1467 results about "Pulsed laser" patented technology

The invention relates to the technical field of power equipment state monitoring, in particular to an oil-immersed transformer distributed temperature measurement method based on a fluorescent optical fiber sensor, and the method comprises the steps: arranging the fluorescent optical fiber sensor in a key temperature rise region in a transformer in a partitioned and layered three-dimensional topological structure, and forming a distributed temperature measurement network; exciting light is injected through a pulse laser to excite a fluorescence signal; a dual-channel phase-locked amplification technology is used to collect signals, and a dual-weight adaptive attenuation model and an oil flow coupling compensation function are combined to demodulate the temperature; reconstructing a dynamic temperature field based on a three-dimensional thermodynamic inversion algorithm, and marking high-gradient hot spots; and temperature, load current and oil flow velocity data are fused to realize graded alarm. According to the invention, the limitation of traditional single-point monitoring is broken through, the strong electromagnetic interference resistance is excellent, a global temperature field can be accurately reconstructed, dynamic early warning is realized, and the operation safety and the operation and maintenance efficiency of the transformer are remarkably improved.

The invention discloses a high-temperature airflow two-dimensional temperature field and velocity field synchronous measurement system and method based on laser-induced phosphorescence, and the system comprises phosphorescence particles, a low-frequency double-pulse laser, an image collection device, a synchronous controller, and an image processing device. The image processing device analyzes the gray intensity ratio of different wave band images acquired by the two PIV cameras at the same time, and combines a temperature response function calibrated by an experiment to realize inversion of a temperature field; meanwhile, a double-frame time-resolved image acquired by any PIV camera is subjected to cross-correlation calculation, particle displacement is extracted, and then a velocity field is reconstructed. According to the invention, synchronous acquisition of temperature and speed based on the same data source is realized, and the system has the remarkable advantages of simple structure, high measurement precision and wide application environment.

The invention discloses a device and method for measuring dust concentration distribution at an inlet of an aero-engine, and belongs to the field of aero-engine sand swallowing tests, the device comprises a pulse laser light source, a shaping module, an optical image acquisition module and a data post-processing module, the pulse laser light source is arranged at a preset position around the aero-engine and is used for emitting laser beams, and the shaping module is used for shaping the laser beams; the aero-engine is located in a sand dust environment to be detected; the shaping module is used for receiving the laser beam and outputting a sheet-shaped beam; the optical image acquisition module is used for receiving coherent scattered light emitted by the grit in the irradiation area of the flaky light beam to form a laser speckle image, and transmitting the obtained laser speckle image to the data post-processing module; and the data post-processing module processes the laser speckle image by adopting an inlet sand dust concentration measurement algorithm to obtain the concentration distribution of the inlet sand dust of the aero-engine. The device is simple in structure, and is suitable for measuring the sand dust concentration distribution at the inlet in the sand swallowing experiments of aero-engines with different sizes or stages.

A concrete damage real-time positioning method based on laser induction and dynamic wave velocity correction comprises the following steps: constructing a damage induction platform integrated with a high-energy pulse laser, combining with a three-dimensional mobile platform to realize accurate positioning of a laser focus, and arranging a phase demodulation type optical fiber acoustic emission sensor array to construct a full-coverage monitoring network; synchronous acquisition of high-frequency acoustic emission signals is realized by adopting a multi-channel coupling phase demodulation system, and noise suppression is completed in combination with a self-adaptive wavelet threshold algorithm; a dynamic wave velocity attenuation model is established based on space-time reference information, a propagation path is optimized through a Basic Theta * path planning algorithm, a wave velocity field is reconstructed by applying an ART algebraic iteration algorithm, and a thermodynamic diagram is generated; and finally, constructing a convolution-graph neural joint network model, and realizing accurate monitoring and positioning analysis of the concrete structure damage through a damage probability distribution generation and multi-scale verification module by using a multi-modal data fusion and transfer learning technology.

