A method for fabricating
integrated circuit devices, e.g.,
Flash memory devices, embedded
Flash memory devices. The method includes providing a
semiconductor substrate, e.g.,
silicon,
silicon on insulator,
epitaxial silicon. In a specific embodiment, the
semiconductor substrate has a
peripheral region and a
cell region. The method includes forming a first
dielectric layer (e.g.,
silicon dioxide) having a first thickness overlying a
cell region and a second
dielectric layer (e.g., silicon dixode) having a second thickness overlying the
peripheral region. In a specific embodiment, the
cell region is for
Flash memory devices and / or other like structures. The method forms a pad
oxide layer overlying the first
dielectric layer and forms a
nitride layer overlying the pad
oxide layer. The method includes patterning at least the
nitride layer to
expose a first trench region in the
peripheral region and to
expose a second trench region in the
cell region, while a portion of the first
dielectric layer having the first thickness in the
cell region is maintained. The method includes forming a first trench structure having a first depth in the first trench region, while the portion of the first
dielectric layer having the first thickness in the
cell region protects the second trench region. The method includes removing the portion of the first
dielectric layer to
expose the second trench region. In a specific embodiment, the method includes subjecting the first trench region, including the first trench structure, and the second trench region with an
etching process to continue to form the first trench structure from the first depth to a second depth and to form a second trench structure having a third depth within the second trench region. In the third depth is less than the second depth.