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25 results about "Tetramethylsilane" patented technology

Tetramethylsilane (abbreviated as TMS) is the organosilicon compound with the formula Si(CH₃)₄. It is the simplest tetraorganosilane. Like all silanes, the TMS framework is tetrahedral. TMS is a building block in organometallic chemistry but also finds use in diverse niche applications.

Device and method for purifying tetramethylsilane

The invention discloses a purification device and a purification method of tetramethylsilane. A raw material tank in the purification device is used for accommodating tetramethylsilane. The light component removal rectifying tower is communicated with the raw material tank and is used for receiving tetramethylsilane and removing low-boiling-point impurities in the tetramethylsilane. The first heavy component removal rectifying tower is communicated with the light component removal rectifying tower and is used for removing high-boiling-point impurities of tetramethylsilane; the first gasifier is communicated with the first de-heavy rectifying tower and is used for gasifying tetramethylsilane; the first adsorption unit is communicated with the first gasifier and is used for adsorbing impurities of which the boiling point is close to that of tetramethylsilane; and the second de-heavy rectifying tower is communicated with the first adsorption unit and is used for receiving the tetramethylsilane adsorbed by the first adsorption unit and removing high-boiling-point impurities in the tetramethylsilane. And the second gasifier is communicated with the second de-heavy rectifying tower and is used for gasifying tetramethylsilane. And the second adsorption unit is communicated with the second gasifier and is used for adsorbing impurities with the boiling point close to that of tetramethylsilane. The purification device and the purification method are good in purification effect and low in purification cost.
Owner:SUZHOU JINHONG GAS CO LTD

System and method for preparing tetramethylsilane

The invention discloses a system and method for preparing tetramethylsilane, wherein the system for preparing tetramethylsilane comprises a raw material tank, a distillation device, an adsorption device and a sub-boiling distillation tower, wherein the raw material tank is used to hold a mixture containing tetramethylsilane, the distillation device comprises a first distillation tower and a second distillation tower, the first distillation tower is connected to the raw material tank and the second distillation tower, the first distillation tower is used to remove chloroalkanes in the mixture to form a first mixture, the second distillation tower is used to remove part of the small molecule alkanes in the first mixture to form a second mixture, the adsorption device is connected to the second distillation tower to remove the small molecule alkanes and olefins in the second mixture and form a third mixture, and the sub-boiling distillation tower is connected to the adsorption device to purify the third mixture to obtain tetramethylsilane. The tetramethylsilane prepared by the system for preparing tetramethylsilane of the invention has high purity and low production cost.
Owner:CHINA SILICON CORP LTD +1

Device for purifying tetramethylsilane and method for recovering tetramethylsilane in steel cylinder

The invention discloses a purification device of tetramethylsilane and a recovery method of tetramethylsilane in a steel cylinder. The tetramethylsilane purification device comprises a vaporizer, an adsorption column, a filter, an intermediate tank and a product tank. The vaporizer is connected with the steel cylinder and used for vaporizing tetramethylsilane in the steel cylinder, and a plurality of sample outlets and sample inlets are formed in the steel cylinder; one end of the adsorption column is connected with the vaporizer, and the adsorption column is used for adsorbing gaseous impurities in tetramethylsilane; the filter is connected with the other end of the adsorption column and is used for filtering particulate impurities in tetramethylsilane; the intermediate tank is communicated with the filter, can be communicated with the steel cylinder and is used for temporarily storing filtered tetramethylsilane; and the product tank is communicated with the intermediate tank and is used for storing purified tetramethylsilane. The purification device disclosed by the invention is simple in structure, and can be connected through a simple pipeline, so that the recovery of raw materials in the steel cylinder and the flushing and replacement of the steel cylinder can be completed on a production site, the production efficiency is improved, and the purification cost is reduced.
Owner:SUZHOU JINHONG GAS CO LTD

A continuous production device of high-purity tetramethylsilane

The utility model discloses a kind of continuous production device of high-purity tetramethylsilane, including receiving support, the receiving support top is fixedly connected with control electricity box, the receiving support top is fixedly connected with support sleeve frame, two installation conical barrels are fixedly sleeved in the support sleeve frame, the installation conical barrel side wall is connected with installation valve, the installation conical barrel top is provided with installation cover.The utility model, by mixed liquid falls into the inside of connecting drawer, and after being filtered by connecting filter screen, connecting filter element and connecting filter cloth, then be discharged into the inside bottom of adjusting shell through multiple liquid discharge holes on connecting drawer, so that hydrolysis impurity removal is accelerated, and the mixed liquid of hydrolysis is fully purified in multiple stages, to improve use effect.
Owner:ZHANGZHOU XIPU MATERIAL TECH CO LTD