The invention provides a laser surface treatment method, device and equipment based on visual control, and the method comprises the steps: carrying out the energy waveform capture processing of pulse laser outputted by laser marking equipment, and carrying out the multi-channel visual detection of a surface reflection region of a to-be-marked part based on a pulse energy reference, and obtaining the surface feature information; planning an initial scanning path according to the surface feature information, and synchronously correcting a trigger time sequence of the pulse laser to obtain a target marking path; and in combination with the target marking path and the pulse energy reference, dynamic observation and local heat dispersion treatment are conducted on the marking area, and the treated part surface is obtained. The method is suitable for performing fine marking on a high-reflectivity or complex geometric surface, and can perform timely adjustment according to local temperature rise or optical characteristic change in the marking process to reduce depth unevenness and thermal damage.

A wide-field dynamic magnetic imaging device and method. The wide-field dynamic magnetic imaging device comprises: a probe assembly (1), comprising a diamond (101) containing NV centers; a microwave magnetic field assembly (2) configured to generate a uniform microwave field and a uniform bias magnetic field in the vicinity of the diamond (101), so as to regulate the spin energy level of the diamond (101) and the quantum state evolution process; a laser modulation assembly (3) configured to output an initial uniform pulsed laser to excite the diamond (101) to emit fluorescence; a fringe light modulation assembly (4) configured to modulate the initial uniform pulsed laser to output a fringe pulsed laser, causing the fluorescence emitted by the diamond (101) to be fringe fluorescence, or to modulate the fluorescence emitted by the diamond (101) into fringe fluorescence; a fluorescence detection assembly (5) configured to perform spatial imaging on the fringe fluorescence to obtain magnetic field information of a sample under test (7), thereby obtaining an initial magnetic image of said sample (7); and a data processing assembly (6) configured to perform Fourier transform and inverse Fourier transform on the initial magnetic image to obtain a first magnetic image.

A pulsed laser source device configured to a plurality of Fabry Perot resonant cavities. The pulsed laser source device provides a frequency, a wavelength, and a phase, each of which is matched with a plurality of laser beams configured, respectively, with the plurality of Fabry Perot resonant cavities to generate a high intensity beam for laser fusion.

The invention discloses a laser coaxial beam combining system for improving the repetition frequency of laser pulses, which comprises p polarization pulse lasers, a pulse time sequence controller and n stages of beam combining devices, each stage of beam combining device comprises an s polarization pulse laser, a polarization beam combiner and an electro-optical Q switch, and n is a non-negative integer and is greater than or equal to 1. The invention has the following advantages: a plurality of beams of laser in different polarization states can be combined, the pulse repetition frequency and the output average power of the laser are improved, the optimal pulse energy and peak power are maintained, and coaxial output of pulses in the same polarization state is realized.

The invention discloses an extensible multi-path beam combination laser assembly and a laser, and relates to the technical field of laser beam combination. The extensible multi-path beam combining laser assembly comprises a half-wave plate, a reflecting element, a polaroid, a Q switch, a controller and 2n basic lasers. The basic laser can output initial pulse laser with the polarization direction being the first direction, every two of the 2n initial pulse laser beams can be combined into 2n-1 pulse laser beams, and every two of the 2n-1 pulse laser beams can be combined into 2n-2 pulse laser beams until the 2n pulse laser beams are combined into one beam of output pulse laser. When the Q switch is turned on, the polarization direction of the pulse laser penetrating through the Q switch can be deflected by 90 degrees. When the pulse laser beams are combined, the first pulse laser beam passes through a Q switch and a reflecting element which are arranged along the light path of the first pulse laser beam, the polarization direction is the first direction or the second direction, and the first pulse laser beam is reflected to a polaroid arranged along the light path of the second pulse laser beam to be combined. Therefore, beam combination of multiple paths of laser is achieved, and even if light path faults exist, the multiple paths of laser after beam combination can be output.

