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2276results about How to "Reduce the risk of contamination" patented technology

Methods and apparatus for processing the surface of a microelectronic workpiece

A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution. In one embodiment, the plurality of contacts are in the form of discrete flexures while in another embodiment the plurality of contacts are in the form of a Belleville ring contact. A flow path may be provided in the contact assembly for providing a purging gas to the plurality of contacts and the peripheral edge of the workpiece. The purging gas may be used to assist in the formation of the barrier of the contact assembly. A combined electroplating/electroless plating tool and method are also set forth.
Owner:SEMITOOL INC

Processing method for reducing and recycling organic waste water and processing system

The invention provides a processing method for reducing and recycling organic waste water. The method comprises steps: (1) pre-treating waste water to obtain pre-treated out-water; (2) treating the out-water obtained from the step (1) through solid-liquid separation; (3) nano-filtering the out-water obtained from step (2); (4) treating nano-filtered concentrated water obtained from the step (3) to obtain out-water subjected concentrated water nano-filtering, returning to the step (3) for mixing the out-water subjected to concentrated water nano-filtering with the out-water subjected to solid-liquid separation, and performing nano-filtering; (5) performing first reverse osmosis treatment on out-water obtained from the step (3) through nano-filtering; (6) performing second reverse osmosis treatment on concentrated water obtained from the step (5) through first reverse osmosis treatment; and (7) evaporating and crystallizing a concentrated liquid obtained from the step (6) through second reverse osmosis treatment in order to obtain crystallized salt and evaporated concentrated water. The invention further provides a processing system of the method. Through the method and system, waste water is truly reduced and recycled.
Owner:DATANG INT CHEM TECH RESINST

Methods and apparatus for processing the surface of a microelectronic workpiece

A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution. In one embodiment, the plurality of contacts are in the form of discrete flexures while in another embodiment the plurality of contacts are in the form of a Belleville ring contact. A flow path may be provided in the contact assembly for providing a purging gas to the plurality of contacts and the peripheral edge of the workpiece. The purging gas may be used to assist in the formation of the barrier of the contact assembly. A combined electroplating / electroless plating tool and method are also set forth.
Owner:SEMITOOL INC

Resource recycling and treatment technology of high-concentration degradation-resistant salt-containing organic waste water

Provided is a resource recycling and treatment technology of high-concentration degradation-resistant salt-containing organic waste water.The technology comprises the following steps of the pretreatment process, the biochemical treatment process, the advanced pretreatment process, the advanced treatment process and the concentrated water treatment process.According to the technology, multiple process combinations are optimized, degradation-resistant organic matter and inorganic salts in the waste water can be removed step by step, and resource recycling of the high-concentration degradation-resistant salt-containing organic waste water is achieved on the basis of nearly zero emission; the recycling rate of produced water produced after the treatment process can reach 95% or above, and the produced water can be used as water for a production technology and replenishing water for circulating cooling water.According to the resource recycling and treatment technology of the high-concentration degradation-resistant salt-containing organic waste water, the water quality requirement of biochemical reaction inlet water is guaranteed; due to the fact that fluorine ions are removed through a fluorine removing reactor, and calcium and magnesium ions are removed through a resin softening device, the risk of inorganic salt scaling of a subsequent desalination system is greatly reduced; the risk of organic matter contamination of the subsequent desalination system is effectively reduced by means of biochemical treatment and an advanced oxidation reaction.
Owner:BEIJING JINDAYU ENVIRONMENT TECH CO LTD
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