102 results about "Piezoelectric thin films" patented technology

Provided is a filter device wherein electric power resistance can be improved.　A filter device according to the present invention comprises a plurality of elastic wave resonators (serial arm resonators S2a, S2b) that share a piezoelectric substrate 2 having a support member 3 and a piezoelectric film that is provided on said support member 3 and includes a piezoelectric layer 6, and each have a functional electrode (IDT electrode 7) that is provided on the piezoelectric film. In each of the plurality of elastic wave resonators, a cavity section 2a is provided in the support member 3 in a location that overlaps with the functional electrode in plan view. The support member 3 and the piezoelectric film are positioned such that a section of the support member 3 and a section of the piezoelectric film face each other with the cavity sections 2a interposed therebetween. The plurality of elastic wave resonators include at least one set of parallel-connected resonators, which are at least two elastic wave resonators that are connected in parallel to each other. The cavity sections 2a of the at least one set of parallel-connected resonators are separated from each other in at least one section by a partition wall 2b, which is a section of the support member 3.

The utility model relates to a piezoelectric and capacitor composite sensing's car door outer handle, car, including sensing unit, piezoelectric measurement branch, capacitor digital conversion circuit, treater, sensing unit includes piezoelectric film and the upper electrode and lower electrode respectively arranged in the upper and lower two faces of piezoelectric film, the upper electrode is oriented handle and is away from the direction of car body, as the multiplexing electrode of piezoelectric film's signal output electrode and capacitor sensor's sensing electrode, capacitor sensor forms the electric field for sensing the electric field of external object approach and / or contact handle outer surface, piezoelectric measurement branch is coupled respectively upper and lower electrode to obtain the piezoelectric signal of vibration generation, piezoelectric measurement branch is provided with amplifier at least to amplify piezoelectric signal, capacitor digital conversion circuit is coupled upper electrode to obtain self -capacitance and / or mutual capacitance, processing module is coupled piezoelectric measurement branch, capacitor digital conversion circuit respectively.

A piezoelectric laminate and a piezoelectric element have, on a substrate in the following order, a lower electrode layer, and a piezoelectric film containing a perovskite-type oxide. The lower electrode layer includes a first layer arranged in a state of being in contact with the substrate and includes a second layer arranged in a state of being in contact with the piezoelectric film, the first layer contains Ti or TiW as a main component, the second layer is a uniaxial alignment film which contains Ir as a main component and in which the Ir is aligned in a (111) plane, and a half width at half maximum of an X-ray diffraction peak from the (111) plane is 0.3° or more.

A piezoelectric device includes a support including a support substrate, a piezoelectric layer with a thickness in a first direction and provided on a principal surface of the support, and a functional electrode on the principal surface of the piezoelectric layer. The piezoelectric layer includes first and second piezoelectric films that are laminated and each made of a single crystal of a same material. The first and second piezoelectric films have different polarization directions. The first and second piezoelectric films each include cleavage surfaces. At least one of the cleavage surfaces of the first piezoelectric film, and at least one of cleavage surfaces of the second piezoelectric film extend in intersecting directions in plan view in the first direction.

The application discloses a kind of based on piezoelectric film air flow detection circuit, air flow detection device and electronic atomizer, by adopting piezoelectric film as sensing element, combining integral circuit design, transient electrical signal is converted into stable detection voltage output, so that the deformation size of piezoelectric film can be accurately judged, and then the function of accurately detecting air flow is realized.The problems of weak anti-interference ability, poor signal stability and other problems existing in traditional air flow detection technology can be effectively solved.

The present invention provides a pressure detection device and a pressure detection method that can reliably measure static load. [Solution] The pressure detection device comprises a piezoelectric film sensor 1 having a structure in which a first electrode layer, a piezoelectric film, and a second electrode layer are sequentially stacked in that order; an analog-to-digital converter 50 connected to the piezoelectric film sensor 1; and a digital signal processing unit 60 that performs digital signal processing including DC offset compensation on the signal obtained from the analog-to-digital converter 50. The digital signal processing unit 60 is characterized in that it calculates the pressure applied to the piezoelectric film sensor 1 from the baseline signal obtained from the piezoelectric film sensor 1.

