352 results about "Thin film sensor" patented technology

The present invention relates to organic thin film sensors and the preparation and use thereof in sensing applications, and in particular in glucose sensing. The sensor is characterised by a layered structure comprising a porous wicking layer whose surface is configured to receive a liquid sample. An enzyme is disposed on or within the porous layer for facilitating the generation of a charge carrier from an analyte. A polymer layer in contact with the porous layer is connected to an ohmic conductor for applying a gate voltage to the polymer layer, the polymer layer being conductive to the charge carrier; and an organic semiconducting layer is connected to a source electrode and a drain electrode.

The invention discloses a temperature effect monitoring method and system for a metal roof, particularly relates to the technical field of building structure health monitoring, and is used for solving the problems of decoupling of temperature monitoring data and structural mechanical response, failure of a static early warning threshold and the like in the prior art. Acquiring three-dimensional temperature field data through a distributed temperature sensing network, and extracting a temperature gradient characteristic value from the three-dimensional temperature field data; a piezoelectric film sensor is used for collecting constraint point micro-vibration signals, and dynamic constraint reaction force spectrum characteristic values are extracted through signal transformation and manifold learning; establishing a temperature gradient and mechanical characteristic coupling model to generate a temperature stress evaluation value; dynamically adjusting an early warning threshold range according to the environmental parameters; when the evaluation value exceeds a threshold value, a structure safety early warning signal is output; multi-physical field coupling analysis of temperature field distribution and structural response is achieved, an environment-adaptive dynamic early warning mechanism is constructed, and the accuracy and reliability of metal roof temperature effect monitoring are remarkably improved.

The invention relates to the technical field of oil nozzles, in particular to an efficient atomization injection system for a direct injection oil injector in a cylinder. According to the technical scheme, an injection execution unit adopts a laser-cladded asymmetric injection hole array, fuel oil is evenly distributed in a combustion chamber through aperture gradient distribution and logarithmic spiral arrangement, and the oil-gas mixing effect is enhanced. The dynamic pressure adjusting unit is integrated with an MEMS film sensor array and a fuzzy neural network controller, a sensor can accurately monitor fuel oil pressure in real time, and the controller is based on a 7-12-3 type BP network and can rapidly and accurately adjust fuel injection pressure according to the working condition of an engine through mass data training. The fuel oil pretreatment unit comprises an ultrasonic cavitation device and a graded heating system, the ultrasonic cavitation device reduces the viscosity of fuel oil, and the graded heating system accurately controls the temperature by means of a PTC heater, a semiconductor laser and a vortex generator. The three units work cooperatively, the fuel oil atomization and combustion efficiency is greatly improved, pollutant emission is reduced, and the engine performance is remarkably improved.

The invention relates to the technical field of flexible piezoelectric sensors, and discloses a wide-working-condition multi-dimensional force representation flexible film piezoelectric sensor and a signal analysis method, after a pvdf piezoelectric film is cut in a paper-cut mode, regionalized electrode coating and covering are carried out, and multi-channel signal output is achieved. Therefore, characterization of multi-dimensional force can be realized on one film sensor, and meanwhile, the tension and conformal capability of the sensor are enhanced through the paper-cut design, so that the attachment requirement of a complex surface is met. A multi-layer composite structure is combined and comprises a flexible polymer protection layer and a flexible connection layer, and high sensitivity, excellent tensile property and mechanical durability are achieved through hot pressing and local ultrasonic welding. The sensing capability is enhanced, and the defect of poor tensile property of a traditional PVDF piezoelectric sensor is overcome. The preparation method is simple in process, low in cost and suitable for large-scale industrial production. In addition, the invention provides a deep learning analysis method for multi-channel signals, and classification and nonlinear fitting can be realized.

The invention relates to an embedded rolling bearing with a source end parameter acquisition system and a manufacturing method of the embedded rolling bearing. The embedded rolling bearing comprises a bearing body, and a containing groove is formed in the peripheral face of the bearing body; the thin film sensor assembly is formed in the accommodating groove, and comprises a PDC-ITO (Poly (Propylene Diene Monomer-Indium Tin Oxide)) strain element, a PDC-Pt (Poly (Propylene Diene Monomer)-Pt) temperature element, a PDC-PZT (Poly (Poly (Propylene Diene Monomer)-PZT) piezoelectric thin film and a plurality of bonding pads which are respectively matched with the PDC-ITO strain element, the PDC-Pt temperature element and the PDC-PZT piezoelectric thin film; the acquisition microstructure is arranged in the accommodating groove and comprises a PCB (Printed Circuit Board) and a functional chip which is formed on the PCB and is electrically connected with the plurality of bonding pads through a plurality of electrical interconnection sockets; the heat insulation pouring sealant is poured into the accommodating groove; and a metal cover. Normal installation of the bearing is achieved to the maximum extent, and the defect that the appearance and the size of a traditional external sensor and a traditional collector are limited is overcome.

