The invention relates to the technical field of
bulk acoustic wave resonators, and particularly provides a
bulk acoustic wave resonator integrated with a double-layer temperature compensation structure and a preparation method thereof.The
resonator comprises a first substrate, a bonding layer, a bottom
electrode, a piezoelectric layer, a second temperature compensation layer and a top
electrode which are sequentially connected from bottom to top, and the first substrate is provided with an
air cavity; a first temperature compensation layer is wrapped in the bottom
electrode, the boundary of the projection of the first temperature compensation layer in the overlook direction is located in the boundary of the projection of the
air cavity in the overlook direction, and the temperature coefficients of the bottom electrode, the piezoelectric layer and the top electrode are all opposite to the temperature coefficients of the first temperature compensation layer and the second temperature compensation layer; the
resonator can effectively avoid the conditions that the piezoelectric layer needs to be directly formed on the temperature compensation layer, and
lattice mismatch exists between the temperature compensation layer and the piezoelectric layer, so that the
crystal quality of the piezoelectric layer is poor, and leakage current is increased.