7936 results about "Foreign matter" patented technology

A substrate processing apparatus and a method for manufacturing a semiconductor device whereby foreign matter can be prevented from being adsorbed on the substrate, by suppressing agitation of foreign matter present in the processing chamber. The substrate processing apparatus comprises a processing chamber for processing a substrate; a processing gas feeding line for feeding a processing gas into the processing chamber; an inert gas feeding line for feeding an inert gas into the processing chamber; an inert gas vent line provided in the inert gas feeding line, for exhausting the inert gas fed into the inert gas feeding line without feeding the inert gas into the processing chamber; a first valve provided in the inert gas feeding line, on a downstream side of a part where the inert gas vent line is provided in the inert gas feeding line; a second valve provided in the inert gas vent line; and an exhaust line that exhausts an inside of the processing chamber.

A primary device for inductive power transfer to a secondary device is disclosed. The primary device includes a primary coil, the primary device being configured to (i) operate in a first mode during which the primary coil transfers power through inductive coupling to the secondary device, and (ii) operate in a second mode during which a foreign object is detected. The primary device further includes a primary controller configured to operate the primary coil (i) using a first frequency during the first mode, and (ii) using a second frequency during the second mode. A method to detect a foreign object which is in proximity of an inductively coupled environment of a primary device is also disclosed.

An etching apparatus using a neutral beam includes an electron emission unit to convert an ion beam, extracted from plasma by a plurality of grids, into a neutral beam by colliding the ion beam with electrons to prevent the ion beam from physically colliding with the electron emission unit, thus preventing the damage to a neutralization unit and generation of foreign substances with a simple structure. Further, the etching apparatus converts the ion beam into the neutral beam at a high neutralizing efficiency without causing directionality and energy losses, and generates a neutral beam having a large area, thus uniformly etching a semiconductor wafer.

A dust collection assembly of a vacuum cleaner is provided. The dust collection assembly includes a dust collecting box, a filter, a flow guide unit, an exhaust guider, and an upper cover. The dust collecting box and the flow guide unit are integrally formed in a single body. The dust collecting box includes a first and second dust collecting spaces for collecting foreign objects. The filter is disposed in the inside of the dust collecting space to primarily filter foreign objects during operation of a cyclone. The flow guide unit guides airflow and has small cyclones integrally formed therein, for secondarily filtering the foreign objects in air. The exhaust guider guides airflow and has a plurality of discharge holes through which air filtered by the small cyclone flows. The upper cover is disposed on the upper side of the exhaust guider.

A dust collection unit for a vacuum cleaner includes a first filtering chamber filtering foreign objects using a cyclone airflow, a separation plate defining a top surface of the first filtering chamber, a filter having a diameter that is reduced as it goes downward in response to airflow rate variation in the first filtering chamber, and a blocking member provided under the filter to prevent the foreign objects filtered in the first filtering chamber from flying.

This disclosure provides apparatuses and methods for detecting foreign objects. An apparatus for detecting a presence of an object comprises at least one radar antenna attached to a wirelessly chargeable vehicle. The at least one radar antenna is configured to transmit a radar signal into a space between a wireless power receiver of the vehicle and a wireless charger as the vehicle moves in a primary direction of movement of the vehicle and receive the radar signal. The apparatus further comprises a radar processing circuit configured to determine a presence of the object in the space based on at least one characteristic of the received radar signal. The radar processing circuit is further configured to provide an indication to receive power from the wireless charger based at least in part on the determining the presence of the object.

A heat dissipation member having variable heat dissipation paths and an LED lighting flood lamp using the same are provided, which can maximize heat dissipation effect by widening an air contact area and making air flow rapidly, seek a waterproof effect and prevention of a scald due to contact with a high-temperature heat dissipation plate, and prevent the reduction of heat dissipation efficiency caused by foreign substances by keeping wings of the heat dissipation plate not exposed to an outside. The LED lighting flood lamp using a heat dissipation member having variable heat dissipation paths includes LEDs, an LED mounting substrate on which the LEDs are mounted, a heat dissipation member having a lower part to which the LED mounting substrate is fixed and provided with the variable heat dissipation paths formed thereon, an upper cap fixed to outer surfaces of heat dissipation plates of the heat dissipation member; a fixing ring member fixed to the lower part of the heat dissipation member to achieve inflow of outside air, and a lower lens fixed to a lower part of the cap.