Provides are a haptic feedback substrate and apparatus. The haptic feedback substrate includes: a base substrate; a first electrode layer, the first electrode layer is electrically connected to a ground voltage input end; a piezoelectric film layer at one side of the first electrode layer facing away from the base substrate; a second electrode layer at one side of the piezoelectric film layer facing away from the base substrate, the second electrode layer is divided into vibration zones, each vibration zone includes at least one second electrode, second electrodes in each vibration zone are electrically connected to the same drive voltage input end, second electrodes in different vibration zones are electrically connected to different drive voltage input ends; the first and second electrode layers form an alternating electric field, the piezoelectric film layer vibrates under the action of the alternating electric field and drive the base substrate to resonate.

The application belongs to the technical field of ultrasonic scanning, and particularly relates to a high-frequency ultrasonic probe and a preparation method thereof. The method comprises the following steps: S1, obtaining a conductor column and a piezoelectric film plated with electrodes on two surfaces after polarization; S2, processing a first end of the conductor column into a spherical arc surface and a first anti-reflection surface, and processing a second end of the conductor column into a second anti-reflection surface to form a backing; S3, coaxially fixing a first surface of the piezoelectric film to the spherical arc surface and the first anti-reflection surface; S4, sleeving an insulating inner shell around the backing, wrapping a shielding net around an outer side of the inner shell, bonding the shielding net to a second surface of the piezoelectric film through conductive glue, connecting a ground wire to the second anti-reflection surface, and connecting a signal wire to the shielding net to form a transducer; and S5, packaging the transducer into a metal shell as a whole, grounding the metal shell through a standard interface, and obtaining the high-frequency ultrasonic probe by plating a waterproof layer on the metal shell and the second surface of the piezoelectric film after packaging, which can be used for ultrasonic nondestructive testing.

This invention relates to an online monitoring device for diaphragm deformation of an ultra-clean diaphragm valve based on a flexible piezoelectric thin film, comprising: a piezoelectric thin film sensor array for converting the deformation state of the diaphragm valve into an electrical signal to be extracted; a signal extraction component for extracting the electrical signal to the outside of the valve body; a signal acquisition component for acquiring the electrical signal extracted to the outside of the valve body; and a consistency comparison and discrimination component for judging the deformation state of the electrical signal and obtaining the deformation state judgment result; wherein the piezoelectric thin film sensor array, the signal extraction component, the signal acquisition component, and the consistency comparison and discrimination component are connected sequentially. This invention eliminates the need for sensor placement on the medium side, does not affect the cleanliness of the ultra-clean fluid channel, and uses relative consistency as the criterion, reducing the dependence on absolute amplitude calibration, making it suitable for engineering installation and online early warning.

The present application relates to the technical field of piezoelectric thin film material, and particularly relates to a piezoelectric thin film nozzle suitable for a micro-electro-mechanical system and a preparation method thereof. The nozzle comprises a silicon substrate, a composite vibrating membrane layer, a lower electrode, a gradient lanthanum-doped lead zirconate titanate piezoelectric thin film and a ring-shaped upper electrode. The piezoelectric thin film is sequentially provided with a lanthanum-rich bottom layer, a lanthanum-transition middle layer and a lanthanum-depleted surface layer along the thickness direction. Through gradient doping, layered atmosphere heat treatment and full-film three-stage gradient crystallization annealing, residual stress is effectively released, warping deformation and micro-crack propagation are inhibited, and the piezoelectric coefficient is improved. The design of the ring-shaped upper electrode and the center reserved spray hole can stably convert the low stress advantage of the material level into the improvement of the liquid droplet spraying direction precision, volume consistency and long-term stability, thereby solving the problem that the piezoelectric thin film is prone to warping and cracking, and the spraying precision and reliability are difficult to be considered in the prior art.

