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1747results about How to "Small spacing" patented technology

Semiconductor device and method of manufacturing thereof

The invention relates to a semiconductor device comprising: a substrate (1), the substrate (1) comprising a body (5), the body (5) having a surface, the substrate (1) being provided with an insulating layer (10) on the surface of the body (1);—a conductor (25) with insulating sidewall spacers (22) located in the insulating layer (10), the conductor (25) having a current-flow direction during operation, the conductor (25) having a first width, the insulating sidewall spacers (22) each having a second width being smaller than the first width of the conductor (25), the first width and the second width being measured in a direction perpendicular to the current-flow direction of the conductor (25) and parallel to said surface, the conductor (25) having a first top surface extending parallel to said surface, the insulating sidewall spacers (22) having a second top surface, and airgaps (30) located in the insulating layer (10) adjacent to the insulating sidewall spacers (22), characterized in that the first top surface coincides with the second top surface, and in that the airgaps (30) extend from the surface of the body (5) to said first and second top surface. The invention further relates to a method of manufacturing such a semiconductor device. The semiconductor device according to the invention enables a lower resistance of the conductor while still providing a tolerance for unlanded vias.
Owner:NXP BV

Method and apparatus for converting thermal energy to mechanical energy

A method and apparatus for converting thermal energy to mechanical energy which can use a wide range of fuels and perform with a high efficiency. Operating on a little utilized thermodynamic cycle of isentropic compression, isothermal expansion, isentropic expansion and finally constant pressure cooling and contraction. The external heat engine utilizes a heat exchanger carrying heat from the external energy source to the working parts of the engine. Pistons and cylinders are activated by appropriate means to adiabatically compress the working fluid, for example ambient air, to transfer the entire mass of the air through the heat exchanger to accomplish isothermal expansion followed by adiabatic expansion and, finally, exhaust the air to ambient to allow for constant pressure cooling and contraction. Valve pistons in conjunction with the cylinders form valves that allow for the exchange of working fluid with ambient. Energy is added to the engine during isothermal expansion, whereby the energy of compression is added by a flywheel or other appropriate energy storage means, said flywheel stores energy recovered during adiabatic expansion. The thermodynamic cycle described and the engine embodiments disclosed, when run in reverse, perform as a heat pump or refrigeration device.
Owner:CROW DARBY
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