The utility model belongs to the technical field of
wafer cleaning, and particularly relates to a liquid supply device, which comprises a liquid
medicine intermediate container, at least one air
pipe and at least one liquid inlet
pipe are communicated from the upper part to the inner cavity of the liquid
medicine intermediate container, and a liquid
discharge pipe is arranged from the inner cavity to the lower part of the liquid
medicine intermediate container; the valve
assembly comprises an air valve arranged at the air pipe; when the air valve is opened, air is introduced into the inner cavity through the air pipe, so that the cavity is in
positive pressure, and liquid medicine is discharged through the liquid discharging pipe; or air is pumped out of the inner cavity through the air pipe to enable the cavity to be in negative pressure, and liquid medicine is sucked through the liquid inlet pipe; when liquid is supplied, air in the inner cavity can be exhausted through the air pipe, low pressure is formed in the inner cavity, the liquid inlet pipe is opened, and the low pressure of the inner cavity continuously and quickly sucks liquid medicine; after the liquid medicine is in place, the liquid inlet pipe and the air pipe are closed, the air pipe pumps air into the inner cavity to form
high pressure in the liquid medicine intermediate container, the liquid
discharge pipe is opened, the liquid medicine is discharged through the
high pressure of the inner cavity, power is provided for the liquid medicine, an existing special pump
machine is replaced, the manufacturing cost of the device is reduced, and the working efficiency is improved.