This invention relates to a symmetrical discrete stacked piezoelectric drive structure, a beam splitter chip, and a fabrication method. The scheme comprises an upper piezoelectric actuator formed by sequentially distributing an insulating layer, a first upper electrode, an upper piezoelectric film, and a first lower electrode on the upper surface of a substrate. The first upper and first lower electrodes provide driving voltages for the upper piezoelectric actuator. A lower piezoelectric actuator is formed by sequentially distributing an insulating layer, a second lower electrode, a lower piezoelectric film, and a second upper electrode on the lower surface of the substrate. The potentials of the first and second upper electrodes are kept consistent, as are the potentials of the first and second lower electrodes. The upper and lower piezoelectric actuators are mirror-symmetrically distributed about the substrate. This overall structure reduces the impact of residual stress on device performance, and the upper and lower piezoelectric actuators can achieve motion coupling, increasing driving displacement and driving frequency.

An acoustic wave device including an IDT electrode on a piezoelectric film, in which a Z-axis direction of a crystal is different from a direction of a normal to a major surface. An overlap region of the IDT electrode includes a central region and first and second edge regions. First and second dielectric films are stacked between the piezoelectric film and first and second electrode fingers in the first and second edge regions. When an angle between a first side surface of the first dielectric film and a major surface of the piezoelectric film is α1 and an angle between a second side surface of the second dielectric film and the major surface of the piezoelectric film is α2, α1≠α2 between at least one electrode finger of the first and second electrode fingers and the piezoelectric film.

The application relates to the technical field of multi-modal perception, and particularly provides a burglary-resistant door abnormal intrusion behavior recognition method and system based on multi-modal perception. The method comprises the following steps: collecting tensile length data groups of strain fiber bundles embedded in different areas of a door body, and outputting a deformation gradient matrix; extracting a local abnormal area coordinate set; performing spatial superposition operation on the obtained local abnormal area coordinate set and breakpoint distribution of a conductive paint grid pre-printed on an inner layer of a door panel; outputting a contact pressure distribution atlas of an intrusion action; performing time domain alignment operation on the obtained contact pressure distribution atlas and airflow disturbance sequences collected by micro piezoelectric films arranged at gaps between a door leaf and a door frame; performing feature fusion calculation on the aligned composite feature sequences to obtain a composite feature tensor; and performing classification mapping calculation on the composite feature tensor to output a classification label of abnormal intrusion behavior. The application realizes high-precision recognition of abnormal intrusion behavior of a burglary-resistant door.

The application provides a piezoelectric thin film preparation device and a preparation method thereof. The piezoelectric thin film preparation device comprises a deposition growth cavity module and an annealing cavity structure. The deposition growth cavity module comprises at least an adhesion electrode deposition cavity structure, a buffer deposition cavity structure, a seed deposition cavity structure and a piezoelectric deposition cavity structure. The annealing cavity structure is configured to anneal at least the seed layer and / or the piezoelectric film layer to finally form the piezoelectric thin film. The piezoelectric thin film preparation device of the application additionally provides the seed deposition cavity structure, so that low-energy nucleation points can be formed on the surface of the buffer layer, so that the atoms of the piezoelectric film layer can be directly oriented and rapidly sputtered on the cell template, so as to reduce the nucleation activation energy, thereby effectively reducing the crystallization temperature of the atoms. At the same time, the annealing cavity structure can inject high temperature, so that the atoms can rapidly crystallize on the cell template, and the substrate still maintains low temperature in a short period of time, thereby reducing the influence on the substrate through the dual effects of rapid crystallization of the atoms and reduction of the nucleation activation energy.

The application provides a composite piezoelectric structure, comprising a supporting substrate and a composite piezoelectric layer, the composite piezoelectric layer is located on one side surface of the supporting substrate, and comprises at least two piezoelectric film layers, the at least two piezoelectric film layers have the same crystal cutting type, and a preset included angle is formed between the same in-plane crystal axes of the two adjacent piezoelectric film layers. In the composite piezoelectric structure provided by the application, the at least two piezoelectric film layers have the same crystal cutting type, so that the thermal expansion coefficient matching degree of each piezoelectric film layer is high, the internal stress caused by thermal mismatch can be significantly reduced, and the structural integrity and service life are improved; by setting the preset included angle between the same in-plane crystal axes of the two adjacent piezoelectric film layers, the thermal expansion directions of the two adjacent piezoelectric film layers can be offset to each other, a complementary structure is formed, the composite piezoelectric layer tends to be isotropic, and the thermal stress between the composite piezoelectric layer and the supporting substrate can be reduced.

