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38 results about "Argon" patented technology

Argon is a chemical element with the symbol Ar and atomic number 18. It is in group 18 of the periodic table and is a noble gas. Argon is the third-most abundant gas in the Earth's atmosphere, at 0.934% (9340 ppmv). It is more than twice as abundant as water vapor (which averages about 4000 ppmv, but varies greatly), 23 times as abundant as carbon dioxide (400 ppmv), and more than 500 times as abundant as neon (18 ppmv). Argon is the most abundant noble gas in Earth's crust, comprising 0.00015% of the crust.

Anti-oxidation high-precision TG-DSC testing method for high-temperature alloy powder

The invention belongs to the technical field of TG-DSC testing of metal powder materials, and particularly relates to an anti-oxidation high-precision TG-DSC testing method of high-temperature alloy powder, which comprises the following steps: placing the high-temperature alloy powder in a furnace body of a TG-DSC instrument, carrying out high-purity argon replacement on the atmosphere in the furnace body by taking high-purity argon as furnace body purging gas, and carrying out high-purity argon replacement on the atmosphere in the furnace body; the initial oxygen content in the furnace body is reduced to 0.1 ppm or below; continuously introducing hydrogen-argon mixed gas as flowing gas into the furnace body, controlling the temperature of the furnace body to be increased to a target temperature, and ending the test to obtain a TG curve and a DSC curve of the to-be-tested high-temperature alloy powder; according to the invention, through physical cleaning of oxygen in the furnace body by circulating vacuumizing before testing and chemical cleaning of oxygen permeating into the furnace body by hydrogen-argon mixed gas in the whole process in the testing process, a dual anti-oxidation barrier is constructed, so that oxidation weight increment and oxidation heat release interference of a powder sample are eliminated fundamentally; therefore, the real mass change and the heat flow signal change of the alloy powder sample in the temperature programming process can be accurately measured.
Owner:泛锐云智科技(郑州)有限公司

Argon recovery system for EIGA powder preparation

The invention discloses an argon recovery system for EIGA powder preparation, belongs to the technical field of gas recovery, and solves the problems that the step is added for further purification after argon recovery every time, so that excessive energy is consumed, the cost of recovered argon is forcibly increased, and the production cost is reduced. Therefore, whether low-concentration impurities such as CO and H2 are mixed in argon or not needs to be detected in the argon recovery process. Comprising a pretreatment module, a filtration and purification module, a deep purification module, a pressurized gas storage module and a low-concentration impurity detection module. According to the device, argon is sampled in a split-flow mode, impurity gathering is enhanced through a sound field, detection, signal processing and the like are carried out, errors are corrected through temperature and pressure compensation, alarm is triggered, emergency purification is controlled, real-time detection and closed-loop control of the CO / H2 in the argon as low as 0.5 ppm / 0.3 ppm are achieved, routes can be switched through an execution module, the argon is treated through a chemical looping combustion reactor, impurities are removed, and the device is suitable for industrial production. And purity of argon is ensured.
Owner:JIANGSU VILORY ADVANCED MATERIALS TECH CO LTD

Plasma processing method

This invention provides a plasma treatment method capable of forming a deposited film on the walls of a processing chamber and suppressing the diffusion of contaminants into a transport system. The plasma treatment method for plasma treating samples placed on a sample stage within a processing chamber includes: a first step of removing deposits in the processing chamber using plasma; a second step of depositing deposits in the processing chamber using a mixture of hydrofluorocarbon gas and argon (Ar) gas after the first step; a third step of selectively removing deposits from the sample stage using a mixture of oxygen (O2) gas and argon (Ar) gas after the second step; and a fourth step of plasma treating a predetermined number of samples after the third step.
Owner:HITACHI HIGH TECH CORP

A method for producing high-purity oxygen based on LNG cold energy

This invention discloses a method for producing high-purity oxygen based on LNG cold energy, belonging to the technical field of gas purification equipment. The implementation steps include: S1, pre-cooling and stepped heat exchange of raw air; S2, distillation separation process using LNG cold energy; S3, oxygen purification and argon separation; S4, cold energy recycling. This invention can improve the purity of oxygen, making the molar purity of oxygen above 99.9%, and rationally utilize LNG cold energy to liquefy raw air, reducing air separation costs. In addition, by coupling a crude argon tower, argon with a molar fraction of 7.4% can be produced for the utilization of rare gases.
Owner:SHANGHAI UNIV OF ENG SCI

