282 results about "Laser heating" patented technology

The invention provides a temperature control system of an electrostatic adsorption disc and an improvement method of temperature control performance. According to the system, a temperature control layer is arranged in an electrostatic adsorption disc, and the temperature control layer comprises a graphite heat absorption layer and a graphene heat conduction layer; the system further comprises a laser generator and a controller. During working, the laser generator emits heating laser to the graphite heat absorption layer, so that the graphite heat absorption layer efficiently absorbs energy to generate heat, and then the heat is quickly and uniformly conducted to the surface of the electrostatic adsorption disc through the graphene heat conduction layer with ultrahigh heat conductivity. Laser heating is used for replacing traditional resistance heating, graphene heat conduction is used for replacing traditional metal heat conduction, the method has the advantages of being high in temperature switching speed, high in control precision, good in temperature uniformity and the like, and the temperature control performance of the electrostatic adsorption disc can be remarkably improved.

The invention discloses a temperature-controllable laser heating device and method, and relates to the technical field of laser heating, and the device comprises a laser generator which is used for generating a laser beam for heating; the triangular prism assembly is arranged on the same side of the laser generator and the detection control module and is used for refracting the laser beams to irradiate the power equipment for heating and refracting infrared radiation generated by the power equipment to irradiate the detection control module; the detection control module is used for detecting the infrared radiation so as to obtain the actual temperature of the heating point of the power equipment, and adjusting the output power of the laser generator based on the actual temperature and the preset temperature so as to control the deviation between the preset temperature and the actual temperature; the laser beam is refracted to irradiate the power equipment for heating, the actual temperature of the heating point is obtained, the output power of the laser generator is adjusted based on the actual temperature and the preset temperature, the device can be used without modification, and the problems of randomness of training content and concealment of examination content are solved.

The invention relates to the technical field of material corrosion and protection, discloses a TP2 copper corrosion behavior testing method based on temperature regulation and control, and aims to solve the problem that in the prior art, various physical and chemical parameters in the corrosion process are difficult to synchronously obtain under the same microscale, so that a local corrosion dynamics mechanism cannot be deeply revealed. The core of the system is a coaxial three-function composite probe integrated with thermal, acoustic and electrochemical sensing units, and the coaxial three-function composite probe is matched with a synchronous laser heating module and a multi-physical field synchronous control system. During testing, the probe scans on the surface of a sample, local thermal disturbance is applied to each pixel point, and the interface temperature, acoustic impedance and corrosion rate data of the point are synchronously collected. According to the invention, through high integration in structure and accurate synchronization in time, the space mismatch error of multi-source measurement is eradicated, and multi-physical field distribution images which are accurately corresponding to each other can be obtained in situ and losslessly.

The invention discloses a working temperature control method of a Josephson probe and a method for regulating and controlling the thickness of an Nb film, the working temperature of the Nb-based probe is increased to 7.2 K by regulating and controlling the film thickness parameter and controlling the working temperature of the probe, and the highest record of similar probes is created. According to the method for regulating and controlling the thickness of the Nb film, a four-groove quartz tube is selected as a substrate, and after ultrasonic cleaning, a nano needle tip is drawn by adopting a laser heating method, so that a needle tip structure with a clean surface and a controllable geometric structure is obtained; and horizontally fixing the prepared nano needle tip on a probe bracket, depositing a niobium film by adopting a magnetron sputtering process, and controlling the thickness of the Nb film to prepare the Josephson probe. According to the invention, the dependence of the probe on an extremely low temperature environment is obviously reduced, the limitation of the original process is broken, the available film thickness range is effectively widened, the preparation yield and the performance consistency of the probe are obviously improved, and a reliable device basis is provided for the practical development of near-field microwave imaging and quantum sensing technologies.

The invention belongs to the technical field of temperature characterization, and discloses a semiconductor device temperature characterization method and system. The semiconductor device temperature characterization scheme provided by the invention comprises the following steps: bearing a semiconductor device and adjusting the position of the semiconductor device by using a device bearing and adjusting unit; respectively emitting detection laser and heating laser by using a detection laser emitting unit and a pumping laser emitting unit, and irradiating the detection laser and the heating laser to a test area of the semiconductor device; collecting and recording a temperature measurement signal reflected by the semiconductor device by using a temperature measurement unit; the device operation control unit is used for providing an electric signal for the semiconductor device and synchronously triggering the temperature measurement unit to record a temperature measurement signal so as to ensure the synchronization of online work and temperature measurement of the semiconductor device; and obtaining transient temperature characterization information of the semiconductor device based on the temperature measurement signal by using the main control unit. According to the invention, temperature characterization of nanosecond-level time and submicron-level spatial resolution of the semiconductor device can be realized.

