A method for providing
waveguide structures for an energy assisted magnetic recording (EAMR)
transducer is described. The
waveguide structures have a plurality of widths. At least one
waveguide layer is provided.
Mask structure(s) corresponding to the waveguide structures and having a pattern are provided on the waveguide layer(s). The
mask structure(s) include a planarization stop layer, a planarization assist layer on the planarization stop layer, and a
hard mask layer on the planarization assist layer. The planarization assist layer has a
low density. The pattern of the
mask structure(s) is transferred to the waveguide layer(s). Optical material(s) that cover the waveguide layer(s) and a remaining portion of the
mask structure(s) are provided. The optical material(s) have a density that is at least twice the
low density of the planarization assist layer. The method also includes performing a planarization configured to remove at least a portion of the optical material(s).