Bowl opening argon blowing type external submersed nozzle

The utility model discloses a bowl mouth argon blowing type external submersed nozzle, which relates to the field of nozzles and comprises a nozzle body, an iron ring is mounted on the outer wall of the nozzle body, an argon pipe is mounted on the side edge of the iron ring, and clamping blocks are symmetrically and movably connected to two sides of an inner cavity of the iron ring. Reinforcing blocks are symmetrically and movably connected to the top and the bottom of an inner cavity of the iron ring, and anti-abrasion pads are symmetrically installed on the opposite sides of the two reinforcing blocks. According to the bowl opening argon blowing type externally-installed submersed nozzle, argon can be blown into the through groove through the argon groove through the arranged argon pipe, so that the inner cavity of the nozzle body can be filled with argon, sealing treatment can be directly conducted through argon without other structures during pouring, and the sealing effect is good. The sealing structure cannot be damaged during pouring, the pouring cost can be effectively reduced, and the pouring quality and efficiency can be further improved.
Owner:SUZHOU BAOMINGGAOWEN CERAMICS CO LTD

High-temperature coal gas carbon migration online quantitative monitoring method and system based on argon internal standard

The invention relates to a high-temperature coal gas carbon migration online quantitative monitoring method and system based on an argon internal standard, and belongs to the technical field of blast furnace ironmaking. The system is characterized in that a high-precision gas distribution execution unit comprises multi-channel mass flow controllers connected in parallel and is used for accurately simulating the composition of industrial gas and maintaining the internal standard concentration of argon; the high-temperature-resistant reaction unit is designed based on an industrial hot-blast stove structure, comprises a reactor and a heating system, and accurately reproduces an industrial heating environment; the rapid phase change quenching unit comprises a micro-channel heat exchanger and a low-temperature phase change system and is used for realizing super-rapid cooling; the intelligent analysis processing unit comprises a gas analyzer, an argon standard flow calibration engine and a bidirectional carbon migration model library; the argon standard flow calibration engine is used for obtaining the actual outlet gas flow through back calculation according to the element conservation principle based on the argon concentration detected by the gas analyzer in the outlet gas; and the bidirectional carbon migration model library is used for storing thermodynamic parameters of the carbon precipitation reaction or the carbon elimination reaction and calculating the carbon precipitation amount and the carbon elimination amount.
Owner:CISDI ENGINEERING CO LTD

Device for removing carbon, oxygen and hydrogen impurities from argon tail gas and treatment method thereof

The invention belongs to the technical field of inert gas purification and recovery, and relates to a device for removing carbon, oxygen and hydrogen impurities from argon tail gas and a treatment method thereof, the device comprises a first reactor, a second reactor and a third reactor which are communicated in sequence; an inlet of the first reactor is connected with an argon tail gas conveying pipe and a hydrogen conveying pipe; a first regulating valve is arranged on the hydrogen conveying pipe; the first analyzer is connected to an outlet of the first reactor; the second analyzer is connected to an outlet of the second reactor; the temperature measuring unit is connected to an inlet of the second reactor; the control unit controls the opening degree of the first adjusting valve and the second adjusting valve. The device and the method have the advantages that the device and the method are used for removing carbon, oxygen and hydrogen impurities in argon tail gas, and can solve the problems of high potential safety hazard, high management difficulty, low recovery rate, investment increase and energy consumption increase caused by an excessive hydrogenation and oxygen removal process in the conventional argon recovery device and method; the process is effectively simplified, the equipment investment is reduced, the energy consumption is reduced, and the potential safety hazard is eliminated.
Owner:MAYFLY GREEN ENERGY (DALIAN) TECHNOLOGY CO LTD

Ion introduction device and ion introduction method for introducing ions into mass spectrometer, mass spectrometry system, mass spectrometry method, ionization device, and ionization method