The invention relates to the field of medical image processing, in particular to a lesion recognition method and system for non-staining biopsy cells, and the method comprises the steps: carrying out the imaging collection of the non-staining biopsy cells flowing at a high speed through the time sequence synchronous control of pulse laser and high-speed imaging, and obtaining an original cell image; performing image preprocessing on the original cell image to obtain a preprocessed cell image; performing multi-target cutting on the preprocessed cell image to obtain a standardized single cell image; extracting multi-scale features of the standardized single cell image based on a deep learning model to obtain a lesion recognition result corresponding to the non-staining biopsy cells; and based on a preset structured report generation algorithm and a statistical distribution modeling mechanism, performing structured integration on the lesion recognition result to obtain a structured cell diagnosis report. Through pulse laser imaging and deep learning feature extraction, automatic lesion recognition of non-staining biopsy cells is realized, a report is efficiently generated, and accurate diagnosis is assisted.

The invention provides an online detection and compensation method for local decarburization of a high-strength spring steel band, which comprises the following steps: arranging an oxygen content sensor in a continuous annealing furnace to monitor oxygen concentration in real time, and marking a potential decarburization risk section; scanning the risk section steel strip by adopting infrared thermal imaging, and generating a carbon distribution map to position a decarburization area; pulse laser heating is conducted on the decarburization area, and methane-argon mixed gas is introduced to achieve in-situ carburization; and finally, local thermal stress is eliminated through high-frequency induction heating. According to the method, decarburization risk dynamic early warning, defect accurate positioning, local efficient carbon supplementation and stress homogenization control are achieved, and the surface quality and fatigue performance of the steel strip are remarkably improved.

The invention discloses an array type optical fiber ultrasonic imaging system based on multi-path delay parallel detection, and belongs to the technical field of ultrasonic detection and imaging. The main working process of the system is as follows: continuous laser output by a laser is modulated into pulse laser to be transmitted to an optical fiber ultrasonic detector array, and ultrasonic waves emitted by an ultrasonic wave generating device act on each detection array element to cause the property change of a detection optical signal; through multi-path time delay with the optical fiber as the medium, the detection optical signal forms different transmission time in each channel, is distinguished in a time division mode and is combined into a single path to be output. After photoelectric conversion, electric signals containing multi-channel detection information are collected in parallel, the signals are analyzed at a terminal processor by means of an imaging algorithm with an array parallel architecture, information of a to-be-detected target is obtained, and image reconstruction is completed. The array type optical fiber ultrasonic imaging system has the advantages of being accurate and rapid in scanning detection, simple and compact in system structure and efficient and high-quality in image reconstruction, and large-scale and low-cost array type optical fiber ultrasonic imaging is achieved.

The invention provides a dual-wavelength tunable all-solid-state mid-far infrared laser, relates to the technical field of lasers, and is used for solving the technical problems that high-performance dual-wavelength 3 [mu] m waveband laser and mid-far infrared waveband laser generated by pumping of the high-performance dual-wavelength 3 [mu] m waveband laser are difficult to obtain in the prior art. The middle and far infrared laser comprises an erbium-doped laser and an optical parametric oscillator, the erbium-doped laser is used for providing dual-wavelength 3-micron wave band pulse laser, and the erbium-doped laser comprises a pumping source, an erbium-doped laser medium, a gain modulator, a high reflective mirror and an output mirror; the optical parametric oscillator is used for obtaining medium-wave infrared laser and long-wave infrared laser which are output in a dual-wavelength mode under the pumping effect of the dual-wavelength pulse laser in the 3-micron wave band. The mid-far infrared laser is simple in structure and convenient to use, can obtain tunable dual-wavelength mid-far infrared pulse laser with high beam quality, and meets the light source requirements of differential absorption of toxic gas telemetering of laser radar and photoelectric countermeasure.

