The invention relates to the technical field of NTC (
Negative Temperature Coefficient) thermistors, in particular to a thin film type NTC
thermistor and a preparation method thereof. Forming an insulating layer: forming the insulating layer on the surface of the substrate to isolate the
conductivity of the substrate; forming an
adhesive layer: forming the
adhesive layer on the insulating layer to enhance the
adhesive force of the substrate; preparing an
alloy thermosensitive film:
sputtering a Mn-Co-Ni ternary
system target material, a Mn-Co binary
system target material, a Mn-Ni binary
system target material or a Mn-Co-Ni-Al
quaternary system target material onto the adhesion layer by adopting a magnetron
sputtering method, and then carrying out graphical treatment through a
laser process to obtain the
alloy thermosensitive film; the
alloy thermosensitive film partially covers the adhesion layer;
electrode films are prepared, specifically, one or more
metal materials containing silver, gold,
platinum,
titanium,
tungsten and alloys of silver, gold,
platinum,
titanium,
tungsten and the alloys of silver, gold,
platinum,
titanium,
tungsten and the alloys of silver, gold, platinum, titanium, tungsten and the alloys of silver, gold, platinum, titanium, tungsten and the alloys of silver, gold, platinum, titanium, tungsten and the alloys are formed on the alloy thermosensitive films through a
sputtering technology to form the oppositely-arranged
electrode films, and then
electrode patterns which form bent or arc-shaped patterns and
expose the alloy thermosensitive films are etched on the electrode films through a
laser technology.