The invention relates to the technical field of
crystal growth control, in particular to a multi-sensor-based
crystal growth
furnace temperature control system, which comprises a
crystal unit, a heating unit, a stirring unit, a gas conveying unit, a lifting unit, a temperature acquisition unit, a saturation accounting unit, an identification unit and an analysis unit, wherein the crystal unit is provided with a sublimation area and a
seed crystal area; the temperature acquisition unit detects temperature distribution and gradient through multiple sensors; the saturation accounting unit and the recognition unit are used for calculating the solution
supersaturation degree and monitoring crystal contour features through an
optical detector respectively; the analysis unit is used for determining the growth rate according to the contour characteristics, judging the crystal quality by comparing the
overlap ratio of an actual
growth curve and an expected
growth curve, intelligently diagnosing reasons when the crystal quality is unqualified, adjusting the
gas phase conveying rate aiming at the
impurity enrichment problem to improve stirring, correcting the temperature ratio between regions aiming at the heat dissipation problem, and realizing multi-parameter linkage regulation and control.