2286 results about "Thermal spraying" patented technology

A plasma processing system has a susceptor, provided in a processing vessel, for supporting thereon a substrate. A process gas is supplied into the processing vessel to produce the plasma of the process gas. The susceptor has a dielectric film formed on a base, and a plurality of protrusions formed on the film. The protrusions of the susceptor are formed by thermal-spraying a ceramic onto the dielectric film via an aperture plate having a plurality of circular apertures.

A thermally sprayed member or an electrode includes a basic material, a thermally sprayed film formed on the surface of the basic material, the thermally sprayed film being made of an insulating ceramic and a metallic intermediate layer provided between the basic material and the thermally sprayed film for increasing a bonding force therebetween, wherein the thermally sprayed film side of the member is exposed to a high frequency plasma atmosphere and the electrode is intended to form a high frequency plasma on the side of the thermally sprayed film. The basic material includes a base portion made of a conductive material and a dielectric portion provided to include a part of a surface of the basic material. Further, the intermediate layer is comprised of a plurality of island-shaped parts isolated from each other.

A method for making a process kit and a process kit design which has reduced particle generation during substrate processing are provided. The internal surface of the process kit design are textured by coating its surface with a first material layer having a smaller RMS surface roughness measurement and arc spraying with a second material layer or additional material layers having a larger RMS value. The first material layer can be coated by bead blasting, plating, arc spraying, thermal spraying, or other processes. In addition, the invention also provides selective coating of internal surface of the process kit with a protective layer and arc spraying the surface pf the protective layer with another material layer, which may be of the same material as the material of the internal surface of the process kit.

A method for forming a battery from via thin-film deposition processes is disclosed. A mesoporous carbon material is deposited onto a surface of a conductive substrate that has high surface area, conductive micro-structures formed thereon. A porous, dielectric separator layer is then deposited on the layer of mesoporous carbon material to form a half cell of an energy storage device. The mesoporous carbon material is made up of CVD-deposited carbon fullerene “onions” and carbon nano-tubes, and has a high porosity capable of retaining lithium ions in concentrations useful for storing significant quantities of electrical energy. Embodiments of the invention further provide for the formation of an electrode having a high surface area conductive region that is useful in a battery structure. In one configuration the electrode has a high surface area conductive region comprising a porous dendritic structure that can be formed by electroplating, physical vapor deposition, chemical vapor deposition, thermal spraying, and/or electroless plating techniques.

A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a metal surface such as aluminum or aluminum alloy, stainless steel, or refractory metal coated with a phosphorus nickel plating and an outer ceramic coating such as alumina, silicon carbide, silicon nitride, boron carbide or aluminum nitride. The phosphorus nickel plating can be deposited by electroless plating and the ceramic coating can be deposited by thermal spraying. To promote adhesion of the ceramic coating, the phosphorus nickel plating can be subjected to a surface roughening treatment prior to depositing the ceramic coating.

A method for fabricating an electronic device comprises providing a substrate (501), direct writing a functional material by a thermal spray on the substrate (502) and removing a portion of the function material to form the electronic or sensory device (503).

A TBC system suitable for protecting the surface of a substrate subjected to a hostile thermal environment. The TBC system comprises a bond coat on the substrate surface, an alumina scale on the bond coat, and a multilayer TBC comprising a thermal-sprayed first ceramic layer on the alumina scale and a thermal-sprayed second ceramic layer overlying the first ceramic layer. The first ceramic layer consists essentially of partially stabilized zirconia so as to comprise the tetragonal and cubic phases of zirconia. The second ceramic layer consists essentially of fully stabilized zirconia so as to consist essentially of the cubic phase of zirconia. The second ceramic layer is also characterized by having vertical microcracks that extend through the thickness thereof. The second ceramic layer is thicker and more erosion resistant than the first ceramic layer.

A layered heater is provided that comprises a dielectric layer formed by a first layered process, a resistive layer formed on the dielectric layer, the resistive layer formed by a second layered process, and a protective layer formed on the resistive layer, wherein the protective layer is formed by one of the first or second layered processes or yet another layered process. The first layered process is different than the second layered process in order to take advantage of the unique processing benefits of each of the first and second layered processes for a synergistic result. The layered processes include, by way of example, thick film, thin film, thermal spraying, and sol-gel. Additional functional layers are also provided by the present invention, along with methods of forming each of the individual layers.

