magnetic field to a location on the element array in proximity to the magnet element. Embodiments of the methods of the present application may be performed by an EWOD control system executing program code stored on a non-transitory computer readable medium.
Owner:SHARP LIFE SCI EU LTD

A temperature-sensitive self-regulating method for heating surface wettability and a heating device thereof

The application discloses a temperature-sensitive self-regulating method and device for heating surface wettability. The method comprises the following steps: integrating a temperature-sensitive functional material layer and arranging a patterned microelectrode array on a heating surface, and dividing the heating surface into multiple electrically independent sub-regions; collecting the wall surface temperature and / or liquid film coverage state of each sub-region in real time to form a thermal-wettability state spatial distribution map; identifying high-risk sub-regions based on multi-level threshold value judgment, and applying an electro-wetting excitation voltage to the high-risk sub-regions only; and dynamically adjusting the voltage parameters according to the type of cooling medium and heat load, and automatically stopping the excitation after the wettability state is restored. The device comprises a heat-conducting substrate, a temperature-sensitive functional material layer, a partitioned microelectrode array, a multi-channel programmable power supply, a sensor and a central control unit. The scheme realizes local precise regulation and control, improves the critical heat flux density, significantly reduces the power consumption, and is suitable for chip heat dissipation, nuclear energy and space heat control fields.
Owner:CHONGQING HAIZHI BOCHUANG PRECISION TECHNOLOGY CO LTD

Electrowetting device

PCT designated stageWO2026048265A1SamplingMechanical engineeringMaterials science
This electrowetting device includes: an array substrate on which working electrodes are arranged; a counter substrate on which counter electrodes are arranged, and which is disposed opposite and away from the array substrate; and a spacer disposed between the array substrate and the counter substrate. The counter substrate has a first opening through which a specimen is injected into a region where the array substrate and the counter substrate are separated from each other, and a second opening through which the specimen is discharged. The spacer has a first sub-spacer on the array substrate side and a second sub-spacer on the counter substrate side. The first sub-spacer and the second sub-spacer have an elongated shape in plan view, and the first sub-spacer and the second sub-spacer overlap such that the longitudinal directions thereof intersect.
Owner:JAPAN DISPLAY INC

Electrowetting display panel and display equipment

The invention discloses an electrowetting display panel and display equipment. The electrowetting display panel comprises a first circuit layer, an electrowetting display layer and a second circuit layer which are stacked. Each pixel area of the electrowetting display panel comprises a first electrode, a second electrode, a hydrophobic layer, a pixel wall, polar liquid and non-polar liquid, the first electrode and the second electrode are oppositely arranged, the hydrophobic layer covers the surface of the side, close to the second circuit layer, of the first circuit layer, and the non-polar liquid covers the surface of the side, close to the second circuit layer, of the pixel wall. A groove structure with an opening facing the second circuit layer is defined by the pixel wall and the hydrophobic layer, the position between the hydrophobic layer and the second circuit layer is filled with the polar liquid, and the inner side of the groove structure is filled with the non-polar liquid. The containing groove is formed in the pixel wall of at least one pixel area, the opening of the containing groove faces the inner side of the groove structure, the non-polar liquid can be effectively limited in the groove in the contraction process, and crosstalk caused by the fact that the non-polar liquid crosses over the pixel wall to enter the adjacent pixel area is avoided.
Owner:MIANYANG HKC OPTOELECTRONICS TECH CO LTD +1

Corrosion parameter adaptive adjustment method and system for wafer wet etching

The invention discloses a corrosion parameter adaptive adjustment method and system for wafer wet etching, and relates to the technical field of wafer wet etching, and the method comprises the steps: carrying out the global optimization based on the geometric features of a wafer and wet etching, and obtaining the optimized initial local electrowetting voltage and initial programming type laser scanning path parameters; acquiring a gas-liquid interface curvature radius and a by-product concentration gradient; obtaining an interface transmission impedance value by using a transmission impedance calculation model; inputting the interface transmission impedance value into a corrosion parameter control model, and outputting a local electrowetting voltage adjustment amount and a programmable laser scanning path parameter adjustment amount; and carrying out adaptive adjustment on the initial local electrowetting voltage and the initial programming type laser scanning path parameter. The technical problems that in the prior art, corrosion parameters are difficult to accurately control, real-time performance and adaptability are lacked, corrosion uniformity is poor, the mass transfer effect is not ideal, and the overall process quality is not high are solved.
Owner:ZHEJIANG LISHUI XIN WAFER SEMICON TECH CO LTD

Droplet generation method and preparation device based on electrowetting phenomenon

The invention discloses a droplet generation method based on an electrowetting phenomenon and a preparation device, relates to the technical field of droplet generation, and solves the problems that the droplet generation rhythm of a droplet in a droplet bottle may be affected, and the droplet generation efficiency is affected because the droplet generation rhythm of the droplet in the droplet bottle may be affected because the droplet generation rhythm usually needs to be manually prepared and adjusted and input into the droplet oil bottle. Therefore, the effect generated before and after liquid dropping may be affected. The invention discloses a droplet generation method and preparation device based on an electrowetting phenomenon, and the device comprises a control machine body, the control machine body is provided with an electrode chip, and the electrode chip is connected with a liquid dropping pipe, an oil dropping pipe and a liquid outlet pipe through a liquid dropping connection port, an oil dropping connection port and a liquid outlet connection port. According to the invention, when the miniature ultrasonic defoamer works, the oil agent generates tiny bubbles, and the bubbles are broken under the action of an electrode on the electrode chip when being finally conveyed to the electrode chip, so that the contact wrapping effect of the oil agent and liquid drops generated on the electrode chip can be enhanced.
Owner:ZHUHAI PROPRECISION MEDICAL TECHNOLOGY CO LTD