1221 results about "Piezoelectric thin films" patented technology

The invention provides a piezoelectric device and a preparation method thereof. The piezoelectric device comprises a substrate material layer; the single crystal seed layer is arranged on the substrate material layer, and the single crystal seed layer is made of a six-membered ring structure carbon material; the electrode layer is arranged on the single crystal seed layer; and the single crystal piezoelectric film is arranged on the electrode layer. According to the preparation method of the piezoelectric device, the cost is lower, the material price is lower, the film deposition efficiency is higher, and the crystal structure of the single crystal piezoelectric film is more stable.

The invention discloses a temperature and humidity adaptive control system and method for drying flower traditional Chinese medicinal materials, and the system comprises a humidity gradient monitoring module which is used for deploying a 12-channel capacitive humidity sensor spiral array and a laser radar, generating a three-dimensional humidity field thermodynamic diagram in combination with a Kriging interpolation method, calculating a humidity gradient change rate in real time, and carrying out the early warning of local abnormality; the heat-humidity ratio regulation and control module is used for integrating humidity gradient monitoring data and a real-time result of the evaporation latent heat calculation module based on a fuzzy PID algorithm, dynamically adjusting the heating power and the rotating speed of a dehumidification fan, and meanwhile, integrating a PVDF piezoelectric film sensor to monitor petal stress; the evaporation latent heat calculation module is used for predicting a future evaporation rate by combining an LSTM neural network based on an edge calculation unit and providing key parameters for the energy supply matching module; the energy supply matching module is used for outputting a combined control instruction of the heating power and the air door opening degree; and the air volume balance optimization module is used for dynamically adjusting air volume distribution according to the humidity gradient monitoring data.

The invention relates to the field of continuum robot shape reconstruction, in particular to a continuum robot shape sensing method based on IMU and PVDF sensor fusion. The method comprises the following steps: acquiring node attitude information of the continuum robot based on measurement data of an inertial sensor; acquiring node pressure information of the continuum robot through a piezoelectric film sensor, and inputting the node pressure information into a pre-trained convolutional neural network model to obtain node curvature information; fitting a continuous curvature function of the continuum robot based on the node curvature information to obtain continuous curvature information; and the shape information of the continuum robot is obtained by using the node attitude information and the continuous curvature information in combination with the Cosseerat Rod theory. According to the shape sensing method, the PVDF sensor and the inertial sensor work cooperatively, and the machine learning model and the Cosseerat Rod theory are combined, so that high-precision and low-error shape sensing of the continuum robot in a dynamic complex environment is realized.

The invention relates to the technical field of stoma nursing devices, and discloses an AI visual stoma leakage early warning system, which comprises a plurality of passive piezoelectric film sensors embedded in a stoma chassis and used for capturing acoustic signals generated by adhesion interface structure instability; the edge calculation unit periodically collects an electric signal sequence and calculates an information entropy value, and through comparison with a self-adaptive resting entropy baseline, the structural instability risk is judged and early warning is generated when the entropy value continuously and abnormally rises. The risk orientation is accurately identified in combination with a multi-sensor cooperative positioning technology, body movement interference is avoided by using a dynamic compensation mechanism, and the early warning accuracy and clinical practicability are improved.

The invention relates to the technical field of pipeline detection, and provides a non-contact pipeline fluid flow velocity measurement method based on a frequency wavenumber domain spatial spectrogram, and the method comprises the steps: collecting a turbulence signal in a pipeline through a piezoelectric film sensor; carrying out snapshot number segmentation on the turbulence signal to obtain a plurality of segmented turbulence time domain signals; fourier transform and narrowband signal processing are carried out on the segmented turbulence time domain signals, and a spatial spectrum corresponding to each narrowband signal component is obtained; constructing a three-dimensional frequency-wave number domain spectrogram according to the spatial spectrum function; and according to the three-dimensional frequency-wavenumber domain spectrogram, calculating the flow velocity of the pipeline fluid. According to the method, a three-dimensional spectrogram characteristic space is constructed through conjoint analysis of the frequency and the wave number, the angle, distance and frequency characteristics of the turbulence signals are decoupled through spatial spectrum estimation methods such as the MUSIC algorithm, multipath interference and noise are effectively restrained, the flow speed of fluid in a pipeline can be accurately estimated, and limitation in a traditional method is overcome.