The invention relates to the technical field of packaging equipment, in particular to semiconductor laser packaging equipment and a using method thereof.The semiconductor laser packaging equipment comprises a rack, a packaging table and a laser heater and further comprises an electric push rod, an air exhaust assembly and a plugging assembly, the electric push rod is arranged on the rack, and the air exhaust assembly is arranged at the output end of the electric push rod; the plugging assembly is arranged in the air exhaust assembly, the air exhaust assembly comprises an adsorption part, an air hole is formed in the adsorption part and is formed below the plugging assembly, the air exhaust assembly generates negative pressure and adsorbs a chip when being powered on and started, and the electric push rod drives the air exhaust assembly to drive the plugging assembly and the chip to move downwards when being powered on and started. Through the arrangement of the air exhaust assembly and the plugging assembly, the situation that stress is concentrated on the bonding surface of the chip and the welding flux due to local cooling can be avoided, gaps generated when the welding flux is molten can be eliminated through vibration generated by impact, and the quality and reliability of packaged products are effectively improved.

The invention discloses a liquid nitrogen cooling and laser heating collaborative auxiliary cutting device and a cutting method thereof. The device comprises a laser heating system, a liquid nitrogen cooling system, a cutting system, a tool temperature monitoring system and a control system. Laser emitted by the laser heating system is focused on a to-be-machined area of a workpiece in front of a cutting edge after transmitting through the cutter body; the liquid nitrogen cooling system accurately sprays liquid nitrogen to the cutting edge area of the tool through a heat insulation liquid supply pipeline and a nozzle which are integrated in the tool rest. The control system dynamically and synergistically adjusts the laser output power and the liquid nitrogen injection flow based on a temperature signal sent by a thermocouple embedded in the cutter. According to the device, parallelism of the two processes of laser heating of a workpiece and liquid nitrogen cooling of a tool is achieved in space, dynamic matching and accurate balance of laser heating and liquid nitrogen cooling are achieved in time, and the problems that in laser-assisted cutting, the tool is prone to thermal damage, the cooling efficiency is low, and a thermal field is out of control are effectively solved.

The invention relates to a to-be-cut solar cell and a photovoltaic module, and the cell comprises a cell body, and the surface of the cell body is provided with a laser heating enhancement region; the laser heating enhancement area is provided with a light trapping part and a heat absorption part, and a to-be-cut line of the battery piece body is located in the laser heating enhancement area; the light trapping part is arranged on the surface of the laser heating enhancement area; the heat absorption part and the light trapping part are at least partially overlapped, and the heat absorption part is arranged on the to-be-cut line. The light trapping part can improve the light incidence effect and increase the utilization rate of laser energy, the heat absorption part can absorb laser and heat around the light trapping part so as to improve the temperature of laser cutting at the position of the to-be-cut line, and therefore under the condition that low laser output power is adopted, the laser cutting efficiency is improved. The heat on the solar cell is not reduced, the effect of cutting the solar cell can still be realized, the damage to the surface of the solar cell is reduced, the power loss of the solar cell is reduced, and the power generation efficiency and long-term reliability of the photovoltaic module are improved.

The invention discloses a particle erosion test device and method, and belongs to the technical field of particle erosion tests.The particle erosion test device comprises a clamping piece used for clamping a workpiece, a sand blasting device and a laser emitter, and the laser emitter is used for emitting laser to irradiate the workpiece so as to heat the workpiece; the particle erosion test device further comprises cooling water pipes and a vacuum pipe, the vacuum pipe is arranged outside the laser transmitter in a sleeving mode, the two opposite ends of the vacuum pipe are connected with the cooling water pipes, and the cooling water pipes are communicated with the cooling water tank. The cooling water pipe is used for introducing circulating cooling water into the vacuum pipe so as to adjust the temperature of the laser transmitter, and the air compressor sprays compressed air to the workpiece through the compressed air spraying pipe so as to cool the workpiece. Through combined use of the laser heating device and the particle erosion device, a particle erosion test in an extreme environment is stably simulated, and the effectiveness of the test is ensured.