[Problem] To provide an ionization device and an ionization method which are capable of stably sustaining dark discharge at a low voltage and enable stable ionization of various samples from gas to solid. [Solution] The present invention pertains to an ionization device which: ionizes a sample by applying a voltage to a mixture gas of argon gas and nitrogen gas under an air atmosphere and exciting the argon with dark discharge; and comprises a mixture gas generation unit, a sample supply unit, and an ionization means. In the mixture gas generation unit, the mixture gas is generated by mixing the argon and the nitrogen. In the sample supply unit, a sample component is generated by bringing the mixture gas into contact with the sample. In the ionization means, sample ions are generated by exciting the sample component with the dark discharge. The present invention further pertains to: an ion introduction device and an ion introduction method for introducing said sample ions into a mass spectrometer; and a mass spectrometry system for analyzing the mass of the sample by ionizing and introducing the sample into the mass spectrometer.
Owner:AMR CORPORATION

A long argon-blowing nozzle for uniform air blowing

ActiveCN224424265USteelmakingMolten steel
This application relates to a uniformly blowing argon nozzle, belonging to the field of steelmaking technology. It includes a main body with a central drain hole and an annular groove on its outer wall. Multiple blowing holes are circumferentially arranged within the main body, with their ends located within the drain hole and the annular groove, respectively. An annular filter screen and an outer ring are arranged within the annular groove, with the outer ring sealing the opening of the groove. A blowing nozzle is fixed to the outer ring. A baffle is fixed to the filter screen opposite the blowing nozzle. A gap is maintained between the filter screen and the end of the blowing hole, and also between the filter screen and the outer ring. In this application, argon gas is compressed and passes through the filter screen and filter screen sequentially, allowing for relatively uniform argon gas flow through both screens, thereby improving the uniformity of the airflow entering each blowing hole and preventing deflection of the molten steel flow. The main body is composed of an upper and lower half, facilitating the manufacture of the annular groove and the installation of objects within it.
Owner:JIANGSU XINHU REFRACTORIES

Gas purification device based on d-d accelerator neutron activation argon isotope dating

This invention discloses a gas purification device for neutron-activated argon isotope dating based on a D-D accelerator, belonging to the field of rare gas isotope mass spectrometry analysis and geological dating technology. Addressing the limitations of traditional gas purification systems, which suffer from large internal volumes and high static release rates, making them unsuitable for the efficient purification and enrichment of trace argon isotopes generated by the D-D accelerator neutron activation method, this invention employs an integrated 316L stainless steel substrate, internally integrating a main gas flow channel and multiple branch channels. The substrate houses a sample gas injection module, a primary purification module, a secondary purification module, a tertiary purification module, a vacuum preparation and monitoring module, a standard gas injection module, and a gas enrichment module. Each module is connected to the main gas flow channel via branch channels, achieving multi-stage purification of the mixed gas and low-temperature enrichment of trace argon isotopes. This device is used for gas purification in D-D accelerator neutron-activated argon isotope dating, meeting the requirements for efficient purification and enrichment of extremely small amounts of argon gas.
Owner:LANZHOU UNIV

Purification of hydrogen by adsorption

A process for purifying a crude hydrogen feed stream employs an adsorbent having a N2 / Ar selectivity at 30 DEG C in the range of 2 to 4 and a Henry law constant of argon at 30 DEG C in the range of 0.15 to 1.0 mmole / g / atm. The composition of a crude hydrogen stream from a carbon dioxide capture process requires formulation of new adsorbent selection criteria to improve recovery.
Owner:AIR PROD & CHEM INC

Method for measuring argon content in high-temperature alloy powder

The invention belongs to the technical field of detection of the content of gas elements in high-temperature alloy powder, and particularly relates to a method for measuring the content of argon in high-temperature alloy powder. A pulse heating-thermal conductivity method is used for detection, a sample is fed in a direct feeding mode, and the method mainly comprises the steps of parameter setting, blank deduction, working curve establishment and sample detection. According to the method, by optimizing a detection program and a sample introduction mode, the interference of gas adsorbed on the surface of the powder and internal compound nitrogen is effectively eliminated, and the argon content is accurately and reliably measured.
Owner:LIAONING ZHONGKE METAL TECHNOLOGY CO LTD

