The application belongs to the technical field of power devices, and provides a super-junction MOS device with strong terminal robustness, a preparation method thereof and a
chip. The surface of a terminal withstand
voltage region is higher than the surface of a
cell region, so that a first P-type base region in a terminal transition region and a first P-type ring region in the terminal withstand
voltage region form a first included angle, and the first P-type base region is in contact with a plurality of second P-type columns. The surface of the terminal withstand
voltage region is higher than the surface of the
cell region, and the first P-type base region and the first P-type ring region form a first included angle, so that the terminal transition region forms a slope along the terminal withstand voltage region to the
cell region, thereby increasing the contact area of the terminal transition region and the source
metal layer, improving the reverse extraction speed of the terminal holes, converting the one-dimensional hole channel of the terminal transition region structure into a two-dimensional channel, improving the extraction speed of the holes, and weakening the
aggregation phenomenon of the electrons, thereby reducing the peak
electric field and improving the terminal robustness of the device.