Heat dissipation and electromagnetic interference (EMI) shielding for an electronic device having an enclosure. An interior surface of the enclosure is covered with a conformal metallic layer which, as disposed in thermal adjacency with one or more heat-generating electronic components or other sources contained within the enclosure, may provide both thermal dissipation and EMI shielding for the device. The layer may be sprayed onto the interior surface in a molten state and solidified to form a self-adherent coating.

A rare-earth oxide thermal spray coated article comprising a substrate and a coating layer formed by thermally spraying a rare-earth oxide thermal spraying powder onto a surface of the substrate, said coating layer being of a gray or black color having, in the L*a*b* color space, an L* value of up to 50, an a value of −3.0 to +3.0, and a b* value of −3.0 to +3.0.

An abradable coating composition for use on shrouds in gas turbine engines or other hot gas path metal components exposed to high temperatures containing an initial porous coating phase created by adding an amount of inorganic microspheres, preferably alumina-ceramic microballoons, to a base metal alloy containing high Al, Cr or Ti such as β-NiAl or, alternatively, MCrAlY that serves to increase the brittle nature of the metal matrix, thereby increasing the abradability and oxidation resistance of the coating at elevated temperatures. Coatings having a total open and closed porosity of between 20% and 55% by volume due to the presence of ceramic microballoons ranging in size from about 10 microns to about 200 microns have been found to exhibit excellent abradability for applications involving turbine shroud coatings. An abradable coating thickness in the range of between 40 and 60 ml provides improved performance for turbine shrouds exposed to gas temperatures between 1380° F. and 1800° F. Abradable coatings in accordance with the invention can be used for new metal components or to repair existing equipment. The coatings can be applied to the metal shroud using thermal spray, processes that integrate sintering and brazing, or direct write techniques.

Spherical particles of a rare earth (inclusive of yttrium)-containing compound and having a breaking strength of 10-300 MPa and an average particle diameter of 10-80 μm are suitable for plasma spraying.

This invention relates to blades for a gas turbine engine, said blades having an inner end adapted for mounting on a hub and a blade tip located opposite the inner end, and wherein at least a portion of the blade tip is coated with a thermally sprayed coating of a high purity yttria or ytterbia stabilized zirconia powder, said thermally sprayed coating having a density greater than 88% of the theoretical density with a plurality of vertical macrocracks substantially homogeneously dispersed throughout the coating in which a cross-sectional area of the coating normal to the blade tip exposes a plurality of vertical macrocracks extending at least half the coating thickness in length up to the full thickness of the coating and having from about 5 to about 200 vertical macrocracks per linear inch measured in a line parallel to the surface of the blade tip and in a plane perpendicular to the surface of the blade tip, and said high purity yttria or ytterbia stabilized zirconia powder comprising from about 0 to about 0.15 weight percent impurity oxides, from about 0 to about 2 weight percent hafnium oxide (hafnia), from about 6 to about 25 weight percent yttrium oxide (yttria) or from about 10 to about 36 weight percent ytterbium oxide (ytterbia), and the balance zirconium oxide (zirconia).

The invention relates to a preparation method of nickel-coated alumina oxide powder, in particular to the preparation method of nickel-coated aluminum oxide powder for thermal spraying in aviation, aerospace and military fields. The invention is characterized in that: a suspension is made from a mixing liquid of nano-aluminum oxide and dispersant, stirred and added with nickel salt solution at the same time, and the obtained mixture liquid is dropped with ammonium water after being fully stirred, added with distilled water, when dark blue mixing solution C of nickel ammonia complex ([Ni (NH3)) 2+and alumina oxide is obtained; the mixing solution C is aged by water, filtered, washed and dried, and a green middle coated product is obtained; the green middle coated product is further reduced and roasted, finally, black nickel-coated aluminum oxide powder is prepared. The nickel-coated aluminum oxide powder prepared through the invention has uniform granularity, with average size less than or equal to 1.0Mum, and can enhance the application performance of nano-alumina and expand the application of nano-aluminum oxide; the product is mainly used for aviation, aerospace and military materials and other high-tech fields. The method of the invention is simple, reproducible and easy to be industrialized.

Components of semiconductor processing apparatus comprise thermal sprayed yttria-containing coatings that provide erosion, corrosion and/or corrosion-erosion resistance in plasma atmospheres. The coatings can protect substrates from physical and/or chemical attack.