The application discloses a LiNbO3-based periodic curved three-busbar structure acoustic wave resonator and a preparation method thereof, which comprises a substrate, a piezoelectric film layer arranged on the substrate, an interdigital electrode layer arranged on the piezoelectric film layer, a release hole arranged on the piezoelectric film layer, and a cavity arranged in the substrate, wherein the interdigital electrode layer is provided with symmetrically arranged interdigital electrodes, and two interdigital electrodes on the same side are connected by three parallel periodic curved busbars. The transverse excitation bulk acoustic resonator (XBAR) based on the curved three-busbar structure can effectively suppress the transverse high-order stray mode, significantly weaken the ripple in the passband, suppress the additional acoustic energy loss caused by the parasitic mode, improve the flatness and stability of the frequency response, and improve the signal transmission performance of the device. Compared with the traditional XBAR with the parallel busbar structure, the structure can effectively avoid the excitation of other non-target acoustic modes during the resonance process, thereby improving the spectral purity of the device and increasing the Q value by about 4 times compared with the traditional XBAR.

The present application relates to the technical field of pressure measurement, and particularly relates to a piezoelectric bias capacitive general flexible pressure patch. The piezoelectric bias capacitive general flexible pressure patch comprises, from top to bottom, a bias coupling electrode layer, and a piezoelectric bias module electrically connected with the bias coupling electrode layer; the piezoelectric bias module comprises a piezoelectric film and electrodes arranged on both sides of the piezoelectric film, and the electrodes comprise the bias coupling electrode layer arranged above the piezoelectric film and a first electrode layer arranged below the piezoelectric film; a pressure-capacitance conversion unit comprises a plurality of electrode layers arranged in a vertical direction and dielectric layers arranged between adjacent two electrode layers, and the dielectric layers comprise a plurality of micro-protrusions arranged at intervals; the uppermost electrode layer in the pressure-capacitance conversion unit is the first electrode layer, and the piezoelectric bias module and the pressure-capacitance conversion unit share the first electrode layer. The piezoelectric bias capacitive general flexible pressure patch is suitable for irregular surface application, pressure transmission is more uniform, and stable output can still be maintained in a humid, sweat, long-term contact environment.

The purpose of this invention is to eliminate the influence of crystal structure and lattice matching of the piezoelectric thin film layer and the electrode layer, thereby improving the crystal orientation of the piezoelectric thin film layer. A laminate includes a substrate and a laminated film disposed on at least one surface of the substrate. The laminated film sequentially comprises a first base layer, an electrode layer, and a piezoelectric thin film layer from the substrate side. The first base layer is in contact with the substrate and the electrode layer. The first base layer contains a nitrogen compound containing at least one element selected from Group IIIB to Group VIB elements.

The present disclosure provides a piezoelectric sensor, a manufacturing method thereof and a haptic feedback device, wherein the piezoelectric sensor comprises a substrate, and a first electrode layer, a piezoelectric film layer, an insulating layer and a second electrode layer arranged in sequence away from the substrate, wherein the insulating layer is in contact with at least part of the piezoelectric film layer. The piezoelectric sensor avoids short circuit and improves product yield.

Disclosed herein are a piezoelectric device using a stretchable piezoelectric composite and a method for manufacturing the same. The piezoelectric device using the stretchable piezoelectric composite includes a piezoelectric film printed using the stretchable piezoelectric composite, and a substrate for fixing the piezoelectric film. The stretchable piezoelectric composite is produced by performing a sieving process of aligning piezoelectric nanoparticles, a functionalization process of improving interfacial adhesion by adding a functionalization agent to the aligned piezoelectric nanoparticles, and a mixing process in which the functionalized piezoelectric nanoparticles are mixed with a flexible and stretchable matrix.

