111 results about "Laser scribing" patented technology

The invention discloses a solar cell laser scribing track control method, a scribing method and a scribing system.The control method comprises the following steps that a first camera is used for obtaining datum line data at the position L away from the front of a laser device and sending the datum line data and corresponding position data to a control device; when the control device controls the laser to move to the position corresponding to the position data in the first direction, compensation and lineation are carried out based on the datum line data and the preset line spacing, so that the laser carries out lineation along with the datum line; the second camera is used for acquiring a current line spacing between a current processing line and a reference line and sending the current line spacing to the control device, the control device compares the current line spacing with a preset line spacing, the control device obtains correction data according to a comparison result, and the correction data is used for correcting the current processing line according to the correction data. And controlling the movement of the laser based on the correction data and the datum line data of the first camera.

The invention relates to the field of display screen production, in particular to intelligent cutting equipment for display screen production. Comprising a console and a laser transmitter. And a laser transmitter is mounted on the console. According to the laser scribing device, the function of synchronously cracking after laser scribing is achieved, and the specific process is that when a laser transmitter resets after scribing is completed, an electric push rod drives a cutting head to move downwards, so that the cutting head makes contact with a stress groove formed after scribing cutting, and then when the laser transmitter moves and resets, the cutting head is driven by the electric push rod to move downwards; the mechanical force is applied to the formed laser cutting stress groove through the cutting head, so that the laser cutting stress groove is completely cracked, splitting is achieved, and the problems that in traditional display screen cutting, due to the fact that laser scribing and mechanical splitting serve as independent working procedures, the machining efficiency is low, and damage is likely to be generated in secondary alignment and machining are solved.

The invention relates to the technical field of solar cells, in particular to an interface regulation and control method for inhibiting electrode failure of a perovskite device, which comprises the following steps: (1) cleaning a transparent conductive layer with P1 laser scribing to obtain a clean transparent conductive substrate; sequentially preparing a first carrier transport layer, a perovskite layer and a second carrier transport layer on the transparent conductive substrate from bottom to top, and then performing P2 laser scribing; (2) preparing an interface buffer layer on the second carrier transport layer; and (3) depositing a metal electrode on the interface buffer layer and then carrying out P3 laser scribing. According to the regulation and control method, through preparation of a core interface buffer layer and full-flow process regulation and control, an optimized nucleation interface is provided for metal electrode densification and film formation, and the electrode deposition quality is improved; meanwhile, good energy level matching of the carrier transport layer and the metal electrode is achieved, interface ion migration and diffusion are restrained, and the problems of thin film splashing and edge curling in the laser scribing process are solved.

The present application provides a solar cell and a preparation method therefor, an electric apparatus, and a power generation apparatus. The solar cell comprises a first electrode, a functional layer, and a second electrode that are sequentially stacked, and a P3 groove formed through the second electrode and the functional layer, wherein the surface of the side of the second electrode away from the functional layer, and the surfaces of the inner wall and the bottom end of the P3 groove are covered with an insulating layer, and the resistance value of the insulating layer ranges from 2,000 Ω to 108 Ω. The insulating layer can reduce the short circuit caused by the contact between burrs formed by laser scribing of the second electrode and the first electrode, thereby improving the photoelectric conversion efficiency of the solar cell.

The invention provides a high-yield low-capacitance TVS (Transient Voltage Suppressor) diode packaging process, which comprises the following steps: S1, back metallization: a sputtering table is adopted, the thickness of Ti / Ni / Ag is 50 / 200 / 800nm, and the back temperature is lt; the contact resistance is less than or equal to 0.05 m omega.mm < 2 > and the resistance is gt; 0.08, sputtering again; s2, wafer thinning and stress release are carried out; s3, front passivation / low-k dielectric layer preparation; s4, preparing an aluminum-copper bump; s5, performing laser scribing; s6, inversely mounting a patch; s7, performing vacuum reflow soldering; s8, plasma cleaning and plasma underfilling are carried out; and S9, laser marking is carried out. According to the process, five contradictions of'extreme low capacitance, extreme yield, low temperature drift, zero cavity and green manufacturing 'are simultaneously grounded in the same package, so that the TVS device really meets the dual requirements of a 40Gbps high-speed interface and a vehicle gauge for the first time.

