The invention discloses a preparation process of a low-internal-stress thick nano
coating for
erosion-resistant low-friction
solid lubrication at high temperature. The preparation process comprises the following steps: pretreating a matrix; vacuumizing and heating;
etching and cleaning Ar ions on the surface of the matrix; starting a rotating
cathode or a planar
cathode filled with
metal target materials such as Ti and Cr or
alloy target materials such as TiAl and TiZr, and introducing N2 gas to carry out magnetron reactive
sputtering; the method comprises the following steps: starting a
hot filament arc gas
ion source, introducing Si-containing precursors such as TMS
tetramethylsilane, HMDS hexamethyldisilazane and SiH4
silane beside the
hot filament arc gas
ion source to obtain active Si
ion and Si-C ion functional ionic groups, and depositing TiSiCN, CrSiCN and TiAlSiCN multi-element coatings on the surface in the presence of
metal ions, Si ions, Si-C ions and
nitrogen. According to the method, the
silicon-doped multi-element
nitride coating is deposited innovatively through the PVD and PECVD mixed vapor deposition technology, the technical problem of collaborative optimization of high temperature,
erosion and
low friction is solved, and the performance blank of an existing
coating under the extreme working condition is filled up.