The application discloses an
ion source
ceramic discharge channel support and inner
heat shield integrated structure, and belongs to the Hall
ion source field.The integrated structure comprises a
ceramic support and an inner
heat shield which are welded and fixed as an integrated piece; the
ceramic support comprises a bottom plate and an outward-flanged cylinder, the outward-flanged cylinder comprises, from bottom to top, a mounting and positioning section, an outward-expanding section, a
radiation heat transfer section and an outer magnetic pole mounting outward-flanged section, and the inner
heat shield is in a cylindrical structure, and the bottom side outer side is fixedly connected with the inner ring end face of the bottom plate.The ceramic support is fixed to the outer magnetic pole of the Hall
ion source through the outer magnetic pole mounting outward-flanged section, and a gap is kept between the ceramic
discharge channel outlet section and the ceramic
discharge channel, so that the heat conduction between the ceramic support and the ceramic discharge channel is changed into mainly
radiation heat exchange; the inner heat shield keeps a radial gap with the ceramic discharge channel and the inner magnetic screen, and a low-
radiation-rate surface is adopted to reduce the
heat transfer of the ceramic discharge channel to the inner
magnetic circuit.The application can reduce the
heat transfer to the inner and outer magnetic circuits while realizing the support and positioning of the ceramic discharge channel, improve the
thermal protection effect of the Hall
ion source, and improve the working reliability and service life of the
magnetic circuit and the ceramic discharge channel.