219 results about "Thin film sensor" patented technology

The invention discloses a temperature effect monitoring method and system for a metal roof, particularly relates to the technical field of building structure health monitoring, and is used for solving the problems of decoupling of temperature monitoring data and structural mechanical response, failure of a static early warning threshold and the like in the prior art. Acquiring three-dimensional temperature field data through a distributed temperature sensing network, and extracting a temperature gradient characteristic value from the three-dimensional temperature field data; a piezoelectric film sensor is used for collecting constraint point micro-vibration signals, and dynamic constraint reaction force spectrum characteristic values are extracted through signal transformation and manifold learning; establishing a temperature gradient and mechanical characteristic coupling model to generate a temperature stress evaluation value; dynamically adjusting an early warning threshold range according to the environmental parameters; when the evaluation value exceeds a threshold value, a structure safety early warning signal is output; multi-physical field coupling analysis of temperature field distribution and structural response is achieved, an environment-adaptive dynamic early warning mechanism is constructed, and the accuracy and reliability of metal roof temperature effect monitoring are remarkably improved.

The invention provides an online monitoring method for a curing process of a resin-based composite material, and belongs to the technical field of curing monitoring of composite materials. In the curing process of the resin-based composite material, a conductive patch is placed on the surface of the resin-based composite material to form a laminated structure consisting of the conductive patch, a dielectric layer containing resin and a high-reflection substrate, and the curing process of the resin-based composite material is deduced in real time by using a microwave signal to radiate the laminated structure and monitoring peak valley characteristics and temperature changes of a reflection signal. According to the method, a microwave signal is utilized to irradiate a laminated structure, and the curing process of the resin-based composite material is judged by monitoring the peak valley characteristics and temperature change of a reflected signal in real time. The in-situ online curing process monitoring method based on the microwave signal and the conductive patch film sensor not only can realize real-time online monitoring of the resin curing key point and the curing degree, but also has the remarkable advantages of being capable of adjusting the monitoring position in real time, realizing curing degree field monitoring and the like.

The invention relates to the technical field of photovoltaic module manufacturing, in particular to a photovoltaic module vacuum laminating system based on dynamic pressure feedback. The dynamic pressure adjusting module comprises a piezoelectric film sensor and a servo motor, the piezoelectric film sensor is used for detecting the pressure borne by the photovoltaic module, and the control module calculates and obtains the real-time optimal pressure and then controls the servo motor to act so as to achieve the real-time optimal pressure; the heating control module comprises a heating plate, a thermal infrared imager and a PID temperature control unit, the heating plate is used for heating the photovoltaic module, the thermal infrared imager is used for detecting the surface temperature distribution of the photovoltaic module, and the PID temperature control unit is used for controlling the temperature of the heating plate; the vacuum control module comprises a plurality of air chambers which are independently arranged, each air chamber is provided with an air inlet pipeline and an air outlet pipeline which are communicated with the laminating machine cavity, and micro electromagnetic valves are arranged on the air inlet pipelines and the air outlet pipelines.

A device and method for representing the foam porosity state of foamed lightweight soil with self-adjusting beams, and relates to the technical field of sound absorption coefficients measurement; the device includes a standing wave tube, a plurality of polyvinylidene fluoride piezoelectric films, a sensor, an exciter, a push-pull handle, an adjustable telescopic tube, a foamed lightweight soil detection material, a charge amplifier, a data memory, a data adapter, a signal generator, an adaptive power amplifier board, and a PC computer; the device of the invention has low cost, long service life, high measurement accuracy, relatively simple production process, and can be applied to different scenarios.