The invention relates to a phase-sensitive optical time domain reflectometer based on a parallel frequency division multiplexing sequence. Continuous laser is divided into a local path and a detection path through an optical coupler; the local path is input to the polarization coherent receiving module, the detection path is converted into a pulse laser sequence with intensity modulation through a light intensity modulator driven by a radio frequency signal provided by the signal generation circuit module, and the radio frequency signal is composed of two frequency division multiplexing sequences with difference; the pulse laser sequence enters the sensing link to be measured to generate Rayleigh backscattered light, and the Rayleigh backscattered light and local continuous laser are subjected to beat frequency coherent receiving through a circulator; and the signal acquisition circuit is used for sampling and analyzing the interference signal, and performing frequency domain comparison on an interleaving result of the two frequency division multiplexing pulse sequences to eliminate a harmonic frequency and retain a real strain signal frequency. Compared with the prior art, the non-harmonic strain signal measurement is realized, the high-frequency response performance and the high-precision strain measurement capability are excellent, and meanwhile, the long-distance coverage capability is also realized.

The invention provides a single-line excitation OH plane laser-induced fluorescence temperature measurement system and method, and belongs to the technical field of aero-engine special tests, the system comprises an Nd: YAG laser, a sheet light shaping lens group, two ICCD cameras and a data acquisition device, the laser outputs quadruplicated pulse laser, the sheet light shaping lens group is arranged at the output end of the laser, and the data acquisition device is arranged at the output end of the laser. Laser sheet light is output through the sheet light shaping lens group to illuminate a to-be-detected area in the flame and reacts with OH groups in the flame to generate fluorescent light; the cameras are respectively arranged opposite to flames, are respectively in communication connection with the data acquisition device, are respectively provided with a band-pass optical filter with different bandwidths, and are used for synchronously measuring fluorescence to obtain a bispectral fluorescence image, and the data acquisition device is used for carrying out data processing on the image to realize two-dimensional temperature distribution measurement. Through the processing scheme provided by the invention, the measurement system configuration and the data processing flow are remarkably simplified, and the light spot quality and the signal-to-noise ratio are improved.

The invention relates to a low-power pulse laser-induced enhanced double-TIG (Tungsten Inert Gas) composite heat source medium-thickness plate narrow-gap efficient welding method, which adopts two independent TIG welding machines, a pulse laser and a wire feeder, and two TIG welding guns are positioned in a narrow-gap groove on the same side of a plane on which a laser beam perpendicular to the plate welding direction is positioned, the angle and distance of each heat source can be independently adjusted, before welding, the space angle and distance among the two TIG welding guns, laser beams and welding wires are adjusted, tungsten electrodes at the front ends of the two TIG welding guns and the laser beams emitted by a laser device are arranged in the corresponding space range, and a plate to be welded and the welding wires can obtain sufficient heat for melting, wetting and spreading; during welding, welding parameters are adjusted, the coupling plasma energy density in the narrow gap space range is controlled, and the droplet transition behavior of a welding wire and the flow characteristic of a molten pool are adjusted and controlled in real time. Compared with traditional arc welding, the welding process window can be improved, and the welding deposition efficiency is improved by more than 10 times.

The invention discloses an infrared photothermal imaging system and method in structured light illumination fluorescence detection, and belongs to the field of super-resolution imaging. The system comprises a structured light generation module, a fluorescence excitation module, a fluorescence collection module and a mid-infrared light thermal module. The structured light generation module generates structured light with adjustable phase and direction; the fluorescence excitation module inputs the structured light to a to-be-analyzed sample and excites the sample to emit fluorescence; meanwhile, infrared pulse laser can be input into a sample by utilizing a mid-infrared photothermal module, and the fluorescence intensity is modulated by utilizing a photothermal effect; finally, fluorescent light emitted by the sample is collected by a fluorescent light collecting module, and an infrared photothermal image in structured light illumination is obtained. The system breaks through the diffraction limit, the resolution ratio is increased by two times at most, the intrinsic infrared spectrum of the sample is obtained through mid-infrared photothermal imaging, and the chemical components and the structure of the sample are reflected. According to the invention, two technologies are combined, so that the intrinsic infrared spectrum information of the sample is provided under the sub-diffraction limit.

