18014results about "Ion implantation coating" patented technology

The invention provides an artificial intelligence-based optical coating quality monitoring method, which comprises the following steps of: 1, acquiring visual image data of the surface of a coating substrate in real time by using a common industrial camera in an optical coating process; 2, preprocessing the collected image data, and extracting visual feature information representing the state of the film layer; 3, inputting the extracted feature information into a pre-trained artificial intelligence analysis model for simulating artificial experience judgment; step 4, outputting an evaluation result of the current coating quality by the artificial intelligence analysis model, wherein the evaluation result comprises identification of film layer uniformity, thickness trend and potential defects; and 5, generating a process adjusting instruction according to the evaluation result, feeding back the process adjusting instruction to a control system of the coating equipment, and dynamically adjusting process parameters to realize closed-loop optimization control.

The invention relates to a multi-layer composite black film and a preparation method thereof. The multi-layer composite black film is formed by sequentially stacking a base material layer, a multi-layer film system and a top covering layer, the multi-layer film system is formed by alternately stacking a plurality of absorption layers and a plurality of oxide layers, the number of the layers is 7-30, an initial layer is an oxide layer, the refractive indexes of the oxide layers are the same (1.4-1.5), the thickness ratio of the oxide layers to the absorption layers is larger than 2, and the thickness ratio of the top covering layer to the absorption layers is larger than 1. And the thicknesses of the two layers are increased and then reduced from the substrate layer to the top covering layer. A buffer layer with gradually changed oxygen content is arranged between the oxide layer and the absorption layer, and both the oxide layer and the top covering layer are made of silicon dioxide. The preparation method comprises the following steps: providing the substrate layer, alternately depositing the absorption layer and the oxide layer by using a magnetron sputtering or electron beam evaporation process to form a multilayer film system, then forming the top covering layer, controlling parameters such as vacuum degree, power, temperature and the like during deposition, and forming the buffer layer in the same cavity. The multilayer composite black film has the inner surface reflectivity of less than 1% and the appearance surface reflectivity of less than 5%, and is simple in structure and low in preparation cost.

The invention discloses a rolling and annealing treatment process for a copper-steel composite strip, and relates to the technical field of material rolling, the process comprises the following steps: selecting a high-purity copper plate and a stainless steel plate, and depositing a nano nickel / graphene composite transition layer through a magnetron sputtering technology; the stainless steel layer is promoted to deform through front-section low-speed high-pressure rolling, and the copper layer interface bonding force is improved through rear-section high-speed low-pressure rolling; performing short-time local annealing by using a high-frequency induction coil; honeycomb-shaped micro-pits are formed in the stainless steel surface through the laser micro-texture technology, and the interface bonding force is improved in combination with the nano-nickel / graphene layer. Copper layer hardening is eliminated through low-temperature annealing, stainless steel recrystallization is promoted through medium-temperature annealing, and a nanometer precipitated phase is fixed through rapid water cooling; the heating rate is controlled, and nitrogen-hydrogen mixed gas is used for preventing oxidation; the rolling process and the annealing process are seamlessly connected, and the temperature, the stress and the atmosphere are detected in real time through an online monitoring system. The mechanical property, the corrosion resistance and the machining stability of the copper-steel composite strip are remarkably improved.

The invention relates to an optical fiber hydrogen sensor based on a silver film-nanowire hole array structure and a preparation method thereof in the field of photochemical sensors. The optical fiber hydrogen sensor comprises a multimode optical fiber, and a sensing area is formed on the multimode optical fiber; the sensing area is formed by stripping a coating layer with a preset length from the multimode optical fiber, thinning the optical fiber in the area, plating a silver film on the surface of the thinned optical fiber, and adsorbing a nanowire hole array structure which is sequentially and vertically arranged on the surface of the silver film in a liquid level self-assembly manner; the nanowire hole array is of a metal-medium-metal (MIM) structure, a gold-palladium nanowire array is arranged at the bottom, an intermediate medium layer is made of aluminum oxide, and a silver film with a hole array in any shape is arranged at the top. When light is transmitted to a sensing area from a fiber core of the multimode optical fiber, the light and a metal silver film can excite a surface plasmon resonance (SPR) effect, meanwhile, an MIM structure formed by a gold-palladium nanowire, an aluminum oxide dielectric layer and a porous silver film serves as an optical coupling antenna through a local surface plasmon resonance (LSPR) effect at the edge of a top hole, and the optical coupling antenna is used for transmitting the light to the sensing area. Light energy is efficiently converged and excited in an extremely bound gap plasmon (Gap Plasmon) in an aluminum oxide dielectric layer, so that far-unconventional electromagnetic field enhancement is generated in a sensing core area, and the sensitivity of the sensor is greatly improved.