The invention relates to the technical field of sensors. In particular to a preparation method, a stripping method and an application method of a fiber bragg grating film sensor. The preparation method of the fiber bragg grating film sensor comprises the following steps: preparing the fiber bragg grating film sensor consisting of an optical fiber, a packaging part and a grating film; preprocessing the optical fiber and the packaging part; writing a fiber bragg grating into the preprocessed optical fiber to form a fiber bragg grating sensing element; packaging the fiber bragg grating sensing element through a packaging part to form a fiber bragg grating sensing probe; and coating the fiber grating sensing probe with a grating film to obtain the fiber grating film sensor. The device can be tightly attached to a target monitoring sample, and the monitoring sensitivity and accuracy are improved.

The invention discloses a high-temperature strain film sensor for detecting thermal stress of a small square billet crystallizer, and relates to the technical field of sensors, the high-temperature strain film sensor comprises a composite system formed by fiber structures, the fiber structures are interwoven and interspersed, and the composite system sequentially comprises a substrate layer, a high-temperature insulating layer, a piezoelectric film layer and a multifunctional composite layer from bottom to top; a channel is arranged in the piezoelectric film layer, the channel penetrates to the high-temperature insulating layer and the multifunctional composite layer, and the channel is connected with external equipment through a lead electrode. The multifunctional composite layer comprises a thermocouple array and a sensitive grid unit which are distributed in parallel and interwoven, and the thermocouple array is used for superposing the thermoelectric effect and increasing the output situation; the sensitive grid unit is used for converting strain of the crystallizer steel pipe into electric signals through sensitive grid deformation and outputting the electric signals, and real-time measurement of stress and strain on the surface or in the crystallizer is achieved. The sensor designed by the invention is good in high temperature resistance, good in structural stability, long in service life and high in measurement precision.

The invention discloses an angle identification method and device for data enhancement of a thin film bending sensor, and belongs to the field of deep learning. The invention provides an electrical impedance tomography (EIT) inspired angle identification method for data enhancement of a thin film bending sensor, which comprises the following steps of: arranging a series of metal electrodes on the edge of a microstructure etching pattern to detect impedance values pairwise; therefore, the output signal of the thin film sensor is enhanced into a feature vector reflecting the impedance value distribution condition, and finally angle prediction is carried out based on the feature vector through a deep learning network. According to the invention, the impedance change on the thin film bending sensor can be monitored and analyzed more accurately, and the angle identification performance of the bending sensor is greatly improved.

The invention discloses a flexible piezoelectric cilia sensor array for detecting flow velocity, flow direction and air pressure, which belongs to the field of bionic airflow sensing and comprises an air bag cilia sensor array, a piezoelectric film sensor array, a signal processing module, an airflow signal output end, a comprehensive signal output end and a wire. The air bag cilium sensor array is composed of air flow sensing units and comprises a base, a supporting piece, a film air bag, an annular electrode and piezoelectric cilia. The piezoelectric film sensor array comprises a common ground layer, a sensing layer, a positive electrode layer and an isolation protection layer from top to bottom; and the signal processing module comprises a comprehensive signal receiving end, an airflow signal receiving end and an external equipment connecting end. The air bag cilium sensor array and the piezoelectric film sensor array sense air flow and air pressure signals in real time and input the signals into the signal processing module, electric signals output by the connecting end of external equipment are analyzed, and multi-dimensional, real-time and high-sensitivity detection of the flow speed, the flow direction and the air pressure is achieved.

The invention relates to the technical field of pipeline flow velocity measurement, and provides a non-contact pipeline fluid flow velocity measurement method based on a neural network model, and the method comprises the steps: collecting signal data sets at different pipeline flow velocities through a piezoelectric film sensor; performing two-dimensional Fourier transform on the signal data set, and converting the signal into a two-dimensional energy spectrogram of a frequency-wavenumber domain; the two-dimensional energy spectrogram predicts the flow velocity of the fluid through a two-dimensional neural network model. The collected signals are subjected to two-dimensional Fourier transform and converted into the two-dimensional energy spectrogram of the frequency-wavenumber domain, the signal processing capacity is effectively improved, more accurate and meaningful input data are provided for the two-dimensional neural network model, the two-dimensional neural network model is adopted for flow velocity prediction, the two-dimensional energy spectrogram serves as input, and the flow velocity prediction accuracy is improved. And features are automatically extracted and the flow velocity is predicted through a deep learning technology. According to the method, a traditional signal algorithm for processing the workpiece problem in the complex turbulence environment through the flow speed is overcome, and the measurement precision and robustness are improved.