The invention provides an SLM preparation process method for TC4 powder with wide particle size distribution. The SLM preparation process method comprises the following steps that firstly, a first layer of titanium alloy powder is laid on a forming substrate at the powder laying speed of 100 mm / s-200 mm / s; secondly, according to the particle size and particle size distribution characteristics of the current layer of titanium alloy powder, corresponding laser heating melting parameters are selected for laser heating melting, and cooling solidification is conducted; thirdly, the thickness of the formed substrate is reduced by 90-120 micrometers, and a next layer of titanium alloy powder is laid on the basis of the current layer of titanium alloy powder; fourthly, the first step to the third step are repeated, and layer-by-layer stacking is conducted till the titanium alloy part is formed; according to the method, the problems of high porosity, poor forming quality and low performance of wide-size-distribution TC4 powder in SLM forming can be effectively solved, meanwhile, the advantages of low cost and short period of a wide-size-distribution scheme are fully played, and high-quality forming of high-cost-performance TC4 alloy components is achieved.

The invention discloses a water, electricity and light independent separation multi-cavity laser heating system and device. The system comprises a laser generating module, a light beam guiding module, a double-cavity isolation module and a variable light spot adjusting module. The laser generating module outputs a laser beam, the light beam guiding module enables the laser beam to be transmitted according to a preset path through light path steering, the double-cavity isolation module comprises a laser action cavity and a cooling medium cavity which are mutually independent, and the variable light spot adjusting module is integrated in the laser action cavity to adjust the dimension of a light spot. The device comprises a frame assembly, a laser emitting part, a reflecting part, a lens adjusting part and a cooling part, the laser emitting part outputs light beams, the light beams enter a laser cavity after being turned by the reflecting part, the lens adjusting part adjusts the light spot width, and the cooling part is communicated with a water path of a lens fixing seat through a water cooling pipe to achieve cooling. The laser action cavity and the cooling medium cavity are subjected to double-cavity separation, and the problems that when light spots are adjusted, a pipeline is prone to being pulled and large in size, and cooling is affected by laser radiation are solved.

The invention belongs to the technical field of fusion connection of a thermoplastic composite material and a metal laminated structure, and discloses a laser fusion temperature and pressure coordinated control process method for the thermoplastic composite material and the metal laminated structure. According to the method, follow-up pressing force application and temperature control in the laser connection process are achieved, follow-up pressing force application is achieved through clamping mechanisms designed at the two ends of a laser welding actuator respectively, and the contact portion of the clamping mechanism on one side and a workpiece is in a single-roller pre-clamping mode; and the contact part of the clamping mechanism on the other side and the workpiece adopts a multi-pressing-roller pressing and pressure maintaining mode. According to the temperature control function, the temperature of a connection interface is fed back in real time through an infrared online sensing system, then the output power of a laser heating head is changed in a self-adaptive mode to dynamically regulate and control energy irradiated on the metal surface, and finally control over the interface temperature of the laminated structure is achieved. According to the method, the problems of poor connection quality and the like caused by poor temperature consistency of connection areas and different pressing forces are solved, and the interface connection effect of the thermoplastic composite and the metal laminated structure is effectively improved.

The embodiment of the invention discloses a laser heating device and laser welding equipment, the laser heating device comprises a first laser mechanism and a second laser mechanism, the first laser mechanism comprises a fixedly arranged first laser module, and the first laser module is used for emitting light to a target object to form a first light spot on the target object; the second laser mechanism comprises a rotationally arranged second laser module, and the second laser module is used for emitting light to the target object so as to form a second light spot on the target object; wherein the orientation of the first laser module is perpendicular to the axial direction of the rotating shaft of the second laser module, and the angle of the second laser module can be adjusted so as to adjust the splicing between the second light spot and the first light spot. The second laser module is rotatably arranged relative to the first laser module, and the angle of the second laser module can be adjusted, so that the splicing between the second light spot and the first light spot is adjusted, and the size, the shape, the power density and the like of the heating light spot are adjusted.

An apparatus for heating a substrate within a thermal processing chamber is disclosed. The apparatus includes a chamber body, a gas inlet, a gas outlet, an upper window, a lower window, a substrate support, and an upper heating device. The upper heating device is a laser heating device and includes one or more laser assemblies. The laser assembly includes a light source, a cooling plate, an optical fiber, and an illumination window.