The invention relates to the technical field of evaporation process monitoring, and discloses an evaporation process monitoring method and system based on data analysis and a medium. The method comprises the following steps: acquiring data of a sensor in an evaporation cavity, and performing filtering standardization treatment to obtain process parameter data; performing time-frequency analysis and correlation calculation on the process parameter data, and extracting key parameter features; setting a dynamic threshold based on the key parameter characteristics, and calculating a deviation degree to obtain an abnormal index; and adjusting the radio frequency power and the substrate temperature in real time according to the abnormal index, and generating a control scheme. According to the method, the complex incidence relation among the multi-source sensing data can be analyzed in real time, the abnormal mode can be recognized in time, potential problems can be predicted before the abnormal condition is obviously expressed, the technological parameters are automatically adjusted through the intelligent control strategy, and therefore the technical defects that in the prior art, response of a monitoring system is lagged, and the technological parameters cannot be adjusted in real time are overcome; and the stability of the evaporation process and the product quality consistency are improved.

The invention relates to a preparation method of a high-purity manganese target material, which belongs to the technical field of metallurgy, and comprises the following steps: firstly, drying manganese powder, then pouring the manganese powder into a graphite mold, and putting the graphite mold into a Joule hot sintering furnace for sintering, during sintering, a strategy of two-stage prepressing and four-stage gradient pressing of prepressing forming, low-pressure degassing, medium-pressure densification and high-pressure sintering is implemented, and low-temperature sintering is realized; through two-stage cooling after sintering, stress and cracking in the cooling process are avoided; by accurately controlling the temperature and time of each stage, the defects that high heating temperature and long heat preservation time are needed are overcome. The production process is integrally simplified, the internal stress is controlled to be effectively and gradually released at different temperatures, the porosity is reduced, and sintering cracking is avoided; by optimizing the sintering atmosphere of each stage, the influence of impurities such as oxygen in the air on the purity of the sintered manganese target material is avoided, and the purpose of preparing the high-purity manganese target material with low energy consumption, high efficiency and high quality is achieved.

The invention relates to the technical field of aluminum-based thin film preparation, and discloses an aluminum-based thin film uniform deposition system based on magnetron sputtering. The system comprises a substrate state detection module, a magnetic field dynamic regulation and control module, a sputtering power regulation module, a deposition process monitoring module and a central control terminal. The substrate state detection module collects and transmits surface flatness data of the substrate in real time, and the central control terminal carries out visual display. The magnetic field dynamic regulation and control module obtains magnetic field intensity correction through a magnetic field gradient algorithm according to the deviation value of the real-time flatness parameter and the standard parameter and sends the magnetic field intensity correction to the sputtering power regulation module. And the sputtering power adjusting module adjusts the sputtering rate of the target material accordingly. The deposition process monitoring module tracks the adjusting process, evaluates the dynamic response performance, generates a stable or fluctuation signal and sends the stable or fluctuation signal to the central control terminal, and the central control terminal triggers sound-light alarm when receiving the fluctuation signal. The system can improve the deposition uniformity and process stability of the aluminum-based thin film.

The invention discloses an optical lens coating thickness accurate regulation and control and intelligent processing method and system, and belongs to the technical field of automatic process control, and the method comprises the steps: building a technological process digital twin model based on an optical lens three-dimensional model and a target film system structure, carrying out the virtual coating simulation, and generating an ideal thickness growth curve; reflection spectrum data of a plurality of spectrum reflection probes preset in the coating cavity are collected for synchronous inversion calculation, a real-time thickness distribution diagram is generated, and the real-time thickness distribution diagram is compared with an ideal thickness growth curve to generate a film thickness deviation feature vector; and a technological process digital twinborn model is input to carry out compensation strategy deduction to generate a dynamic technological compensation instruction, and a control signal is sent to a coating equipment execution mechanism to regulate and control coating physical parameters. According to the method, the technological process digital twinborn model is combined with closed-loop control of multi-point real-time monitoring, and dynamic compensation and coordinated regulation and control of space distribution and time rate of film thickness growth can be realized, so that the precision and uniformity of film thickness control are improved.

