Methods for producing layered nanocarbon structures placing a workpiece in a working chamber, applying a vacuum to the chamber,
processing the workpiece surface with gas ions, applying a material sublayer to the workpiece surface, depositing carbon ions from a
carbon plasma on the workpiece surface to apply an
amorphous diamond-like sp3
carbon coating layer on the workpiece surface. The methods include irradiating the growing
carbon coating with accelerated ions of an
inert gas at a first energy range to apply a
graphite sp2
carbon coating layer on the sp3 carbon
coating layer and irradiating the growing carbon
coating with accelerated ions of the
inert gas at a second energy range, different from the first energy range, to apply a linear chain and
polymer sp1 carbon
coating layer on the sp2 carbon coating layer.