Polycarbonate diols

[Problem] To provide a polycarbonate diol or the like that is equivalent to petroleum-derived from plants and has excellent colorless transparency in appearance. [Solution] The polycarbonate diol has a repeating unit represented by formula (1) and a terminal hydroxyl group, and is characterized in that the integral value of a signal of 2.50-2.70 ppm is 0.01-1.0 when the integral value of a signal of 3.90-4.45 ppm is set to 1000 in a 1H-NMR spectrum measured using chloroform-d as a solvent and tetramethylsilane as a reference substance. (In the formula, R1 represents a divalent aliphatic hydrocarbon having 2-20 carbon atoms. )
Owner:ASAHI KASEI KOGYO KABUSHIKI KAISHA

A system and method for trimethylchlorosilane production

The present application relates to a kind of trimethylchlorosilane preparation system, including sequentially connected: feed unit, preheating unit, reaction unit and light removal unit;Feed unit, including hydrogen chloride purification device and tetramethylsilane mixture storage tank;Preheating unit: preheating unit includes preheater;Raw material tetramethylsilane mixture and hydrogen chloride gas are preheated after preheating unit and enter reaction unit;Reaction unit: including fixed bed reactor, raw material is reacted in reaction unit after preheating, and product is obtained;Light removal unit: including light removal tower, reaction product enters light removal tower, and the mixture containing target product trimethylchlorosilane of light component removal is obtained by rectification, separation.The present application is not consumed on the basis of other organosilicon monomer, utilizes the hydrogen chloride gas generated by methylchlorosilane hydrolysis TMS comprehensive utilization, is converted into trimethylchlorosilane, and trimethylchlorosilane content in product reaches 93% or more.
Owner:JIANGXI BLUESTAR XINGHUO SILICONE CO LTD

Method for preparing silicon carbide coating on hard alloy substrate

The invention relates to the technical field of preparation of silicon carbide coatings, in particular to a method for preparing a silicon carbide coating on a hard alloy substrate. The method comprises the following steps that firstly, a hard alloy substrate is pretreated, then the pretreated substrate is placed on a clamp in hot filament chemical vapor deposition equipment, then tetramethylsilane and hydrogen are introduced into a reaction cavity, precursor cracking is excited through a hot filament, and the hard alloy substrate is obtained. The compact and uniform silicon carbide coating is obtained on the surface of the hard alloy substrate, and meanwhile the hard alloy substrate with more excellent performance is provided. According to the method, the applicable substrate of the preparation technology of the silicon carbide coating is widened, the application range of the silicon carbide coating is expanded, and the silicon carbide coating prepared on the hard alloy substrate has high purity, good crystal quality and excellent film-substrate adhesion strength; and the wear resistance and the service life of the cutter can be obviously improved when applied to the surface of the hard alloy cutter.
Owner:SHANGHAI JIAOTONG UNIV

Electronic grade tetramethylsilane filling system and processing method

The present application relates to a kind of electronic grade tetramethylsilane filling system, including raw material tank, gas purification structure, gas-liquid separator, liquid purifier and cylinder, the present application also relates to processing method, the processing method of electronic grade tetramethylsilane filling system described in the present application, by raw material tank liquid gasification, the removal of oxygen, carbon dioxide and particulate matter and other impurities in 4MS gas is completed by gas purification structure, and then by gas-liquid separator, gas is converted into liquid, by liquid purifier, metal ions are removed, secondary filling treatment is completed, that is, the purity of ≥99.99% ultra-pure tetramethylsilane can be obtained.The filling method reduces the influence of filling power, and can improve the purity of tetramethylsilane during filling.The present application is simple in design, and the purpose of high purity of tetramethylsilane after filling and reducing the influence of intermediate impurities is realized under the synergistic effect of two-stage purifier.
Owner:PERIC SPECIAL GASES CO LTD

