Vertically oriented
semiconductor memory cells are added to a separately fabricated substrate that includes
electrical devices and / or interconnect. The plurality of vertically oriented
semiconductor memory cells are physically separated from each other, and are not disposed within the same
semiconductor body. The plurality of vertically oriented
semiconductor memory cells can be added to the separately fabricated substrate as a
thin layer including several doped semiconductor regions which, subsequent to attachment, are etched to produce individual doped stack structures, which are then supplied with various
dielectric coatings, gate electrodes, and contacts by means of further
processing operations. Alternatively, the plurality of vertically oriented
semiconductor memory cells may be completely fabricated prior to attachment. DRAMs, SRAMs, non-volatile memories, and combinations of memory types can be provided.