A dust collection unit for a vacuum cleaner includes a first filtering chamber filtering relatively large foreign objects, a second filtering chamber filtering relatively small foreign objects when air exhausted from the first filtering chamber is introduced into the second filtering chamber, an exhaust member disposed above the filtering chambers to guide airflow, a storing chamber disposed under the filtering chambers to store the foreign objects filtered in the filtering chambers, a sealing member sealing bottoms of the filtering chambers, and a rectifying unit formed on an exhaust side of the second filtering chamber to rectify airflow, thereby reducing noise generated by the airflow.

An object of the present invention is to provide a face-down type jet plating device in which deterioration in plating quality due to minute solid foreign matters derived from a black film etc. is prevented without impairing operativity. The plating device is designed such that a partition (7) is provided between a semiconductor wafer (1) and an anode (5) so that the anode (5) and the semiconductor wafer (7) are separated from each other and a plating tank (100) is divided into a substrate-to-be-plated chamber and an anode chamber.

A washer nozzle removes foreign matter on an image capturing surface of a camera mounted to the outside of a vehicle by supplying washer fluid to the image capturing surface. The washer nozzle includes an inside spray hole and a discharge portion. The inside spray hole sprays the washer fluid introduced into the washer nozzle. The discharge portion receives washer fluid sprayed from the inside spray hole. The discharge portion has a passage extending in a direction intersecting the spray direction of the washer fluid and a discharge port connected to the passage. The discharge portion discharges, from the discharge port, washer fluid sprayed from the inside spray hole along the image capturing surface, while filling the passage with the washer fluid, thereby washing the image capturing surface.

A light guide plate for a surface light-emitting device and a method of manufacturing the same are disclosed wherein the light guide plate is constructed in the form of an optical waveguide including an upper cladding film, core films formed with V-cut grooves, and a lower cladding film, so that since the upper and lower cladding films with a relatively low refractive index are respectively located on upper and lower surfaces of the core films, external foreign substances cannot penetrate into the core films, and the core films are not brought into contact with other components, whereby optical transmission properties are not changed and brightness can be also enhanced, and since the V-cut grooves are formed or both the V-cut grooves and optical waveguides are formed at the same time by means of a simple hot embossing process, the manufacturing costs can be saved.

A device having an improved thermal barrier coating (46) and a process for manufacturing the same. A support structure (28) for retaining a ceramic insulating material (46) on a substrate (16) is formed by the deposition of a support structure material through a patterned masking material (14). The support structure can define cells into which the ceramic insulating material is deposited following removal of the masking material. The masking material may be patterned by known photolithographic techniques (22,24) or by laser etching (48). The support structure (28) may be a composite metal-ceramic material having either discreet layers (30,34) or a graded composition and may be deposited by an electro-desposition process followed by a heat treatment to form a solid state diffusion bond with the substrate. The ceramic filler material may be deposited (44) by the electrophoretic deposition of ceramic particles coated with a bonding material that is subsequently heated to oxidize and to bond the particles together. The support structure may be provided with included walls in order to improve its resistance to foreign object impact damage.

A cyclonic cleaner which includes a cyclone unit enabling a reduction of noise generated from the cyclone unit, and reduction in pressure loss by forming a smooth air flow. The cyclone unit includes a body having an air inlet and an air outlet, a primary cyclone to primarily separate foreign matter from air drawn through the air inlet, a plurality of secondary cyclones to secondarily separate foreign matter from air discharged from the primary cyclone and to discharge the air having the foreign matter removed therefrom through discharge holes of the secondary cyclones, and a noise reduction member positioned in the discharge hole of each secondary cyclone to reduce noise. The cyclone unit also includes a guide plate to allow the air discharged through the discharge holes of the secondary cyclones to be smoothly discharged through the air outlet.

Device for fastening a dust box to a cyclone vacuum cleaner, including an accommodating part having a space in a body of the cyclone vacuum cleaner, a dust box mounted in the accommodating part selectively, for collecting various foreign matters separated from air, and fastening means for moving the dust box in the accommodating part in up and down directions selectively for putting, or taking the dust box into/out of the accommodating part, whereby permitting smooth putting in and taking out the dust box with simple operation, and preventing escape of various foreign matters from the dust box during putting or taking the dust box in/out of the cleaner.