The invention belongs to the technical field of photoelectric countermeasure, and particularly relates to a CMOS detector damage system based on time-domain composite pulse laser, which comprises a time-domain composite pulse laser generation module, a light beam transmission and focusing module, a target damage monitoring module, a parameter optimization control module and a detector to be damaged. The time domain composite pulse laser generating module comprises a short pulse laser, a long pulse laser, a pulse synchronous controller, a power adjusting unit, a power supply module and a cooling device, and the power adjusting unit is electrically connected with the short pulse laser and the long pulse laser; and the power supply module is electrically connected with the long pulse laser, the short pulse laser and the cooling device. According to the method, energy loss generated by plasmas in a traditional laser damage method is avoided, the damage efficiency is remarkably improved, efficient transmission and concentration of energy in the multilayer structure are achieved through the synergistic effect of long pulses and short pulses, all layers of materials synchronously lose efficacy in a short time, and the damage consistency of the whole multilayer structure is ensured.

Disclosed is a detection device for laser spot welding micro-weld spot quality based on laser ultrasound, comprising: a nanosecond pulsed laser configured to emit a laser; a half-wave plate configured to generate a phase difference of the laser; a scanning galvanometer configured to focus the laser as a point source and excite an ultrasonic wave on a surface of a sample; a multi-axis displacement platform configured to place and / or move the sample; a laser Doppler vibrometer configured to emit a probe light; an image sensor configured to acquire image data of the sample in a plurality of attitudes; an optical filter configured to receive the probe light to adjust an intensity of the probe light; and a processor configured to be in communication connection with the image sensor, the optical filter, the nanosecond pulsed laser, the scanning galvanometer, the multi-axis displacement platform, and the laser Doppler vibrometer.

The invention discloses a surface defect height quantitative detection method and device based on all-optical laser ultrasound. The method comprises the following steps: respectively exciting and detecting ultrasonic Rayleigh waves in a state that a pulse laser and a laser interferometer are arranged on the same side and different sides of a surface defect of a detected sample piece, extracting the transit time of an incident Rayleigh wave and the transit time of a transmission Rayleigh wave, and obtaining the height of the surface defect on the basis of the transit time of the incident Rayleigh wave and the transit time of the transmission Rayleigh wave. According to the invention, the detection of incident ultrasonic Rayleigh waves, reflected ultrasonic Rayleigh waves and transmitted ultrasonic Rayleigh waves is realized by moving the sample piece or the pulse laser and the laser interferometer through the linear motion platform, the height of the surface defect is calculated, the detected sample piece does not need to be clamped for the second time in the detection process, and high-efficiency in-situ quantitative detection is realized. In addition, nondestructive testing of the tested sample piece is achieved under a thermoelastic mechanism, the contact type defect of traditional ultrasonic testing is overcome, and the device is suitable for special environments such as high temperature, high pressure, intense radiation and strong corrosion.

The invention relates to a femtosecond gamma ray pulse generation device, which comprises a femtosecond order electron beam slice generation system, a cavity, a Compton scattering laser system and collimation equipment, and is characterized in that the femtosecond order electron beam slice generation system, the cavity and the collimation equipment are sequentially arranged along a first axis; the femtosecond-order electron beam slicing system is used for generating femtosecond-order electron beams with high-density slices, the cavity is used for providing an interaction cavity, and the Compton scattering laser system is used for generating pulse type laser. The pulse type laser and the electron beam with the high-density slices in the femtosecond order are subjected to Compton scattering in the interaction cavity so as to generate a gamma-ray pulse in the femtosecond order; the collimation device is used for carrying out collimation on the femtosecond order gamma ray pulse.

