61870 results about "Exhaust gas" patented technology

An atomic deposition apparatus is provided for simultaneously loading / unloading a plurality of substrates. The atomic deposition apparatus which may load / unload the plurality of substrates when transmitting the plurality of substrates to a process module, includes a loading / unloading module for loading / unloading a substrate, a process module including a plurality of process chambers for simultaneously receiving a plurality of substrates and performing a deposition process, each of the plurality of process chambers including a gas spraying unit having an exhaust portion by which an exhaust gas is drawn in from inside the process chamber and the drawn in gas is exhausted above the process chamber, and a transfer module including a transfer robot provided between the loading / unloading module and the process module, the transfer robot being adopted for simultaneously holding the plurality of substrates while transporting the substrate.

A method for removing mercury and mercury-containing compounds from a combustion gas in an exhaust gas system has the steps of providing a mercury sorbent; injecting the mercury sorbent into a stream of the mercury-containing combustion gas for a sufficient time to allow at least an effective amount of the mercury and mercury-containing compounds in the combustion gas to adsorb onto the mercury sorbent, and collecting and removing the mercury sorbent from the combustion gas stream. The mercury sorbent is prepared by treating a carbonaceous substrate with an effective amount of a bromine-containing gas, especially one containing elemental bromine or hydrogen bromide, for a time sufficient to increase the ability of the carbonaceous substrate to adsorb mercury and mercury-containing compounds. The points of injecting and collecting and removing the mercury sorbent may be varied, depending upon the exact configuration of the exhaust gas system.

In one embodiment of the present inventions, an exhaust outlet in a vacuum processing chamber includes a nonsealing flow restrictor which can facilitate rapid opening and closing of the flow restrictor in some applications. Because the flow restrictor is a nonsealing flow restrictor, the conductance of the flow restrictor in the closed position may not be zero. However, the flow restrictor can restrict the flow of an exhaust gas from the chamber to permit the retention of sufficient processing gas in the chamber to deposit a film on the substrate or otherwise react with the substrate. After a film has been deposited, typically in a thin atomic layer, the exhaust flow restrictor may be opened such that the flow restrictor conductance is significantly increased to a second, higher flow rate to facilitate exhausting residue gas from the chamber. The nonsealing flow restrictor may be closed again to deposit a second layer, typically of a different material onto the substrate. The nonsealing flow restrictor may be rapidly opened and closed to deposit alternating layers of a variety of materials onto the substrate.

The present invention is an industrial waste water microwave electrodeless ultraviolet photocatalysis-dual membrane separation coupling treatment device, the device mainly consists of a reactor (1), a membrane separation system (2), a microwave electrodeless ultraviolet light source system (4), an aeration system, and an ozone tail gas decomposition device (7) connected to the reactor, and an inlet and outlet water system, wherein: the upper and lower parts of the reactor are respectively the reaction zone and the aeration zone, which are separated by a water distribution plate (5); the membrane separation system The microwave electrodeless ultraviolet light source system is located in the reaction zone and is separated by a corrugated partition (3); the aeration system is composed of a microporous aeration head (6) and a blower (8), and the microporous aeration head is located in the aeration At the bottom of the zone, the blower sends air to the aeration zone through the air duct. The invention has the characteristics of high reaction rate, complete degradation of organic matter, long-term operation and the like, and has strong operability and high safety. It is suitable for the treatment of refractory organic industrial wastewater, and it is also suitable for sterilization and disinfection in the field of water supply.

A fuel cell based subterranean heater for mineral extraction, in situ decontamination, or other applications. The fuel cells are preferably stacked within a casing which is then inserted into a hole bored, or otherwise formed, into the formation to be heated. Conduits within the casing, and preferably formed by adjacent, aligned holes formed through the plates of the individual fuel cells supply fuel and air and extract exhaust gases. An optional manifold is used to span the overburden without applying heat to it directly. The manifold may also function as a heat exchanger between incoming and exhaust gases. Preferably the fuel cell is fueled by gases produced by the formation and also generates electricity which is available for use or export.

An object of the present invention is to provide a honeycomb filter for purifying exhaust gases which makes it possible to alleviate a thermal stress generated due to occurrence of a local temperature change and which is less likely to generate cracks and superior in strength and durability, an adhesive that has a low thermal capacity and is capable of alleviating the thermal stress, a coating material that has a low thermal capacity with a superior heat insulating property and is capable of alleviating the thermal stress, and a manufacturing method of the honeycomb filter for purifying exhaust gases that can improve precision in the outside dimension, and reduce damages in the manufacturing processes. The present invention relates to a honeycomb filter for purifying exhaust gases, having a structure in that a plurality of column-shaped porous ceramic members, each having a number of through holes that are placed side by side in the length direction with partition wall interposed therebetween, are combined with one another through adhesive layers so that the partition wall that separate the through holes are allowed to function as a filter for collecting particulates, and in this structure, the thermal expansion coefficient αL of the adhesive layer and the thermal expansion coefficient αF of the porous ceramic member are designed to have the following relationship: 0.01<|αL−αF| / αF<1.0.

