580 results about "Hydrogen bromide" patented technology

A method of forming a photoresist pattern comprises providing a semiconductor substrate on which a layer to be etched is formed. The method further comprises forming a first photoresist pattern on the layer to be etched, processing the first photoresist pattern with hydrogen bromide (HBr) plasma, and forming a second photoresist pattern on the semiconductor substrate between the first photoresist patterns

In a gas containing a fluorine atom in the molecule, etching of a SiN film is performed isotropically; therefore, the width of a sidewall gets smaller and it is difficult to widen the width of an LDD region. A silicon nitride film is formed over a gate electrode, a hydrogen bromide is mainly used as an etching gas, the silicon nitride film only over the gate electrode and the surface of a substrate are removed by an etching method such as ICP (Inductively Coupled Plasma), and the silicon nitride film is simultaneously left only on the side surface part of the gate electrode.

The present disclosure provides a method for etching trenches, contact vias, or similar features to a depth of 100 mum and greater while permitting control of the etch profile (the shape of the sidewalls surrounding the etched opening). The method requires the use of a metal-comprising masking material in combination with a fluorine-comprising plasma etchant. The byproduct produced by a combination of the metal with reactive fluorine species must be essentially non-volatile under etch process conditions, and sufficiently non-corrosive to features on the substrate being etched, that the substrate remains unharmed by the etch process. Although aluminum is a preferred metal for the metal-comprising mask, other metals can be used for the masking material, so long as they produce an essentially non-volatile, non-corrosive etch byproduct under etch process conditions. By way of example, and not by way of limitation, metallic materials recommended for the mask include aluminum, cadmium, copper, chromium, gallium, indium, iron, magnesium, manganese, nickel, and combinations thereof. In particular, aluminum in combination with copper or magnesium is particularly useful, where the copper or magnesium content is less than about 8% by weight, and other constituents total less than about 2% by weight. The plasma feed gas includes at least one fluorine-containing compound such as nitrogen trifluoride (NF3), carbon tetrafluoride (CF4), and sulfur hexafluoride (SF6), by way of example and not by way of limitation. Oxygen (O2), or an oxygen-comprising compound, or hydrogen bromide (HBr), or a combination thereof may be added to the plasma feed gases to help provide a protective layer over etched sidewalls, assisting in profile control of the etched feature.

A process for converting gaseous alkanes to olefins, higher molecular weight hydrocarbons or mixtures thereof wherein a gaseous feed containing alkanes is thermally reacted with a dry bromine vapor to form alkyl bromides and hydrogen bromide. Poly-brominated alkanes present in the alkyl bromides are further reacted with methane over a suitable catalyst to form mono-brominated species. The mixture of alkyl bromides and hydrogen bromide is then reacted over a suitable catalyst at a temperature sufficient to form olefins, higher molecular weight hydrocarbons or mixtures thereof and hydrogen bromide. Various methods are disclosed to remove the hydrogen bromide from the higher molecular weight hydrocarbons, to generate bromine from the hydrogen bromide for use in the process, and to selectively form mono-brominated alkanes in the bromination step.

The specification discloses a process for the production of olefins including ethylene, propylene and butenes from methyl bromide. In a chemical reaction methyl bromide is dehydrobrominated to the olefin and hydrogen bromide. The reaction is carried out at elevated temperatures, preferably in the range of 300° C. to 500° C. A catalyst comprising a zeolite may be used.

A process is provided for the manufacture of formaldehyde from methyl bromide. In the process, methyl bromide is oxidized with air over a catalyst to give formaldehyde and hydrogen bromide. In a preferred embodiment of the invention, a mixture of two different catalysts are employed, one to promote hydrolysis of methyl bromide to methyl alcohol and the other to promote the oxidation of methyl alcohol to formaldehyde.

The invention relates to a fatty group polyester-polyamino acid copolymer with biology function and its synthesis method in the field of macromole biological medicine material technique. The block copolymer comprises: the two block copolymer (A) of fatty group polyester -polyamino acid with biology function and three block copolymer (B), and polyoxyethylene-fatty group polyester-polyamino acid three block copolymer (C). The synthesis method comprises: synthesizing the block copolymer of the carboxylic which is protected by benzyl, doing catalytic reduction to the palladium wood coal or hydrolyzing hydrogen bromide to generate the corresponding polymer with free carboxyl, then using NHS (N- hydroxyl succinimide-sauba) to active the flank carboxyl of the polyamino acid section, reacting it with short peptide, sugar or drug with RGD to obtain the fatty group polyester-polyamino acid copolymer with biology function.