The application provides an online detection and compensation method for local decarburization of high-strength spring steel strips, which comprises the following steps: monitoring oxygen concentration in real time by arranging an oxygen content sensor in a continuous annealing furnace and marking potential decarburization risk sections; scanning the steel strips in the risk sections by infrared thermal imaging to generate a carbon distribution map and locate decarburization zones; performing pulse laser heating on the decarburization zones and introducing a methane-argon mixed gas to realize in-situ carburization; and finally eliminating local thermal stress by high-frequency induction heating. The method realizes dynamic early warning of decarburization risk, accurate positioning of defects, local efficient carburization and stress homogenization control, and significantly improves the surface quality and fatigue performance of the steel strips.

The application relates to a growth method of a single crystal fiber with a continuous gradient distribution of doping ions, comprising the following steps: cutting at least two homogeneous crystals or ceramics with different doping ion concentrations and a homogeneous crystal or ceramic without doping ions into square rods; selecting the square rod without doping ions as a first seed crystal, selecting the square rod doped with a first ion concentration as a first source rod, and performing a first forward growth of the single crystal fiber by using a laser heating base method; after the single crystal fiber doped with the first ion concentration is grown to a required length, adding a square rod doped with a second ion concentration as a source rod to continue the first forward growth of the single crystal fiber by fusion, and repeating the operation N times until the single crystal fiber doped with each ion concentration is grown to the required length; and sequentially performing a first reverse growth, a second forward growth and a second reverse growth on the obtained fused single crystal fibers with different doping ion concentrations to obtain the single crystal fiber with the continuous gradient distribution of the doping ions.

Disclosed in the present invention are a reaction device for narrow-band luminescence indium phosphide quantum dots, and a method for producing narrow-band luminescence indium phosphide quantum dots using the reaction device. The reaction device comprises a high gravity device and a photothermal device, wherein the high gravity device comprises a housing, an electric motor, a rotating disk, shear packing, a liquid distributor, a reaction chamber, a packing cover, a gas outlet, a liquid outlet and liquid inlets; and the photothermal device comprises a laser heating device, a circuit and water cooling device, a reflective layer and a laser controller. In the present invention, infrared laser is coupled into a high gravity reactor, and solvent media such as water or organic compounds are used to absorb infrared light and convert same into thermal energy to raise the temperature of the high gravity reactor, so as to initiate a nucleation reaction of a reactant precursor in a "micro-droplet reactor", thereby realizing the controllable growth of quantum dots in the micro-droplet reactor; and then nanoparticles of uniform size are finally obtained by means of controlling the laser irradiation and heating duration.

The invention discloses a temperature control method and device for laser cladding, electronic equipment and a storage medium. The temperature control method comprises the steps that laser parameters of laser heating conducted by laser equipment on a laser cladding area on a machined part are obtained; the laser parameters are input into a preset temperature field simulation model to conduct temperature field simulation on the laser cladding area, and temperature field data in the laser cladding area are obtained; based on the temperature field data, cladding state parameters in the laser cladding area are determined, and the cladding state parameters comprise at least one of the cladding temperature and cladding state characteristics; and target laser parameters are determined based on the cladding state parameters, so that laser equipment conducts laser heating in the laser cladding area according to the target laser parameters. According to the method, the temperature control accuracy of laser cladding can be improved.

This invention relates to the field of conductivity measurement technology, and more particularly to a high-temperature conductivity measurement system and method based on the eddy current method. The system includes a stage, a high-temperature eddy current probe, a moving device, a pyrometer, a laser heating subsystem, and a data measurement subsystem. The stage is used to place the sample to be measured. The high-temperature eddy current probe is used to receive an excitation signal and pick up the measurement signal. The moving device is used to move the high-temperature eddy current probe laterally above the sample. The laser heating subsystem emits a continuous laser in the near-infrared band to heat the sample. The data measurement subsystem generates a set of multi-frequency excitation signals to excite the high-temperature eddy current probe, determines the inductance changes corresponding to the multi-frequency excitation signals measured by the high-temperature eddy current probe at the same position above the sample, and calculates the conductivity of the sample based on the inductance changes. This invention enables accurate, non-contact measurement of the conductivity of materials under high-temperature conditions.

