The invention discloses a capacitive small six-dimensional
force sensor, an optimization design method and a six-dimensional force decoupling method.The sensor comprises a three-T-
shaped beam type elastic body, a lower
electrode plate, an upper
electrode plate and a base, the three-T-
shaped beam type elastic body converts external six-dimensional force into displacement changes, the upper
electrode plate is connected with the elastic body, the upper electrode plate and the lower electrode plate form six sets of opposite electrodes, and the three-T-
shaped beam type elastic body is connected with the base. Comprising three groups of horizontally arranged electrodes and three groups of vertically arranged electrodes to form six groups of
parallel plate capacitor structures. When the sensor is subjected to external force, deformation of the elastic body drives the upper electrode plate to generate displacement, a
capacitance value is changed, and force information is converted into six
capacitance signals to be output. The sensor is compact in design and small in size, and can be conveniently integrated into narrow spaces such as
robot fingertips. Based on a
capacitance measurement principle, the sensor has excellent dynamic response performance and can quickly respond to external force change. The sensor has high sensitivity, rigidity in all directions is consistent, the
coupling effect of force is effectively reduced, and high-precision six-dimensional force decoupling is achieved by combining a decoupling
algorithm.