The invention discloses a mining-while-digging earthquake advanced detection system based on distributed optical fiber acoustic sensing. Relates to the technical field of seismic exploration. On the basis of a distributed optical fiber acoustic sensing technology, mining-while-digging seismic detection of a working face is realized by utilizing vibration generated by cutting a coal rock stratum by mining machinery. In the production process, the detector collects vibration data of mining machinery and transmits the vibration data to the server through a network; optical cables are arranged on two sides of a coal face upper and lower crossheading or two sides of a driving face roadway; the demodulator emits pulse laser and transmits the pulse laser to the working face optical cable through the industrial looped network or the independent fiber core, vibration of measuring points at equal intervals of the optical cable is measured, and a measuring data packet is returned to the demodulator through the industrial looped network or the independent fiber core; the demodulator demodulates vibration waveform data and uploads the vibration waveform data to the server; server data processing software carries out noise reduction processing on the waveform, then stores and images the waveform, carries out real-time intelligent interpretation, and realizes detection of a geological structure and an abnormal area in front of a working face.

The invention provides an optical element laser thermal effect and light beam quality integrated measurement device and method, and the device combines key assemblies, such as a pump laser, a real-time power monitoring module, an energy transmission optical fiber, a multi-surface reflector, a beam splitter, a monochromatic optical filter, a CCD camera, an infrared thermal imager, a blackbody radiation calibration module, a Fizeau interferometer and the like. And the thermal effect of the transflective element can be measured at a specific angle. The device combines pump light and test light into one beam through the beam combiner and irradiates the surface of a sample at the same time, after transmission, the beam splitter divides the laser into two paths, one path is used for collecting far-field light spots to calculate the quality of the light beams, the other path forms an interference image to calculate thermal distortion, and meanwhile, the thermal infrared imager monitors the temperature of the sample. According to the invention, non-contact lossless integrated synchronous measurement is realized with high integration level and high flexibility, the device is suitable for temperature, thermal distortion and light beam quality measurement of an optical element under continuous or pulse laser, and thermal response characteristics of a sample are comprehensively and accurately evaluated.

The invention discloses a tiny unmanned aerial vehicle detection method and system based on target reflectivity, solves the problem that a low-reflectivity target is difficult to detect in a complex environment in the prior art, and realizes recognition of a tiny unmanned aerial vehicle by combining laser active detection and target reflectivity characteristic analysis. The method comprises the following steps: transmitting pulse laser to a target area, and synchronously acquiring a target signal through double detectors with a common-path design to obtain a target geometric feature and a reflectivity intensity signal; calculating an original reflectivity based on the reflectivity intensity signal, obtaining target distance information, and correcting the original reflectivity based on the target distance information to obtain a corrected reflectivity value; target motion features are generated through multi-frame time sequence analysis, the corrected reflectivity value, the target geometric features and the target motion features are fused based on a fusion strategy, and a target comprehensive feature vector is constructed; and inputting the target comprehensive feature vector into a classifier, and outputting an identification result of the tiny unmanned aerial vehicle.

Additive manufacturing systems and associated methods are disclosed herein. In some embodiments, the additive manufacturing system includes a build chamber that has an active build region, an energy beam system positioned to direct energy beams toward the active build area, and a controller operably coupled to the energy beam system. During an additive manufacturing process, the controller can control the energy beam system to execute a hybrid sintering process. For example, for a first region of a planned build object, the controller can operate the energy beam system in a continuous wave mode to generate a first energy beam to sinter powder in the first region. Then, for a second region, the controller can operate the energy beam system in a pulsed mode to generate a second energy beam with to sinter the second region.

The invention relates to a miniaturized medium-long wave infrared solid-state laser in which a thulium-doped laser directly pumps a ZGP crystal, the thulium-doped laser takes two laser diodes with the central emission wavelength of 793 nm as pumping sources, two Tm: YAP crystals with the same parameters are cascaded and placed in a U-shaped resonant cavity to serve as laser gain media, and an acousto-optic Q crystal controls intra-cavity loss in the resonant cavity, so that the thulium-doped laser directly pumps the ZGP crystal. Pulse laser with the wavelength of 1.94 m is output; the 1.94 m pulse thulium laser serves as pump light and passes through the ZGP-OPO module, and 2.8 m signal light and 6.2 m idler frequency light are obtained. The Tm laser outputs 1.94 m laser through primary oscillation to directly serve as a pump source, the ZGP-OPO outputs medium-long wave infrared laser in a nonlinear mode, the overall light path structure of the medium-long wave laser is simplified, and the electro-optical conversion efficiency is improved.