A system for determining a concentration of an analyte, such as B-type natriuretic peptide (BNP), in a fluid sample, such as a blood sample, includes a sample cartridge, a sensor reader, and a data processing system. The cartridge comprises a sample chamber with an electrochemical sensor, such as a carbon nanotube thin film sensor, and a connector for coupling with the sensor reader. The sensor reader is operable to perform impedance spectroscopy sweeps on the sensor at preconfigured time intervals to generate a set of temporal impedance spectra, which is communicated to the data processing apparatus. The latter operates a trained machine learning model on the set of temporal impedance spectra to generate the concentration of the analyte in the fluid sample. The system enables convenient and reliable point-of-care analyte concentration determination for prognostication of a patient condition.

The invention belongs to the technical field of gas sensors, and discloses a portable ratio fluorescent film sensor for visual detection of oxygen as well as a preparation method and application of the portable ratio fluorescent film sensor. According to the sensor, polymethyl methacrylate is used as a base material, a carbon dot emitting blue light is used as a fluorescent indicator, protoporphyrin emitting red light is used as a fluorescent reference agent, and the two materials are physically blended to form a blue-red dual-emission system; under the excitation of 365nm ultraviolet light, the oxygen concentration affects the yield of active oxygen, the active oxygen quenches the fluorescence of the carbon dots, the fluorescence of protoporphyrin is stable, and the sensor gradually changes from blue violet to red. Meanwhile, the invention discloses an oxygen quantitative / semi-quantitative detection method of the sensor. The preparation process is simple, the cost is low, the detection operation is simple and convenient, the anti-interference performance is strong, the high-sensitivity visual portable detection of the oxygen concentration can be realized, and the sensor is suitable for the fields of food packaging, medical monitoring, industrial safety and the like, and has the potential of large-scale production and commercial application.

The invention provides a hafnium-zirconium-oxygen film, a preparation method thereof and a hafnium-zirconium-oxygen film sensor, and belongs to the technical field of piezoelectric sensors, the hafnium-zirconium-oxygen film is prepared from a hafnium-zirconium-oxygen material, the chemical general formula of the hafnium-zirconium-oxygen material is Aly-HfxZr1-xO2, x is greater than or equal to 0.3 and less than or equal to 0.7, and y is greater than or equal to 0.02 and less than or equal to 0.08. The lead-free hafnium-based oxide is selected as a piezoelectric core, HfxZr1-xO2 is adopted as a matrix, Al is doped to stabilize an orthogonal ferroelectric phase and inhibit oxygen vacancy, d33 = 85-95 pC / N within the thickness range of 10-200 nm and reaches 90% of that of an existing PZT film, and the Curie temperature is increased to 600 DEG C and is greatly increased compared with 350 DEG C of the PZT film. And the material is completely free of lead and conforms to the RoHS instruction.

The invention belongs to the field of film sensors, and discloses a preparation method of a lanthanum aluminate / strontium titanate nanostructure for hydrogen detection, which comprises the following steps: preparing a strontium titanate single crystal substrate, depositing a single crystal epitaxial lanthanum aluminate film on the strontium titanate single crystal substrate by pulse laser to obtain a single crystal epitaxial lanthanum aluminate / strontium titanate material; then, a stripe-shaped periodic surface nanostructure is formed on the surface of the single crystal epitaxial lanthanum aluminate thin film through femtosecond laser induction, a lanthanum aluminate / strontium titanate nanostructure is obtained, and then precious metal nanoparticles are deposited on the surface of the lanthanum aluminate / strontium titanate nanostructure. According to the preparation method, the highly-ordered single-crystal lanthanum aluminate / strontium titanate heterogeneous film is obtained by accurately controlling pulse laser deposition process parameters, and a nano stripe periodic structure is prepared on the surface of lanthanum aluminate by accurately controlling pulse femtosecond laser processing parameters, so that the specific surface area is effectively increased, gas adsorption sites are increased, and the specific surface area of the lanthanum aluminate / strontium titanate heterogeneous film is increased. And the gas charge transmission capability of the lanthanum aluminate / strontium titanate interface two-dimensional electron gas is improved.

