Aluminum-containing diamond-like carbon film and method for preparing same

A technology of diamond and carbon film, applied in metal material coating process, ion implantation plating, coating, etc., can solve problems such as internal stress of friction coefficient, limit the thickness of deposited film, film peeling, etc., and achieve the surface quality of the coating Excellent, great application value, low cost effect

Inactive Publication Date: 2010-03-10
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the deposition of diamond-like carbon film materials with low friction coefficient and high bonding strength on the surface of various materials has always been troubled by internal stress, and its internal stress

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] a. Clean the stainless steel sheet ultrasonically, after drying, fix it on the workpiece frame in the vacuum chamber of the magnetron sputtering coating equipment, keep the target base distance at 150mm, and then vacuumize, pre-vacuumize to 4×10 -3 Pa;

[0021] b. Pass argon gas into the vacuum chamber, keep the air pressure at 1Pa, turn on the substrate bias power supply and apply a bias voltage of -1000V on the surface of the sample, and perform glow cleaning and activation on the surface of the sample for 20 minutes;

[0022] c. Pass the mixed gas of methane and argon into the vacuum chamber, the total pressure in the vacuum chamber is 1Pa, and the partial pressure of methane gas is 0.5Pa;

[0023] d. Adjust the substrate bias to -500V, and the pulse duty cycle to 50%; turn on the magnetron sputtering power supply to deposit an aluminum-containing diamond-like carbon film on the surface of the sample, and keep the current density of the sputtering target at 8mA / mm 2...

Embodiment 2

[0027] a. Clean the stainless steel sheet ultrasonically, after drying, fix it on the workpiece frame in the vacuum chamber of the magnetron sputtering coating equipment, keep the target base distance at 150mm, and then vacuumize, pre-vacuumize to 4×10 -3 Pa;

[0028] b. Pass argon gas into the vacuum chamber, keep the air pressure at 1Pa, turn on the substrate bias power supply and apply a bias voltage of -1000V on the surface of the sample, and perform glow cleaning and activation on the surface of the sample for 20 minutes;

[0029] c. Pass the mixed gas of methane and argon into the vacuum chamber, and the total pressure in the vacuum chamber is 1Pa;

[0030] d. Adjust the substrate bias to -500V, and the pulse duty cycle to 50%; then turn on the magnetron sputtering power supply to deposit an aluminum-containing diamond-like carbon film on the surface of the sample, and keep the current density of the sputtering target at 8mA / mm 2 ; Using gradient transition, the partial...

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Abstract

The invention discloses an aluminum-containing diamond-like carbon film and a method for preparing the same. The film adopts a diamond-like structure and comprises 3 to 20 percent of metal aluminum and the balance of carbon; the metal aluminum is dispersed in the amorphous diamond-like carbon film in an atomic state and is not bonded with the carbon, and the thickness of the film is between 500 and 5,000 nanometers. The aluminum containing diamond-like carbon film has the advantages of lower internal stress, higher hardness, good film-substrate bonding force and good abrasion proof property.

Description

technical field [0001] The invention relates to an aluminum-containing diamond-like carbon film and a preparation method thereof. Background technique [0002] Diamond-like carbon (Diamond-like carbon, referred to as DLC) film has high hardness, low friction coefficient, high wear resistance and good chemical stability, thermal conductivity, electrical insulation, light transmission and biocompatibility, as New functional thin film materials have broad application prospects in mechanical wear-resistant coatings, optical windows, microelectromechanical systems (MEMS), etc. However, the deposition of diamond-like carbon film materials with low friction coefficient and high bonding strength on the surface of various materials has always been troubled by internal stress, and its internal stress can be as high as more than ten GPa, which can easily cause the film to peel off from the substrate during use, and even Exfoliation from the substrate surface during fabrication limits ...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35
Inventor 王立平张广安薛群基
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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