234 results about "Planar electrode" patented technology

The invention relates to an electrofluid-driven deformable flexible fiber pump and a manufacturing method, the flexible fiber pump comprises a flexible pump body, a three-dimensional electrode module and an external voltage driving control unit, the flexible pump body is made of a thermoplastic plastic material, and the whole flexible pump body is of a hollow tubular structure; the three-dimensional electrode module comprises a polytetrafluoroethylene film and electrodes, and the electrodes comprise a positive electrode and a negative electrode; the polytetrafluoroethylene film is fused with the inner surface of the flexible pump body, the external voltage driving control unit is electrically connected with the positive electrode and the negative electrode, and the manufacturing method mainly comprises the steps of electrode printing, electrode winding and thermoplastic forming. Compared with the prior art, the electrode has the advantages that a planar electrode structure is converted into a three-dimensional structure through winding, so that the integration of the electrode is enhanced, and the application range of the three-dimensional electrode design is widened; and the shapes of the three-dimensional electrode module and the flexible pump body are fixed while heating, so that the electrode can adapt to the change of the shape of the pump, and the flexible deformation capability of the pump is improved.

The invention belongs to the technical field of gas sensor materials, and particularly relates to a novel high-conductivity conjugated coordination polymer gas-sensitive material, an ammonia gas sensor and a preparation method. Copper salt and 1, 5-diamino-4, 8-dihydroxy anthraquinone or 1-amino-4-hydroxy anthraquinone are used as raw materials, two novel high-conductivity conjugated coordination polymer materials are prepared by adopting a simple solvothermal method, and the preparation method is simple in process and can be used for mass production of materials. The obtained material can form a film on planar electrodes at two ends to prepare a resistance-type ammonia gas sensor, so that ammonia gas can be detected in a concentration range of 2.3 ppb-100 ppm, and the defects of narrow detection range and insufficient sensitivity of a single material in the prior art are overcome.

The invention discloses an MEMS infrared light source with a 3D structure and a preparation method thereof, and the preparation method comprises the steps: cleaning a silicon substrate, depositing supporting layers on the upper surface and the lower surface of the silicon substrate respectively, processing a heating electrode on the supporting layer on the upper surface, and processing to obtain an isolation layer covering the heating electrode and the supporting layer; an infrared radiation material layer is processed in the middle area of the isolation layer, and planar electrodes communicated with the heating electrode are processed on the two sides of the infrared radiation material layer; etching and windowing are carried out on the middle area of the supporting layer on the lower surface of the silicon substrate to form a substrate cavity, etching and windowing are carried out on the supporting layer on the peripheral area of the substrate cavity to form an etching window, substrate body silicon secondary etching is carried out on the lower surface of the silicon substrate to form a communicating cavity, and therefore the MEMS infrared light source with the 3D structure is obtained. According to the preparation method, the communication cavity beneficial to ventilation is formed by etching below the infrared light source through secondary etching, so that the reliability and the stability of high-temperature radiation of the infrared light source are improved.

The invention relates to the technical field of semiconductor gas sensors for gas detection, in particular to an in-situ construction method and application of a gas sensor for volatile aroma substance detection, and the in-situ construction method comprises the following steps: mixing an aqueous solution of zinc nitrate hexahydrate and an aqueous solution of 2-methylimidazole according to different molar ratios to obtain a precursor solution; upwards fixing a planar electrode on the surface of a glass slide, and then transferring the planar electrode into the precursor solution; carrying out hydrothermal reaction on the precursor solution at 90 DEG C for 4 hours, after the hydrothermal reaction is finished, cooling to normal temperature, taking out the glass slide, washing the surface of an electrode by using deionized water, removing impurities, and then carrying out drying treatment; calcining the obtained dried electrode in an air atmosphere at 500 DEG C for 2 hours to construct an in-situ growth semiconductor sensor; according to the present invention, the rapid sensing response on nine volatile aroma substances is achieved, and the excellent gas sensitive characteristic is represented in the gas sensitive research on the volatile substance ocimene in the volatile aroma substances.