Argon graded replacement method for synthesis of n-butyllithium

The invention relates to the technical field of argon graded replacement, in particular to an argon graded replacement method for synthesizing n-butyllithium. Comprising the following steps: arranging a gas accommodating cavity between adjacent reaction kettles, and controllably communicating the gas accommodating cavity with a gas outlet of a front-stage reaction kettle and a gas inlet pipeline of a rear-stage reaction kettle through a control valve group; firstly, pretreatment equipment (a branch pipe) of a single kettle is started, argon is introduced, mixed gas in a pipeline blind area is removed, then the argon time sequence and flow of upstream, downstream and midstream gas inlets are controlled, a stable pressure gradient is formed, and the mixed gas in the kettle is directionally pushed to a gas containing cavity; mixed gas in the front-stage gas accommodating cavity is introduced into the rear-stage kettle for repeated replacement and is finally discharged from the tail end; according to the method, blind area purification is enhanced, the replacement efficiency is improved, argon consumption is reduced, inert gas waste is reduced, carbon emission reduction is assisted, and atmospheric pollution prevention and control are assisted.
Owner:NANTONG SHIMEIKANG PHARMA CHEM

Methods for improved carbon endpoint determination

The present invention generally relates to methods for determining an improved carbon endpoint concentration in an argon oxygen decarburization process. The present invention utilizes various pieces of real-time data, including parameters of the flame and soot content to estimate a carbon composition in the steel product, along with two other metallurgical models to generate corresponding carbon compositions in the steel product. A total of 3 carbon compositions are determined and continuously updated during the process. An improved carbon endpoint value is determined to be reached when at least a first value and a second value corresponding to any of the three carbon compositions are below a target carbon value. Upon such condition being satisfied, an alert notification is transmitted to enable carbon sampling to confirm that the sample has a measured carbon concentration that is below a predetermined calculated target carbon value.
Owner:PRAXAIR TECH INC

Method of manufacturing soi structure particularly suitable for photonic applications and carrier substrate for the same

This invention relates to a method for manufacturing an SOI structure, comprising the following steps: a) providing an initial substrate made of monocrystalline silicon having an interstitial oxygen content between 15 and 27 ppma according to standard ASTM'79, and a resistivity of less than 200 ohm·cm, the initial substrate being designed to form a carrier substrate for an SOI structure after undergoing a subsequent step b); b) applying a series of heat treatments to the initial substrate, wherein the initial substrate has no silicon oxide layer on at least its front side except optionally a native oxide layer, the series consisting of: - a first heat treatment defined by a isothermal range of temperatures above 1200°C and below 1280°C for a duration between 1 second and 60 seconds, a cooling ramp between 10°C / s and 70°C / s, and an argon or argon-hydrogen atmosphere, followed by - a second heat treatment in a neutral or oxidizing atmosphere defined by a isothermal range of temperatures between 900°C and 1100°C, without intermediate steps prior to this temperature, to form a carrier substrate comprising: - a stripped surface layer with a thickness greater than 40 µm and a resistivity of less than 10 ohm·cm. 8 / cm 3 The microdefect concentration (BMD); and - enriched deep layers, located below the peeled surface layer, with a concentration of 2.10. 8 / cm 3 Up to 5.10 10 / cm 3 The invention relates to the microdefect concentration (BMD) between these parameters. The invention also relates to a carrier substrate and an SOI structure including the carrier substrate.
Owner:SOITEC SA

System and method for optimizing production of argon in a cryogenic air separation unit

A system and method of optimizing the production of argon in a cryogenic air separation unit using a temperature profile of a distillation column or distillation column section obtained via fiber optic temperature measurements on the exterior surface of the distillation column or the distillation column section is provided. The temperature profiles are used to determine the vertical location and / or spatial movement of the maximum argon concentration in the distillation column or the distillation column section. Distillation column operation is then adjusted such that the vertical location or spatial movement of the maximum argon concentration is aligned proximate with the location of an argon-rich draw from the distillation column.
Owner:PRAXAIR TECH INC +1