The present application relates to a kind of device and method for measuring solid-liquid two-phase flow dynamics information, including measuring plate, glass plate, pore pressure sensor, filter screen, triaxial force sensor, force plate, outer pressure strip, inner pressure strip, sealing film, sensor bracket, dynamics information includes the pressure of liquid component in two-phase flow and the force of overall to force plate;The present application can ensure fluid seal when the mechanical sensor is reasonably measured dynamics information;Meanwhile, the present application can also realize the simultaneous measurement of solid-liquid two-phase flow kinematics and dynamics information by mechanical sensor cooperation high-speed camera technology.

The application discloses a sheet type integrated platinum film heat flow sensor for a hypersonic shock tunnel, which comprises a glass substrate in a sheet shape, a plurality of platinum thin film lines arranged on the surface of the glass substrate along the width direction of the glass substrate, and silver paste contacts corresponding to the platinum thin film lines arranged on the side edges of the glass substrate and electrically connected with the platinum thin film lines, wherein the end of the silver paste contact away from the platinum thin film line is used for welding a lead wire. The sheet type integrated platinum thin film line resistance sensor has the characteristics of high frequency response of a two-millimeter-diameter thin film sensor. After the thickness of the glass substrate as a sensor bearing substrate is reduced, the sensor can be applied to a particularly thin part of an aircraft for heat measurement, and a measurement point with a gradient range is formed on the glass substrate, so that the aerodynamic heat of the aircraft surface with a certain gradient can be measured.

The application relates to the technical field of temperature measurement, and discloses a distributed temperature measurement method for the surface of a solid oxide fuel cell unit, which comprises the following steps: preparing a PDC thin film temperature sensor array on the surface of the solid oxide fuel cell, so as to realize distributed measurement of the surface temperature of the solid oxide fuel cell; wherein the PDC thin film temperature sensor array comprises a transition layer, an insulation layer, a sensitive layer, a wire layer, a bonding pad, a protective layer and a lead connection structure; the transition layer is arranged above the cathode, the anode or the electrolyte of the solid oxide fuel cell, the insulation layer covers the top of the transition layer, the sensitive layer, the wire layer and the bonding pad are all arranged above the insulation layer, the sensitive layer comprises an array of multiple temperature sensitive units, the lead connection structure is connected with the wire layer through the bonding pad, and the protective layer covers the top of the sensitive layer and the wire layer. The application can reduce process steps and improve the compatibility of the thin film sensor and the solid oxide fuel cell material.

The present invention discloses a high-density piezoelectric array flexible thin film sensor and its acoustic-assisted 3D manufacturing method. This sensor includes an upper electrode layer, a sensing layer, and a lower electrode layer; the upper electrode layer and the sensing layer are provided with mutually cooperating concave-convex interlocking positioning structures, the upper electrode layer and the lower electrode layer are provided with an upper layer of microparticle silver electrode array and a lower layer of microparticle silver electrode array, respectively, and the sensing layer is provided with a barium titanate microparticle strip array, and the upper layer of microparticle silver electrode array is electrically connected to the lower layer of microparticle silver electrode array via the barium titanate microparticle strip array; this sensor is prepared by an acoustic-assisted 3D printing manufacturing method. The method of the present invention realizes the additive manufacturing of a high-resolution flexible pressure film sensor of 254DPI, solves the problem of low density of traditional piezoelectric film arrays, improves pressure sensing performance and detection resolution, and enhances the flexibility and adherence of the piezoelectric film.

