The invention discloses a
phosphorus trifluoride production device and method, and belongs to the technical field of
phosphorus trifluoride production, the device comprises a reaction part, a pretreatment part and a post-treatment part, the reaction part comprises a first
raw material tank, a second
raw material tank, a reaction kettle and a collection
cold trap, the pretreatment part comprises a primary separation
tower and an absorption
tower, and the post-treatment part comprises a secondary separation
tower and an absorption tower. The post-treatment part comprises an adsorption tower, a light component removal tower and a heavy component removal tower; the production method comprises the following steps: adding raw materials of
phosphorus trichloride and
hydrogen fluoride into a reaction kettle to generate phosphorus
trifluoride and
hydrogen chloride, collecting the phosphorus trifluoride and
hydrogen chloride in a collecting
cold trap, heating the collecting
cold trap to vaporize the phosphorus trifluoride and
hydrogen chloride, and sequentially entering a primary separation tower, a light component removal tower and a heavy component removal tower for a series of treatment, and finally, high-purity phosphorus trifluoride gas is extracted from the heavy component removal tower to a filling
system. According to the method, high-purity phosphorus trifluoride with the purity larger than or equal to 99.999% can be finally produced, and the problem that in the prior art, the purity of phosphorus trifluoride is not enough is solved.