The embodiment of the invention provides a detection module and electronic equipment. The detection module comprises a pressurizing piece and a film sensor. And the pressurizing piece is used for applying pressure to the measuring part. The film sensor is used for measuring a pulse wave signal of the measuring part and is arranged between the pressurizing piece and the measuring part. According to the detection module and the electronic equipment provided by the embodiment of the invention, the difficulty of miniaturization of the electronic equipment can be reduced.

The invention provides an online monitoring method for a curing process of a resin-based composite material, and belongs to the technical field of curing monitoring of composite materials. In the curing process of the resin-based composite material, a conductive patch is placed on the surface of the resin-based composite material to form a laminated structure consisting of the conductive patch, a dielectric layer containing resin and a high-reflection substrate, and the curing process of the resin-based composite material is deduced in real time by using a microwave signal to radiate the laminated structure and monitoring peak valley characteristics and temperature changes of a reflection signal. According to the method, a microwave signal is utilized to irradiate a laminated structure, and the curing process of the resin-based composite material is judged by monitoring the peak valley characteristics and temperature change of a reflected signal in real time. The in-situ online curing process monitoring method based on the microwave signal and the conductive patch film sensor not only can realize real-time online monitoring of the resin curing key point and the curing degree, but also has the remarkable advantages of being capable of adjusting the monitoring position in real time, realizing curing degree field monitoring and the like.

The invention provides a lithium ion battery assembly and a battery state detection method based on expansion pressure, and belongs to the technical field of lithium ion batteries. The battery assembly comprises: at least two battery cells; the rigid supporting plates and the ion capacitance type thin film sensors are clamped between every two battery monomers, each ion capacitance type thin film sensor comprises at least one sensing unit formed by an ion membrane layer and an electrode array layer arranged below the ion membrane layer, and the sensing units are used for measuring the expansion pressure of the battery monomers; the edge of the rigid supporting plate is convexly provided with a first guide butt joint part, and the locking column penetrates through the first guide butt joint part of the rigid supporting plate, so that each battery monomer and each rigid supporting plate are kept parallel and aligned, and the battery monomer has consistent pre-tightening force after being locked by the locking column. According to the invention, the consistency and the stress uniformity of each single battery in the module can be improved, and the service life and the safety of the battery assembly are prolonged.

The utility model discloses a slurry compaction performance testing device, and belongs to the field of gangue fluidization filling. The cylinder body is fixed with the base and the upper sealing cover through bolts, a filter screen, screen cloth and a screen plate are arranged at the bottom of the cylinder body, and a film sensor is arranged on the inner wall of the cylinder body and connected with a static strain gauge through a data line; the water chute is located on the base and connected to the water pipe and the drainage valve; an axial pressure inlet is positioned in the upper sealing cover and is connected with the constant-speed constant-pressure pump through a water pipe; a sealing rubber ring is arranged on the lower portion of the load transfer piston, and a cavity is formed in the load transfer piston and communicated with the pressure relief opening. During working, the constant-speed and constant-pressure pump is used for loading and stabilizing axial pressure, the film sensor, the displacement sensor and the pressure sensor can record the axial pressure, pressure measurement and strain in a slurry compaction state, and the compaction performance of fluidized slurry is tested. The device is simple in structure, has important practical significance on proportioning optimization of slurry, and plays an important role in promoting development of a gangue fluidization grouting filling technology.

The invention provides a lithium ion battery assembly and a battery expansion pressure detection method, and belongs to the technical field of lithium ion batteries. The lithium ion battery assembly comprises at least two battery monomers and an ion capacitive film sensor clamped between every two battery monomers, the ion capacitance type thin film sensor comprises an ionic membrane layer and an electrode array layer arranged below the ionic membrane layer, and at least one first electrode unit in the electrode array and the ionic membrane layer are laminated to form at least one temperature sensing unit. At least one second electrode unit is in non-press contact with the ionic membrane layer to form at least one pressure sensing unit. The method can improve the calculation accuracy of the expansion pressure of the battery.