The invention discloses a process for preparing brominated butadiene rubber, which is characterized in that the process for preparation comprises first, dissolving butadiene rubber solution in dissolvent to form glue solution, second, stirring bromine and the glue solution to transfer with medium to become homogeneous solution, and then having a brominated reaction, third, entering nitrogen or air to remove hydrogen bromide in the glue solution after brominated reaction in a degassing tower, fourth, neutralizing the glue solution with dilute lye in a neutralizing reactor, and repeatedly washing with deionized water, leading the pH value of the glue solution to be 6.5-8.0, fifth, adding dispersing agent and heat-resisting agent to conciliate, sixth, flashing and recovering the dissolvent in the glue solution in a condensation pot to get brominated butadiene rubber gel particle, and getting the end products through squeezing, dewatering, expanding and drying. Compared with the prior art, the invention has the advantages that the invention can be continuously produced, the qualities of the products are stable, and the reaction process is easy to control (expand).

A method is provided which includes patterning one or more metal layers arranged above a metal insulating layer and terminating the patterning process upon exposure of the metal insulating layer. In particular, the method may be adapted to be more selective to the metal insulating layer than the one or more metal layers. In general, such an adaptation may include exposing the semiconductor topography to an etch chemistry comprising hydrogen bromide. In some cases, the etch chemistry may further include a fluorinated hydrocarbon. In yet other embodiments, the method may further or alternatively include using a reactive ion etch process, etching at a relatively low temperature, using a resist mask, and/or using an etch chemistry substantially absent of an oxygen plasma. In this manner, the method may, in some embodiments, include patterning the one or more metal layers using a reactive ion etch process substantially absent of an oxygen plasma.

The invention relates to a process for producing nylon 11 resin by utilizing castor oil, in particular to a method for preparing 11-aminoundecanoic acid by utilizing 10-undecenoic acid. The method comprises the following steps: proportioning 10-undecenoic acid, methylbenzene and benzene to prepare a raw material solution, and generating 11-bromoundecanoic acid by virtue of the additive reaction of the raw material solution with hydrogen bromide in a double-kettle reaction device in the presence of catalyst; ammonolyzing the 11-bromoundecanoic acid by virtue of three different processing ways without the crystallization; adding a phase-transfer catalyst in the ammonolysis reaction to accelerate the ammonolysis reaction; carrying out vacuum filtering after the ammonolysis reaction is completed, wherein a filter cake is a 11-aminoundecanoic acid crude product; adding the crude product into the deionized water, dissolving the crude product by heating the crude product, cooling and crystallizing the crude product, and filtering the crude product to obtain the refined 11-aminoundecanoic acid product.

The invention relates to a Y-shaped three-arm segmented copolymer of aliphatic polyester namely polyamino acid and a process for synthesis, which belongs to the high-polymer biological medicine material field. And the process for synthesis comprises protecting amidogens of 2-amidocyanogen-1 and 3-propylene glycol with benzyl chloroformate, ringopening and polymerizing 2-amidocyanogen-1 and 3-propylene glycol with aliphatic cyclic esters monomer in benzene or toluene dissolvent under the condition of warming up and stirring and without water and oxygen through utilizing stannous octoate as catalyst, utilizing amidogens to be macromolecule initiating agent after de-protecting, triggering alpha- amino acid-N-carboxylic acid anhydrides to ring-open and polymerize, getting Y-shaped segmented copolymer of carboxy group which is protected by benzyl group, forming relative polymer with free carboxy group through dewatering hydrogen bromide or catalyzing hydrogenating and deacidizing palladium-charcoal, and then getting the Y-shaped segmented copolymer which can be biodegraded and can have biology functionalization. The invention can be widely applied in the filed such as internal fixation of bone fracture, medicinal carrier, tissue engineering scaffold and the like.