Polycarbonate diol

To provide a polycarbonate diol and the like excellent in colorless transparency comparable to that of one derived from petroleum, even when derived from a plant.SOLUTION: A polycarbonate diol has a repeating unit expressed by the following formula (1), and a terminal hydroxy group, where the integral value of a signal of 2.50-2.70 ppm is 0.01-1.0 when an integral value of a signal of 3.90-4.45 ppm is 1,000 in a 1H-NMR spectrum measured using chloroform-d as a solvent and tetramethylsilane as a reference material. In the formula, R1 expresses a divalent 2-20C aliphatic hydrocarbon.SELECTED DRAWING: None
Owner:ASAHI KASEI KOGYO KABUSHIKI KAISHA

Process for the purification of tetramethylsilane

The application discloses a purification method of tetramethylsilane, which comprises the following steps: S1, pre-purification treatment is performed on tetramethylsilane raw materials to obtain tetramethylsilane crude product; S2, the tetramethylsilane crude product is mixed with a catalyst, heated, and catalytic reaction is generated so that isopentane in the tetramethylsilane crude product is converted into isoamylene to obtain an intermediate product; and S3, rectification treatment is performed on the intermediate product to remove isoamylene in the intermediate product, and purified tetramethylsilane is obtained. According to the purification method of tetramethylsilane, most of the easily separated impurities in the tetramethylsilane raw materials are removed through pre-purification treatment, then the tetramethylsilane crude product is mixed with a catalyst, and the difficult-to-separate isopentane impurities are converted into isoamylene under the catalytic action of the catalyst; the boiling point of isoamylene is greatly different from that of tetramethylsilane, so the isoamylene is removed through rectification, and finally the purified tetramethylsilane is obtained.
Owner:SUZHOU JINHONG GAS CO LTD

Method for producing epitaxial film, vapor phase growth device and epitaxial film

To provide a method for producing an epitaxial film which can suppress mixing of H and C into an epitaxial film and increase in Si concentration distribution, a vapor phase growth device and an epitaxial film.SOLUTION: An n type β-Ga2O3 epitaxial film is grown by using a hot wall MOVPE method using an electric furnace for heating a reaction pipe made of SiO2, using trimethyl gallium (TMGa) as a Ga raw material, O2 gas as an O raw material and tetramethylsilane (TMSi) as a dopant of Si, under the conditions of a growth temperature of 950-1,100°C, and 1.0×10-7 to 1.0×10-3 RSi (wherein, RSi represents (supply amount of TMSi) / ((supply amount of TMSi)+(supply amount of TMGa)) in molar ratio).SELECTED DRAWING: Figure 1
Owner:NIPPON SANSO CORP +1

A tetramethylsilane production device

ActiveCN224926107UProcess engineeringChiller
The utility model discloses a tetramethylsilane production device, including dechlorination reation kettle, purification column, cooler and receiving tank, the dechlorination reation kettle top is equipped with the entrance and the export, and the export is connected purification column, and the purification column top export is connected cooler, and the cooler export is connected respectively purification column top entrance and receiving tank entrance, and receiving tank obtains the tetramethylsilane product after purification, the dechlorination reation kettle outer wall is equipped with the outer coil of jacket, and the outer coil can pass into cooling medium and realize the cooling of dechlorination reation kettle, and the jacket can pass into heating and carry out the temperature rise heat preservation to dechlorination reation kettle. The reation kettle can realize two kinds of functions of dechlorination reaction and distillation purification simultaneously, greatly simplifies equipment floor space and cost, improves the utilization of device, and obtains electronic grade high purity tetramethylsilane.
Owner:ZHEJIANG YINGKE NEW MATERIAL CO LTD

A filtration membrane and a method for producing the same

PendingCN122321652AFiltration membraneMeth-
This invention provides a filter membrane and its preparation method. The preparation method includes the following steps: placing a porous filter membrane substrate in an environment containing plasma and a precursor, and performing plasma treatment to obtain the filter membrane; wherein the precursor includes at least one selected from hexamethyldisiloxane, perfluorooctyltriethoxysilane, pentane, ethylene, toluene, perfluorohexane, styrene, divinylbenzene, hexamethyldisiloxane, tetramethylsilane, tetraethoxysilane, tetrafluoroethylene, and hexafluoropropylene. The filter membrane obtained by this preparation method can significantly reduce the swelling rate and simultaneously increase the permeation flux in organic solvents, achieving precise molecular weight cutoff.
Owner:CHINA UNIV OF PETROLEUM (BEIJING) +1

Tetramethylsilane high-efficiency adsorption and purification small-scale experiment device

