The invention relates to an ultra-precision
grinding and photochemical mechanical
polishing combined process for a
laser crystal sheet. Comprising the following steps that coarse
grinding is conducted through a coarse-grained
grinding wheel, rapid
thinning is achieved, the depth of a subsurface damaged layer is determined, and reference is provided for the
grinding wheel feeding amount in the accurate grinding stage; a fine-grained
grinding wheel is adopted for accurate grinding, a damaged layer introduced in the coarse grinding stage is removed, and
high surface / subsurface quality and surface precision are obtained by optimizing technological parameters; a special
polishing solution for photochemical mechanical
polishing is prepared from an aluminum
oxide (Al2O3) grinding material, semi-fine polishing is carried out on a
laser crystal sheet, and surface damage caused in the grinding stage is rapidly removed; a special polishing solution for photochemical mechanical polishing is prepared from a
zirconium oxide (ZrO2) grinding material, and the
laser crystal sheet is finely polished, so that the surface quality and the surface precision are further optimized; an ultrasonic cleaning instrument is adopted to clean the laser crystal slice, and a
cleaning agent is absolute ethyl
alcohol. According to the invention, high-
surface integrity and high-efficiency
processing of the laser crystal slice can be synchronously realized.