A method of making a thermal spray powder is provided. The method comprises: providing a powder comprising a plurality of porous particles; infiltrating a mixture comprising a solvent and a plurality of solid lubricant particles into the porous particles; and heating the powder to a temperature sufficient to evaporate the solvent. The method of forming a wear-resistant coating is provided. The method comprises: providing a thermal spray powder; heating the thermal spray powder; and accelerating the thermal spray powder from a thermal spray gun onto the substrate, to form a deposit. Yet another embodiment provides a wear resistant coating. The wear resistant coating is formed by thermally spraying the thermal spray powder.

The invention belongs to the technical field of alloy material, and relates to an improvement on the prior art, in particular to special alloy powder for laser cladding of high-hardness crack-free iron-based alloy. The formula of the alloy powder comprises the following compositions in weight percentage: 0.3 to 0.5 of C, 1.2 to 2.0 of Si, 0.4 to 1.0 of B, 1.5 to 2.5 of Ni, 1.0 to 1.5 of Cr, 1.0 to 1.5 of Mn, 1.5 to 2.5 of Mo, 0.15 to 0.7 of V, and 0.15 to 0.7 of Nb, the balance being Fe; and the total weight of the compositions is 100 percent. The special alloy powder can obtain the iron-based alloy with large area, large thickness and no crakes for laser cladding without preheating and subsequent heat treatment, has high strength, hardness and wear resistance and good plastic toughness of a cladding layer, and has lower cost compared with most of hot spraying self melting alloy powder and the prior laser cladding special iron-based alloy powder.

A method is described that can be used in electrodes for electrochemical devices and includes disposing a precious metal on a top surface of a corrosion-resistant metal substrate. The precious metal can be thermally sprayed onto the surface of the corrosion-resistant metal substrate to produce multiple metal splats. The thermal spraying can be based on a salt solution or on a metal particle suspension. A separate bonding process can be used after the metal splats are deposited to enhance the adhesion of the metal splats to the corrosion-resistant metal substrate. The surface area associated with the splats of the precious metal is less than the surface area associated with the top surface of the corrosion-resistant metal substrate. The thermal spraying rate can be controlled to achieve a desired ratio of the surface area of the metal splats to the surface area of the corrosion-resistant metal substrate.

This invention relates to thermal spray coatings on a metal or non-metal substrate. The thermal spray coating comprises a partially or fully stabilized ceramic coating, e.g., yttria stabilized zirconia coating, and has sufficiently high thermodynamic phase stability to provide corrosion and/or erosion resistance to the substrate. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings. The coatings are useful, for example, in the protection of integrated circuit manufacturing equipment, internal chamber components, and electrostatic chuck manufacture.

This invention relates to a method by which liquid feedstock suspensions containing fine particles, micron- and nano-sized, are injected, with sufficient droplet velocity, preferably axially, into a thermal spray apparatus for the production of high-quality nanostructured coatings. The method allows complete entrainment of the droplets in a high temperature gas stream, while the injection orifice remains potentially blockage-free for long periods of operation.

A thermal spray material includes granules of an oxyfluoride of yttrium (YOF). The granules may contain a fluoride of yttrium (YF₃). The granules preferably have an oxygen content of 0.3 to 13.1 mass %. The granules preferably have a fracture strength of 0.3 MPa or more and less than 10 MPa. Part of yttrium (Y) of the granules may be displaced with at least one rare earth element (Ln) except yttrium, the molar fraction of Ln relative to the sum of Y and Ln being preferably 0.2 or less.

A system for thermal spray coating of a particulate material onto a substrate includes a spray gun apparatus having dual vortex chambers for the mixing of fuel gas and oxygen. The apparatus provides a jet flame resulting from a compression wave formed by compressed air. Dual venturis control the flow of fluidized coating material particles to provide smooth and controlled delivery of coating material to the spray gun.

The present invention concerns a plasma resistant member comprising Y₂O₃ or YAG thermal performed thermal spray on an alumina base material, wherein the surface roughness Ra of the alumina base material is 5 μm or more and 15 μm or less. By rendering the surface layer of the alumina base material porous to a porosity of 20% or more and 60% or less to a depth of ranging from 10 μm to 1O0 μm, aplasma resistant member having an enhanced adhesion strength can be provided. The aforementioned plasma resistant member can be produced by subjecting the surface of analumina base material to chemical etching, and then performing thermal spray Y₂O₃ or YAG on the roughened surface of the alumina base material to form a plasma resistant layer.