The invention provides a control method and device of a drilling and tapping machine and electronic equipment, and relates to the field of data processing. The method comprises the steps that temperature data and deformation data which are sent by a nano-film sensor and aim at a processing object are obtained, and the nano-film sensor is located in a processing area corresponding to the processing object; according to the temperature data and the deformation data, a temperature distribution diagram of the machining area is determined; based on the temperature distribution diagram, surrounding type cooling equipment of the drilling and tapping machine is controlled to cool the machined object in real time; determining a first thread image of a thread corresponding to the processing object according to the deformation data; acquiring a second thread image which is sent by image acquisition equipment of the drilling and tapping machine and aims at a thread corresponding to the processing object; and based on the first thread image and the second thread image, adopting a preset support vector machine model to generate a quality result of a thread corresponding to the processing object. According to the technical scheme, quality detection can be conveniently conducted on the threads machined by the drilling and tapping machine.

The invention relates to the technical field of photovoltaic module manufacturing, in particular to a photovoltaic module vacuum laminating system based on dynamic pressure feedback. The dynamic pressure adjusting module comprises a piezoelectric film sensor and a servo motor, the piezoelectric film sensor is used for detecting the pressure borne by the photovoltaic module, and the control module calculates and obtains the real-time optimal pressure and then controls the servo motor to act so as to achieve the real-time optimal pressure; the heating control module comprises a heating plate, a thermal infrared imager and a PID temperature control unit, the heating plate is used for heating the photovoltaic module, the thermal infrared imager is used for detecting the surface temperature distribution of the photovoltaic module, and the PID temperature control unit is used for controlling the temperature of the heating plate; the vacuum control module comprises a plurality of air chambers which are independently arranged, each air chamber is provided with an air inlet pipeline and an air outlet pipeline which are communicated with the laminating machine cavity, and micro electromagnetic valves are arranged on the air inlet pipelines and the air outlet pipelines.

A preparation method of a polymer-derived high-temperature ceramic thin film sensor is provided. Specifically, a sensitive layer precursor layer is prepared by spraying a sensitive layer precursor liquid on an alumina substrate, and the sensitive layer precursor liquid is obtained by mixing precursor liquid with conductive powder. A protective layer precursor liquid is prepared by spraying protective layer precursor liquid on the sensitive layer precursor layer, and the protective layer precursor liquid is obtained by mixing TiB2 nano-powder, insulating powder and the precursor liquid. The protective layer precursor layer, a solder and the sensitive layer precursor layer are simultaneously pyrolyzed by a one-time pyrolysis process, and thus a protective layer, the solder joints and the sensitive layer are obtained simultaneously. Thus, there is no need to pyrolyze the sensitive layer first, saving the time for pyrolyzing the sensitive layer.

A device and method for representing the foam porosity state of foamed lightweight soil with self-adjusting beams, and relates to the technical field of sound absorption coefficients measurement; the device includes a standing wave tube, a plurality of polyvinylidene fluoride piezoelectric films, a sensor, an exciter, a push-pull handle, an adjustable telescopic tube, a foamed lightweight soil detection material, a charge amplifier, a data memory, a data adapter, a signal generator, an adaptive power amplifier board, and a PC computer; the device of the invention has low cost, long service life, high measurement accuracy, relatively simple production process, and can be applied to different scenarios.

The invention discloses a flexible paper-cut structure film sensor and a manufacturing method thereof, the flexible paper-cut structure film sensor comprises a PI main body structure, a resistance strain layer, conductive pins and a packaging layer, the PI main body structure is formed by cutting a PI film by ultraviolet laser, the resistance strain layer is generated by inducing the PI main body structure by the ultraviolet laser, and the conductive pins are electrically connected with the PI main body structure. The conductive pins are copper wires connected to two ends of the resistance strain layer, the packaging layer is a packaging structure in which PDMS is smeared to the resistance strain layer and the conductive pins for protection, the flexible paper-cut structure thin film sensor is prepared, the traditional Chinese paper-cut technology is utilized, the shape transformation is ingeniously realized, and the flexible paper-cut structure thin film sensor is portable, high in toughness and high in reliability. The flexible paper-cut structure thin film sensor can be used for clamping ultra-soft, overweight and ultra-thin objects in a multifunctional mode through a single gripper.

