An AFM that combines an AFM Z position 
actuator and a self-actuated Z position 
cantilever (both operable in cyclical mode and 
contact mode), with appropriate nested 
feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either 
ambient air or fluid includes a self-actuated 
cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated 
cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an 
oscillation amplitude generally equal to a 
setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever 
control signal in response to 
vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever 
control signal to generate a 
position control signal. A Z position 
actuator is also included within the second feedback circuit and is responsive to the 
position control signal to position the sample. In operation, preferably, the cantilever 
control signal alone is indicative of the 
topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor ("Q") of the cantilever 
resonance to optimize the bandwidth of the cantilever response.