An argon analysis system

ActiveCN224682207UCO analyzerPhysical chemistry
The utility model provides a kind of argon analysis system, the purpose is to solve the technical problem that argon is diluted after being used as protective gas in prior art, and traditional processing mode is difficult to make recycled gas to reach use standard again.The argon analysis system includes: main pipeline, with the analyzer cabinet body connection in argon factory area;Multiple trace oxygen analyzers, are located on the main pipeline, and are distributed along the laying path of the main pipeline;Recycling pipeline, in communication with the main pipeline;Wherein, CO analyzer, CO2 analyzer, argon nitrogen analyzer, zirconia analyzer, hydrogen analyzer are also provided on the main pipeline.Argon analysis system sets trace oxygen analyzer, CO analyzer, CO2 analyzer, argon nitrogen analyzer, zirconia analyzer and hydrogen analyzer and other instruments on the main pipeline conveying argon, analyzes the composition in argon, then makes sufficient preparation for subsequent processing, so that recycled argon can be utilized again.
Owner:四川永祥光伏科技有限公司

Method for preparing two-dimensional low-symmetry multi-element material [Bi2CuO3] SO4

The invention discloses a method for preparing a two-dimensional low-symmetry multi-element material [Bi2CuO3] SO4, which comprises the following steps: selecting Bi2O3, Bi2S3 and Cu2S solid powder as precursors, and reacting in a mixed atmosphere of argon and air; putting Bi2S3 into a porcelain boat, putting the porcelain boat in a low-temperature area, putting the other two precursors into the porcelain boat, putting the porcelain boat in a high-temperature area, taking freshly stripped mica as a growth substrate, and putting the growth substrate on the powder in the high-temperature area; the material is prepared by adopting three stages, namely a heating stage, a growth stage and a cooling stage. According to the method, the precursor which is spontaneously carried out according to thermodynamics is selected as a reactant, the problem that the uniformity of components is difficult to control is solved, meanwhile, the preparation process is divided into three stages, the transportation process is accurately controlled by regulating and controlling the gas flow of different stages, and the product quality is improved. And the problems of imperfect precursor design and conveying mechanism and insufficient surface quality and phase purity control are solved.
Owner:TIANJIN UNIV

Atomic layer deposition process and structure for forming air gap

The invention provides an atomic layer deposition process and structure for forming an air gap, and the process comprises the steps: introducing mixed gas of hydrogen and argon, applying radio frequency power to generate hydrogen plasma, and carrying out the in-situ plasma pretreatment of the side wall and the bottom of a groove; using the precursor to set a first pulse time for non-conformal deposition by using an ALD process; the first pulse time of the precursor and the oxidizing agent is prolonged to the second pulse time, so that saturated adsorption is realized; and carrying out thermal annealing treatment in an oxygen atmosphere, and taking out after natural cooling. According to the method, the single and continuous dual-mode atomic layer deposition process is adopted, the air gap is directly constructed and sealed in situ in the preformed groove structure, and a plurality of independent processes such as photoetching, etching removal and cleaning which are necessary for a traditional sacrificial layer method are abandoned, so that the whole process flow is greatly simplified, and the production and manufacturing cost is remarkably reduced.
Owner:QUANZHOU NORMAL UNIV

System and method for optimizing production of argon in a cryogenic air separation unit

A system and method of optimizing the production of argon in a cryogenic air separation unit using a temperature profile of a distillation column or distillation column section obtained via fiber optic temperature measurements on the exterior surface of the distillation column or the distillation column section is provided. The temperature profiles are used to determine the vertical location and / or spatial movement of the maximum argon concentration in the distillation column or the distillation column section. Distillation column operation is then adjusted such that the vertical location or spatial movement of the maximum argon concentration is aligned proximate with the location of an argon-rich draw from the distillation column.
Owner:PRAXAIR TECH INC +1

Ion introduction device and ion introduction method to mass spectrometer, mass spectrometry system, mass spectrometry method, ionization device and ionization method