The invention discloses a composite optical film with a polarization function, a preparation method and application thereof. The composite optical film comprises a transparent substrate layer, and a buffer layer, an oriented calcite crystal layer and an anti-reflection layer which are laminated on one side of the transparent substrate layer. Wherein the oriented calcite crystal layer is obtained by coating a superparamagnetic modified calcite crystal composite material suspension on the surface of the buffer layer, inducing optical axis oriented arrangement through a magnetic field and performing UV curing; the buffer layer is obtained by co-extruding a cycloolefin polymer and a polyurethane acrylate mixture, and a thermal expansion coefficient transition system is formed; the anti-reflection layer is composed of nano-porous titanium dioxide with the refractive index changing from 1.8 to 2.3 in a gradient mode, and a refractive index gradient structure is formed. According to the composite optical film, the polarization efficiency and the light transmittance of the composite optical film are improved and the industrial stability is improved through the design of the polarization functional layer in which the calcite nanocrystals are directionally arranged under the induction of a magnetic field and in combination with the gradient refractive index scattering layer.

The invention discloses a gradient gradual change type powder material as well as a preparation method and application thereof. The gradient gradual change type powder material comprises a non-metal core, a transition layer, a gradual change layer and a modification layer. The gradient powder material provided by the invention shows excellent strength-ductility synergistic effect, high fracture toughness and enhanced fatigue, wear and corrosion resistance, is good in metal wettability, can effectively reinforce a metal matrix and improve the performance of the metal matrix, can also be well dispersed in resin, and can be applied to the field of metal materials. The gradient powder material disclosed by the invention has a wide application prospect, and can be applied to the fields of heat dissipation of electronic devices, high-speed cutting tools, grinding material and grinding tool materials, high-temperature protection materials and the like.

The invention relates to a magnetron sputtering system and a coating method thereof, the system comprises a pair of twin silicon target material and aluminum target material which are arranged in a coating chamber, the aluminum target material is located in the middle of a horizontal line where the twin silicon target material is located, the twin silicon target material is electrically connected with a medium-frequency power supply, and the aluminum target material is electrically connected with a direct-current power supply. According to the structural design, on one hand, the uniform deposition range can be expanded, the deposition difference of wide workpieces can be reduced, and the whole surface insulation consistency can be ensured, and on the other hand, the aluminum target realizes uniform doping of the aluminum element and stable control of the content, so that the toughness and binding force of the coating are improved, the influence on insulation is avoided, and the comprehensive performance of the non-conductive coating is remarkably improved.

The invention discloses a preparation method of a high-homogeneity and high-stability copper target material, which comprises the following steps of: 1, cutting off a riser of a high-purity copper cast ingot, and turning to obtain a pretreated high-purity copper cast ingot; secondly, the pretreated high-purity copper ingot is heated and subjected to heat preservation in a furnace and then forged to obtain a forged copper blank; thirdly, the forged copper blank is subjected to room-temperature circumferential rolling treatment, and a rolled copper blank is obtained; fourthly, the rolled copper blank is subjected to two-stage annealing heat treatment, and a copper target blank is obtained; and 5, machining, cleaning and packaging to obtain the high-homogeneity and high-stability copper target material. According to the method, the high-purity copper cast ingot is sequentially subjected to pretreatment, forging, room-temperature circumferential rolling, two-stage annealing, machining, cleaning and packaging, preparation of the high-quality copper target material which is uniform in structure, controllable in crystal orientation and excellent in heat stability is achieved, the sputter coating quality is improved, and the method is easy to operate, high in controllability, high in production efficiency and suitable for industrial production. Meanwhile, raw materials and production cost are saved, and the method is suitable for large-scale popularization and application.

