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323results about How to "Erosion is good" patented technology

Thermal barrier coatings with protective outer layer for improved impact and erosion resistance

A reduced thermal conductivity thermal barrier coating having improved impact and erosion resistance for an underlying metal substrate of articles that operate at, or are exposed to, high temperatures. This coating comprises an inner layer nearest to the underlying metal substrate comprising a ceramic thermal barrier coating material, as well as a protective outer layer adjacent to and overlaying the inner layer and having an exposed surface. The outer layer has a thickness up to about 5 mils (127 microns) sufficient to impart impact and erosion resistance to the thermal barrier coating, and comprises a zirconia-containing ceramic composition having a c/a ratio of the zirconia lattice in the range of from about 1.011 to about 1.016 and stabilized in the tetragonal phase by a stabilizing amount of a stabilizing metal oxide selected from the group consisting of yttria, calcia, ceria, scandia, magnesia, india, ytterbia and mixtures thereof. This coating can be used to provide a thermally protected article having a metal substrate and optionally a bond coated layer adjacent to and overlaying the metal substrate. The thermal barrier coating can be prepared by forming the inner layer comprising the ceramic thermal barrier coating material, followed by forming on the inner layer the protective outer layer.
Owner:GENERAL ELECTRIC CO

Substrate supports for semiconductor applications

ActiveUS20120141661A1Enhance attractive and chuck forceMinimize currentSemiconductor/solid-state device manufacturingCoatingsCorrosionOxide
This invention relates to substrate supports, e.g., coated electrostatic chucks, having a dielectric multilayer formed thereon; dielectric multilayers that provide erosive and corrosive barrier protection in harsh environments such as plasma treating vessels used in semiconductor device manufacture; process chambers, e.g., deposition chambers, for processing substrates; methods for protecting substrate supports; and methods for producing substrate supports and electronic devices. The dielectric multilayer comprises (a) an undercoat dielectric layer comprising a metal oxide or metal nitride formed on a surface; and (b) a topcoat dielectric layer comprising a metal oxide formed on the undercoat dielectric layer. The topcoat dielectric layer has an aluminum oxide content of less than about 1 weight percent. The topcoat dielectric layer has a corrosion resistance and/or plasma erosion resistance greater than the corrosion resistance and/or plasma erosion resistance of the undercoat dielectric layer. The undercoat dielectric layer can have a resistivity greater than the resistivity of the topcoat dielectric layer. The topcoat dielectric layer can have a dielectric constant greater than the dielectric constant of the undercoat dielectric layer. The undercoat dielectric layer can have a porosity greater than the porosity of the topcoat dielectric layer. The invention is useful, for example, in the manufacture and protection of electrostatic chucks used in semiconductor device manufacture.
Owner:FM INDS

Thermal spray composite coatings for semiconductor applications

This invention relates to thermal spray composite coatings on a metal or non-metal substrate. The thermal spray composite coatings comprise (i) a ceramic composite coating undercoat layer having at least two ceramic material phases randomly and uniformly dispersed and / or spatially oriented throughout the ceramic composite coating, and (ii) a ceramic coating topcoat layer applied to the undercoat layer. At least a first ceramic material phase is present in the undercoat layer in an amount sufficient to provide corrosion resistance to the ceramic composite coating, and at least a second ceramic material phase is present in the undercoat layer in an amount sufficient to provide plasma erosion resistance to the ceramic composite coating. This invention also relates to methods of protecting metal and non-metal substrates by applying the thermal spray coatings. The composite coatings provide erosion and corrosion resistance at processing temperatures higher than conventional processing temperatures used in the semiconductor etch industry, e.g., greater than 100° C. The coatings are useful, for example, in the protection of semiconductor manufacturing equipment, e.g., integrated circuit, light emitting diode, display, and photovoltaic, internal chamber components, and electrostatic chuck manufacture.
Owner:PRAXAIR ST TECH INC

Substrate supports for semiconductor applications

This invention relates to substrate supports, e.g., coated electrostatic chucks, having a dielectric multilayer formed thereon; dielectric multilayers that provide erosive and corrosive barrier protection in harsh environments such as plasma treating vessels used in semiconductor device manufacture; process chambers, e.g., deposition chambers, for processing substrates; methods for protecting substrate supports; and methods for producing substrate supports and electronic devices. The dielectric multilayer comprises (a) an undercoat dielectric layer comprising a metal oxide or metal nitride formed on a surface; and (b) a topcoat dielectric layer comprising a metal oxide formed on the undercoat dielectric layer. The topcoat dielectric layer has an aluminum oxide content of less than about 1 weight percent. The topcoat dielectric layer has a corrosion resistance and / or plasma erosion resistance greater than the corrosion resistance and / or plasma erosion resistance of the undercoat dielectric layer. The undercoat dielectric layer can have a resistivity greater than the resistivity of the topcoat dielectric layer. The topcoat dielectric layer can have a dielectric constant greater than the dielectric constant of the undercoat dielectric layer. The undercoat dielectric layer can have a porosity greater than the porosity of the topcoat dielectric layer. The invention is useful, for example, in the manufacture and protection of electrostatic chucks used in semiconductor device manufacture.
Owner:FM INDS

