13137 results about "NH3 compound" patented technology

Embodiments of the invention provide treatment processes to reduce substrate contamination during a fabrication process within a vapor deposition chamber. A treatment process may be conducted before, during or after a vapor deposition process, such as an atomic layer deposition (ALD) process. In one example of an ALD process, a process cycle, containing an intermediate treatment step and a predetermined number of ALD cycles, is repeated until the deposited material has a desired thickness. The chamber and substrates may be exposed to an inert gas, an oxidizing gas, a nitriding gas, a reducing gas or plasmas thereof during the treatment processes. In some examples, the treatment gas contains ozone, water, ammonia, nitrogen, argon or hydrogen. In one example, a process for depositing a hafnium oxide material within a batch process chamber includes a pretreatment step, an intermediate step during an ALD process and a post-treatment step.

Biomass is pretreated using a low concentration of aqueous ammonia at high biomass concentration. Pretreated biomass is further hydrolyzed with a saccharification enzyme consortium. Fermentable sugars released by saccharification may be utilized for the production of target chemicals by fermentation.

One or more highly-oriented, multi-walled carbon nanotubes are grown on an outer surface of a substrate initially disposed with a catalyst film or catalyst nano-dot by plasma enhanced hot filament chemical vapor deposition of a carbon source gas and a catalyst gas at temperatures between 300° C. and 3000° C. The carbon nanotubes range from 4 to 500 nm in diameter and 0.1 to 50 μm in length depending on growth conditions. Carbon nanotube density can exceed 104 nanotubes / mm2. Acetylene is used as the carbon source gas, and ammonia is used as the catalyst gas. Plasma intensity, carbon source gas to catalyst gas ratio and their flow rates, catalyst film thickness, and temperature of chemical vapor deposition affect the lengths, diameters, density, and uniformity of the carbon nanotubes. The carbon nanotubes of the present invention are useful in electrochemical applications as well as in electron emission, structural composite, material storage, and microelectrode applications.

Metal films are deposited with uniform thickness and excellent step coverage. Copper metal films were deposited on heated substrates by the reaction of alternating doses of copper(I) NN′-diisopropylacetamidinate vapor and hydrogen gas. Cobalt metal films were deposited on heated substrates by the reaction of alternating doses of cobalt(II) bis(N,N′-diisopropylacetamidinate) vapor and hydrogen gas. Nitrides and oxides of these metals can be formed by replacing the hydrogen with ammonia or water vapor, respectively. The films have very uniform thickness and excellent step coverage in narrow holes. Suitable applications include electrical interconnects in microelectronics and magnetoresistant layers in magnetic information storage devices.

Methods for forming a capacitor using an atomic layer deposition process include providing a reactant including an aluminum precursor onto a substrate to chemisorb a portion of the reactant to a surface of the substrate. The substrate has an underlying structure including a lower electrode. An ammonia (NH3) plasma is provided onto the substrate to form a dielectric layer including aluminum nitride on the substrate including the lower electrode. An upper electrode is formed on the dielectric layer. A second dielectric layer may be provided oil the first dielectric layer

An MOCVD reactor such as a rotating disc reactor (10) is equipped with a gas injector head having diffusers (129) disposed between adjacent gas inlets. The diffusers taper in the downstream direction. The injector head desirably has inlets (117) for a first gas such as a metal alkyl disposed in radial rows which terminate radially inward from the reactor wall to minimize deposition of the reactants on the reactor wall. The injector head desirably also has inlets (125) for a second gas such as ammonia arranged in a field between the rows of first gas inlets, and additionally has a center inlet (135) for the second gas coaxial with the axis of rotation.

A method for large-scale manufacturing of gallium nitride boules. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and grown ammonothermally. The seed orientation and mounting geometry are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus. The method is scalable up to very large volumes and is cost effective.