The invention discloses a stannic oxide-based ammonia gas sensor as well as a preparation method and application thereof, relates to the technical field of gas sensors, and solves the problems of high detection lower limit, poor gas selectivity and low sensitivity of a traditional semiconductor ammonia gas sensor. A sensitive material based on oxygen vacancy regulation and control SnO2 / ZIF-67 is prepared on the surface of an interdigital gold electrode by adopting a chemical vapor deposition method, a planar electrode, an aluminum oxide ceramic substrate, a heater and a Pt wire are welded and packaged according to a general indirectly-heated gas sensitive element, and the SnO2 / ZIF-67 semiconductor ammonia gas sensor is prepared. The lower detection limit of the SnO2 / ZIF-67 semiconductor ammonia gas sensor is 1 ppm; meanwhile, the NH3 selectivity and sensitivity of the sensor are improved through the synergistic effect of SnO2 and ZIF-67, and the sensor can be used for detecting ammonia gas leakage and can be applied to judging the safety of ammonia gas in chemical production operation, environmental gas detection and other applications.

The invention discloses a multi-parameter micro-nano sensing chip for detecting a neural network. The multi-parameter micro-nano sensing chip comprises an ECIS interdigital electrode, an MEA multi-channel planar electrode, an electrochemical SWNT film array and a microfluidic structure. Three-dimensional heterogeneous integration is achieved through vertical stacking and partition cooperation, an ECIS interdigital electrode and an MEA chip share a plane base, an electrode layer is isolated through a nanoscale insulating layer, electrical signal crosstalk is avoided, meanwhile, the space of the chip is utilized to the maximum extent, meanwhile, a micro-fluidic cavity is divided into three corresponding detection areas, and the detection accuracy of the micro-fluidic cavity is improved. Therefore, signal detection of the in-vitro neural network in different states can be completed. According to the invention, multi-mode signal detection can be carried out on the neural network cultured by the same iPSCs neuron, and the ECIS interdigital electrode, the MEA multi-channel planar electrode and the electrochemical SWNT thin film array are combined together by using the micro-fluidic chip, so that the problems of single function, data splitting, insufficient sensitivity, difficulty in long-term stability and the like of the traditional neural chip are solved.

The invention relates to the technical field of fruit picking, and particularly provides a bimodal touch sensor, a fruit picking system and a picking robot. The lower electrode layer is fixed at the top of the base and comprises a first planar electrode and a plurality of first extension electrodes; the upper electrode layer comprises a second planar electrode and a plurality of second extension electrodes, the second extension electrodes are arranged above the first extension electrodes, and the number of the second extension electrodes is consistent with that of the first extension electrodes; the piezoresistive sensor is arranged between the first planar electrode and the second planar electrode; a plurality of triboelectric sensors which are arranged above the base in a circumferential array and are arranged between the first extension electrode and the second extension electrode; the flexible shell is connected with the top of the upper electrode layer; the sensor can effectively solve the problem that the reliability of the obtained dynamic information and the grabbing force is insufficient due to the fact that the dynamic information representing the fruit maturity and the grabbing force applied to the fruit cannot be detected at the same grabbing position point.

An electrostatic ion trap or array of electrostatic ion traps having a longitudinal length of no more than 10 mm and / or at least one electrode with a ground capacitance of no more than 1 pF is provided. A first set of planar electrodes and a second set of planar electrodes can be distributed along a longitudinal axis, at least some of the first set of planar electrodes and the second set of planar electrodes being configured to receive an electrostatic potential, and a second set of planar electrodes for confining ions received in a space between the first set of planar electrodes and the second set of planar electrodes. The array can include an inlet for receiving an ion beam, the inlet configured such that a portion of the ion beam can be trapped in each of the ion traps. Signals indicative of ion mass and charge data can be obtained from a plurality of electrostatic ion traps in the array. The mass and charge data can be combined for identifying a composition of a mixture of different analyte ions.