The invention discloses a far-infrared band optical thin film, a preparation method thereof and an optical element, and relates to a far-infrared band optical thin film technology, the far-infrared band optical thin film comprises a substrate, a front band-pass film system and a back cut-off film system; wherein the front band-pass film system is located on one side of the substrate, and the back cut-off film system is located on the other side of the substrate; the far infrared band optical thin film is prepared by alternately depositing lead telluride serving as a high-refractive-index thin film material and cadmium telluride serving as a low-refractive-index thin film material. The far infrared band optical thin film can cut off the band with the wavelength smaller than 4 microns, and the average transmittance is 0.23%; anti-reflection is carried out at the wave band of 5-50 microns; the moisture-resistant performance is excellent.

The invention belongs to the technical field of thin film capacitors, and particularly relates to a chemical grafting modified polypropylene capacitor film material and a preparation method and application thereof. According to the preparation method of the chemical grafting modified polypropylene capacitor film material, provided by the invention, diethylenetriamine ethyl acrylate with a plurality of specific groups such as amino groups and carboxyl groups and unsaturated double bonds is synthesized through esterification reaction, and the diethylenetriamine ethyl acrylate is introduced into a polypropylene material through chemical grafting to obtain chemical grafting modified polypropylene; the prepared polypropylene capacitor film material has the excellent properties of good compatibility, difficulty in film breakage, capability of adsorbing and removing residual moisture, difficulty in oxidation corrosion, excellent breakdown resistance and the like, and the preparation method is a preparation method of the high-performance polypropylene capacitor film material; therefore, the technical problem that a polypropylene capacitor film material prepared in the prior art is low in performance is solved.

The invention belongs to the technical field of vacuum coating, and particularly relates to a vacuum coating machine electron gun control method and system.The control method comprises the steps that in the coating process, key real-time parameters reflecting the working state of an electron gun and the evaporation process are continuously collected and fused, and the current coating state is evaluated in real time based on the key real-time parameters; and in combination with preset coating process requirements, an electron beam control target instruction set of a next control period is dynamically generated through a built-in decision mechanism and is sent to a power controller, a focusing coil controller and a scanning coil controller of the electron gun, and the electron gun is driven to adjust the power output, the focusing state and the scanning motion of the electron gun in real time. Through accurate and stable control of the evaporation rate, material characteristic changes are effectively coped with through a strong closed loop of power and the evaporation rate; the dynamically planned scanning path can actively compensate the non-uniformity of the thermal field of the crucible, and beam spot energy distribution is optimized in combination with focusing adjustment, so that the uniformity of the thermal field is remarkably improved.

The present invention provides a vapor deposition device, comprising: a reaction chamber; a gas injection mechanism, located at the top of the reaction chamber; a susceptor, disposed the reaction chamber, a reaction zone being formed above the susceptor; a rotating shaft, connected to the susceptor; a shielding member, positioned in the reaction chamber and surrounding an inner wall of the reaction chamber, the shielding member comprising an isolation wall near the reaction zone, the isolation wall and the gas injection mechanism forming an enclosed spatial region that covers the reaction zone, a radial dimension of the spatial region gradually increasing from top to bottom, and an outer diameter of the lowest end of the shielding member matching an inner diameter of the reaction chamber; purge channels, distributed on the isolation wall, passing through the isolation wall and in communication with the spatial region, so as to allow a purge gas to be introduced into the spatial region. The vapor deposition device provided by the present invention can improve the production efficiency and quality of materials grown by the device, and extend the maintenance cycle of the reaction chamber.

The invention provides a positive active material with a lithium fluoride layer as well as a preparation method and application of the positive active material. The positive active material comprises a high-nickel ternary positive material and the lithium fluoride layer covering the surface of the high-nickel ternary positive material, and the thickness of the lithium fluoride layer is 10-100 nm. In the positive electrode active material with the lithium fluoride layer, the surface of the high-nickel ternary positive electrode material is covered with the lithium fluoride layer, and lithium fluoride has excellent chemical stability, conductivity and lithium ion transmission rate, so that the positive electrode active material is coated with the lithium fluoride layer with the thickness of 10-100nm, thereby ensuring that the positive electrode active material has relatively good ion transmission performance; the internal strain and phase change of the high-nickel ternary positive electrode material are inhibited, and the risk that the high-nickel ternary positive electrode material generates cracks is reduced; the interface performance is improved, and the active material is isolated from the electrolyte, so that the risk of side reaction between the high-nickel ternary positive electrode material and the electrolyte is reduced, and the high-nickel ternary positive electrode material is prevented from being dissolved and delithiated.