The utility model provides a tetramethylsilane high-efficiency adsorption and purification small-scale experiment device which is characterized in that one opening of a three-neck flask is communicated with a vertically arranged adsorption column, the adsorption column is filled with an adsorbent, the top of the adsorption column is communicated with a vertically arranged cooling pipe through a concave pipe, an adding sleeve on the outer wall of the adsorption column is communicated with a heating circulation box, and the heating circulation box is communicated with a heating circulation box; the cooling sleeve on the outer wall of the adsorption column is communicated with the cooling circulation box. The whole experiment system is transparent glass, so that the dynamic process in the system can be clearly observed, and the unreliable experiment result caused by flow back-mixing and material flow flowing abnormity can be obviously prevented. After the experiment parameters are adjusted, the system response time is short, the adjustment experiment can be quickly carried out, and the overall experiment failure caused by faults is avoided. The small-scale test experimental device can efficiently screen adsorbents and determine experimental conditions required by various pilot tests, and after industrial-grade tetramethylsilane (94%) is adsorbed through the device, the purity of the industrial-grade tetramethylsilane can reach 99.999%.
Owner:HUBEI SINOPHORUS ELECTRONIC MATERIALS CO LTD

Device and method for purifying tetramethylsilane

The invention discloses a tetramethylsilane purification device and method, and the device comprises a raw material pretreatment assembly which comprises a station for placing a crude TMS storage tank and a precision filter connected to a raw material pipe, and the station is provided with a heating device; the vaporization assembly is a vaporizer communicated with the raw material pipe of the raw material pretreatment assembly; the membrane separation assembly comprises a membrane assembly of a ZSM-5 molecular sieve membrane with height b-axis orientation, the b-axis orientation value of the ZSM-5 molecular sieve membrane in the membrane assembly is 0.90-95, the thickness of a separation layer is 1-3 microns, and a membrane carrier is an alpha-Al2O3 porous ceramic tube; an inlet of the membrane component is communicated with a vaporization outlet of the vaporization component; the condensation and collection assembly comprises a condenser communicated with a second connecting pipe on the permeation side of the membrane separation assembly and a product tank communicated with an outlet of the condenser; the tail gas storage device is communicated with the first connecting pipe on the interception side of the membrane separation assembly. The continuous purification of the TMS is realized, the energy consumption is reduced, and the purity is improved to an electronic grade.
Owner:SUZHOU JINHONG GAS CO LTD

Tetramethylsilane filling system

The utility model discloses a tetramethylsilane filling system which comprises a product storage tank provided with a liquid outlet pipe and a liquid inlet pipe; the circulating device comprises a circulating inlet pipe connected with the liquid outlet pipe, a filter connected with the circulating inlet pipe and a circulating outlet pipe connected with the filter, and the circulating outlet pipe is connected with the liquid inlet pipe; the filling tank is connected with the circulating outlet pipe; the control device is used for controlling the filling tank to be communicated with the circulating outlet pipe and closing the communication between the circulating outlet pipe and the liquid inlet pipe; or the circulation outlet pipe is controlled to be communicated with the liquid inlet pipe, and meanwhile communication between the filling tank and the circulation outlet pipe is closed. According to the tetramethylsilane filling system, low-carbon hydrocarbons and particulate matters in the product storage tank can be effectively removed, pollution to products is avoided, the operation mode and the structural unit are simple, and the tetramethylsilane filling system can be used in the subsequent filling tank treatment process only by switching the valve under the condition that new equipment is not additionally built.
Owner:SUZHOU JINHONG GAS CO LTD

Adsorption and purification device for tetramethylsilane mixture

The utility model discloses an adsorption and purification device for a tetramethylsilane mixture, which comprises a vaporizer and further comprises a first-stage adsorption tower, a second-stage adsorption tower, a third-stage adsorption tower and a fourth-stage adsorption tower, the first-stage adsorption tower is an adsorption tower provided with activated carbon and / or a 13X molecular sieve; the second-stage adsorption tower is connected with the first-stage adsorption tower and is used for removing hydrochloric acid and low-carbon alkane; and the third-stage adsorption tower is connected with the second-stage adsorption tower and is used for removing isopentane. The adsorption and purification device disclosed by the utility model can be used for continuously adsorbing raw materials and removing various impurities contained in the raw materials, so that electronic-grade tetramethylsilane with the content of 99.99% is obtained.
Owner:SUZHOU JINHONG GAS CO LTD

Preparation process of low-internal-stress thick nano coating for erosion-resistant low-friction solid lubrication at high temperature

