MEMS converter (200, 300, 400) for integration into a
microphone arrangement (100) having a housing in which the MEMS converter is arranged, the MEMS converter comprising: a substrate (202) comprising an aperture (212); an electroacoustic transduction element (204) coupled to the substrate (202), the transduction element (204) comprising a fixed
electrode (210) and a movable
electrode (208) located on different
layers of the MEMS
transducer to form a
variable capacitor, and the movable
electrode (208) being at least partially disposed over the aperture (212);
electrical contacts (414a, 414b) coupled to the transduction element (204); a
resistor (206, 306); and
electrical contacts (416) coupled to the
resistor (206, 306) and electrically insulated from the
electrical contacts (414a, 414b) of the transduction element (204), wherein the transduction element (204) comprises an insulating material (214) connected to the substrate, wherein the
resistor (206, 306) is arranged laterally offset from the aperture (212) of the substrate (202, 502) and the insulating material (214) forms a backplate structural layer (508, 516), in the surface of which facing the substrate (202) the fixed electrode (210) is sunk, wherein the resistor (306) is sunk into said surface and is arranged in the same layer as the fixed electrode (210) and is formed of the same material, or wherein the resistor (206) is suspended from said surface and is arranged in the same layer as the movable electrode (208) and is formed of the same material.