The invention relates to the technical field of battery current collectors, in particular to a high-strength composite current collector and a preparation method thereof.The preparation method of the composite aluminum foil current collector comprises the following steps that S1, a base material roll film is modified on a film stretching line so as to improve the tensile strength and reduce the ductility; the base material roll film is a polymer base material roll film for preparing the composite current collector; s2, copper plating or aluminum plating is conducted on the surface of the modified base material roll film; and S3, forming the high-strength composite current collector coiled material. Through base material modification, compared with a composite current collector in the prior art, the composite current collector is higher in strength and lower in total elongation under low elongation, the problem that the compactness of a metal layer becomes poor under high elongation is effectively solved, the modified composite current collector is not prone to being excessively stretched during subsequent procedure operation, and if the modified composite current collector is excessively stretched, the modified composite current collector can be directly fractured, so that the service life of the composite current collector is prolonged. The problem that the compactness of the metal layer is poor but not easy to find due to excessive stretching and non-fracture is solved, and the operation difficulty of procedures such as downstream coating is reduced.

The invention relates to a laser processing method for a coated armor structure of wear-resistant super-hydrophobic aluminum bronze, which comprises the following steps of: preparing an aluminum bronze workpiece, polishing and cleaning, depositing a ceramic wear-resistant film on the surface of the workpiece by adopting pulse laser, and etching the ceramic wear-resistant film by adopting femtosecond laser, so as to obtain a coated armor structure of the wear-resistant super-hydrophobic aluminum bronze. And then chemical modification of the wear-resistant armor structure is completed through heat treatment, chemical modification of the micro-nano surface structure is completed, and the wear-resistant super-hydrophobic aluminum bronze is obtained. The wear-resistant ceramic film and the wear-resistant armor structure can resist wear together, double guarantee is provided for the internal hydrophobic microstructure, the super-hydrophobic wear resistance of the surface of a component in underwater equipment can be improved, the service life of the component can be prolonged, and the problem of marine organism corrosion is solved.

The invention discloses a method and system for detecting the coating quality of a coating machine, and relates to the technical field of industrial automation and intelligent detection. Spectral reflectivity data and film layer thickness oscillation frequency data are collected and preprocessed, coating quality characteristics are extracted, a quality classification model and a thickness prediction model are constructed, and the coating quality is detected. And outputting a coating quality classification result, a quality confidence coefficient, a thickness prediction value and a prediction error interval, performing classification judgment and thickness judgment, formulating a corresponding compensation mechanism, obtaining a real-time risk index, synchronously performing graded early warning and time-space correlation early warning, and designing a three-dimensional visual board to integrate key indexes. Through collaborative analysis of multi-modal data fusion and an intelligent algorithm, online real-time detection and dynamic regulation and control of the coating quality are realized, the defect recognition sensitivity and the process abnormality response efficiency are remarkably improved while high-precision optical performance and thickness uniformity are ensured, and the method is suitable for large-scale popularization and application. And the production yield is effectively optimized, and the stability and controllability of the coating process are guaranteed.

The invention relates to the technical field of composite material surface magnetron sputtering coating, and particularly discloses a composite material surface magnetron sputtering coating process and method, and the composite material surface magnetron sputtering coating process comprises the steps of S1, surface treatment, S2, process equipment condition setting, S3, intelligent control, S4, multi-target co-sputtering process, S5, post-treatment and S6, surface topography detection. Through the multi-target co-sputtering technology, multiple layers of composite coatings such as TiN, CrN, Al2O3, ITO and other different functional layers can be deposited on the surface of the composite material, the base material is endowed with the properties such as abrasion resistance, corrosion resistance, insulation and electric conduction, and the comprehensive performance of the coatings is further improved through the synergistic effect of all the layers; the intelligent control system monitors and adjusts sputtering parameters in real time, so that the compactness and uniformity of the film are ensured, the defect rate of the film is reduced, the protection effect of a coating is enhanced, the service life of the coating is prolonged, key parameters such as sputtering power and temperature can be accurately adjusted, fluctuation caused by manual intervention is reduced, and the service life of the coating is prolonged. And the result of each process operation has high consistency.