Provided is an emissions treatment system and method for reducing NOx emissions in the exhaust stream produced from an internal combustion engine. The system has an injector for periodically metering ammonia or an ammonia precursor into an exhaust stream; and a first substrate with a first SCR catalyst composition, downstream of the injector. The first substrate has an inlet end, an outlet end, a length extending between the inlet end to the outlet end, wall elements and a plurality of passages defined by the wall elements. The first SCR catalyst composition is disposed on the wall elements from the inlet end toward the outlet end to a length that is less than the substrate's axial length to form an inlet zone. The first substrate also has an NH3 destruction catalyst composition with a platinum group metal component dispersed on a refractory metal oxide. The NH3 destruction catalyst is disposed on the wall elements from the outlet end toward the inlet end to a length that is less than the substrate's axial length to form an outlet zone. Generally, there is from 0.1 to 10 g / ft3 of platinum group metal component in the outlet zone.

Method for etching organic low-k dielectric using ammonia, NH3, as an active etchant. Processes using ammonia results in at least double the etch rate of organic low-k dielectric materials than processes using N2 / H2 chemistries, at similar process conditions. The difference is due to the much lower ionization potential of NH3 versus N2 in the process chemistry, which results in significantly higher plasma densities and etchant concentrations at similar process conditions.

A system for effective NOx and particulate matter control in a diesel or other lean burn internal combustion engine is presented. The system includes a urea-based SCR catalyst having an oxidation catalyst coupled upstream of it and a particulate filter coupled downstream of the SCR catalyst. This system configuration results in improved NOx conversion due to fast SCR catalyst warm-up and higher operating temperatures. Additionally, placing the particulate filter last in this system configuration reduces tailpipe ammonia emissions as well as prevents any thermal damage to the SCR catalyst due to the particulate filter regeneration.

One aspect of the invention relates to controlling the ammonia feed rate to an SCR reactor using a NOx sensor cross-sensitive to ammonia. The sensor, positioned downstream of the reactor, is interrogated by introducing a pulse in the ammonia feed rate. A positive response to a positive pulse indicates ammonia slip. A negative response to a positive pulse indicates NOx breakthrough. Another aspect of the invention related to a combination of feed-back and feed-forward control. Upon detecting ammonia slip, the controller enters into an ammonia slip recovery mode in which the ammonia feed rate is reduced for a period to restore the reactor's ammonia or NOx buffering capacity. After the recovery period, feed-forward control is restored, optionally with an updated control objective. A further aspect of the invention relates to a learning probabilistic model for feed-forward control trained according to the occurrence or non-occurrence of NOx breakthrough and ammonia slip.

Water-soluble solvent compositions, including from about 10% to about 60% by weight of an aromatic ester; from about 30% to about 60% by weight of an aliphatic ester; from 0% to about 15% by weight of a co-solvent; from 0% to about 20% of one of a cyclic terpene and a terpenoid; from 0% to about 1% by weight of an odor-masking agent; and from 0% to about 20% by weight of a nonionic surfactant, for removing petroleum residue from a substrate, and methods of use thereof. The composition can further comprise water. The composition also can comprise an aqueous solution. The method for removing petroleum residue from a substrate can further comprise recycling the solvent composition by using a countercurrent separation column charged with compressed ammonia and / or carbon dioxide and a spinning band distillation column to separate the solvent composition from the petroleum residue.

Embodiments of nanoelectronic sensors are described, including sensors for detecting analytes such ammonia. An environmental control system employing nanoelectronic sensors is described. A personnel safety system configured as a disposable badge employing nanoelectronic sensors is described. A method of dynamic sampling and exposure of a sensor providing a number of operational advantages is described.

A portable peritoneal dialysis system for a patient includes an inlet port for providing inflow to the patient's peritoneal cavity, an outlet port for providing outflow from the patient's peritoneal cavity, and a volume of dialysate for flow into and out of the patient's peritoneal cavity, thereby removing from the dialysate uremic waste metabolites that have diffused into the dialysate. The portable peritoneal dialysis system also includes a closed liquid flow loop, including a pump, for flowing the dialysate into and out of the patient's peritoneal cavity, and an organic- and phosphate-removing stage, including at least one replaceable cartridge in the closed liquid flow loop, the cartridge containing material for removing organic compounds and phosphate from dialysate removed from the patient's peritoneal cavity. The portable peritoneal dialysis system further includes a urea- and ammonia-removing stage, including at least one replaceable cartridge in the closed liquid flow loop, the cartridge containing material for removing urea and ammonia from dialysate removed from the patient's peritoneal cavity, the material being packed around semi-permeable hollow fibers with interior fiber walls that reject cations, thereby retaining cations in the dialysate.