The application provides a smart monitoring mattress with a graphene self-heating sleep-aiding function, and relates to the field of smart home and health monitoring.The smart monitoring mattress comprises a mattress main body, a graphene self-heating layer, sleep-aiding traditional Chinese medicine, a piezoelectric film sensor array, a main control unit, a communication module, a display module and a reminding module.The graphene self-heating layer is arranged inside the mattress main body and is used for releasing far infrared radiation under the stimulation of human body temperature.The sleep-aiding traditional Chinese medicine is arranged inside the mattress main body and is located outside the graphene self-heating layer and is spatially coupled with the graphene self-heating layer to form a composite sleep-aiding structure.The graphene self-heating material and the sleep-aiding traditional Chinese medicine are innovatively combined to form a composite sleep-aiding system with a synergistic effect.The piezoelectric film sensor array is integrated to realize the real-time and non-contact detection of core physiological characteristic data of a user, such as heart rate, breathing frequency and body movement.

A method for producing a piezoelectric film substrate according to the invention comprises: forming a lower electrode layer on or over a substrate, forming an adaptation layer containing a predetermined metal element on or over the lower electrode layer, applying a piezoelectric layer containing lead zirconate titanate with a perovskite structure on or over the adaptation layer, wherein the substrate is heated to a predetermined application temperature using a heating device, continuously holding the substrate for a predetermined period after applying the piezoelectric layer, wherein the substrate is heated to the predetermined application temperature, and forming an upper electrode layer after holding the substrate for the predetermined period.

This invention belongs to the field of medical robot technology, specifically relating to a rollable, wrap-around multi-point force sensing film, an actuator arm, and a force sensing method. The invention comprises, from bottom to top, a lower highly elastic base membrane, a distributed heterogeneous lower electrode layer, a PVDF piezoelectric film, a distributed heterogeneous upper electrode layer, and the lower highly elastic base membrane, stacked sequentially. The PVDF piezoelectric film includes a dense sensing segment at the distal end, a uniformly distributed segment in the middle, and a sparse sensing segment at the proximal end. In use, it is rolled up along its length as a rolling axis to form a rollable, wrap-around multi-point force sensing film. This invention, by directly using a flexible film integrating distributed PVDF piezoelectric units as electronic skin to wrap the sidewall of a catheter, not only significantly improves spatial sensing efficiency but also achieves an optimal balance between sensing accuracy and sensing range with a limited number of sensing units, enabling the flexible surgical actuator arm to possess gradient tactile sensing capabilities similar to biological nerves.

A film bulk acoustic wave resonator (FBAR) is disclosed with recessed and raised frame portions in the piezoelectric film. The FBAR can include a substrate, the piezoelectric film supported to oscillate in a direction opposite to a main surface of the substrate, and a pair of top and bottom electrodes formed respectively on top and bottom surfaces of the film. The recessed frame portion and the raised frame portion can be formed in the film to extend adjacent to each other along a periphery of an active region of the film oscillating during an operation of the film on a top surface of the top electrode.

This invention discloses a water-impact magnetic coupling type nonlinear piezoelectric energy harvesting device, belonging to the field of piezoelectric material energy harvesting control. The device includes: an upper base plate, an elastic film, a polyvinylidene fluoride (PVDF) piezoelectric film, a lower base plate, permanent magnets, springs, and a fixed circular frame. The elastic film is adhered to the outer cylindrical walls of the concentrically mounted upper and lower base plates, forming a sealed cavity. The PVDF piezoelectric film is adhered to the outer side of the elastic film. The IS pole of the permanent magnet is fixed to the inner wall of the bottom surface of the upper base plate, while the S pole of the permanent magnet II faces downwards and can move relative to the lower base plate. The N poles of the two sets of permanent magnets face each other, and due to the repulsion of like poles, a nonlinear magnetic repulsion force is generated, achieving overall vibration of the piezoelectric device. One end of each of the four springs is fixed to the geometric center of the four sides of the permanent magnet II, and the other end is fixed to the inner cylindrical wall of the fixed circular frame. Under any external vibration excitation, the piezoelectric film is simultaneously subjected to water impact and nonlinear force, resulting in significant elastic deformation and thus energy harvesting.

