The invention provides an adapter plate, a
semiconductor device and a preparation method thereof. The preparation method of the adapter plate comprises the following steps: S1, providing a glass substrate; s2, a plurality of open holes are formed in the glass substrate, each
open hole is formed through one-time
machining, each
open hole comprises a
blind hole and a through hole penetrating through the glass substrate, each through hole sequentially comprises a first part serving as an
interconnection switching hole, a second part serving as a
contact hole and a third part serving as a wiring hole from bottom to top, and the blind holes serve as the wiring holes; s3, filling the holes with conductive material
layers at one time, wherein the conductive material
layers are exposed on the front surface and the back surface of the glass substrate; and S4, forming an electric lead-out structure electrically connected with the conductive material layer on the surface of the glass substrate to prepare the adapter plate. According to the invention,
punching of the three material
layers of the switching layer, the through hole
interconnection layer and the wiring
dielectric layer can be completed only through one-
time processing, and then one-time filling is carried out, so that the process steps are greatly simplified, the production cost can be greatly reduced, and the production efficiency is improved.