To provide an ionization device capable of stably continuing undercurrent discharge at a low voltage and stably ionizing even various specimens from gases to solids, and an ionization method.SOLUTION: There is disclosed an ionization device which applies a voltage to a mixed gas of an argon gas and a nitrogen gas under an atmospheric environment and excites the argon by means of undercurrent discharge to ionize a specimen. The ionization device includes a mixed gas generation section, a specimen supply section and ionization means, mixes the argon and nitrogen to generate the mixed gas in the mixed gas generation section, brings the mixed gas into contact with the specimen to generate a specimen component in the specimen supply section, and excites the specimen component by means of the undercurrent discharge to generate specimen ions in the ionization means. Further, there are disclosed: an ion introduction device and an ion introduction method for introducing the specimen ions to a mass spectrometer; and a mass spectrometry system by which the specimen is ionized and introduced to the mass spectrometer and mass spectrometry is performed.SELECTED DRAWING: Figure 1
Owner:AMR CORPORATION

A method for removing uranium-rich defect fluorine-doped cobaltosic oxide and its preparation and application

This invention belongs to the field of water treatment and environmental remediation technology, and discloses a method for removing uranium-rich defect-laden fluorine-doped cobalt tetroxide, its preparation, and its application. Fluorine is in-situ doped in bulk through a hydrothermal reaction. After calcination, crystalline bulk fluorine-doped cobalt tetroxide is obtained. Then, low-temperature argon plasma bombardment is applied to create abundant oxygen vacancy defects on the material surface without damaging the bulk crystal structure. The combined process of this invention simultaneously achieves a significant improvement in the material's conductivity and precise enrichment of highly active surface sites. It exhibits excellent conductivity and catalytic activity, achieving a maximum uranium removal efficiency of 99.2% in water. Its performance is stable within the pH range of 3-9, and the removal efficiency remains at 97.4% after 10 cycles. The preparation process of this invention is simple, controllable, and low-cost. The prepared material is suitable for the efficient purification of radioactive water bodies such as uranium-containing wastewater and uranium-containing groundwater from the nuclear industry, and has broad prospects for industrial application.
Owner:GUANGZHOU UNIVERSITY

A dual-tower combined argon recovery and purification system and method

This invention provides a dual-tower combined argon gas recovery and purification system and method. The system includes a cold box, an argon distillation unit, and a nitrogen distillation unit. The argon distillation unit is located inside the cold box and includes an argon distillation column, an argon condenser, and a liquid argon inlet. The argon condenser is located at the top of the inner cavity of the argon distillation column, and the liquid argon inlet is located at the top of the argon distillation column and communicates with the argon condenser. The nitrogen distillation unit is located inside the cold box and includes a nitrogen distillation column, a first conveying pipe, and a second conveying pipe. The nitrogen distillation column is connected to the inlet of the argon condenser through the first conveying pipe and to the outlet of the argon condenser through the second conveying pipe. The nitrogen introduced into the argon condenser can recover excess cold energy from the liquid argon to form liquid nitrogen. Finally, the liquid nitrogen is sent back to the nitrogen distillation column through the second conveying pipe. The recovered liquid nitrogen can be sold as a byproduct, increasing economic benefits and avoiding the waste of cold energy caused by the vaporization of liquid argon at room temperature.
Owner:SHANGHAI SHENGXINHONG ENERGY TECH CO LTD

Method for removing argon ion interference in ICP-MS (Inductively Coupled Plasma Mass Spectrometry) and application

The invention discloses a method for removing argon ion interference in ICP-MS (Inductively Coupled Plasma Mass Spectrometry) and application. The existing LA-ICP-MS / MS technology is utilized, interference of argon-based ions on K and Ca elements is removed based on SF6, and then laser microcell K-Ca dating is carried out. The method comprises the following steps: introducing SF6 into a collision reaction tank, and effectively removing argon-based ions (40Ar < + >, 38Ar1H < + >, 40Ar16O < + > and 40Ar40Ar < + >) through an ionic reaction effect; and meanwhile, SF6 reacts with Ca to generate CaF instead of reacting with K, so that 40Ca and 40K are separated, and in-situ K-Ca dating of K-rich minerals can be carried out. The method provided by the invention has huge application potential for accurate analysis of argon-interfered isotopes (such as K, Ca, Fe and Se).
Owner:INSTITUTE OF GEOLOGY AND GEOPHYSICS CHINESE ACADEMY OF SCIENCES