The application discloses a kind of ultrasonic drilling device and drilling method of auxiliary liquid using laser heating, belong to ultrasonic auxiliary processing technical field, it includes spindle assembly, spindle Z direction feed assembly, laser heating assembly, auxiliary liquid buffer drainage assembly, workpiece fixed platform assembly, ultrasonic vibration assembly, X direction and Y direction moving assembly, monitoring component, portal frame;The X direction and Y direction moving assembly are used to realize the horizontal two-dimensional motion of workpiece, and the spindle Z direction feed assembly is fixedly connected on the portal frame, to control the movement of spindle assembly in Z direction;Laser heating assembly realizes the up-down movement of auxiliary liquid buffer drainage assembly by bidirectional screw rod, and buffer heating unit with shallow groove structure rotates, to realize the uniform and rapid heating of auxiliary liquid;Ultrasonic vibration assembly contains four ultrasonic vibration units, to realize the vibration of workpiece during processing together;The monitoring component includes force sensor, temperature sensor and position switch sensor, to assist the whole processing process.

A method and system for manufacturing an RFID device involve positioning a first conductive member relative to a second conductive member and temporarily securing them together. A localized temperature increase is created at an interface between the conductive members, forming a galvanic connection at a localized weld zone. The method may include applying pressure during heating and can use various heating techniques such as inductive, capacitive discharge, or laser heating. The system includes a transporter, a positioner, and an energy applicator. An RFID device manufactured by this method comprises a first conductive member, a second conductive member, and a galvanic connection between them, with the connection having a localized weld zone exhibiting distinct structural characteristics. The method and system may improve electrical connectivity in RFID devices, particularly between RFID straps and antennas.

The utility model discloses a pinch roller assembly capable of realizing edge rolling operation of a high-strength steel plate workpiece, which comprises a laser heating mirror group for pre-softening a high-strength steel plate to be subjected to edge rolling operation, a rolling device for carrying out edge rolling operation on the pre-softened high-strength steel plate, and a servo articulated arm for connecting the laser heating mirror group and the pre-rolling device, therefore, the laser lens group obtains appropriate heating light spots and orientations relative to the edge rolling head according to the angle and position conditions. According to the pressing wheel assembly, on one hand, laser of the laser heating mirror set is adopted for heating a local area of a high-strength steel plate, then the edge rolling effect is achieved, then the rolling force in the edge rolling process is reduced, and the laser mirror set can adjust the angle and position conditions relative to an edge rolling head so as to obtain appropriate heating light spots and orientation; and on the other hand, the laser heating mirror set and the rolling device can be jointly installed on the mechanical arm by means of the servo articulated arm, and synchronization of laser annealing and rolling operation is achieved.

The application provides an electron microscope for in-situ characterization of material surface and interface damage under multi-factor coupled corrosion, relates to the technical field of in-situ detection equipment, and aims at solving the technical problem that the scanning electron microscope in the prior art cannot realize the research on the damage mechanism of the material under a specific corrosion environment in-situ. The electron microscope for in-situ characterization of material surface and interface damage under multi-factor coupled corrosion comprises an electron microscope bin, a support frame, a corrosion-resistant loading table, a laser heating device and a gas needle. The corrosion-resistant loading table clamps a sample after salt spraying and applies stress to the sample. The laser heating device and the gas needle are integrated in the electron microscope bin. The sample is heated by the laser heating device, the hot salt environment under the stress state of the service of the sample is simulated, trace reaction gas is introduced to the surface of the sample through the gas needle, the test environment is closer to the actual environment, and thus the damage mechanism of the material under a specific environment is more truly revealed, thereby laying a foundation for establishing a hot, force and electrochemical multi-field coupled corrosion damage theory and a corrosion damage evaluation model.

The utility model discloses an aerosol generating device, and belongs to the technical field of aerosol generation. The aerosol generating device provided by the embodiment of the utility model comprises a laser heating module. The laser heating module is used for emitting laser to heat the aerosol generating substrate. And the optical power density range of the laser heating module acting on the aerosol generating matrix is 0.2-1.0 W / mm < 2 >. According to the aerosol generating device provided by the embodiment of the invention, the aerosol generating substrate is heated through the laser heating module. The laser heating technology has the characteristics of high energy density and high power response speed, and energy can be quickly radiated to the aerosol generation matrix without firstly heating the heating body, so that the aerosol is quickly generated, a user does not need to wait for a long time, and the user experience is relatively good. Furthermore, the optical power density range of the laser heating module acting on the aerosol generating substrate is 0.2-1.0 W / mm < 2 >, so that the suction experience of stopping while sucking can be realized, and meanwhile, the problem that the aerosol generating substrate is burnt is solved, so that aerosol with good taste is obtained.