An electrode-stacking wheel designed to receive and convey planar electrode elements, includes: a spindle designed for the rotating of the electrode-stacking wheel; a plurality of stacking fingers, which are radial to the spindle and which are arranged circumferentially around the axis of rotation; a plurality of intermediate spaces, which are formed between the respective stacking fingers, each intermediate space being designed to receive at least one of the electrode elements; and an electrode-clamping element formed in each of the intermediate spaces, each electrode-clamping element being designed such that, in the clamping state, the electrode-clamping element applies clamping force to a main surface of one of the electrode elements and presses the electrode element in question against the stacking finger in question by means of the force application.

The present invention discloses a high-sensitivity and shock-resistant microhemispherical gyroscope electrode structure and manufacturing method. The electrode structure is divided into upper and lower layers. The lower layer is a planar electrode, and the upper layer is a special-shaped planar electrode fabricated by a process method, presenting an overall shape of a combination of a circular hole and a circular groove. Both the upper and lower layer electrodes are sensitive to the out-of-plane motion of the edge of the sensitive resonator housing. The method includes realizing the patterning of the electrode by means of coating and photolithography processes on a wafer to obtain the lower electrode; fixing the prepared resonator housing to the lower electrode through precision microassembly; manufacturing the shape of the upper electrode on the wafer by etching or microfabrication processes, and realizing the patterning of the corresponding area of the upper electrode through processes such as coating, spraying glue, and multiple photolithographies; and assembling and fixing the upper electrode to the lower electrode with the resonator housing fixed by using a jig. The electrode form in the present invention improves the sensitivity of the microhemispherical gyroscope, and at the same time can limit the motion of the resonator housing, thereby enhancing the environmental adaptability of the gyroscope.

The invention relates to the technical field of ultrasonic transducers, and discloses a flexible wearable ultrasonic three-dimensional array and device.The flexible wearable ultrasonic three-dimensional array comprises a transducer array composed of a plurality of transducer units, the transducer units are divided into a plurality of subareas, all the transducer units in each subarea are connected, and the transducer units are arranged in the subareas; the upper plane electrodes of the transducer units in different partitions are not connected, and the lower plane electrodes are connected and then are in common ground; each cross-layer lead unit corresponds to the transducer unit of the corresponding partition, the thickness of each cross-layer lead unit is the same as that of the transducer unit, and each cross-layer lead unit is connected with the upper plane electrode of the transducer unit of the corresponding partition, so that the upper plane electrode and the lower plane electrode are located on the same two-dimensional plane; according to the flexible substrate surface-mounted ultrasonic array, the transmission control of the transducer unit of each subarea is carried out in a two-dimensional plane, and the problems that an existing flexible substrate surface-mounted ultrasonic array connection process is complex in structure and high in cost, and the connection cost is high when the flexible substrate surface-mounted ultrasonic array is connected with a peripheral circuit, so that the clinical large-scale batch processing requirement of the flexible substrate surface-mounted ultrasonic array is difficult to meet are solved.

The invention relates to the technical field of tea aroma detection, in particular to a noble metal-sensitized volatile aroma substance sensor construction and detection method, which comprises the following steps: dissolving zinc acetate dihydrate, urea and trisodium citrate dihydrate in deionized water to obtain a mixed precursor solution; controlling the hydrothermal reaction of the precursor solution; after naturally cooling to room temperature, washing, centrifuging, drying and calcining to obtain a zinc oxide material; the preparation method comprises the following steps: impregnating a zinc oxide material with deionized water, adding an ammonium carbonate solution while stirring, stirring, and then adding a noble metal solution to obtain a noble metal modified zinc oxide mixed solution; centrifuging, drying and calcining to obtain a powder zinc oxide loaded noble metal material; dissolving the zinc oxide loaded noble metal material in ethanol, performing ultrasonic treatment to form turbid liquid, and further dispensing the turbid liquid to the surface of a planar electrode to construct a semiconductor sensor for detecting tea aroma; the sensor prepared by the method has excellent sensing characteristics of high sensitivity, high stability and the like on tea aroma.