The invention discloses a two-block copolymer of poly-N-isopropyl acrylamide-polyamino acid and making method, which is characterized by the following: the number average molecular weight of poly-N-isopropyl acrylamide-polyamino acid is 1000-10000; the polyamino acid is poly-L-glutamic acid or poly-L-aspartic acid with number average molecular weight at 1000-30000; the molar percentage of amino acid carbobenzoxy is 0-90%; the invention uses hydrogen bromide or reducing method to strip benzyl through catalyzing and hydrogenating to obtain the product, which possesses double response for temperature and pH value in the solution; the copolymer can be biological decomposed to be discharged out of body through kidney directly, which can be carrier of target drug release and injectable intellectual response aquagel.

The invention discloses a method for comprehensively recycling waste printed circuit boards, which comprises the following: a step of waste printed circuit board gasification, which is to crush the waste printed circuit boards, feed the crushed waste printed circuit boards into a molten salt reacting furnace, perform gasification at the temperature of between 700 and 900 DEG C to obtain gasified residues and a gas product which contains a large amount of tar, allow the gasified residues to layer in molten salt, discharge the layered products from different positions of the molten salt reacting furnace and recycle the products respectively; a step of bromine-containing pollutant removal, which is to release bromine (Br) from the waste printed circuit boards in a form of hydrogen bromide (HBr) when the waste printed circuit boards are gasified, wherein the released acid HBr is instantly absorbed by alkali molten salt and a small amount of bromine-containing organic materials generated at the same time are cracked and absorbed by the molten salt under the catalysis of the molten salt; and a step of gas product reforming, which is to introduce the mixture of the gas product containing a large amount of tar, oxygen-enriched air and vapor according to a ratio of 1: (0.4-0.7): (1-5) into an airflow bed, reform at the temperature of between 1,200 and 1,500 DEG C, regulate the ratio of hydrogen (H2) to carbon monoxide (CO) in the gas to 0.8 to 2 and convert the tar in the gas product at a high temperature in the airflow bed.

The invention discloses a green synthesizing method of aryl bromide. The synthesizing method comprises the step of carrying out bromination on an aromatic compound of which the structure is shown as a formula (1) to prepare the aryl bromide by using hydrogen bromide as a brominating agent, using copper nitrate as a catalyst and using molecular oxygen as an oxidant, wherein in the formula (I), R is hydrogen; substituent groups R1, R2, R3, R4 and R5 are respectively independently selected from hydrogen, hydroxy, amino, C1 to C8 alkoxy, single C1 to C8 alkyl amino, double C1 to C8 alkyl amino, C1 to C12 alkyl, C6 to C12 aryl, C1 to C8 acyloxy, C1 to C8 acylamino, halogen, nitryl, cyan, carboxyl and C1 to C8 acyl or C1 to C8 carbalkoxyl group; and at least one substituent group of R1, R2, R3,R4 and R5 is hydroxy, amino, C1 to C8 alkoxy, single C1 to C8 alkyl amino, double C1 to C8 alkyl amino, C1 to C8 acyloxy, C1 to C8 acylamino or C1 to C12 alkyl. The synthesizing method of the invention has the advantages of wide application range and high atom utilization, avoids using an organic solvent and has the characteristics of economy and environment protection.

This invention relates to a convenient and improved process for preparation of glatiramer acetate (copolymer-1) of pharmaceutical grade. The process involves polymerizing N-carboxyanhydrides of tyrosine, alanine, y-benzyl glutamate and &egr;-N-trifluoroacetyllysine in dioxane with diethylamine as initiator to afford protected copolymer-1. Treatment with hydrogen bromide in acetic acid at 35° C. for 3-5 h cleaves benzyl group to produce trifluoroacetyl copolymer-1. The trifluoroacetyl copolymer-1 is washed with an organic solvent to remove reactive benzyl bromide generated during debenzylation. Deprotection with aqueous piperidine, followed by dialysis offers glatiramer acetate (copolymer-1) of Molecular weight 5000-9000 daltons.

