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405results about How to "Minimize contamination" patented technology

Etching apparatus for manufacturing semiconductor devices

An etching apparatus for manufacturing semiconductor devices which reduces contamination of the processing surface of a wafer by transporting a plurality of wafers stacked in a cassette with their processing surfaces facing down from the cassette supply chamber to one or more process chambers where the etching operation is performed on each wafer, one at a time. The apparatus has a load lock chamber for transferring the wafers stacked in the cassette from the cassette supply chamber, which is maintained under atmospheric conditions, to the process chamber, which is maintained under a strong vacuum. The process chamber has a cathode to which a wafer is clamped by a wafer holder with its processing surface facing down; the process chamber may also have a removable lower cover for easy repair and cleaning. The apparatus may also have a wafer aligning chamber installed between the cassette supply chamber and the load lock chamber for simultaneously aligning all of the wafers n the cassette before they are transported to the load lock chamber. The wafer aligning chamber also has a cassette transport mechanism for transferring the cassette from a cassette supply table in the cassette supply chamber to an elevator installed in the load lock chamber.
Owner:SAMSUNG ELECTRONICS CO LTD

Etching apparatus for manufacturing semiconductor devices

An etching apparatus for manufacturing semiconductor devices which reduces contamination of the processing surface of a wafer by transporting a plurality of wafers stacked in a cassette with their processing surfaces facing down from the cassette supply chamber to one or more process chambers where the etching operation is performed on each wafer, one at a time. The apparatus has a load lock chamber for transferring the wafers stacked in the cassette from the cassette supply chamber, which is maintained under atmospheric conditions, to the process chamber, which is maintained under a strong vacuum. The process chamber has a cathode to which a wafer is clamped by a wafer holder with its processing surface facing down; the process chamber may also have a removable lower cover for easy repair and cleaning. The apparatus may also have a wafer aligning chamber installed between the cassette supply chamber and the load lock chamber for simultaneously aligning all of the wafers n the cassette before they are transported to the load lock chamber. The wafer aligning chamber also has a cassette transport mechanism for transferring the cassette from a cassette supply table in the cassette supply chamber to an elevator installed in the load lock chamber.
Owner:SAMSUNG ELECTRONICS CO LTD

Pelvic balloon tamponade

An implantable device is provided for controlling hemorrhage in a body cavity, comprising an expandable balloon and a conduit for supplying a physiologically compatible fluid to inflate the balloon. When the balloon tamponade device is implanted or inserted into the body cavity, it is inflated with a physiologically suitable fluid, so that the balloon generally conforms to the body cavity and exerts compressive force against the walls, tissues or structures of the body cavity to control hemorrhage. The balloon may have a deforming means to limit expansion of the balloon in a direction to facilitate expansion of the balloon in another direction. The device may have additional tubes within the conduit, or a plurality of separate lumens within the conduit or tubes to allow drainage and irrigation to the body cavity. There is also provided a cuff for attachment of an external traction to the balloon tamponade, to facilitate the compressive effect of the device. In a preferred embodiment, there is provided a dual balloon tamponade in which two balloons are axially spaced along the conduit, providing a means to control hemorrhage from two distinct body cavities, such as a uterus and a vagina. There is also provided a method to control hemorrhage in a body cavity by implantation or insertion of the balloon tamponade, inflating the balloon with a fluid to a sufficient pressure and retaining the fluid pressure within the balloon for a sufficient period of time to determine whether hemorrhage has been controlled. A kit comprising the balloon tamponade apparatus is also provided.
Owner:B & D MEDICAL DEV
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