A diesel engine exhaust treatment system and method is provided which utilizes a diesel particulate filter positioned in the exhaust gas stream of a vehicle which includes an SCR catalyst, an ammonia oxidation catalyst, and / or a diesel oxidation catalyst. The system is capable of performing multiple functions including converting NOx to N2, converting HC and CO to H2O and CO2, trapping particulates, and minimizing ammonia emissions. The system is more compact and efficient than prior systems utilizing separate catalyst units, and minimizes backpressure while maximizing catalyst performance.

Various methods of fabricating a circuit structure utilizing silicon nitride are provided. In one aspect, a method of fabricating a circuit structure is provided that includes forming a silicon nitride film on a silicon surface, annealing the silicon nitride film in an ammonia ambient and annealing the silicon nitride film in a nitrous oxide ambient to form a thin oxide layer at an interface between the silicon nitride film and the silicon surface. The process of the present invention enables the manufacture of thin silicon nitride films with highly uniform morphology for use as gate dielectrics or other purposes. The thin oxide film is self-limiting in thickness and improves differential mechanical stresses.

Systems for converting a carbonaceous feedstock into a plurality of gaseous products are described. The systems include, among other units, two separate gasification reactors to convert a carbonaceous feedstock in the presence of an alkali metal catalyst into the plurality of gaseous products including at least methane. Each of the gasification reactors may be supplied with the feedstock from a single or separate catalyst loading and / or feedstock preparation unit operations. Similarly, the hot gas streams from each gasification reactor may be purified via their combination at a heat exchanger, acid gas removal, or methane removal unit operations. Product purification may comprise trace contaminant removal units, ammonia removal and recovery units, and sour shift units.

An exhaust aftertreatment system comprises an injector for injecting urea water into an exhaust duct, and a denitration catalyst disposed downstream of the injector with respect to a flow of exhaust gas. The exhaust aftertreatment system reduces nitrogen oxides in the exhaust gas by the denitration catalyst while using ammonia produced from the urea water injected from the injector. The urea water is injected along a direction of the flow of the exhaust gas within the exhaust duct, and a porous plate is disposed in multiple stages in a space of the exhaust duct such that droplets of the injected urea water impinge against the porous plate before reaching a wall surface of the exhaust duct. A surface of the porous plate subjected to the impingement of the droplets is arranged to face downstream with respect to the flow of the exhaust gas. Deposition of the urea water is prevented by causing film boiling when the droplets impinge against the porous plate, and the urea water reflected by the porous plate is uniformly dispersed into the exhaust gas. Thus, the urea water is uniformly dispersed into the exhaust gas without increasing a pressure loss of the exhaust gas. The urea water is prevented from depositing on the wall surface and producing a precipitate in the form of a solid.

A new method for the removal of environmental compounds from gaseous streams, in particular, flue gas streams. The new method involves first oxidizing some or all of the acid anhydrides contained in the gas stream such as sulfur dioxide (SO2) and nitric oxide (NO) and nitrous oxide (N2O) to sulfur trioxide (SO3) and nitrogen dioxide (NO2). The gas stream is subsequently treated with aqua ammonia or ammonium hydroxide which captures the compounds via chemical absorption through acid-base or neutralization reactions. The products of the reactions can be collected as slurries, dewatered, and dried for use as fertilizers, or once the slurries have been dewatered, used directly as fertilizers. The ammonium hydroxide can be regenerated and recycled for use via thermal decomposition of ammonium bicarbonate, one of the products formed. There are alternative embodiments which entail stoichiometric scrubbing of nitrogen oxides and sulfur oxides with subsequent separate scrubbing of carbon dioxide.