The present invention relates to an apparatus and method for forming a plasma in the exhaust line of a primary process reactor. The plasma is generated in an inductive source (5) to examine the chemical concentrations of the waste or exhaust gas in vacuum lines that are below atmospheric pressure. The optical radiation emitted by the plasma is analyzed by an optical spectrometer (9) and the resulting information is used to diagnose, monitor, or control operating states in the main vacuum vessel.

Showerheads for use in an apparatus for manufacturing a semiconductor substrate include an injection plate defining a bottom face of a gas receiving space in the showerhead and a gas receiving channel extending within the injection plate. A plurality of exhausting holes in the injection plate are coupled to the gas receiving channel. The exhausting holes are configured to exhaust gas from the gas receiving channel to the bottom face of the gas receiving space. A plurality of channels extend through the injection plate from the bottom face of the gas receiving space configured to flow gas from the bottom face of the gas receiving space out of the space.

The invention provides a catalyzed soot filter formed on a wall flow substrate having internal walls coated with catalyst compositions. The soot filter maintains a homogeneous flow of the exhaust gases through the internal walls of the substrate along the length of the filter due to the coating design. Both the efficiency and the durability of the catalytic function are increased over conventionally designed catalyzed soot filters. The catalyzed soot filter provides an integrated function for simultaneously treating the gaseous components of the exhaust (e.g., CO and HC) and the particulate matter deposited in the filter.

A combined patient interface and integrated exhaust assembly that passes a controlled flow of gas from an interior of a patient interface to ambient atmosphere at a predetermined flow rate irrespective of variations of pressure in the interior of the patient interface device relative to ambient atmosphere. Control of the flow of exhaust gas is achieved by varying the effective cross sectional area of the exhaust path communicating the interior of the patient interface with ambient atmosphere based on the pressure in the interior of the patient interface relative to ambient atmospheric pressure.

The invention discloses a reactor for catalytically oxidizing wastewater through ozone and an application method thereof. The reactor comprises a reaction chamber, a water inlet, a water outlet, a gasoutlet and a circulating water outlet, wherein a separation plate in the reaction chamber is used for separating the lower part of the reaction chamber into a jet flow reaction chamber and a tower type reaction chamber; the jet flow reaction chamber is internally provided with a first catalysis bed layer and an ejector; the circulating water outlet is connected with a working fluid inlet of the ejector; the gas outlet is connected with a sucked liquid inlet of the ejector through a gas circulating pipe; the water inlet is arranged at the bottom of the jet flow reaction chamber; the tower typereaction chamber is internally provided with a tower plate and a second catalysis bed layer; the water outlet is arranged at the bottom of the tower type reaction chamber; a gas inlet is communicatedwith the lower side of the tower plate and the gas circulating pipe; the gas circulating pipe is connected with a tail gas outlet. The reactor has the advantages of high mass transfer efficiency, rapid reaction speed, high ozone utilization rate, high COD (Chemical Oxygen Demand) removal rate and the like.

A process, system and sorbent for removal of mercury from a combustion exhaust gas stream in a combustion exhaust gas purification scheme that includes a combustion exhaust scrubber system that uses an aqueous liquid to remove acid gases from the combustion exhaust gas. A powdered mercury sorbent is used. The sorbent is introduced into the aqueous scrubber liquid in the scrubber system. After introduction of the mercury sorbent into the scrubber liquid, at least some of the mercury sorbent is separated from the scrubber liquid.

An exhaust port assembly comprising a conduit carries a flow of gas. A vent assembly having a fixed exhaust area is provided on the conduit for venting a flow of exhaust gas from within the conduit to ambient atmosphere. The vent assembly is configured so as to minimize noise associated with the flow of exhaust gas passing to atmosphere, diffuse the flow of exhaust gas passing to ambient atmosphere over a relatively large area, and minimize the area occupied by the venting assembly on the conduit.

A carbon dioxide separation system includes a compressor for receiving an exhaust gas comprising CO2 and generate a compressed exhaust gas and a separator configured to receive the compressed exhaust gas and generate a CO2 lean stream. The separator includes a first flow path for receiving the compressed exhaust gas, a second flow path for directing a sweep fluid therethrough, and a material with selective permeability of carbon dioxide for separating the first and the second flow paths and for promoting carbon dioxide transport therebetween. The system further includes an expander coupled to the compressor for receiving and expanding the CO2 lean stream to generate power and an expanded CO2 lean stream.

