The invention discloses a porefilling
copper plating method, which comprises an electrolytic tank body, a power supply module, a partition flow control module and a
temperature control module, the electrolytic tank body is divided into a pretreatment area, a porefilling area and a post-treatment area, the power supply module comprises three groups of independent adjustable electrodes which are respectively arranged in the porefilling area, the partition flow control module is arranged in the porefilling area, and the
temperature control module is arranged in the porefilling area. Sequentially carrying out oil removal, micro-
etching, activation and pre-plating treatment on the PCB to be plated in the pretreatment area; fixing the pretreated PCB in a hole filling area, injecting a hole filling plating solution, starting a power supply module and a partition flow control module, performing hole filling and
copper plating by adopting parameters of gradient current,
pulse frequency of 500800Hz and plating solution temperature of 28-32 DEG C, and performing hole filling and
copper plating by adopting a spraying flow rate of 1.0-1.2 m / s and a circulating flow rate; according to the method, hole-filling
copper plating combining the solution and the device is adopted, hole-filling
copper plating of
micro holes with the hole
diameter smaller than or equal to 0.2 mm is met, the
filling rate of copper
layers in the holes can reach 95% or above, the thickness difference between hole openings and plate surface plating
layers is smaller than or equal to 5 micrometers, the overall process stability is high, and operation is easy.