The invention relates to the technical field of adapter plates, and discloses an active optical
chip adapter plate and a preparation method thereof. The preparation method of the active optical
chip adapter plate comprises the following steps: providing an active optical
chip with a connection point and an exposed optical port, and forming a
protection layer covering the optical port and the connection point on the active optical chip; forming a through-
silicon-via structure penetrating through the protective layer and extending to the active optical chip, wherein the through-
silicon-via structure comprises conductive
metal and is staggered with the optical port and the connection point; removing the
protection layer on the connection point to
expose the connection point, and forming a first wiring layer electrically communicating the conductive
metal and the connection point on the
protection layer; and removing the first wiring layer and the protective layer on the optical port to
expose the optical port. According to the invention, before the active optical chip is subjected to the
silicon through hole process, the protective layer is formed on the surface of the active optical chip, so that
pollution to an optical port by a subsequent process and damage to a connection point by a wet process liquid
medicine are reduced, and the performance of the optical chip active adapter plate is ensured.