The present invention is directed to a multilayer capacitor, a circuit board containing the multilayer capacitor, and an integrated circuit package containing the multilayer capacitor. A multilayer capacitor includes a body containing alternating dielectric layers and internal electrode layers that each include a first electrode and a second, co-planar electrode, the first electrode having a main body with at least one lead tab extending from each of a top edge and a bottom edge thereof. The capacitor also includes a first external terminal and a second external terminal that each wrap from a top surface, along an end surface, to a bottom surface. The first external terminal is electrically connected to the first electrode of the first internal electrode layers along its lead tab leading edges, and the second external terminal is electrically connected to the first electrode of the second internal electrode layers along its lead tab leading edges.

Techniques for forming one or more MIM trench capacitors over one or more planar MIM capacitors in an interconnect region above or below a device layer of an integrated circuit. The MIM trench capacitor(s) is in one or more interconnect layers of the interconnect region, and can have a relatively high height. The MIM trench capacitor includes a first electrode, a capacitor dielectric on the first electrode, and a second electrode on the capacitor dielectric, and runs along the outside surface of a plurality of dielectric fins, which increases the surface area of the capacitor within a relatively small plan footprint. A planar MIM capacitor is beneath the MIM trench capacitor within a same interconnect layer as the MIM trench capacitor. The planar MIM capacitor includes first and second planar electrodes separated by a capacitor dielectric, and may be electrically isolated from, or capacitively coupled to, the MIM trench capacitor.

Disclosed are a method for producing an electrode for a galvanic cell, an electrode for a galvanic cell, a galvanic cell, and uses of the galvanic cell. The method comprises: applying a separator membrane to a planar electrode such that an intermediate space is formed between the planar electrode and the separator membrane; subsequently applying a liquid comprising a particular material to the separator membrane, wherein the liquid comprising material penetrates, by way of capillary forces, at least into the pores of the separator membrane, into the intermediate space between the planar electrode and the separator membrane and into pores of the planar electrode, wherein the liquid is subsequently evaporated. The method makes it easily and inexpensively possible to provide an electrode which exhibits a high energy density at the cell level and high chemical, electrochemical and mechanical stability, exhibits high cycle stability and allows high operating currents.

The present invention discloses a Cu-BTC single crystal resistive humidity sensor and a preparation method, belonging to the field of MOFs material sensing. The Cu-BTC single crystal resistive humidity sensor of the present invention comprises a planar interdigitated electrode produced by ultrafast laser-induced processing of the Cu-BTC single crystal surface and unprocessed Cu-BTC single crystal material between the interdigitated fingers. The planar electrode is prepared by the following steps: S1: preparing a Cu-BTC single crystal sample with a length and width of the to-be-processed surface greater than or equal to 100 μm; S2: using an ultrafast laser processing device to perform ultrafast laser-induced processing on the Cu-BTC single crystal sample in step S1 under set laser processing parameters to obtain the planar interdigitated electrode; wherein the ultrafast laser wavelength is 1030 nm, the pulse width t is 1.2 ps≤t≤10 ps, ​​the processing power P is 3 mW≤P≤8 mW, the scanning speed v is 200 μm / s≤v≤360 μm / s, the processing interval is 1 μm, and the focused spot is 4 μm. The Cu-BTC single crystal resistive humidity sensor can detect humidity in the range of 5% to 90% RH, with a response time of up to 2 s and good selectivity, stability, and cyclability.

The present invention improves the insertion loss of a resonant element. In the resonant element (10), a first via electrode (111) and a second via electrode (112) connect a first planar electrode (101) and a third planar electrode (103). A third via electrode (113) and a fourth via electrode (114) connect the first planar electrode (101) and a second planar electrode (102). When the first planar electrode (101) is viewed from the normal direction (Z) of the first planar electrode (101), a first imaginary line (VL11) connecting the first via electrode (111) and the second via electrode (112) and a second imaginary line (VL12) connecting the third via electrode (113) and the fourth via electrode (114) cross.