Systems to convert a carbonaceous feedstock into a plurality of gaseous products are described. The systems include, among other units, three separate gasification reactors for the gasification of a carbonaceous feedstock in the presence of an alkali metal catalyst into the plurality of gaseous products including at least methane. Each of the gasification reactors may be supplied with the feedstock from a single or separate catalyst loading and / or feedstock preparation unit operations. Similarly, the hot gas streams from each gasification reactor may be purified via their combination at a heat exchanger, acid gas removal or methane removal unit operations. Product purification may comprise trace contaminant removal units, ammonia removal and recovery units, and sour shift units.

This patent describes technology for generating ammonia from urea. The method is based on the hydrolysis of an aqueous solution of urea and / or biuret by heating under pressure to form a mixture of ammonia, carbon dioxide and water. The gas mixtures produced are useful for supplying ammonia at controlled pressure and rate of flow for many industrial applications without the risks and hazards associated with the transportation and on-site storage of ammonia, thereby providing a significant safety advantage over present industrial practice.

The present invention provides a method for treating biomass composed of integrated feedstocks to produce fermentable sugars. One aspect of the methods described herein includes a pretreatment step wherein biomass is integrated with an alternative feedstream and the resulting integrated feedstock, at relatively high concentrations, is treated with a low concentration of ammonia relative to the dry weight of biomass. In another aspect, a high solids concentration of pretreated biomass is integrated with an alternative feedstream for saccharifiaction.

A NOx abatement system comprising: a first NOx adsorber (18) capable of being disposed in-line and downstream of and in fluid communication with an engine (12); a selective catalytic reduction catalyst (20) disposed in-line and downstream of and in direct fluid communication with the first NOx adsorber (18), wherein the selective catalytic reduction catalyst (20) is capable of storing ammonia; and an off-line reformer (24) disposed in selective communication with and upstream of the first NOx adsorber (18) and the selective catalytic reduction catalyst (20), wherein the reformer (24) is capable of producing a reformate comprising primarily hydrogen and carbon monoxide.

Target chemicals were produced using biocatalysts that are able to ferment sugars derived from treated biomass. Sugars were obtained by pretreating biomass under conditions of high solids and low ammonia concentration, followed by saccharification.

A method for improved growth of a semipolar (Al,In,Ga,B)N semiconductor thin film using an intentionally miscut substrate. Specifically, the method comprises intentionally miscutting a substrate, loading a substrate into a reactor, heating the substrate under a flow of nitrogen and / or hydrogen and / or ammonia, depositing an InxGa1-xN nucleation layer on the heated substrate, depositing a semipolar nitride semiconductor thin film on the InxGa1-xN nucleation layer, and cooling the substrate under a nitrogen overpressure.

This invention provides a method for the anodization of magnesium or magnesium based alloys using an electrolytic solution containing ammonia, amines or both. The use of such an aqueous electrolytic solution in at least preferred forms alters the conditions under which anodization can occur to provide a more than satisfactory coating on the magnesium material with reduced cycle times.

A method and process for the treatment of wastewater containing phosphorous and nitrogen. The wastewater is first anaerobically treated to produce an anaerobic effluent from which insoluble organic carbon is separated to form a sludge rich in organic carbon that is used as a substrate during anoxic treatment of the wastewater by de-nitrifying phosphorous accumulating organisms (DPAO's) and ordinary de-nitrifying organisms. The separation of insoluble organic carbon is normally conducted using a clarifier located intermediate the anaerobic and anoxic bio-reactors. In one embodiment, the ammonia rich clarifier supernatant is directed to an aerobic reactor for nitrification and the nitrate produced is recycled to the anoxic bio-reactor. The final effluent may be membrane filtered to retain nitrifying biomass within the aerobic bio-reactor. The invention reduces overall hydraulic residence time and sludge volume, which results in a smaller, less expensive wastewater treatment system.