The utility model discloses a mounting structure of a large-area thin film sensor for a strain test. The mounting structure comprises a mounting adhesive, a protective adhesive and an adhesive tape, the bottom of the large-area thin film sensor is adhered to the surface of the to-be-mounted surface through mounting glue, the mounting glue between the test area and the to-be-mounted surface adopts surface mounting glue or a glue film, and the mounting glue between the circuit area and the to-be-mounted surface adopts fixing glue; the protective glue covers the top of the large-area film sensor and completely wraps the top and the side face of the whole large-area film sensor, and the adhesive tape covers the outside of the protective glue and completely wraps the outside of the whole protective glue. A regional installation mode is adopted, the circuit area is fixed by fixing glue which is easy to use, and the test area is installed by surface mount glue which needs to be pressurized, heated and cured, so that the test precision is ensured, the area which needs to be pressurized and heated is reduced, the problem that large-area pressurization and heating are needed when a meter-scale sensor is integrally mounted is avoided, and the installation speed is improved.

The invention relates to the technical field of sensors. In particular to a preparation method, a stripping method and an application method of a fiber bragg grating film sensor. The preparation method of the fiber bragg grating film sensor comprises the following steps: preparing the fiber bragg grating film sensor consisting of an optical fiber, a packaging part and a grating film; preprocessing the optical fiber and the packaging part; writing a fiber bragg grating into the preprocessed optical fiber to form a fiber bragg grating sensing element; packaging the fiber bragg grating sensing element through a packaging part to form a fiber bragg grating sensing probe; and coating the fiber grating sensing probe with a grating film to obtain the fiber grating film sensor. The device can be tightly attached to a target monitoring sample, and the monitoring sensitivity and accuracy are improved.

The invention relates to the technical field of lithium metal battery health monitoring, and particularly discloses a lithium metal battery pack health monitoring system and method based on thin film sensors, the system comprises a plurality of thin film sensors distributed among lithium metal battery pack cells, and each thin film sensor comprises a temperature measuring unit, a pressure measuring unit, a flexible circuit board and silica gel foam; the adapter plate is electrically connected with the plurality of thin film sensors; the signal acquisition unit is electrically connected with the adapter plate and comprises a constant current source circuit, a signal conditioning circuit, a filter circuit and an analog-to-digital conversion circuit; the input end of the data transmission unit is electrically connected with the output of the analog-to-digital conversion circuit; the input end of the digital signal processor is electrically connected with the output end of the data transmission unit; and the input end of the battery management unit is electrically connected with the output end of the digital signal processor. The mechanical information and the temperature information between the battery monomers can be monitored at the same time, the battery management can evaluate the health state of the battery more comprehensively based on the information, and the abnormal problem can be warned in advance.

The invention discloses a pipeline integrated attitude control rocket engine thrust test structure and a working method thereof, and belongs to the technical field of sensing measurement and control. The testing structure is composed of a front fixed frame, a rear fixed frame, a rear movable frame, a middle-layer movable frame, a front movable frame, a straight connecting beam, a front-end inclined connecting beam, a propellant supply pipeline, a rear-end inclined connecting beam, a sensitive beam, a thin film sensor and a supporting thin beam. The thrust generated by rocket eruption enables the engine and the adapter frame to displace, then a series of structures from the front movable frame to the rear movable frame are driven to move step by step in the horizontal direction, strain function film layers of the four film sensors on the sensitive beam are deformed, and finally a differential Wheatstone bridge is formed by the circuit board for testing. According to the invention, the film sensor and the propellant supply pipeline are integrated on the test structure, and the S-shaped propellant supply pipeline, the circular truncated cone type movable frame structure and the layered overall structure are designed, so that the sensitivity of the test sensor is remarkably improved while the high rigidity of the test device is ensured.

The invention discloses a blade-based in-situ measurement film temperature sensor, which belongs to the technical field of film sensors for aero-engines, and comprises a multilayer film structure, the multilayer film structure is arranged on the surface of a blade, the multilayer film structure and the curved surface of the blade are manufactured in a conformal manner, the thickness of the multilayer film structure is micron-sized, and the thickness of the multilayer film structure is micron-sized. And in-situ measurement of the blade surface temperature is realized. According to the invention, non-disturbance temperature measurement is realized through an ultrathin conformal structure, high temperature resistance, fast response and high precision are realized, and the problem of temperature measurement of aero-engine blades under extreme working conditions is solved.