The invention provides a preparation technology of a three-dimensional camera shooting sonar sparse sensing array, and the method comprises the following steps: forming a patterned electrode on a PVDF or P (VDF-TrFE) piezoelectric film through vacuum adsorption and silk-screen printing according to sparse array element coordinates, and arranging a virtual transition array element at the periphery; performing laser etching on the edge contour and the exhaust hole of the piezoelectric film; designing a bonding positioning auxiliary tool, combining an ultrathin double-sided adhesive tape and a single-sided mask adhesive tape, and utilizing conductive silver paste to realize accurate electric connection between the array element and the PCB bonding pad; designing a polytetrafluoroethylene-metal flattening module, and laminating the array in a vacuum environment for curing and bonding; the matching layer is made of a low-impedance sound transmission material, glue filling and vacuum defoaming are performed from the back side in batches, and the sparse sensing array is prepared in combination with a polyimide film and a metal super-flat plate. The preparation problem of the large-aperture high-frequency imaging sonar on the sensing array is solved, and the array element position accuracy, the array element consistency and the imaging resolution can be improved.

A film bulk acoustic wave resonator comprising a piezoelectric film having a central region defining a main active domain in which a main acoustic wave is generated during operation, an upper electrode disposed on a top surface of the piezoelectric film, a lower electrode disposed on a lower surface of the piezoelectric film, a dielectric material layer disposed on a lower surface of the lower electrode, and lower recessed frame regions disposed laterally on opposite sides of the central region, the lower recessed frame regions defined by regions of one of the dielectric material or of the lower electrode having a lesser thickness than the thickness of the one of the dielectric material layer or of the lower electrode in the central region.

The invention provides a flexible piezoelectric sensor and a signal detection method thereof. The flexible piezoelectric sensor comprises a protective layer PDT, a second electrode layer, a flexible composite piezoelectric film layer, a first electrode layer, a flexible square polyimide substrate and a polyurethane adhesive tape. The signal detection method comprises the steps that the flexible piezoelectric sensor is attached to a human body and a sheep, the flexible piezoelectric sensor obtains signal data generated at a test position, the signal data are obtained through the processing module, signal preprocessing is carried out based on an improved filtering method, and a data set with a specific rule of effective signals is obtained. And then the information is sent to a rear end through wireless transmission, so that accurate identification of different behaviors is realized. The invention has the advantages of simple preparation process, small size, good flexibility, convenience in use, stable performance and the like, and can realize detection of heartbeat, respiration and other signals of human bodies and animals in a complex environment.

The invention discloses a micro-fluidic liquid cooling heat dissipation module integrated with piezoelectric driving, a chip and application, and belongs to the technical field of chip liquid cooling heat dissipation. The micro-fluidic liquid cooling heat dissipation module comprises a micro-fluidic substrate and a piezoelectric film, the piezoelectric film covers the surface of one side of the microfluidic substrate; a groove channel is formed in the surface of one side, facing the piezoelectric film, of the micro-fluidic substrate; a loop cavity defined by the piezoelectric film and the groove channel forms a micro-channel; a metal electrode layer, a heat source area and a heat exchange area are respectively arranged at different positions, corresponding to the micro-channel, on the surface of one side, deviating from the micro-fluidic substrate, of the piezoelectric film. The micro-fluidic liquid cooling heat dissipation module can actively drive the cooling liquid to flow to a heat source area, and compared with a traditional micro-channel heat dissipation mode, the micro-fluidic liquid cooling heat dissipation module has very high flexibility in fluid driving, does not need an external driving pump, can greatly reduce the size of a packaged chip, and is beneficial to development of chip integration and microminiaturization.