The invention relates to a method for preparing a lenticular lens on a conductive surface of a transparent support, the method comprising imprinting a curable resin on the support with a lenticular mold, followed by curing the resin and removing the mold to yield a lenticular device comprising the transparent support and a lenticular lens provided thereon. A small part of the curable resin comprises conductive particles, which after curing provide the lenticular lens with a conductive path between the conductive support surface and the lenticular lens surface. The conductive support surface is in this way easily and directly electrically accessible as a planar electrode, when the lenticular device is incorporated in an electrically switchable liquid crystal cell. Accordingly, the invention further relates to such lenticular device, to a liquid crystal cell comprising such lenticular device, and to an autostereoscopic display device comprising such liquid crystal cell.

The invention discloses a system for continuously preparing graphene through an electrochemical stripping method. The system comprises a stripping assembly, a separating and collecting assembly and a continuous material supplementing assembly. The stripping assembly comprises an electrolytic tank, a graphite electrode device and a counter electrode device, electrolyte is contained in the electrolytic tank, the graphite electrode device and the counter electrode device are both immersed in the electrolyte, the graphite electrode device is coaxially arranged in the counter electrode device, the graphite electrode device is connected with the positive electrode of the direct-current power source through a positive wire, and the counter electrode device is connected with the negative electrode of the direct-current power source through a negative wire. The counter electrode device is connected with the cathode of the direct-current power supply through a cathode wire; and the continuous material supplementing assembly is communicated with the electrolytic tank through a material supplementing pipeline. The invention further discloses a method for continuously preparing the graphene through the electrochemical stripping method. The device has the beneficial effects that the graphite electrode device and the counter electrode device are coaxially arranged inside and outside to form an annular electrode structure, so that the electric field edge effect of a planar electrode is avoided, the electric field distribution is more uniform, and the intercalation and stripping efficiency between graphite layers is further improved.

The invention belongs to the technical field of photoelectric detectors, discloses a photoelectric detector based on ferroelectric / semiconductor heterojunction and a preparation method thereof, and solves the problems of limited carrier separation efficiency, complex device structure, insufficient interface regulation and control means and the like in the photoelectric detector. The photoelectric detector comprises a substrate, a planar electrode pair arranged on the surface of the substrate, and a two-dimensional heterojunction active layer which covers and is attached to the planar electrode pair and a channel region between the planar electrode pair; wherein the two-dimensional heterojunction active layer is formed by vertically stacking a CuInP2S6 thin film and a GeSe thin film in sequence. By constructing a Van der Waals heterojunction active layer and utilizing a built-in electric field formed on a heterojunction interface by ferroelectric polarization, the generation, separation and transmission processes of photon-generated carriers are effectively regulated and controlled, so that the photoelectric detection performance of the device is improved on the premise of not introducing a complex process.

An inductor component 1 comprises a parallelepiped element body 10 which contains an insulator, a coil 20 which is provided inside the element body 10 and which is wound along a coil axis direction, and a first external electrode 30 and a second external electrode 40 which are electrically connect to the coil 20. The element body 10 has a first end surface 11a and a second end surface 11b which are opposite from each other in a length direction L, a first main surface 12a and a second main surface 12b which are opposite from each other in a height direction T, and a first side surface 13a and a second side surface 13b which are opposite from each other in a width direction W. The first external electrode 30 has a first planar electrode portion 31 which extends in a planar manner along the first main surface 12a so as to be exposed on the element body 10, and a first columnar electrode portion 32 which extends in a columnar manner along a first ridge portion 14a and / or a second ridge portion 14b from the first planar electrode portion 31 so as to be exposed on the element body 10. The second external electrode 40 has a second planar electrode portion 41 which extends in a planar manner along the first main surface 12a so as to be exposed at a distance from the first planar electrode portion 31 on the element body 10, and a second columnar electrode portion 42 which extends in a columnar manner along a third ridge portion 14c and / or a fourth ridge portion 14d from the second planar electrode portion 41 so as to be exposed on the element body 10. When seen from the height direction T, the first planar electrode portion 31 and the second planar electrode portion 41 have a point-symmetrical shape.