An explosive composition, method of manufacture and method of use thereof

The application discloses an explosive composition, a preparation method and a use method thereof, and belongs to the technical field of explosive preparation, wherein the explosive composition comprises the following raw materials in parts by mass: zirconium carbide powder 60-80 parts, and zirconium oxide powder 20-40 parts; the composition is placed in an inert gas atmosphere, heated to 150-200 DEG C, and an explosion reaction occurs. The zirconium carbide powder and the zirconium oxide powder are mixed according to a proportion, and an unexpected explosion reaction occurs at 150-200 DEG C in an inert gas (argon) atmosphere; on the basis, the application improves the preparation method of the solid powder of the explosive composition; furthermore, the application provides the use method of the explosive composition. The explosive composition has the advantages of simple preparation process, easy-to-control explosion reaction process, and independence from oxygen, and is suitable for fields such as mine exploitation.
Owner:HUAIBEI NORMAL UNIVERSITY

Method of plasma-enhanced chemical vapor deposition

Method of plasma-enhanced chemical vapor deposition by supporting a wafer within a reactor chamber on a wafer support, generating a plasma from acetylene, hydrogen and argon gases using a high frequency RF power supply, and depositing an amorphous hydrogenated carbon film on the wafer. During the deposition, the reactor chamber pressure is within the range 1-6 Torr, and the wafer support temperature is between 200-350 degrees Celsius, such that the deposited amorphous hydrogenated carbon film provides a dielectric layer on the wafer exhibiting low leakage currents of less than 1.0E-07 A / cm2 at an operating voltage of 2 MV / cm and a high breakdown voltage of more than 6 MV / cm.
Owner:SPTS TECH LTD

Method for rapidly determining oxygen and argon in mixed gas

The invention discloses a method for rapidly determining oxygen and argon in mixed gas. The method comprises the following steps: firstly, determining and calculating an oxygen correction factor and an argon correction factor through a gas chromatography thermal conductivity detector taking hydrogen as carrier gas; determining and calculating an oxygen correction factor and an argon correction factor through a gas chromatography thermal conductivity detector taking nitrogen as carrier gas; enabling the mixed gas to pass through a gas chromatography thermal conductivity detector taking hydrogen as carrier gas to determine the sum of response peak areas of oxygen and argon; enabling the mixed gas to pass through a gas chromatography thermal conductivity detector taking nitrogen as carrier gas to determine the sum of response peak areas of oxygen and argon; and finally calculating the content of oxygen and argon in the mixed gas. The method is simple to operate, efficient and accurate in measurement result.
Owner:GUIZHOU TIANFU CHEM

Argon system fraction gas adjusting pipeline

The utility model belongs to the technical field of industrial gas separation equipment, and relates to an argon system fraction gas adjusting pipeline which comprises a crude argon tower, the top of the crude argon tower is connected with an upper tower through a circulating argon pipeline, a condenser is arranged in the top of the crude argon tower, and one side of the top of the crude argon tower is connected with a lower tower through a liquid air input pipeline. A liquid level adjusting valve is arranged on the liquid air input pipeline, a purified liquid output pipeline is led out of the bottom of the crude argon tower and connected with the main tower, one side of the main tower is connected to the crude argon tower through an argon-rich fraction gas input pipeline, a flow meter is arranged on the argon-rich fraction gas input pipeline, and a crude argon gas conveying pipeline is arranged on one side of the middle of the crude argon tower and connected to the pure argon tower. And a tower kettle liquid level meter is arranged at the tower kettle of the crude argon tower. The load of the argon system is adjusted in time, material balance and cooling capacity balance are guaranteed, the argon system can still operate stably when the load changes, the feed gas of the argon system is automatically adjusted according to the flow, and lagging and instability caused by manual liquid level adjustment are avoided.
Owner:SHANDONG IRON & STEEL GRP YONGFENG LINGANG CO LTD