The invention discloses a BDD electrode material and a preparation method thereof. The preparation method comprises the following core steps: pretreating the surface of a porous titanium substrate; depositing a nanoscale TiN film layer on the surface of the pretreated porous titanium substrate in advance; depositing a layer of single-walled carbon nanotube network on the TiN thin film layer by using an electrophoretic deposition method; growing a highly-doped BDD layer on the single-walled carbon nanotube network by adopting a plasma enhanced chemical vapor deposition technology; repeating the two steps to form a multi-layer SWCNT / BDD composite structure, and controlling the thickness of the multi-layer SWCNT / BDD composite structure to be 1-50 microns; and finally, depositing a low-doped BDD active layer with the thickness of 1-5 microns by adopting a hot filament chemical vapor deposition (HFCVD) technology. According to the pulse laser assisted preparation process provided by the invention, the femtosecond laser pulse is introduced to replace traditional plasma treatment, so that the process flow is simplified, and the efficiency is improved; according to the technology, the process is simplified, the quality of the TiN film is improved through accurate energy input, and a new way is opened up for further improving the performance of the BDD electrode.

The invention provides a pulse laser deposition process online monitoring device and method, and relates to the technical field of material preparation and process monitoring, the pulse laser deposition process online monitoring device comprises a growth cavity, a substrate supporting mechanism and a target material supporting mechanism which are arranged in the growth cavity, a pulse laser for ablating a target material, and a spectrum acquisition unit, the optical signal acquisition module is used for acquiring an optical signal radiated by plasma plume generated by ablating a target material by the pulse laser; and the spectrum analysis unit is connected with the spectrum acquisition unit and is used for receiving the light signals acquired by the spectrum acquisition unit and analyzing and processing the light signals so as to obtain the state information of the plasma plume. According to the online monitoring scheme, the extreme ultraviolet spectrum diagnosis technology and the pulse laser deposition process are deeply fused, so that the film growth process is accurately controlled, and the process is optimized.

The invention discloses a miniaturized ultra-strong and ultra-short laser dispersion compensation device and method. The miniaturized ultra-strong and ultra-short laser dispersion compensation device comprises a stretcher, a pre-compensation compressor, an amplifier and a compressor. The pulse laser is firstly broadened by the stretcher, partial second-order and third-order dispersion is compensated by the pre-compensation compressor, partial high-order dispersion is increased, then the pulse laser is amplified by the amplifier, and finally the pulse laser is compressed to be close to the Fourier limit pulse width by the compressor. According to the invention, the pulse laser can be broadened to hundreds of picoseconds or even nanoseconds to be amplified under the existing condition and then compressed to be close to the Fourier limit pulse width, and good light beam quality is ensured.

The invention relates to the technical field of precision and ultra-precision machining, and discloses a CO2 full-laser machining device and method for a fused quartz micro convex lens array. The three-axis motion platform is arranged on the supporting platform; the pulse CO2 laser is used for generating a processing laser beam; the light beam transmission system sequentially comprises a light beam combining module, a light beam adjusting module, a light splitting module, a light beam guiding module, a scanning galvanometer and a focusing field lens along a laser beam path; the main light beam is guided to the scanning galvanometer through the light beam guiding module and is emitted to a fused quartz workpiece after being focused through the focusing field lens; the contour detection unit is used for taking morphology data of the micro-lens array in situ; the temperature monitoring unit is used for measuring the temperature of the processing area; the control unit is connected with the three-axis motion platform, the contour detection unit, the temperature monitoring unit and the pulse CO2 laser, and is used for adjusting the laser power and the displacement of the three-axis motion platform according to detection data; the device has the characteristics of high efficiency, high precision, non-contact processing and small heat influence.