Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor

A carbon dioxide, gas thin film technology, applied in the direction of using material absorption and weighing, can solve the problems of complex process and high cost of gas thin film SAW sensor, and achieve the effect of material saving, accurate sensing function and cost reduction

Inactive Publication Date: 2014-08-20
TIANJIN UNIVERSITY OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problems of complex process and high cost in the manufacturing process of the existing gas thin film SAW sensor, and to provide a method for manufacturing a fully printed electronic carbon dioxide gas thin film SAW sensor

Method used

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  • Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor
  • Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor
  • Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor

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Embodiment 1

[0029] The specific implementation steps are as follows:

[0030] 1. Selection of piezoelectric substrate: ST-cut quartz with a temperature coefficient of zero is selected as the piezoelectric substrate in the present invention.

[0031] The ST-cut quartz substrate with zero temperature coefficient prevents the influence of temperature on the measurement. Its wave velocity is 3159m / s; the electromechanical coupling coefficient is 0.16%. In order to reduce unnecessary loss during SAW transmission, it is necessary to grind, clean and polish the surface of the substrate.

[0032] 2. Electrode design and printing: The present invention uses a dual-channel delay line structure and a uniform interdigitated electrode structure. In the dual-channel structure, the SAW propagation path of one channel is not processed for reference and comparison; while in the other A sensitive film is printed on the channel to detect gas, and finally the two signals are output through the mixer. ...

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Abstract

The invention relates to a manufacturing method of an all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor. The manufacturing method disclosed by the invention specifically comprises the following steps: selecting a piezoelectric substrate; designing and printing an electrode; preparing and printing a sensitive material; and designing and printing a driving circuit. Compared with the traditional microelectronic process, the carbon dioxide thin-film SAW sensor prepared based on printed electronics has the obvious advantages of being low in cost, simple and rapid in manufacturing process, environmentally friendly and the like.

Description

technical field [0001] The invention belongs to the field of preparation technology of a surface acoustic wave gas sensor, and in particular relates to a fully printed electronic carbon dioxide gas thin film SAW sensor. Background technique [0002] The emission of carbon dioxide gas is one of the main causes of the greenhouse effect. With the continuous development of society and industry, the emission of carbon dioxide has exceeded the range that the environment can bear. Therefore, quantitative monitoring of carbon dioxide gas emissions has become extremely important. This has directly caused a research upsurge and rapid development of carbon dioxide gas sensors. In recent years, researchers have developed a variety of carbon dioxide sensors, including solid electrolyte, infrared absorption, heat conduction and so on. When classifying gas sensors according to the sensitive principle, they usually include the following categories: semiconductor gas sensors, electrochem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N5/02
Inventor 滕建辅曹阳李琨轩秀巍
Owner TIANJIN UNIVERSITY OF TECHNOLOGY
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