The present invention relates to the field of electrophysiological ablation, specifically a catheter capable of performing local ablation, comprising a spherical head and a tube body, wherein the spherical head is connected to the distal end of the tube body, and the spherical head comprises a plurality of support arms, a plurality of outer electrodes, and a plurality of inner electrodes; a hollow portion is provided between the support arms, and the support arms are elastic; the outer electrodes are provided on the support arms, and the outer electrodes are flexible planar electrodes, and the shapes of the flexible planar electrodes are one or more of circular, elliptical, and polygonal; the inner electrodes are provided on the support arms and correspond one to one with the outer electrodes, and the inner electrodes are located on the back of the outer electrodes, and the surface area of ​​the inner electrodes is equal to the surface area of ​​the outer electrodes. The present invention simultaneously realizes multi-pole precision mapping, multi-pole high-efficiency ablation, and single-point local fine ablation in the same catheter, and in the case of multiple ablation electrodes, it can also realize the abutment detection of any single outer electrode.

An electrostatic ion trap or an array of electrostatic ion traps having a longitudinal length of no more than 10 mm and / or at least one electrode with a capacitance to ground of no more than 1 pF is provided. First and second sets of planar electrodes may be distributed along the longitudinal axis, at least some of which are configured to receive an electrostatic potential to confine ions received in the space between the first and second sets of planar electrodes. An array may include an inlet for receiving an ion beam configured such that a portion of the ion beam can be trapped in each of the ion traps. Signals indicative of ion mass and charge data may be obtained from multiple electrostatic ion traps in the array.These mass and charge data can be combined to identify components of a mixture of different analyte ions.

The invention relates to a method for manufacturing an assembly comprising a first planar electrode comprising a polymer matrix trapping an electrolyte and a current collector, said first electrode being deposited on one face of said current collector, said method comprising: a) a step of preparing a composition comprising the ingredients intended to be part of the constitution of the first electrode; b) a step of forming a strip by passing said composition through a die; c) a step of rolling the strip obtained in b), d) a step of co-rolling the rolled strip obtained in c) with a current collector, whereby the assembly comprising the first planar electrode and the current collector results.

This application discloses a spatial light modulator, driving method, free-space optical antenna, device, and system, relating to the field of free-space optical communication technology. The spatial light modulator includes a first substrate, a first electrode, a liquid crystal layer, a second electrode, and a second substrate. The first electrode is a planar electrode, and the second electrode includes multiple sub-electrodes spaced apart from each other. The multiple sub-electrodes are arranged sequentially from the inside to the outside around a center. When different driving voltages are applied to the first electrode and the sub-electrodes respectively, the liquid crystal material in the liquid crystal layer flips under the action of the electric field, resulting in different equivalent dielectric constants of the liquid crystal material. This allows the spatial light modulator to adjust the intensity and phase of the incident light beam to modulate different types of light beams, achieving adaptive switching of light beam types. In particular, it can achieve adaptive switching of different types of light beams in a sharp beam, improving anti-turbulence capability and enhancing the stability of the communication link.

The invention discloses a perovskite cell module and a manufacturing method thereof. The cell module comprises a glass substrate, a front electrode, a first charge transport layer, a perovskite light absorption layer, a buffer layer, a second charge transport layer, a back electrode, a packaging layer and back glass which are sequentially stacked. The front electrode is of a composite electrode structure and comprises a first planar electrode layer arranged on the glass substrate in a stacked mode and a plurality of first structured electrodes arranged on the first planar electrode layer in a protruding mode, the first structured electrodes are embedded into the first charge transmission layer, and the first structured electrodes and the first planar electrode layer are made of the same material or different materials; the back electrode is arranged or not arranged to be a composite electrode structure, if the back electrode is of the composite electrode structure, the back electrode comprises a second planar electrode layer and a plurality of second structured electrodes protruding out of the surface of the second planar electrode layer, one end of each second structured electrode is connected to the second planar electrode layer, and the other end of each second structured electrode is embedded into the second charge transmission layer; the packaging adhesive film layer is laminated on the second planar electrode layer.