The invention discloses an intelligent battery life prediction method depending on early-stage characteristics, and the method comprises the steps: implanting an optical fiber sensor, a thin film sensor or a pressure sensor in a lithium ion battery, and obtaining the internal state information, such as internal strain and internal temperature, of a battery formation and early-stage circulation stage in real time. A battery multi-dimensional feature database containing early internal state features is constructed by combining the external voltage and capacity of the same period, and the internal association between the early internal parameter features and the long-term cycle life of the battery is explored by using an artificial intelligence algorithm to realize life prediction. According to the method, the limitation that the service life is predicted by depending on long-term cycle data or external sensing traditionally is broken through, early-stage accurate prediction of the health state of the battery is realized, and a brand new technical means is provided for production screening, echelon utilization and full-life-cycle management of the battery.

A kind of space micro debris monitoring micro-nano satellite based on double-layer film sensor.The satellite carries out bidirectional verification through non-vision in-situ measurement of double-layer film sensor and visual measurement of monitoring camera, carries out monitoring on space micro debris with size less than 1 cm, obtains data information such as velocity vector of debris, and provides real-time and accurate micro debris cloud data.The normal direction of satellite film is the same as the direction of satellite speed, which increases the probability of collision monitoring between satellite and space micro debris.The folding and unfolding mechanism adopted by the present application has small folding volume and is convenient to unfold, and can be used as a debris monitoring device and satellite de-orbit device commonly installed in micro-nano satellite module, and has double functions.The locking-releasing mechanism adopted by the present application can realize locking of the whole mechanism only by using small pre-tightening force, and the design of burning rope release can reduce the separation impact to the minimum, and improve the stability and safety of the system.

The invention provides a sensor packaging structure and an ultrasonic gas flowmeter. The ultrasonic gas flowmeter comprises a sensor structure and an acoustic structure. The sensor packaging structure comprises one or more thin film sensors, an interconnection layer and an interface layer. On one hand, the sensor structure and the acoustic structure are separately designed and are connected through the interface layer, so that the film sensor can be independently manufactured, and the production efficiency is improved. On the other hand, due to the double-layer stacked structure of the two PCB layers, the interconnection layer provides enough rigidity and support, circuit connection and mechanical interface functions are achieved together with the interface layer, and the structure is stable. And on the other hand, the total packaging thickness is smaller than the thickness of the acoustic structure, so that when the packaging structure is mounted at the inlet of the acoustic structure, the surface of the vibrating diaphragm of the thin film sensor does not contact or collide with the inner wall of the acoustic structure, sensor damage caused by mechanical stress is avoided, sound waves can enter an acoustic channel without hindrance, and the reliability of the sensor is improved. And normal operation of the film sensor is ensured.

The invention discloses a general high-precision fixed-point static recognition detection box, an electronic nose and a control method thereof, and the electronic nose comprises the general high-precision fixed-point static recognition detection box and a filter assembly. By adopting the high-precision universal static recognition detection box, the electronic nose and the control method thereof, the type of each gas detection film sensor can be adaptively adjusted according to the type of the detected gas and the detection environment; the position of the detection space can be adjusted, so that the operation convenience is greatly improved; the detection space can be equivalent to the effect of multiple redundant tests through one test; meanwhile, when the detected gas is sucked into the detection space, the detected gas can be filtered through the corresponding filters in sequence, and interference gas and impurities are filtered out; the filter element of each stage of filter has self-checking and self-cleaning functions; the ratio of detected gas can be compressed, so that the detection requirements of some specific rarefied gas are met; the whole device is extremely compact, and the application requirements of miniaturization and modularization are met.