A high-frequency acoustic wave resonator and a manufacturing method therefor, relating to the field of microelectronic devices. The high-frequency acoustic wave resonator comprises a support substrate (1), a piezoelectric film (2) and interdigital transducers (3) which are sequentially stacked from bottom to top. The sound velocity of the support substrate (1) is not less than 5000 m / s; a target mode of the high-frequency acoustic wave resonator is a quasi-bulk wave mode generated by longitudinal electric field excitation; the thickness of each interdigital transducer (3) is inversely proportional to the material density of the interdigital transducer (3); the sound velocity in the target mode is less than the sound velocity of the support substrate (1). On the basis of a heterogeneous integrated substrate, the structure of the acoustic wave resonator is simplified, and the ohmic loss is reduced and the electromechanical coupling coefficient in a high-order mode is improved.

The invention relates to the technical field of surface acoustic wave devices, and discloses a lithium tantalate single crystal film-based Loff wave photonic crystal resonator, which comprises a functional substrate and a piezoelectric film layer on the upper surface of the functional substrate, an interdigital transducer is arranged in the middle area of the upper surface of the piezoelectric film layer, and photonic crystals are arranged on the two sides of the interdigital transducer; the piezoelectric thin film layer is a lithium tantalate single crystal thin film, and the tangential direction of the lithium tantalate single crystal thin film is any one of Y cuts, including 0-degree Y, 36-degree Y, 42-degree Y, 50-degree Y, 64-degree Y and 128-degree Y cuts. The photonic crystal is used for replacing a reflecting grating in a traditional surface acoustic wave resonator, higher sound velocity and lower longitudinal loss are achieved through a material system constructed by combining the functional substrate and the lithium tantalate single crystal film, and the photonic crystal resonator has the advantages of being simple in structure, small in size and easy to prepare and integrate. And compared with a Bragg reflection grating resonator with the same size, the resonator has a higher Q value.

The invention relates to the technical field of engineering structure monitoring, in particular to a structure health monitoring method based on a distributed strain dynamic test. According to the technical scheme, the method comprises the steps of arrangement of a composite sensor array, acquisition of strain data, self-adaptive data transmission, operation of a data processing and analysis center and operation of a man-machine interaction interface, and the composite sensor array composed of multiple types of distributed strain sensors is arranged at an engineering structure part. The strain sensors comprise a fiber bragg grating strain sensor, a resistance strain gauge and a piezoelectric film strain sensor. According to the invention, various types of distributed strain sensors are adopted to form a composite sensor array, and comprehensive, real-time and accurate health monitoring and damage prediction of an engineering structure are realized in combination with a self-adaptive data transmission network and an advanced data processing and analysis technology; and more effective technical support is provided for safety guarantee of civil engineering structures.

The invention relates to the technical field of flexible piezoelectric sensors, and discloses a wide-working-condition multi-dimensional force representation flexible film piezoelectric sensor and a signal analysis method, after a pvdf piezoelectric film is cut in a paper-cut mode, regionalized electrode coating and covering are carried out, and multi-channel signal output is achieved. Therefore, characterization of multi-dimensional force can be realized on one film sensor, and meanwhile, the tension and conformal capability of the sensor are enhanced through the paper-cut design, so that the attachment requirement of a complex surface is met. A multi-layer composite structure is combined and comprises a flexible polymer protection layer and a flexible connection layer, and high sensitivity, excellent tensile property and mechanical durability are achieved through hot pressing and local ultrasonic welding. The sensing capability is enhanced, and the defect of poor tensile property of a traditional PVDF piezoelectric sensor is overcome. The preparation method is simple in process, low in cost and suitable for large-scale industrial production. In addition, the invention provides a deep learning analysis method for multi-channel signals, and classification and nonlinear fitting can be realized.

