The application discloses a kind of
laser detection systems, methods, media and
computer program products, it is related to
semiconductor detection technical field.The
laser detection
system includes: through focusing collimation module, the reflection
laser beam generated after
wafer is irradiated by incident laser beam is collected, and reflection laser beam is focused and collimated, obtain first laser beam, first laser
beam diameter is consistent with the emission laser beam output by equipment
light source according to the preset shrinkage ratio by shrinkage module, form second laser beam;By mirror group adjustment propagation path, make second laser beam and emission laser beam meet in the preset transmission region of beam combiner, utilize beam combiner to carry out beam combination and generate third laser beam, by
beam shaping module, complete third laser
beam shaping according to detection demand, output for
laser detection incident laser beam.That is, by the fusion of reflection laser beam and emission laser beam, the influence of
stray light and laser speckle on
laser detection is reduced, and the stability of
laser detection is improved.