This invention relates to the field of laser processing and automated control technology, and particularly to a laser heating system, including an equipment device and a control device. The equipment device includes a support platform, a transmission mechanism, a laser, and vision components. The control device includes image acquisition, contour analysis, error compensation, coordinate optimization, and pulse sending modules. The image acquisition module drives the vision component to acquire material images and transmits them to the contour analysis module; the contour analysis module calculates deformation parameters and sends them to the error compensation module; the error compensation module combines pre-stored mechanical errors to generate a compensation matrix and sends it to the coordinate optimization module; the coordinate optimization module calculates and outputs the target coordinates to the pulse sending module; the pulse sending module drives the laser component to move and commands it to emit light. This invention solves the positioning deviation caused by hardware errors and changes in material size, improving control accuracy.

The application discloses an aerosol generating device. The aerosol generating device of the application includes a laser heater and a controller. The laser heater is configured to radiate and heat an aerosol generating substrate. The controller is configured to adjust the output energy of the laser heater according to the working condition of the laser heater within a puffing period. The aerosol generating device of the application radiates and heats the aerosol generating substrate by the laser heater. The laser heating technology has the characteristics of high energy density and fast power response speed, and can quickly radiate energy to the aerosol generating substrate without preheating the heating body, thereby quickly generating aerosol, without long waiting time for the user, and good user experience. Further, within the puffing period, the controller adjusts the output energy of the laser heater according to the working condition of the laser heater, so that the aerosol released by each puff has good consistency.

The invention provides an electrode plate, a secondary battery and an electric device. The electrode pole piece comprises a current collector and a film layer located on at least one surface of the current collector, the film layer is provided with a first surface away from the current collector and a second surface opposite to the first surface, the thickness of the film layer is marked as H, and an area within the thickness range from the second surface of the film layer to 0.3 H is marked as a first area of the film layer, the area from the first surface of the film layer to the thickness range of 0.3 H is marked as the second area of the film layer, the first area and the second area both contain a binder, and the ratio of the mass content of the binder in the second area to the mass content of the binder in the first area is 0.4-1.6; the preparation method of the electrode pole piece comprises the following steps: coating: coating at least one surface of a current collector with electrode slurry, and drying to obtain an initial pole piece; and heating treatment: carrying out laser heating treatment on the surface of the initial pole piece to obtain the electrode pole piece.

The invention relates to a radar unit for a vehicle, comprising a radar antenna (1) and a radome (3) surrounding the radar antenna (1) to protect the radar antenna (1), as well as a laser emitter unit (5) whose emission range is directed towards the radome (3) to heat the radome (3).

In an aspect of the present invention, a new active optic is provided, namely, a photo-magnetically actuated deformable mirror (PMADM) made of a magnetic composite structure and an optical quality substrate layer. The magnetic layer is composed of Polydimethylsiloxane (PDMS) and powdered ferromagnetic CrO2. A magnet may be used to deform the mirror surface. The powdered CrO2 has a low Curie temperature (preferably around 395 K) which allows changing the magnetization of the magnetic layer using a laser heating source, thus providing control over the deformation. In one embodiment, the structure has an overall dimension of 1.2 inch 1.2 inch 175 μm with an optical pupil diameter of 8 mm. The PMADM is estimated to deform to a maximum stroke of 8.7731 μm before failure with a 3 safety factor.

The invention provides a laser heating optimization method and system, and the method comprises the steps: obtaining the parameters of a laser chip, a laser module, a heated object and a reflector, inputting the parameters into a multi-parameter coupled angle cooperative calculation model, obtaining an optimal incident angle and an optimal reflection angle, adjusting the inclination angle of the laser module to enable the reflected light to deviate from a photosensitive region, and carrying out the calculation. And the reflecting mirror is arranged to guide the reflected light to the target area again, so that the laser chip is prevented from being damaged by the reflected laser, the reliability of the laser module is improved, the service life of the laser module is prolonged, and meanwhile, the laser energy utilization efficiency is improved to reduce energy waste.