The invention relates to an embedded rolling bearing with a source end parameter acquisition system and a manufacturing method of the embedded rolling bearing. The embedded rolling bearing comprises a bearing body, and a containing groove is formed in the peripheral face of the bearing body; the thin film sensor assembly is formed in the accommodating groove, and comprises a PDC-ITO (Poly (Propylene Diene Monomer-Indium Tin Oxide)) strain element, a PDC-Pt (Poly (Propylene Diene Monomer)-Pt) temperature element, a PDC-PZT (Poly (Poly (Propylene Diene Monomer)-PZT) piezoelectric thin film and a plurality of bonding pads which are respectively matched with the PDC-ITO strain element, the PDC-Pt temperature element and the PDC-PZT piezoelectric thin film; the acquisition microstructure is arranged in the accommodating groove and comprises a PCB (Printed Circuit Board) and a functional chip which is formed on the PCB and is electrically connected with the plurality of bonding pads through a plurality of electrical interconnection sockets; the heat insulation pouring sealant is poured into the accommodating groove; and a metal cover. Normal installation of the bearing is achieved to the maximum extent, and the defect that the appearance and the size of a traditional external sensor and a traditional collector are limited is overcome.

The invention relates to a Lamb wave resonator and a preparation method thereof. The preparation method comprises the following steps: providing a piezoelectric film; the interdigital electrode and the bus bar are positioned above the piezoelectric film; the functional heat dissipation film is positioned below the piezoelectric film; the supporting substrate is positioned below the functional heat dissipation film; high aspect ratio grooves which are periodically arranged or non-periodically arranged are formed in the bottom of the functional heat dissipation film; and the piezoelectric film area corresponding to the interdigital electrode is suspended. Through the arrangement of the fin heat dissipation structure, the contact area of the film and air is greatly increased, the heat dissipation capability of the resonator is remarkably enhanced, and the power capacity and the heat stability of the resonator are further enhanced; meanwhile, the structure can suppress resonance of a spurious mode in the resonator by scattering sound waves, plays a role in suppressing the spurious mode, and has a good application prospect.

An acoustic wave device includes a piezoelectric film and an IDT electrode on the piezoelectric film. The IDT electrode includes first and second busbars, at least one first electrode finger, and at least one second electrode finger. When an overlap region is defined as a region in which the first and second electrode fingers overlap each other in an acoustic wave propagation direction, points A2, B2, C2, and D2, defined as follows, are all outside the cavity when, at the points A2, B2, C2, and D2, xa>about 25 μm, ya>about 25 μm, xb>about 25 μm, yb>about 25 μm, xc>about 25 μm, yc>about 25 μm, xd>about 25 μm, and yd>about 25 μm.

The invention provides a front-end flue gas isolation and discharge device for lithium ion battery thermal runaway exhaust, and belongs to the technical field of lithium ion batteries, the front-end flue gas isolation and discharge device for lithium ion battery thermal runaway exhaust comprises a fixed support, a silica gel ring, a thermal insulation layer, a cushioning layer, a flue and a piezoelectric film sensor, the fixed bracket is clamped between the positive pole and the negative pole of the lithium battery and is used for providing stable support for the installation of the device; the flue is arranged at the top of the fixing support and comprises a plurality of branch pipelines, and each branch pipeline is directly connected with the corresponding safety valve; the silica gel ring is filled between a branch pipeline of the flue and the fixed bracket; the device can solve the problem of diffusion of thermal runaway gas in a battery pack, and prevent heat transfer of unburned gas to a normal battery in a thermal runaway exhaust process and combustion heat transfer possibly generated after ignition, so that the spreading of thermal runaway in a module is delayed.

The invention discloses a piezoelectric film partition dynamic focusing system and method for intelligent glasses. The piezoelectric film partition dynamic focusing system comprises an optical modulation layer, a sensing layer, a control engine, a hybrid driving layer and a closed loop verification module. The optical modulation layer is integrated with an N * M piezoelectric film array, each subarea is provided with an independent electrode and a gradient thickness structure, and intervals are filled with low-modulus insulating polymers. The sensing layer is used for acquiring fixation point, diopter, temperature and head movement information of a wearer; and the control engine executes voltage mapping, temperature drift compensation and resonance suppression according to the sensing data, and drives the hybrid driving layer to complete deformation and displacement compensation. And the closed-loop verification module outputs a defocusing error in real time and feeds back a correction voltage. According to the invention, high-response, low-power-consumption and stable dynamic focusing is realized, and the visual adaptability is improved.