An oxidation apparatus for a semiconductor process includes a process container having a process field configured to accommodate target substrates at intervals vertically, a heater configured to heat the process field; an exhaust system configured to exhaust gas from inside the process field; an oxidizing gas supply circuit configured to supply an oxidizing gas to the process field; and a deoxidizing gas supply circuit configured to supply a deoxidizing gas to the process field. The oxidizing gas supply circuit includes an oxidizing gas nozzle extending over a vertical length corresponding to the process field, and having gas spouting holes arrayed over the vertical length corresponding to the process field. The deoxidizing gas supply circuit includes deoxidizing gas nozzles having different heights respectively corresponding to zones of the process field arrayed vertically, and each having a gas spouting hole formed at height of a corresponding zone.

A radial exhaust gas turbine apparatus has a gas turbine engine that includes a radial exhaust diffuser section and a casing apparatus consisting essentially of polygonal walls, substantially straight plates, and substantially straight sidewalls. The casing apparatus encloses the radial exhaust diffuser section and is configured to direct at least a substantial portion of the gas exiting the radial exhaust diffuser section to an exit in the casing apparatus via an approximately involute path.

Steam generating gasification reactors for providing high-pressure and high-temperature steam for catalytic gasification of a carbonaceous feedstock can be based on oxygen blown gasification reactors adapted for processing a slurry feedstock comprising at least 40% water. The exhaust from the slurry gasifier comprises at least steam, carbon monoxide and hydrogen. The slurry composition and the oxygen to fuel ratio can be varied to control the ratio of carbonaceous gases in the generator exhaust. By directing substantially all of exhaust gases produced from the slurry gasification reactor through the catalytic gasifier and subsequent gas separation and sequestration processes, a greatly higher energy efficiency and decreased carbon footprint can be realized.

A honeycomb filter for purifying exhaust gases. A plurality of rectangular columnar porous ceramic members are combined with one another through a sealing material layer to constitute a ceramic block, each of the rectangular columnar porous ceramic member including a number of through holes that are placed in parallel with one another in the length direction with a partition wall interposed therebetween. A sealing material layer is also formed on a circumference portion of the ceramic block, and the partition wall that separates the through holes functions as a filter for collecting particulates. On a cross section perpendicular to the length direction of the porous ceramic member of the ceramic block, the maximum width L (mm) of the crisscross portion of the sealing material layer is 1.5 to 3 times greater than the minimum width I (mm) of the sealing material layer.

An object of the present invention is to provide a honeycomb filter for purifying exhaust gases that is free from a gap formed between a plug and a partition wall and cracks generated in the plug and a portion of the partition wall contacting the plug, and is superior in durability. The present invention provides a honeycomb filter for purifying exhaust gases which has a structure in which: a columnar body made of porous ceramic comprises a number of through holes, said through holes being placed in parallel with one another in the length direction with a wall portion interposed therebetween; predetermined through holes of said through holes are filled with plugs at one end of said columnar body, while the through holes that have not been filled with said plugs at said one end are filled with plugs at the other end of said columnar body; and a part or all of said wall portion functions as a filter for collecting particulates, wherein the porosity of the columnar body is in a range from 20 to 80%, and the porosity of the plug is 90% or less and is also set to 0.15 to 4.0 times as much as the porosity of the columnar body.

A catalyst for treating exhaust gas from an internal combustion engine includes a carrier body coated with an inner layer and an outer layer. The inner layer includes platinum deposited on a first support material and on a first oxygen storage component, and the outer layer includes platinum and rhodium deposited on a second support material and on a second oxygen storage component. The first and second support materials may be the same or different, and may be selected from the group of: silica, alumina, titania, zirconia, mixed oxides or mixtures thereof, and zirconia-rich zirconia / ceria mixed oxide. The first and second oxygen storage components may include ceria-rich ceria / zirconia mixed oxide compounds, optionally including praseodymia, yttria, neodymia, lanthana or mixtures thereof.

A honeycomb structured body in which a plurality of porous ceramic members are combined with one another by interposing an adhesive layer, each of the porous ceramic members having a plurality of cells placed in parallel with one another in a longitudinal direction with a cell wall therebetween and having an outer edge wall on the outer edge surface thereof, wherein each of the porous ceramic members has a filling body which is provided so as to fill in at least one corner portion of at least one outermost cell of the porous ceramic members, a cross-sectional shape of the outermost cell at the face orthogonal to the longitudinal direction of the cells is an almost tetragon, and a cross-sectional shape of the filling body at the face orthogonal to the longitudinal direction of the cells is an almost right triangle.

A honeycomb filter for purifying exhaust gases that is free from occurrence of cracks and coming-off of plugs and is superior in durability upon its use. The honeycomb filter includes a columnar body made of porous ceramics, which has a number of through holes placed in parallel with one another in the length direction with wall portion interposed therebetween, designed so that predetermined of the through holes are filled with plugs at one end of the columnar body, while the through holes not filled with the plugs at the one end are filled with plugs at the other end of the columnar body, and part of or the entire wall portion functions as a plug for collecting particles. A bending strength Fα (MPa) of the honeycomb filter and a length L (mm) of the plug in the length direction of the through hole satisfy the relationship of Fα×L≧30.