The application belongs to the technical field of piezoelectric thin film hetero-integration, and particularly relates to a PMN-PT piezoelectric single crystal thin film heterostructure with a metal acoustic wave reflection layer, a preparation method and application thereof. The PMN-PT piezoelectric single crystal thin film heterostructure comprises a silicon substrate, a silicon dioxide insulating layer, a high acoustic impedance metal intermediate layer and a lead magnesium niobate piezoelectric single crystal thin film layer. The lead magnesium niobate piezoelectric single crystal thin film layer is a lead in niobate-lead magnesium niobate-lead titanate single crystal thin film or a lead magnesium niobate-lead titanate single crystal thin film. Compared with the prior art, the PMN-PT piezoelectric single crystal thin film heterostructure can highly localize acoustic wave energy in the piezoelectric single crystal thin film, significantly suppress acoustic wave energy leakage to the substrate, and solve the acoustic leakage, vertical electric field loss and thermal stress mismatch bottleneck of the conventional piezoelectric hetero-integration technology.

This invention relates to the field of thermal power generation technology, and provides an intelligent isokinetic pulverized coal sampling system and method for predicting the state of pulverized coal tubes and self-cleaning. Based on the instantaneous flow velocity measurement of a piezoelectric thin film sensor array, it achieves precise control of the isokinetic flow of pulverized coal samples in the sampling tube. The piezoelectric sensing and feedback unit obtains the characteristic parameters of pulverized coal flow, and the intelligent control unit diagnoses whether there is a risk of blockage in the sampling tube. It can provide early warning of abnormal conditions such as blockage and flow interruption, and avoid sampling failure. The self-cleaning and effect verification unit quantitatively verifies the cleaning effect based on the zero-flow reference noise and the noise after cleaning, and realizes the quantitative evaluation of the purging effect, avoiding residual pulverized coal contamination of the next sampling.

This invention discloses a method for fabricating a thin-film bulk acoustic wave device, comprising etching a first cavity on a silicon substrate, depositing a sacrificial layer within the first cavity, depositing a first electrode on the sacrificial layer and a portion of the substrate, and sequentially depositing a piezoelectric thin film, a second electrode, and a protective layer on the first electrode and another portion of the substrate in a single step, etching until the piezoelectric thin film is exposed, simultaneously etching to obtain a Q-value enhancement structure and an exposed second electrode, etching deposition vias and release holes on the piezoelectric thin film, depositing a first metal pad layer through the deposition vias to connect the first metal pad layer to the first electrode, depositing a second metal pad layer on the exposed second electrode, and etching the sacrificial layer through the release holes to obtain a second cavity, thereby obtaining the thin-film bulk acoustic wave device; the Q-value enhancement layer is etched from the protective layer by physical etching, such that the etching profile of the Q-value enhancement layer is controlled at 80-90°. This invention also discloses a thin-film bulk acoustic wave device fabricated using this method.

The utility model provides a pipeline leakage monitoring device based on piezoelectric effect, including signal amplifier, one end of signal amplifier is connected to control circuit, signal amplifier other end is connected with piezoelectric film sensor, piezoelectric film sensor lower end is installed on support structure, and piezoelectric film sensor top is opposite to the pipeline leakage point of need monitoring. The utility model provides a pipeline leakage monitoring device based on piezoelectric effect can realize real -time monitoring and high sensitivity monitoring of small leakage.

The application discloses a basketball stand for exciting the interest of children in sports, which comprises a heavy base, a supporting column fixed on the heavy base, a basketball board, a connecting frame connected to the back of the basketball board, a basketball hoop installed on the front of the basketball board, an RGB LED ring surrounding the front of the basketball board for outputting dynamic light effects according to the result of shooting, an infrared array sensor installed on the lower edge of the front of the basketball board for identifying the three-dimensional coordinates of the ball passing through the center of the basket to distinguish the state of the ball entering the basket, and a piezoelectric film sensor embeddedly installed on the inner side of the inner ring of the basketball hoop metal. The basketball stand introduces intelligent feedback and guiding mechanism and the like, improves the participation of children in sports and shooting skills, can excite more children's interest in basketball sports, and simultaneously cooperates with a laser guiding line and a voice prompting system to guide the standing position, hand shape and shooting angle, helps children to establish standard shooting action memory and form correct sports mode.