The invention discloses a sleep apnea type analysis device and method, and the device comprises a preprocessing module which is used for collecting an original signal through a piezoelectric film sensor, and carrying out the preprocessing of the original signal, and obtaining a framed breathing signal, a framed original signal, and a snoring signal; the first determining module is used for determining a breathing attenuation descending signal based on the framing original signal and determining a breathing effort ascending signal based on the framing breathing signal; the second determination module is used for determining an autocorrelation degree characteristic value of the apnea segment based on the framing original signal; and the sleep apnea type analysis module is used for determining the sleep apnea type based on the respiratory attenuation drop signal, the respiratory effort rise signal, the snoring signal and the self-correlation degree characteristic value, apnea fragments can be rapidly positioned based on the steps, and then the sleep apnea type is rapidly and accurately analyzed.

The invention discloses a piezoelectric air cooling device based on a piezoelectric film PZT technology, and relates to the technical field of MEMS. The device adopts a two-layer packaging structure of a piezoelectric cantilever beam MEMS chip and a PCB (Printed Circuit Board) with a vent hole. A cantilever beam of the MEMS chip is integrated with an SOI top silicon layer and an ultrathin PZT driving stack, low rigidity and high driving force are achieved, and the surface of the cantilever beam is covered with a PDMS flexible sealing layer to achieve dynamic sealing. When the device works, the cantilever beam is driven to resonate in an ultrasonic frequency band, and efficient synthetic jet is generated at the vent hole by periodically changing the volume of the pump cavity. The technical bottleneck that miniaturization and high performance are difficult to consider at the same time is broken through, and the device has the advantages of being compact in structure, mute and efficient and is suitable for precise heat dissipation of miniature electronic equipment.

The invention discloses a piezoelectric cantilever beam energy collector, and the collector comprises a fixed part 1 which is used for fixing the collector at a certain position; the supporting beam and the fixing piece 1 are connected into a whole, the supporting beam comprises a bionic bamboo joint structure 2 close to one end of the fixing piece 1 and a mass structure 3 far away from one end of the fixing piece 1, and at least one micropore 6 penetrating through the upper surface and the lower surface of the supporting beam is formed in the bionic bamboo joint structure 2 and used for forming alternate rigid segments and flexible nodes on the bionic bamboo joint structure 2; the supporting beam swings with the end close to the fixing piece 1 as the circle center in the vibration environment. The mass block 5 is arranged on the mass structure 3; the number of the piezoelectric films 4 is two, the two piezoelectric films 4 are arranged on the upper surface and the lower surface of the bionic bamboo joint structure 2 respectively, and the piezoelectric films 4 cover the micropores 6 formed in the bionic bamboo joint structure 2.

The invention discloses a surface acoustic wave band-pass filter, a design method thereof and electronic equipment, and the method comprises the steps: determining a first structure parameter of a resonator, and determining a second structure parameter which comprises the piezoelectric material and thickness of a piezoelectric film; extracting a first relation and a second relation related to the in-plane transmission directions of the resonators; building a target filter based on the first relation and the second relation; the target filter comprises a basic resonator group and a compensation resonator group, the frequency temperature coefficient of the basic resonator group at the center frequency of the filter is zero, and the frequency temperature coefficient of the compensation resonator group at the transmission zero point is zero; and if the frequency temperature coefficient of the detected target filter is not zero, returning to the step of determining the second structure parameter until the frequency temperature coefficient of the detected target filter is zero. Through interaction of the resonators, it is guaranteed that the passband range of the filter does not change along with temperature change, and the band-pass filter with the frequency temperature coefficient being zero is achieved.