The invention belongs to the technical field of polymer composite materials, and particularly relates to an oil-resistant interior material. The material comprises a porous base material layer, a fluorine-containing polymer and organic silicon resin blended oil-resistant functional layer and a micro-nano structure layer with a periodic micro-bulge array, surface modified nanoparticles are distributed in the functional layer in a gradient manner, and the micro-bulge surface is covered with a perfluoropolyether / fluorinated silicon dioxide composite coating; through a synergistic effect of a low-surface-energy oleophobic interface formed through chemical bonding and curing and a micro-structure capillary lifting effect, anti-permeation barrier of high-viscosity grease is realized, and meanwhile, mechanical wear resistance and thermal stability are improved by virtue of a nano-particle enhanced cross-linked network; and continuous imprinting and an ultraviolet-thermal dual-curing process are combined to achieve high-efficiency manufacturing with zero solvent residue, and finally the interior material with long-acting oil resistance, high environmental tolerance and industrial mass production feasibility is obtained.

The invention belongs to the field of materials, and particularly relates to a composite thermal interface material and a preparation method thereof. The preparation method comprises the following steps: plating non-reactive metal, non-reactive metal carbide or non-reactive ceramic on the surface of diamond micro powder, inducing lattice defects on the surface of a plating layer and alloying a local interface by combining a mechanical force field, and defoaming to obtain the composite thermal interface material. The composite thermal interface material has high thermal conductivity and long-term stability, and the contradiction between excessive alloying of a traditional reactive coating and high interface thermal resistance of a non-reactive coating is solved. The method is particularly suitable for the field of thermal management of high-end electronic devices such as 5G chips and power modules.

The invention discloses a nuclear zirconium alloy cladding high-temperature oxidation resistant composite coating and a preparation method thereof, and belongs to the technical field of nuclear zirconium alloy coatings. According to the preparation method disclosed by the invention, through component gradient structure design, Cr ion pretreatment activation, deposition of a pure Cr inner coating, deposition of a Cr70Al30 intermediate coating and deposition of a Cr50Al50 outer coating are sequentially carried out on the surface of a nuclear zirconium alloy cladding, and the Cr-Cr70Al30-Cr50Al50 composite coating zirconium alloy cladding with a three-layer structure is obtained. According to the method, outward migration of the Al element is effectively limited while the excellent anti-oxidation characteristics of the Cr and Al elements are fully utilized, the coating has the excellent high-temperature oxidation performance, and the requirement for the service performance of the surface coating of the zirconium alloy cladding at the extremely high temperature is met.

The invention provides passivated perfluoroether elastomer rubber as well as a preparation method and application thereof. The passivated perfluoroether elastomer rubber is prepared by sputtering an yttrium oxide passivation layer on the surface of perfluoroether elastomer rubber. The preparation method comprises the following steps: placing the perfluoroether elastomer rubber in a vacuum sputtering cavity, and carrying out sputtering treatment by adopting an yttrium target material to form an yttrium oxide passivation layer with the thickness of 10-100 nm so as to obtain passivated perfluoroether elastomer rubber; and carrying out annealing treatment on the passivated perfluoroether elastomer rubber to eliminate surface stress, and then cleaning and drying for later use. The passivated perfluoroether elastomer rubber is applied to the etching process in the semiconductor manufacturing process, the plasma etching resistance of a perfluoroether elastomer rubber product can be effectively improved by sputtering the yttrium oxide passivation layer, and meanwhile the lubricating performance of the perfluoroether elastomer rubber product is improved.

The invention discloses a partitioned multifunctional metal double-cavity vacuum coating process and system, and belongs to the technical field of material surface treatment. The process comprises the steps of base material pretreatment, double-cavity preparation, vacuum inspection, first cavity bottom layer deposition, vacuum transfer, second cavity functional layer deposition and cooling, the double cavities are provided with corresponding target materials respectively, and parallel operation and vacuum seamless transfer are supported; the system comprises double coating cavities, a vacuum transmission channel, a vacuum acquisition and control module, a coating deposition module, a workpiece bearing module and a process parameter regulation and control module, and each of the double cavities is provided with a multi-target mounting rack and carries a real-time monitoring unit and an intelligent control system. Integrated preparation of the composite film layer and synchronous production of multifunctional workpieces are achieved, operation gaps are eliminated, the compactness and adhesive force of the film layer are improved, parameter deviation and the reject ratio are reduced, and batch production requirements are met.