The invention discloses a dual-wavelength femtosecond laser direct-writing miniaturized precursor ceramic high-temperature thin film sensor, and relates to the technical field of high-temperature thin film sensor manufacturing. Depositing the precursor functional slurry on the surface of a substrate layer by layer by adopting additive manufacturing processes such as blade coating, direct writing and the like, and performing pyrolysis to form an amorphous ceramic multilayer film; based on a dual-wavelength femtosecond laser micro-nano processing platform, the device comprises 1035nm / 343nm double light sources, a light path transmission system and a motion platform, and the characteristics of femtosecond laser ultrashort pulse and high peak power density are utilized to realize submicron precision graphical processing of a precursor ceramic film. And the area of the high-temperature film sensor unit is reduced from the square millimeter level of the traditional process to the square micron level. The method has the advantages of dual-wavelength laser collaborative processing, multi-layer film compatibility and the like, overcomes the disadvantages of large size and poor forming precision of a traditional additive manufacturing precursor ceramic film sensor, and provides a new normal form for integrated manufacturing of a micro sensor array serving in an extreme environment.

The present application relates to the technical field of sensor, in particular to a piezoelectric film sensor, which comprises a piezoelectric film, a sensor substrate, upper and lower electrodes respectively arranged on the upper and lower surfaces of the sensor substrate, electrode lead-out structures respectively arranged on the side edges of the upper and lower electrodes, each electrode lead-out structure being located on the same side of the sensor substrate and on the same horizontal plane of the sensor substrate, and a mass block arranged on the piezoelectric film, the piezoelectric film being connected to an external printed circuit board, the mass block being located in a groove of the printed circuit board, and the electrode lead-out structures being connected to the bonding pads of the printed circuit board through connectors; the piezoelectric film sensor can be miniaturized on the printed circuit board, the complexity of the sensor structure is reduced, the limitation on the mounting tolerance and the device tolerance is reduced, and the cost of the device is reduced.

The utility model relates to the technical field of pressure detection, in particular to a pressure detection sensor and a two-wheeled vehicle, and the pressure detection sensor comprises a mounting piece, a matching piece and a sensor, the mounting piece can be mounted on an external component; the matching piece is connected with the mounting piece; the sensor is attached to the matching piece; when the matching piece is pressed, the matching piece deforms, and the sensor can detect the deformation quantity of the matching piece so as to output a pressure value. The two-wheeled vehicle comprises the pressure detection sensor. Compared with a thin film sensor which needs to additionally modify the structure of an external part to adapt to installation and use of the thin film sensor and needs to transmit pressure to the thin film sensor to enable the thin film sensor to deform so that the size of the thin film sensor has a requirement, the thin film sensor has the advantages that the external pressure is converted into deformation of a matching part; according to the pressure detection device, the deformation of the matching part is detected through the sensor so as to output the pressure value, pressure detection is achieved, the applicability is better enhanced, and the use cost is reduced.

The application discloses a piezoelectric film sensor algorithm calibration system and application thereof, and particularly relates to the technical field of sensors, which comprises a pressure input unit, an output end of the pressure input unit is electrically connected with an input end of a sensor unit, an output end of the sensor unit is electrically connected with an input end of a pressure acquisition unit, an input end of the pressure acquisition unit is electrically connected with an output end of the pressure input unit, and an output end of the pressure input unit is electrically connected with an input end of a waveform processing unit. The application adopts the waveform processing unit to realize the oscillation caused by the dispersion effect in the shock wave waveform in the pressure input process, so that the waveform has obvious wave peaks, the impact force in the input process is more accurate, the influence of the chaotic waveform on the input pressure value measurement is reduced, the calibration algorithm is adopted to realize the rapid calibration process of the sensor itself, and the accuracy calibration confirmation when leaving the factory and the re-calibration after the sensor maintenance are realized.