The invention discloses a two-phase-driven piezoelectric traveling wave micro-motor structure and a preparation method, and belongs to the field of micro-motors, the two-phase-driven piezoelectric traveling wave micro-motor structure comprises piezoelectric ceramic films arranged in partitions, upper electrodes arranged in partitions and lower electrodes arranged in partitions, and in corresponding partitions, the upper electrodes and the lower electrodes of the corresponding partitions are connected with the corresponding piezoelectric ceramic films respectively; the polarization characteristics of the piezoelectric ceramic films can be the same or different; when the same conditions are met, the first piezoelectric ceramic film is connected with an upper electrode and a sin signal, the lower electrode is connected with GND, the second piezoelectric ceramic film is connected with an upper electrode and a cos signal, the lower electrode is connected with GND, the third piezoelectric ceramic film is connected with an upper electrode and a GND, the lower electrode is connected with a sin signal, the fourth piezoelectric ceramic film is connected with an upper electrode and a GND, and the lower electrode is connected with a cos signal; the wiring of the four piezoelectric films in one period is the same, and the arrays in other periods are repeated and are the same in sequence. The size and power consumption of the driving circuit are reduced, and batch manufacturing is easy.

The invention relates to a preparation method of a single-crystal piezoelectric film bulk acoustic resonator, and relates to the field of semiconductor device production processes, and the preparation method comprises the following steps: S1, preparing a single-crystal piezoelectric film and an electrode layer on a first substrate; s2, patterning the single crystal piezoelectric film and the electrode layer; s3, temporarily bonding the supporting slide glass with the first substrate through the adhesion layer; s4, removing the first substrate; s5, etching a photoetching through hole in the thin film body; s6, depositing metal to form a connecting part and a lower electrode; s7, processing a cavity structure on the second substrate; s8, preparing a transition layer on the surface of the second substrate; s9, removing the first part; s10, preparing a bonding layer on the second substrate; s11, processing a communication hole in the bonding layer and removing the second part; s12, bonding the lower electrode and the second substrate; and S13, removing the supporting slide glass and the adhesion layer. The method has the advantages that the bonding material uniformly covers the surface of the second substrate and the cavity structure, weak points are prevented from being formed at the cavity structure, and the reliability and stability of the bonding process are remarkably improved.

The invention relates to the technical field of photovoltaic module manufacturing, in particular to a photovoltaic module vacuum laminating system based on dynamic pressure feedback. The dynamic pressure adjusting module comprises a piezoelectric film sensor and a servo motor, the piezoelectric film sensor is used for detecting the pressure borne by the photovoltaic module, and the control module calculates and obtains the real-time optimal pressure and then controls the servo motor to act so as to achieve the real-time optimal pressure; the heating control module comprises a heating plate, a thermal infrared imager and a PID temperature control unit, the heating plate is used for heating the photovoltaic module, the thermal infrared imager is used for detecting the surface temperature distribution of the photovoltaic module, and the PID temperature control unit is used for controlling the temperature of the heating plate; the vacuum control module comprises a plurality of air chambers which are independently arranged, each air chamber is provided with an air inlet pipeline and an air outlet pipeline which are communicated with the laminating machine cavity, and micro electromagnetic valves are arranged on the air inlet pipelines and the air outlet pipelines.

An acoustic wave device (10) using a surface acoustic wave, comprising: a substrate (11) containing 70 mass% or more of silicon dioxide (SiO2); a piezoelectric thin film (12) formed of LiTaO3 crystal or LiNbO3 crystal disposed on the substrate (11); and an interdigital transducer electrode (13) arranged in contact with the piezoelectric thin film (12); wherein Euler angle of the substrate (11) and Euler angle of the piezoelectric thin film (12) are selected such that a phase velocity of the surface acoustic wave propagating along the substrate (11) is greater than a phase velocity of the surface acoustic wave propagating along the piezoelectric thin film (12).