The invention discloses an electrical equipment appearance abnormity detection method based on image comparison. The electrical equipment appearance abnormity detection method includes normalizing an image photographed during current routing inspection, registering the image with an image photographed at the same position and angle during historical routing inspection, continuing region segmentation on the two registered images respectively, extracting a plurality of characteristics of each region image, fusing the characteristics, calculating difference between the corresponding characteristics of the two images, comparing the difference with a preset threshold value and judging whether the image photographed during current routing inspection is abnormal or not. The electrical equipment appearance abnormity detection method has the advantages that abnormity detection of different types of electrical equipment is achieved under the same algorithm framework; the two images photographed at the same stop and angle by a routing inspection robot during different moments are compared, region changes of the images, with the same content, respectively photographed at a current moment and during historical routing inspection are judged, and accordingly, abnormities, such as damage and foreign-matter suspension, of the electrical equipment are detected.

The multiple cyclonic dust collector includes one primary cyclonic dust collecting device with first air inflow unit, the first main body to separate out foreign matters from the inflow air, one dust collecting tub set in the side bottom of the first main body to collect the foreign matters the first main body separates out, one extending unit extending from the bottom of the first main body and set inside the dust collecting tub, and the first air outflow unit for air to flow out of the first main body; and one secondary cyclonic dust collecting device installed outside the primary cyclonic dust collecting device to suck air from the primary cyclonic dust collecting device for secondary dust collection.

In a connecter, the position at which a pointed part of a rocking terminal slidingly contacts an insertion and the position at which the pointed part of the rocking terminal contacts an upper surface of a terminal plate are substantially the same. Therefore, shavings generated by the contact of the insertion and the pointed part or foreign matters adhering to the insertion may adhere to the pointed part of the rocking terminal and be pinched between the pointed part and the terminal plate, whereby no contact is caused by inserting the insertion into the connector. Then, with regard to a connector having a switch part comprising a rocking terminal 51 swayed by inserting an insertion 53 into a main body of the connector and a receiving terminal 52 arranged to contact the rocking terminal, an pointed part 51a is formed on the rocking terminal, and the terminals contact electrically with each other by making the receiving terminal touch a side surface of the pointed part.

The invention discloses a dust collecting device of vacuum cleaner, which comprises the following parts: first separating box with long diameter, second separating box with short diameter to separate the foreign body from the first separating box, commutating part to form at the vent side of second separating box to communicate air flow. The invention can reduce noise in the working course, which improves satisfaction of multi-cyclone flow typed dust collecting device for user.

An image processing system which detects foreign matter on window of a vehicle with high reliability. The system includes an image processor, a first lamp, and a second lamp and when to turn on the first and second lamps is controlled by the image processor. Light from the first lamp passes through the glass. If there are raindrops on the outer surface of the glass, light is reflected by raindrops and light from the second lamp is reflected by a surface of the glass and such reflected light goes through a lens and an optical filter with prescribed optical characteristics to an imaging device.

A robot cleaner is provided that includes a driver configured to move the robot cleaner, and a suction unit configured to suck foreign objects from a surface below the robot cleaner. The robot cleaner also includes a detector configured to capture images of regions disposed in front of the robot cleaner. The robot cleaner further includes a controller configured to control the detector to capture a first image of a region before cleaning, control the detector to capture a second image of the region after cleaning, and generate cleaning result information using the first and second images.

An on-board optical sensor cleaning device includes an on-board camera and a discharge port. The on-board camera is mounted on a vehicle. The on-board camera includes a lens. The discharge port discharges fluid toward the lens. The discharged fluid removes foreign material collected on the lens. The lens and the discharge port are relatively movable. At least one of the lens and the discharge port is movable between a cleaning position, where the discharge port is located proximal to an image capturing range center of the on-board camera, and a non-cleaning position, where the discharge port is located farther from the image capturing range center than the cleaning position.

A carrier for delivering a foreign substance to a target organ which comprises a graft copolymer in which hyaluronic acid is grafted on a polymer composing main chain, wherein the main chain has a part capable of binding to the foreign substance electrostatically, and contains one or more monomer unit having side chain with amino or imino group capable of coupling to hyarulonic acid, which is useful for delivering a foreign substance to a target organ, especially liver.

The present invention relates to a ceramic sheet having uniform quality over its entire surface with a decreased number of defects such as foreign matters and flaws. When the ceramic sheet was divided into sections of 30 mm square or smaller, each divided section has 5 or less defects detected based on an image obtained with a charge coupled device (CCD) camera. The present invention also relates to a method of producing the ceramic sheet. In this method, a green sheet or a calcined sheet mainly including spherical ceramic particles having an average particle diameter of 0.1 to less than 5 μm was used as a spacer. By using this spacer, the green sheet for ceramic sheet slides smoothly on the spacer surface when it shrinks in baking, and the friction resistance between the green sheet for ceramic sheet and the spacer is lowered. In this manner, the method of the present invention can mass-produce the above-described high quality ceramic sheets.