Calcium titanium-aluminate prefabricated part for vanadium smelting reverberatory furnace lining and preparation method thereof

The invention relates to a calcium titanium-aluminate prefabricated part for a vanadium smelting reverberatory furnace lining and a preparation method thereof. According to the technical scheme, 60-75 wt% of calcium titanium-aluminate particles, 10-20 wt% of calcium titanium-aluminate fine powder, 2-7 wt% of titanium dioxide micro powder, 5-10 wt% of alpha-Al2O3 micro powder and 1-6 wt% of rho-Al2O3 micro powder are used as raw materials; 0.05-0.30 wt% of water reducing agent and 3.5-6.0 wt% of water of the raw materials are added; stirring is conducted for 5-8 minutes, vibration forming is achieved, maintenance is carried out for 18-24 hours under the natural condition, demolding is performed, heat preservation is conducted for 18-24 hours at the temperature of 90-110 DEG C, and accordingly the calcium titanium-aluminate prefabricated part for the vanadium smelting reverberatory furnace lining is obtained. The calcium titanium-aluminate prefabricated part has the advantages of being low in production cost, and capable of saving resources and protecting the environment. The obtained calcium titanium-aluminate prefabricated part for a vanadium smelting reverberatory furnace is high in high-temperature strength, good in acidity vanadium slag corrosion resistance and good in permeability.
Owner:WUHAN UNIV OF SCI & TECH

Method for preparing environment-friendly high-modulus glass fiber

The invention relates to an environment-friendly high-modulus glass fiber composition, and discloses a glass component combination used for preparing the high-modulus glass fiber. The glass fiber prepared by glass components is particularly applied to preparing glass fiber reinforced plastic composite material with higher rigidity requirement. The glass composition has no emission of harmful gas, greatly reduces the emission of greenhouse gas, and is an environment-friendly glass fiber formula. The environment-friendly high-modulus glass fiber composition is characterized in that: a blast furnace slag preferably serves as one of major raw materials for reducing the operational difficulty and prepares the high-modulus glass fiber, and the high-modulus glass fiber can be produced and wiredrawn on a tank furnace having an electro-boost structure on a large scale by adopting a direct method. The fiber mainly comprises the following main components: 57 to 62.5 weight percent of SiO2, 14.5 to 19.5 weight percent of Al2O3, 16 to 23.5 weight percent of RO (wherein RO is the sum of CaO, MgO, SrO and BaO), and less than and equal to 1.5 percent of alkali metal oxide. The glass composition and the adopted raw material mode are suitable for the mass production under the production technological condition of the electro-boost tank furnace, and the glass composition has low production cost.
Owner:TAISHAN FIBERGLASS INC

Gas-blowing and slag-removing device and slag-removing method

The invention relates to a gas-blowing and slag-removing device and a process, mainly solving the technical problems that the slag removing is difficult to realize and the slag-removing effect is poor in the existing slag-removing device. The technical scheme of the invention is as follows: the gas-blowing and slag-removing device comprises a gas-blowing mechanism, a hot-iron ladle and a slag-skimming machine, and is characterized in that the gas-blowing mechanism is fixed at one side of a supporting platform by a hinge base and comprises an oblique rail frame which is provided with a rail chain; the gas-blowing and slag-removing device also comprises a bracket which is level to the upper surface of the rail frame and is provided with a speed-changing machine; an output shaft of the speed-changing machine is provided with a first chain wheel matched with the rail chain; the rail frame is also provided with a clamping trolley which forms a moving pair with the rail frame; the clamping trolley is provided with a second chain wheel which is fixed together with the rail chain; a connecting rod positioned in the middle of the rail frame is clamped and fixed in the middle of the clamping trolley, and is equidirectional with the rail frame; and the lower end of the connecting rod is provided with a connector and is connected with a gas-blowing and slag-removing gun by a connecting flange. The invention is mainly used for removing the slag on the surface of hot iron in the hot-iron ladle.
Owner:SHANGHAI MEISHAN IRON & STEEL CO LTD +1

Method for modifying wear resistance and corrosion prevention of metal component surface

The invention relates to preparation technology for a wear-resistant and corrosion-prevention protective layer of a metal component surface, in particular to a method for modifying wear resistance and corrosion prevention of a metal component surface, which solves the problems that a valve, a pump and the like in the prior art are short in service life and the like due to serious wear and corrosion. Firstly, a component in a needed shape and of a needed size is made of foamed ceramics and fixed to the metal component surface by means of mechanical matching, connecting, welding, adhering or inlaying; and secondly, high polymer mixing castables are poured into foamed ceramic meshes by means of normal-pressure pouring, centrifugal pouring, vacuum suction pouring or injection molding, the foamed ceramic/high polymer co-continuous composite protective layer is obtained after curing, vulcanization or solidification, and the protective layer is firmly combined with the metal component surface. After the inner wall surface of a steel pipeline in a desulfurization system of a thermal power plant is protected by the method, the service life of the pipeline is five times longer than that of an existing pipeline protected by a lining rubber pipe.
Owner:LIAONING ZHUOYI NEW MATERIAL +1
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