The invention relates to preparation of a piezoelectric film wafer, and belongs to the field of MEMS. A method for thinning a large-size piezoelectric film wafer is characterized by comprising the following steps of: firstly, preparing a limiting groove of which the height is slightly greater than or equal to the target thickness of the film wafer on a substrate through a substrate patterning process, then bonding the piezoelectric wafer in the limiting groove, and finally performing chemical grinding to obtain the large-size piezoelectric film wafer. And when the piezoelectric wafer film is ground to be flush with the peripheral height of the limiting groove on the substrate, the thinning of the piezoelectric film wafer is accurately controlled. According to the method, the thickness of the piezoelectric wafer film can be accurately controlled, and the problems of cracking and damage caused by the fact that the thickness cannot be accurately controlled in an existing thinning process are solved. The invention further provides a piezoelectric film wafer based on the thinning method and a process for preparing various filters and resonators based on the method, the limitation on materials is reduced by the new process, the performance of the device is improved, and the method has a relatively high application prospect.

The invention discloses a digital stethoscope system based on a piezoelectric film, and relates to the technical field of medical electronics and biomedical engineering. An existing digital stethoscope based on a piezoelectric film has the challenges of signal noise and interference, limitation of a signal processing algorithm, nonlinear response and time migration, insufficient diagnosis accuracy and automation and the like. A piezoelectric film and microphone dual audio acquisition mode is fused, various physiological signals such as low-frequency vibration and high-quality heart and lung sound are captured, and background noise is removed through a self-adaptive filter and a frequency spectrum subtraction technology; an MFCC feature extraction and dynamic time warping algorithm is utilized to carry out fine feature analysis and time axis alignment on the preprocessed audio signal, and high-precision matching with a storage template is realized; different physiological states are accurately distinguished through intelligent feature processing, real-time and visual diagnosis feedback is achieved through wireless transmission and state indication, and the reliability and efficiency of medical detection are improved.

The invention relates to an acoustic resonator device and a forming method thereof, and a radio frequency filter. The acoustic resonator device comprises a substrate layer; the sacrificial layer is located on the substrate layer and comprises a cavity; the piezoelectric film layer is located on the sacrificial layer and comprises at least one strip-shaped piezoelectric film and etching grooves located in the two sides of each strip-shaped piezoelectric film, and the etching grooves are communicated with the cavity; the bottom conductor layer is located below the piezoelectric film layer and comprises a bottom bus bar and at least one bottom finger bar electrode suspended in the cavity; the top conductor layer is located on the piezoelectric film layer and comprises a top bus bar, a top terminal, a bottom terminal and at least one top finger bar electrode; the top finger strip electrodes, the bottom finger strip electrodes and the strip-shaped piezoelectric films are in one-to-one correspondence. In the embodiment of the invention, the suspended top finger strip electrode, the strip-shaped piezoelectric film and the bottom finger strip electrode are arranged in the device to support a mode of double shear bulk acoustic waves excited by a vertical electric field, so that the device meets the requirements of higher frequency and larger bandwidth.

The invention provides an optical noise suppressor, a manufacturing method and application, the optical noise suppressor comprises a substrate, a piezoelectric driving structure and a top cover, the substrate is internally provided with a clearance space vertically penetrating through the substrate, the clearance space is internally provided with a grating structure, and the grating structure is connected with the substrate through a cantilever beam structure; the piezoelectric driving structure is located above the cantilever beam structure and comprises a bottom electrode metal layer, a piezoelectric film layer and a top electrode metal layer which are stacked from bottom to top; the top cover is located above the substrate and is in bonding connection with the substrate, a reflecting layer is arranged on the lower surface of the top cover, the projection of the reflecting layer on the substrate covers the grating structure, the piezoelectric driving structure can drive the cantilever beam structure to deform after applying voltage, and then the distance between the grating structure and the top cover is changed. The distance between the grating structure and the reflecting layer can be precisely regulated and controlled through voltage driving, the reference light intensity can be regulated and controlled and monitored in real time, and the advantages of full automation and high precision are achieved.