The invention relates to the technical field of electrochromism coating, in particular to an electrochromism device coating process and method, and the electrochromism device coating process comprises the following steps: step 1, substrate pretreatment: cleaning attachments on the surface of a flexible substrate through ultrasonic cleaning and plasma treatment; step 2, conducting layer deposition treatment: depositing an indium tin oxide (ITO) conducting layer on the substrate at the deposition temperature of 100-380 DEG C, the thickness of 200-350 nm and the vacuum degree of less than or equal to 10 <-5 > Pa; step 3, electrochromic layer deposition treatment: sequentially depositing a tungsten oxide (WO3) layer and a nickel oxide (NiO) layer through a magnetron sputtering process, and controlling the film thickness ratio of NiO to WO3 to enable the ratio of NiO / W to be 0.25-0.357; 4, annealing treatment is conducted, specifically, annealing is conducted for the first time at the temperature of 200-500 DEG C, and the annealing time is 200-300 seconds; and secondary annealing is conducted, specifically, annealing is conducted at the temperature of 400 DEG C, and the annealing time ranges from 200 seconds to 800 seconds. The effect of improving the yellow ground color of the electrochromic device is achieved.

The invention relates to the technical field of anti-oxidation coatings, and particularly discloses a tantalum-tungsten alloy anti-oxidation coating and a preparation process thereof. The tantalum-tungsten alloy anti-oxidation coating comprises a transition layer, an inner layer, a barrier layer and an outer layer which are stacked in sequence, the transition layer is prepared from the following raw materials: an Ir target, a Ta target and an Re target are adopted for co-sputtering; the inner layer is prepared from the following raw materials in parts by mass: Si, MoSi2, Y and Ta-W alloy powder; the barrier layer is prepared from the following raw materials in parts by mass: Al2O3, Yb2O3 and 3YZrO2; the outer layer is prepared from the following raw materials in parts by mass: a compound: Yb2O3, La2O3, Gd2O3, SiC and B4C; and the multi-element borides comprise ZrB2 and HfB2. The tantalum-tungsten alloy anti-oxidation coating prepared in the invention has relatively good high-temperature oxidation resistance.

The invention relates to a three-waveband medium-long wave infrared optical filter and a preparation method, the three-waveband medium-long wave infrared optical filter comprises a front film system, a substrate and a back film system, and the substrate is located between the front film system and the back film system; the front film system is formed by alternately overlapping germanium layers and zinc selenide film layers; and the back film system is formed by alternately overlapping germanium layers and zinc selenide film layers. According to the invention, the light energy of three wave bands of 3780-4000 nm, 4500-4900 nm and 7850-9500 nm is improved, the luminous flux of other wave bands is well inhibited, the technical problem of infrared filtering windows in some special infrared spectrum detection systems is solved, and a new scheme is provided for the application of the infrared spectrum detection systems.

The invention discloses a TiSiN / TiBC multilayer hydrogen-resistant wear-resistant coating as well as a preparation method and application thereof, and belongs to the technical field of material preparation. The TiSiN / TiBC multi-layer structure composite hydrogen-resistant wear-resistant coating is prepared on the surface of the steel substrate through the high-frequency pulse magnetron sputtering technology, the middle transition layer is designed between the steel substrate and the hydrogen-resistant coating, and the transition layer has good toughness and the thermal expansion coefficient (8 * 10 <-6 >-12 * 10 <-6 > / DEG C) matched with the substrate; the residual stress between the coating and the steel substrate is effectively reduced, the fracture toughness and binding force of the hydrogen-resistant coating are improved, the binding force of the coating is improved, and then the wear resistance of the coating is remarkably improved. And meanwhile, a large number of vacancy bonds such as Si-bonds, B-bonds, C-bonds and N-bonds contained in the hydrogen-resistant coating can be used for capturing hydrogen atoms, so that the capturing capacity on the hydrogen atoms is improved, the permeation effect of hydrogen is further inhibited, and the hydrogen-resistant efficiency of the coating is remarkably improved.