The invention belongs to the technical field of tooth adjacent surface contact area detection, and particularly discloses a tooth adjacent surface contact area thin film sensor detection device which comprises a thin film pressure sensor module, a data acquisition module, a signal processing module, a display module and a data storage and transmission module. The signal processing module is respectively connected with the data acquisition module, the display module and the data storage and transmission module; the thin film pressure sensor module is of an array structure composed of a plurality of sub-sensors, and each sub-sensor has a unique position code and is used for collecting pressure signals of a tooth adjacent surface contact area and outputting resistance change signals with position information. The problems that an existing sensor array cannot form a high-precision shape contour, cannot be spliced into a continuously measurable contact shape and cannot output shape parameters of a tooth adjacent surface contact area, and the requirements of orthodontics, repair and the like for accurate design of the adjacent surface contact shape are difficult to meet are solved.

This invention discloses a method and system for online monitoring of fiber pressure bearing during composite material molding, belonging to the field of composite material molding and preparation. The method includes: S1, embedding an online fiber pressure bearing monitoring sensor into the interlayer of the composite material to be monitored; the online fiber pressure bearing monitoring sensor is a porous conductive network thin-film sensor with piezoresistive effect; S2, applying pressure in the thickness direction of the composite material during molding; S3, monitoring the resistance change of the online fiber pressure bearing monitoring sensor to reflect the change in fiber pressure bearing during the composite material molding process. This invention eliminates the influence of resin pressure on the sensor signal output during composite material molding, achieving accurate online monitoring of fiber pressure bearing during the composite material molding process. Furthermore, the monitoring process does not affect the molding process or quality of the composite material, and does not reduce the service performance of the molded composite material, or even improve the interlayer mechanical properties.

This invention discloses a method for fabricating a photonic crystal hydrogel film sensor with a self-reporting elastic modulus function and its application. The method involves fabricating a hydrogel film with a periodic photonic crystal structure and constructing a bio-interface on its surface that can dynamically regulate cell adhesion, detachment, spreading, migration, proliferation, and differentiation. An optical imaging system is used to acquire images of the structural color changes of the photonic crystal hydrogel film. Image processing extracts color parameters, which are then converted into changes in reflected wavelength and the film deformation field. The elastic modulus of the film is calculated by inverting the deformation field generated by microspheres of known mass placed on the film surface, combined with an elasticity model. By combining the cell-interface interaction deformation field, the cell-interface interaction force and its spatial distribution can be obtained. A photonic crystal hydrogel film sensor with a self-reporting hardness function is constructed. This method achieves integrated biomechanical research combining dynamic regulation and real-time monitoring, offering advantages such as non-destructive operation, real-time imaging, and acquisition of mechanical spatial distribution.

The application provides a packaging structure and equipment of a platinum resistance thin film sensor, and relates to the technical field of temperature sensors. The inner top of a packaging shell is fixedly provided with a protective cylinder, the top of the protective cylinder is provided with a top ring, the bottom of the packaging shell is provided with a bottom ring, the inner top ring is provided with a spacing ring, the inner bottom ring is provided with a closing ring, a positioning assembly is arranged between the spacing ring and the closing ring, the inner positioning assembly is provided with a platinum resistance probe, the top of the platinum resistance probe is provided with a driving rod, the inner driving rod is provided with a wire, and one side of the packaging shell is provided with a mounting assembly. The device is provided with a packaging shell and a protective cylinder, can play a multi-layer protection role on the platinum resistance probe, prolongs the service life of the platinum resistance probe, reduces damage caused by the external environment, and ensures stability and reliability in long-term use.

A coating system to be used as thin film sensor includes a piezoresistive sensor element. The piezoresistive sensor element is a layer embedded in the coating system. The coating system is deposited on a surface of a substrate. The piezoresistive sensor element comprises at least one hydrogen free tetrahedral amorphous carbon coating doped with a ta-C:X coating layer, where X is one or more chemical elements selected from the elements groups 13 and 15 of periodic table of elements, wherein the ta-C:X coating layer exhibits an anisotropic gage factor.