A beam emitted from a first light source is shed on the surface of a rotating wafer to form a beam spot. Scattered light arising from foreign matter and other defects on the surface of the wafer is detected in a plurality of directions and output in the form of a signal. Vertical movement of the wafer surface is detected by using white light or broadband light from a second light source. The position of the beam spot on the wafer surface is corrected in accordance with the information on the detected vertical movement for the purpose of minimizing a coordinate error that may arise from the vertical movement of the wafer surface. Further, the emission direction and emission position of light generated from the first light source are corrected to minimize a coordinate error that may arise from variations of the first light source. These corrections are made to enhance the accuracy of the coordinates of detected foreign matter and other defects. Moreover, the illumination beam spot diameter is corrected to prevent the detection sensitivity and foreign matter coordinate detection error from varying from one apparatus to another.

There is provided a cleaning device for an image-forming device configured so as to be capable of preventing the image quality from deteriorating by being able to prevent the deterioration of the charging state caused by deposits of foreign matter without increasing costs. There is also provided a cleaning member that can make contact with the cleaning target-members. The cleaning member has a portion composed of melamine resin foam for making contact with at least the cleaning target members, and the melamine resin foam has an Asker F hardness of 5 to 25 points and a hardness variation of 5 points or less, and is used on the cleaning target members in a state obtained by heat compression from the original shape. The pressing member is furthermore disposed in contact with the cleaning member.

The present invention provides an apparatus capable of, and a method for, inspecting at high speed and with high accuracy the super minute foreign particles and pattern defects occurring during device-manufacturing processes in which circuit patterns are to be formed on a sample such as a substrate of semiconductor devices and other elements: in the invention, the sample is illuminated in a dark field from multiple directions each of a different incident angle, the light scattered from the sample during the dark-field illumination is detected in each of the multiple directions, and the signals obtained by detecting the scattered light in each direction; thus, defects present on the surface of an optically transparent film of the sample, and defects present in or under the transparent film are discriminated from each other and both types of defects are discriminatively reviewed using a scanning electron microscope.

The present invention aims to provide a photoconductor having improved wear resistance, and which has reduced foreign matter attached on the photoconductor surface.

The electrophotographic photoconductor of the present invention is formed by sequentially disposing a photoconductive layer comprising at least one layer and a protective layer on an electroconductive support, and the protective layer comprises an acrylic resin and/or a methacrylic resin and a resin composition comprising an acryl-modified polyorganosiloxane compound which is dispersed in or compatible with the acrylic resin and/or the methacrylic resin.

Disclosed is a filter cleaning apparatus and a ductless dryer adopting the same, the dryer having a main body, a drum rotatably mounted at the main body, a hot air supplying unit supplying hot air into the drum, a heat exchanger condensing and removing moisture contained in air exhausted from the drum, a circulation duct conducing the air exhausted from the drum to the heat exchanger, a filter installed in the circulation duct and filtering foreign substances contained in the air discharged from the drum, and a filter cleaning apparatus removing the foreign substances caught by the filter, thereby enhancing a user's convenience and reducing indoor air contamination which may occur in the course of removing the foreign substances.

The invention relates to the field of batteries, in particular to a current collector, a pole piece using the same and a battery. The current collector comprises a PPTC (polymeric positive temperature coefficient) material layer and a metal layer, wherein the PPTC material layer is used for bearing the metal layer; the metal layer is used for bearing an electrode active material layer and is located on at least one surface of the PPTC material layer. The PPTC material layer not only is used for bearing the metal layer, but also can have a rapid resistance increasing function at the stage of temperature rising caused by overcharge and short circuiting because of characteristics of the PPTC material, and generation of joule's heat is inhibited by reducing current value. By means of the current collector, the short-circuiting safety performance because of foreign matter can be improved, and the overcharge safety performance can also be improved.

A coin processing system includes a coin input area for receiving coins from a user, and a coin processing module for receiving and counting the coins from the coin input area. The coin processing module includes a coin hopper, a coin processing area, and a foreign object removal system. The coin hopper receives the coins from the coin input area. The coin processing area receives and counts the coins from the coin hopper. The foreign object removal system is located at least partially within the coin hopper, and removes a foreign object from the coin hopper subsequent to receiving the foreign object from the coin input area.