The invention relates to a composite pane having electrically controllable optical properties, comprising an electrically controllable functional element (10), which has, in a specified sequence, a first carrier film (12), a first planar electrode (14), an active layer (11) or layer sequence having electrically controllable optical properties, a second planar electrode (15) and a second carrier film (13). In the first contact region, the second carrier film (13), the second planar electrode (15) and the active layer (11) or the layer sequence are removed, and the first planar electrode (14) is connected to the bus bar (21) in an electrically conductive manner. In a second contact region, the first carrier membrane (12), the first planar electrode (14) and the active layer (11) or the layer sequence are removed, and the second planar electrode (15) is electrically conductively connected to the at least one collector rail (21; 22.1, 22.2, 22.3) in the first direction. According to the invention, the first contact region and the second contact region are arranged on opposite sides of the functional element (10), and the collector rail (21) of the first planar electrode (14) extends in a connection region from the first contact region to the opposite side of the functional element (10), in which connection region the second carrier film (13), the second planar electrode (15) and the active layer (11) or the layer sequence are removed. An intermediate region is present between the second contact region and the connection region, in which the first carrier film (12), the first planar electrode (14) and the active layer (11) or the layer sequence are not removed, and in which a portion of the second planar electrode (15) adjoining the connection region is electrically insulated from the remainder of the second planar electrode (15) by an insulating wire (16).

A mass spectrometer is provided having an ion source for generating ions from a sample in a high pressure region, a first vacuum chamber having an inlet aperture, and an exit aperture. The at least one ion guide can be between the inlet and exit apertures and can include an entrance end and an exit end. The at least one ion guide can have a plurality of planar electrodes arranged around a central axis defining an ion channel, each of the plurality of electrodes being folded along the length of the ion guide to form a gradually narrowing planar surface that faces the interior of the at least one ion guide, and a second planar surface is approximately orthogonal to the axis of the ion guide; and a power supply for providing an RF voltage to the at least one ion guide.

A method for controlling a glazing unit having electrically controllable optical properties, wherein the glazing unit includes a composite pane having an outer pane and an inner pane which are connected to one another via a thermoplastic intermediate layer, a functional element is arranged between the outer pane and the inner pane and has an active layer having electrically controllable optical properties between a first planar electrode and a second planar electrode, the optical properties are controlled by a control unit, wherein the control unit is connected to at least two transparent planar electrodes of the functional element, an electrical voltage is applied between the planar electrodes by the control unit, and an inverse function is used to determine a magnitude of the electrical voltage.

The present invention relates to a method for improving the uniformity of large-diameter plasma etching by using a curved electrode, which solves the problems of uneven etching rate distribution and difficulty in improving the etching uniformity during the large-diameter plasma etching process. The method includes the following steps: measuring the initial etching rate distribution function; placing m micro-planar electrodes with different thicknesses h on the surface of the lower electrode plate respectively, and performing plasma etching on an unprocessed sample piece respectively; measuring the average etching rate; calculating the functional relationship between the thickness of the micro-planar electrode and the average etching rate; obtaining the thickness distribution of the curved electrode; placing the curved electrode coaxially with the lower electrode plate, and performing plasma etching on an unprocessed sample piece on the workpiece. The method for improving the uniformity of large-diameter plasma etching by using a curved electrode provided by the present invention can design the shape of the curved electrode according to the initial etching rate distribution, has high flexibility, and can effectively improve the uniformity of plasma etching quickly and efficiently.