The invention discloses a preparation method of a high-homogeneity and high-stability
copper target material, which comprises the following steps of: 1,
cutting off a riser of a high-purity
copper cast
ingot, and turning to obtain a pretreated high-purity
copper cast
ingot; secondly, the pretreated high-purity copper
ingot is heated and subjected to heat preservation in a furnace and then forged to obtain a forged copper blank; thirdly, the forged copper blank is subjected to room-temperature circumferential rolling treatment, and a rolled copper blank is obtained; fourthly, the rolled copper blank is subjected to two-stage annealing heat treatment, and a copper target blank is obtained; and 5,
machining, cleaning and packaging to obtain the high-homogeneity and high-stability copper target material. According to the method, the high-purity copper cast ingot is sequentially subjected to pretreatment,
forging, room-temperature circumferential rolling, two-stage annealing,
machining, cleaning and packaging, preparation of the high-quality copper target material which is uniform in structure, controllable in
crystal orientation and excellent in
heat stability is achieved, the sputter
coating quality is improved, and the method is easy to operate, high in
controllability, high in production efficiency and suitable for industrial production. Meanwhile, raw materials and production cost are saved, and the method is suitable for large-scale popularization and application.