The invention discloses a preparation process of a low-internal-stress thick nano coating for erosion-resistant low-friction solid lubrication at high temperature. The preparation process comprises the following steps: pretreating a matrix; vacuumizing and heating; etching and cleaning Ar ions on the surface of the matrix; starting a rotating cathode or a planar cathode filled with metal target materials such as Ti and Cr or alloy target materials such as TiAl and TiZr, and introducing N2 gas to carry out magnetron reactive sputtering; the method comprises the following steps: starting a hot filament arc gas ion source, introducing Si-containing precursors such as TMS tetramethylsilane, HMDS hexamethyldisilazane and SiH4 silane beside the hot filament arc gas ion source to obtain active Si ion and Si-C ion functional ionic groups, and depositing TiSiCN, CrSiCN and TiAlSiCN multi-element coatings on the surface in the presence of metal ions, Si ions, Si-C ions and nitrogen. According to the method, the silicon-doped multi-element nitride coating is deposited innovatively through the PVD and PECVD mixed vapor deposition technology, the technical problem of collaborative optimization of high temperature, erosion and low friction is solved, and the performance blank of an existing coating under the extreme working condition is filled up.
Owner:SHENZHEN HONGHEFU TECH CO LTD +1

Etching stop layer for reducing RC delay and preparation method thereof

PendingCN121969034AReduce the dielectric constant kReduce RC delayThin membraneDielectric permittivity
The invention discloses an etching stop layer for reducing RC delay and a preparation method thereof, and the preparation method employs a plasma enhanced chemical vapor deposition method to carry out the following deposition steps: S1, depositing a first nitrogen-doped carbon-based material layer on the surface of a dielectric layer, and employing a combination of tetramethylsilane and ammonia gas as a first reaction gas; s2, depositing a second nitrogen-doped carbon-based material layer on the surface of the first nitrogen-doped carbon-based material layer, wherein the adopted second reaction gas is a combination of tetramethylsilane, ammonia gas and propylene; and S3, depositing a third nitrogen-doped carbon-based material layer on the surface of the second nitrogen-doped carbon-based material layer, wherein the adopted third reaction gas is a combination of tetramethylsilane and ammonia gas. The dielectric constant k of the whole NDC barrier layer such as a SiCN thin film can be reduced, and therefore RC delay is reduced.
Owner:CHONGQING XINLIAN MICROELECTRONICS CO LTD

Olefin double-bond superconducting material and preparation method and application thereof

The invention belongs to the technical field of superconducting battery materials, and particularly relates to an olefin double-bond superconducting material and a preparation method and application thereof. The olefin double-bond superconducting material is prepared from the following raw materials in percentage by weight: 5 to 15 percent of polyol, 20 to 35 percent of beta-SiC, 20 to 35 percent of alpha-SiC, 10 to 20 percent of tetramethylsilane, 2 to 5 percent of polydimethylsiloxane and 10 to 25 percent of tetraethoxysilane. The olefin double-bond superconducting material has extremely high carrier conductivity density and mobility, extremely low resistivity and excellent conductivity, and when the olefin double-bond superconducting material is applied to a rechargeable battery, the sectional area of a battery conductive path is widened, the current density is reduced accordingly, the charge attraction capacity of an electrode material is improved accordingly, and the dynamic internal resistance limit is close to zero; the working temperature of the battery is effectively reduced, and the charging-discharging conversion rate and cycle life of the battery are improved.
Owner:NINGBO HONEYCOMB NEW MATERIAL TECH CO LTD

A filtration membrane and a method for producing the same

ActiveCN122321652BMeth-Filtration membrane
The application provides a filter membrane and a preparation method thereof, and the preparation method comprises the following steps: placing a porous filter membrane substrate in an environment containing plasma and a precursor, and performing plasma treatment to obtain the filter membrane; wherein the precursor comprises at least one of hexamethyldisiloxane, perfluorooctyltriethoxysilane, pentane, ethylene, toluene, perfluorohexane, styrene, divinylbenzene, hexamethyldisiloxane, tetramethylsilane, tetraethoxysilane, tetrafluoroethylene, hexafluoropropylene. The filter membrane prepared by the preparation method can significantly reduce the swelling rate in an organic solvent, and simultaneously improve the permeation flux, so that the precise molecular weight cut-off is realized.
Owner:CHINA UNIV OF PETROLEUM (BEIJING) +1

Surface protection process for high-temperature-resistant and high-pressure-resistant bolt