The invention discloses a high-temperature strain film sensor for detecting thermal stress of a small square billet crystallizer, and relates to the technical field of sensors, the high-temperature strain film sensor comprises a composite system formed by fiber structures, the fiber structures are interwoven and interspersed, and the composite system sequentially comprises a substrate layer, a high-temperature insulating layer, a piezoelectric film layer and a multifunctional composite layer from bottom to top; a channel is arranged in the piezoelectric film layer, the channel penetrates to the high-temperature insulating layer and the multifunctional composite layer, and the channel is connected with external equipment through a lead electrode. The multifunctional composite layer comprises a thermocouple array and a sensitive grid unit which are distributed in parallel and interwoven, and the thermocouple array is used for superposing the thermoelectric effect and increasing the output situation; the sensitive grid unit is used for converting strain of the crystallizer steel pipe into electric signals through sensitive grid deformation and outputting the electric signals, and real-time measurement of stress and strain on the surface or in the crystallizer is achieved. The sensor designed by the invention is good in high temperature resistance, good in structural stability, long in service life and high in measurement precision.

The invention relates to a device for fixing an object by means of magnetic forces generated by an arrangement of magnets (2). An arrangement of flexible, magnetic thin-film sensors (8) is associated with the arrangement of magnets (2), by means of which the magnetic flux densities of the arrangement of magnets (2) are measured. An evaluation unit is provided in which process parameters of the arrangement of magnets (2) and / or the fixing of the object are determined depending on the measured magnetic flux densities.

According to the method and the system for optimizing the interface strength of the ink-jet printing film sensor, provided by the invention, the meso-structure characteristics of the ink-jet printing film sensor with different process parameters under a multi-dimensional process type are observed and acquired, and the LSTM neural network is trained by an ink-jet process parameter matrix and the three-dimensional meso-structure characteristics; obtaining a trained neural network model; a load displacement curve of a scribing head is calculated and obtained through a preset micro-mechanical model and a phase field fracture model, the real interface bonding strength is obtained, the real interface bonding strength is introduced, the trained neural network model is trained again, and a process parameter-micro-structure-interface bonding strength coupling structure-activity relationship is obtained; and in combination with a genetic algorithm, optimizing the bonding strength of the current interface according to the corresponding process parameters in the ink jet process parameter matrix. The parameter optimization period is shortened, the interface strength optimization cost is reduced, and the optimization efficiency is improved.

The invention provides a flexible high-energy laser sensing film sensor. The flexible high-energy laser sensing film sensor comprises a sensing film and a laser high-reflection film layer on the surface of the sensing film. The sensing film is composed of a flexible substrate, an upper surface transition layer, a lower surface transition layer, an upper surface thermistor layer, a lower surface thermistor layer, an upper surface lead layer, a lower surface lead layer, an upper surface protection layer and a lower surface protection layer. The thin film type double-sided resistor array is used for monitoring the laser irradiation transient thermal effect in real time, the laser detection threshold value is increased in combination with the laser high-reflection film layer, and rapid and accurate measurement of laser irradiation parameters such as laser power density, light spot size and irradiation position can be achieved; the device solves the problem that the existing devices such as a laser power meter and a laser spot analyzer are limited in light sensing diameter and are difficult to be suitable for large-spot-size laser parameter measurement and laser sensing alarm, and has the advantages of flexibility, large area, simple structure, low cost and the like.

The invention relates to the technical field of under-pressure detection, in particular to a high-pressure gas storage leakage point under-pressure detection device which comprises a mechanical arm, the mechanical arm comprises a base, a large arm is movably hinged to the middle of the upper surface of the base, and a first supporting arm and a second supporting arm are hinged to the other end of the large arm in an L shape. Fixing seats are movably mounted at the other ends of the first supporting arm and the second supporting arm, an infrared thermal imaging detector is fixedly mounted at the other end of the first supporting arm through the fixing seat, fixing supports are fixedly mounted at the other end of the second supporting arm through the fixing seat, and a film sensor is fixedly mounted on the sides, close to each other, of the inner surfaces of the fixing supports; supporting legs are fixedly arranged on the outer surface of the side, away from the second supporting arm, of the fixing support, and an integrated machine is fixedly installed in the middle of the upper surface of the fixing support. According to the invention, comprehensive detection of the wall surface of the high-pressure gas storage is facilitated, whether gas leakage exists on the wall surface is found, the use risk of the high-pressure gas storage is reduced, and the gas storage effect is guaranteed.