The invention provides a synthesis method of an intermediate compound of sofosbuvir as shown in formula (I) (see specification). The synthesis method of the intermediate compound of sofosbuvir, a synthetic route of which is as follows: (see specification) the synthesis method comprises the following steps: taking (3R, 4R, 5R)-3-fluoro-dihydro-4-hydroxl3-methyl furan-2(3H)-ketone as an initial raw material to react with pivaloyl chloride to generate an intermediate product (XII); reducing the intermediate product to obtain an intermediate product (XIII); enabling the intermediate product (XIII) to react with pivaloyl chloride to generate an intermediate product (XIV); generating an intermediate product (XV) by virtue of the reaction of the intermediate product (XIV) and a hydrogen bromide; performing silyl-hilbert-johnson reaction for the intermediate product (XV) and uracil to generate an intermediate product (XVI); enabling the intermediate product (XVI) to react with sodium methoxide to obtain a target product. The synthesis method of the intermediate compound (I) is moderate in reaction condition, simple in procedure, low in cost, environment-friendly and favorable for the industrialized production.

The invention discloses a method for synthesizing an alpha-brominated aromatic ketones compound. The method comprises the following steps: taking an aromatic ketones compound as a substrate, hydrogen bromide as a brominating agent, copper nitrate as a catalyst, oxygen or air as an oxidizing agent and water as a solvent; performing brominating reaction at 25-100 DEG C; and after finishing the reaction, post-processing the reaction solution, thereby obtaining the alpha-brominated aromatic ketones compound. According to the method, water is taken as the solvent, so that the pollution and harm to the environment during a producing, recycling or discharging process caused by an organic solvent are avoided; the method is an environment-friendly green synthesizing technology; the hydrogen bromide is taken as the brominating agent, so that the operation is conveniently and easily controlled, the final reaction products are only alpha-bromoketone and water, no other harmful matter is generated and the defects of the prior art are eliminated; the oxygen or air is taken as the oxidizing agent, so that the price is low and the oxidizing agent is easily obtained; and the method provided by the invention is characterized by convenience in operation, safety, environmental protection, low cost, high economic benefit, and the like, and belongs to a green chemical technology.

In a semiconductor device manufacturing method, a target object including a multilayer film and a mask formed on the multilayer film is prepared in a processing chamber of a plasma processing apparatus. The multilayer film is formed by alternately stacking a silicon oxide film and a silicon nitride film. The multilayer film is etched by supplying a processing gas containing hydrogen gas, hydrogen bromide gas, nitrogen trifluoride gas and at least one of hydrocarbon gas, fluorohydrocarbon gas and fluorocarbon gas into the processing chamber of the plasma processing apparatus and generating a plasma of the processing gas in the processing chamber.

The invention discloses a new process for synthesizing alpha-brominated ketone compound by a hydrogen peroxide oxidizing and brominating method and the process comprises a hydrogen bromide-hydrogen peroxide oxidizing and brominating method and a bromine-hydrogen peroxide oxidizing and brominating method. The process comprises the following specific steps of: when hydrogen bromide (solution of hydrobromic acid) is used as a bromination agent, mixing the ketone compound and the hydrobromic acid and directly dripping hydrogen peroxide into the mixture to oxidize the hydrogen bromide into bromine, and then performing a bromination reaction to generate alpha-brominated ketone; when the bromine is used as the bromination agent, brominating the ketone compound by using bromine liquid to generatethe alpha-brominated ketone compound and the hydrogen bromide; and after the bromine is completely reacted, oxidizing the hydrogen bromide generated in the reaction into the bromine by using the hydrogen peroxide, continuing to perform the bromination reaction on the bromine and the ketone until the ketone compound is completely reacted to generate the alpha-brominated ketone. In the invention, water is used as a solvent, the utilization rate of the bromine is nearly 100 percent, the final products of the reaction are only the alpha-brominated ketone and water; especially, when the hydrobromic acid is used as the bromination agent, the hydrobromic acid is nontoxic, tasteless and free of high corrosion of the bromine liquid without generating any harmful substance; and the process has the advantages of more convenient operation, high efficiency, energy conservation and environmental protection.

The invention discloses a method for preparing a tribromophenol, which is characterized in that bromine is generated by the hydrogen peroxide reaction between a hydrogen bromide and an oxidant, and then the bromine continues to react with a phenol to synthesize a tribromophenol, and the method can be finished with no middle steps. A crude product passes through water, a sodium bicarbonate liquor and a sodium bisulfite liquor, then after the simple treatments of water washing, impurity removal and filtration, the product can be got. The method has the advantages of simple and convenient process, easy operation, high reaction safety, less pollution and simple post processing. The yield ratio can reach to more than 96 percent. The product has a high purity, is easy to realize industrial production and has a strong practicality.