The invention relates to the technical field of bolt manufacturing, in particular to a high-temperature-resistant and high-pressure-resistant bolt surface protection technology which comprises the following steps that after the surface of a high-temperature-resistant and high-pressure-resistant bolt is cleaned, the high-temperature-resistant and high-pressure-resistant bolt is loaded into a vacuum chamber, and argon ion bombardment cleaning is A chromium metal bonding layer is deposited on the surface of the high-temperature-resistant and high-pressure-resistant bolt; keeping a magnetron sputtering tungsten target, introducing acetylene gas into the vacuum chamber, and depositing a layer of gradient transition layer of which the composition is in smooth transition from pure tungsten to tungsten carbide on the surface of the chromium metal bonding layer of the high-temperature-resistant and high-pressure-resistant bolt; depositing a tungsten-silicon co-doped diamond-like functional layer on the gradient transition layer of the high-temperature-resistant and high-pressure-resistant bolt in mixed gas of acetylene and tetramethylsilane; and after deposition is finished, the high-temperature-resistant and high-pressure-resistant bolt is taken out after being cooled. The problems that the bolt is prone to seizure and poor in tolerance under high temperature and high pressure are effectively solved, and the service life of the high-temperature-resistant and high-pressure-resistant bolt is remarkably prolonged.
Owner:FUJIAN HUAGAI MACHINERY MFR

Gasoline additive and preparation method thereof

The gasoline additive is characterized by being obtained by mixing and reacting additive active mother liquor, polyamine, polyether, polyol and alkylated oil, the additive active mother liquor is prepared by the following method; silicon tetrachloride and ice are mixed and react to obtain active silicic acid, and the active silicic acid, tetramethylsilane and alkylated oil are mixed and react to obtain the silicon dioxide. The gasoline additive does not generate heavy metal pollution during combustion, and can save fuel oil and improve the gasoline combustion efficiency at the same time.
Owner:SICHUAN NENGZHIXING FUEL TECH CO LTD

Tetramethylsilane purification mechanism

ActiveCN222173318Ueasy to cleanReduce the situation of getting stuck in the filter holeStationary filtering element filtersStructural engineeringProcess engineering
The utility model relates to a purification mechanism of tetramethylsilane, which comprises a box body, a fixed filter assembly is installed on the box body, a stirring and disassembling assembly is installed on the box body, the fixed filter assembly comprises moving blocks which are connected with two sides of the inner wall of the box body in a sliding mode, the opposite sides of the two moving blocks are connected with a first filter plate in a sliding mode, and the first filter plate is connected with a second filter plate in a sliding mode. And mounting frames are fixedly mounted on the two sides of the box body correspondingly, and sliding plates are slidably connected into the two mounting frames correspondingly. According to the purification mechanism for tetramethylsilane, the fixed filtering assembly is installed, after a first filtering plate is used for a long time, the first filtering plate can be detached from the interior of the box body, the first filtering plate can be conveniently cleaned, the situation that substance residues are clamped in filtering holes is reduced, the filtering and purification quality of the device is improved, and the service life of the device is prolonged. And by installing the stirring and disassembling assembly, the raw materials can be stirred and filtered, the raw material filtering efficiency is improved, and the purification efficiency of the device is conveniently improved.
Owner:SUIZHOU XINXING NEW MATERIALS CO LTD

Rectification and purification method of tetramethylsilane

The invention discloses a rectification purification method of tetramethylsilane, which comprises the following steps: (a) adding a low-boiling-point substance of methyl chlorosilane synthesized by a direct method into water, hydrolyzing, adding into a first rectification tower after hydrolysis, carrying out rectification heavy component removal treatment, introducing the obtained product into a condenser from the tower top, then entering a second rectification tower, and carrying out primary light component removal treatment to obtain a low-boiling-point substance; a rectification treatment product is obtained; (b) carrying out adsorption treatment on the rectification treatment product in the step (a) to obtain an adsorption treatment product after the adsorption is completed; and (c) carrying out liquefaction treatment on an adsorption treatment product in the step (b) to obtain liquid-phase tetramethylsilane, then feeding the liquid-phase tetramethylsilane into a third rectifying tower, and carrying out secondary light component removal treatment to obtain the high-purity tetramethylsilane. According to the method, most impurities in the tetramethylsilane can be removed, so that the purity of the obtained tetramethylsilane is remarkably improved, the application field of the tetramethylsilane is expanded, and the method has a good application prospect.
Owner:WUHAN XINGUI TECH QIANJIANG CO LTD