The utility model relates to an air bag pressure detection device for a film sensor. A detection assembly is arranged on the workbench and comprises a rack, an oil cylinder, a middle plate, an air bag bottom plate, an air bag film, a pressing frame and a film sensor, the sliding direction of the middle plate is perpendicular to the air bag bottom plate, an air groove is further formed in the air bag bottom plate, and the air bag film tightly covers the air groove and is fixed to the air bag bottom plate through the pressing frame. The air groove is provided with an air inlet and an air outlet, the air bag bottom plate is provided with an air inlet channel and an air outlet channel, an inlet of the air inlet channel is formed in the side edge of the air bag bottom plate, an outlet of the air inlet channel is communicated with the air inlet, an outlet of the air outlet channel is also formed in the side edge of the air bag bottom plate, and the air outlet in the air groove is communicated with the air outlet channel. The middle plate is driven by the oil cylinder to enable the thin film sensor to be tightly pressed on the air bag film, and the thin film sensor is detected by inflating the air groove. The device is ingenious in structure, convenient and practical.

The invention discloses a low-concentration hydrogen detection MIS type thin film sensor and a preparation method thereof, and belongs to the technical field of oil-immersed transformer online fault monitoring. The sensor sequentially comprises a metal nickel sheet substrate, a nickel oxide semiconductor layer, an insulating layer, a base layer and an electrode layer from bottom to top, the electrode layer comprises a catalytic electrode layer and a gold connection electrode layer; the insulating layer is any one of silicon oxide, aluminum oxide, silicon nitride and aluminum nitride; the bottom layer is any one of chromium, titanium, nickel-chromium and titanium-tungsten; and the catalytic electrode layer is one or a compound of platinum and palladium. The low-concentration hydrogen detection MIS type thin film sensor has the advantages that the low-concentration hydrogen detection MIS type thin film sensor is provided by fully considering the problems that the transformer insulating oil environment temperature change is large and the hydrogen concentration is low according to the requirement for on-line monitoring of the hydrogen concentration in the transformer insulating oil, the sensitivity is high, the detection lower limit is low, the sensor machining and packaging difficulty is lowered, and the cost is reduced. Good application prospects are realized.

The invention discloses an angle identification method and device for data enhancement of a thin film bending sensor, and belongs to the field of deep learning. The invention provides an electrical impedance tomography (EIT) inspired angle identification method for data enhancement of a thin film bending sensor, which comprises the following steps of: arranging a series of metal electrodes on the edge of a microstructure etching pattern to detect impedance values pairwise; therefore, the output signal of the thin film sensor is enhanced into a feature vector reflecting the impedance value distribution condition, and finally angle prediction is carried out based on the feature vector through a deep learning network. According to the invention, the impedance change on the thin film bending sensor can be monitored and analyzed more accurately, and the angle identification performance of the bending sensor is greatly improved.

The invention belongs to the field of robot joint torque measurement, and provides a thin film type torque sensor integrated on a harmonic reducer in situ and a preparation method thereof, and the thin film type torque sensor is integrated on the surface of a flexible gear flange groove or the inner side plane of a flange in the harmonic reducer in situ. The film type torque sensor comprises a middle transition layer film, an insulating film, a torque sensing unit and a protective film from bottom to top. And a signal processing unit of the film type torque sensor is arranged on one side of the groove of the flexible gear flange. Torsional deformation information measured by the torque sensing unit is superposed through the Wheatstone bridge circuit and then is output to the signal processing unit in the form of an electric signal. The thin film type torque sensor can effectively eliminate interference generated by rotation of the wave generator in the process of in-situ measurement of the output torque of the harmonic reducer, and accurate output torque information is obtained. The surface of the thin film sensor obtained by the preparation method is compact and non-porous.

The present disclosure provides a metal mesh array and a manufacturing method thereof, a thin film sensor and a manufacturing method thereof, and belongs to the field of electronic device technology. A method for manufacturing a metal mesh array includes: providing a base substrate; forming a first metal layer on the base substrate as a seed layer; forming a first interlayer dielectric layer on a side of the seed layer away from the base substrate such that the first interlayer dielectric layer includes first groove structures and second groove structures in working areas and arranged in an intersecting manner; and performing an electroplating process on the seed layer to form first metal lines in the first groove structures and second metal lines in the second groove structures. The first metal lines and second metal lines in each working area are arranged in an intersecting manner, thereby forming a metal mesh.