The utility model discloses transparent conductive glass and a perovskite thin film battery assembly. The transparent conductive glass comprises a transparent substrate, the transparent substrate is provided with a first surface and a second surface which are opposite, and a first direction and a second direction which are perpendicular to each other, a plurality of grooves extending in the second direction are formed in the second surface in parallel, and diffuse reflection patterns are arranged at the bottoms of the grooves; and the transparent conducting layer is stacked on the non-groove area on the second surface and stacked on the bottom and at least one side wall of the groove so as to form a continuous or discontinuous transparent conducting layer structure in the first direction. When the transparent conductive glass disclosed by the utility model is used for manufacturing a perovskite thin film battery assembly, the laser scribing passes can be obviously reduced, so that the process is simplified, and the ablation damage to the perovskite thin film battery caused by multiple laser scribing is avoided, thereby reducing the dead zone area; the stability and the power generation efficiency of the assembly are improved; and the service life of the assembly is prolonged.

The invention relates to the technical field of solar cells, in particular to a wide-band-gap organic-inorganic hybrid perovskite cell module driven by indoor light to degrade organic pollutants. The structure of the wide-band-gap organic-inorganic hybrid perovskite battery module is n-i-p type or p-i-n type, and the wide-band-gap organic-inorganic hybrid perovskite battery module is formed by connecting single batteries in series through laser scribing of P1-P2-P3; the wide-band-gap organic-inorganic hybrid perovskite battery module comprises a wide-band-gap perovskite thin film light absorption layer, and is prepared by spin-coating a PbI2 precursor solution on the surface of an n-type electron transport layer or a p-type electron transport layer, annealing 1, spin-coating a perovskite precursor solution, and annealing 2. The perovskite solar cell module has a good visible light utilization rate, and still has high photoelectric conversion efficiency even under the indoor weak light illumination conditions that the color temperature is 3000K and the illumination is 1000lux. The photovoltaic driven catalytic degradation organic pollutant system has an excellent organic pollutant degradation effect.

The application provides a perovskite laminated battery laser scribing and slicing all-in-one machine and a processing technology thereof, which comprises a workbench, a moving mechanism arranged on the workbench, a suction stage arranged at the moving end of the moving mechanism, a laser assembly comprising a laser, an external light path structure and a galvanometer unit, a visual assembly comprising a detection unit for detecting a battery piece and a positioning unit for positioning the battery piece, and the detection unit, the positioning unit, the external light path structure and the galvanometer unit are all located above the workbench. The application has the functions of scribing and slicing, reduces intermediate transfer, secondary feeding and positioning time, greatly improves productivity, and in addition, the processing steps of the technology can effectively protect the material performance of the perovskite battery assembly, and avoid damage to the perovskite performance due to local overheating.

The invention discloses a battery assembly and a forming method thereof. The battery assembly comprises a first substrate; a bottom electrode layer on the first substrate; the first electric energy transmission layer is located on the bottom electrode layer and comprises first electron transmission layers and first hole transmission layers which are alternately arranged; a perovskite layer; a second substrate; a top electrode layer on the second substrate; the second electric energy transmission layer is located on the top electrode layer and comprises second electron transmission layers and second hole transmission layers which are alternately arranged; the first electron transport layer is aligned with the second hole transport layer, and the first hole transport layer is aligned with the second electron transport layer. The complete perovskite layer is located between the first electric energy transmission layer and the second electric energy transmission layer, scribing segmentation does not need to be carried out on the first electric energy transmission layer, the perovskite layer and the second electric energy transmission layer, and dead zones caused by laser scribing in the first electric energy transmission layer, the perovskite layer and the second electric energy transmission layer are eliminated. And the perovskite layer is not damaged by laser scribing, so that the stability and the reliability of each sub-cell module are improved.

The invention relates to a battery piece scribing device and method, and the device comprises a feeding mechanism which comprises at least two first conveying lines and a lifting assembly, the first conveying lines are used for conveying a battery piece to be scribed and a battery box, and the output end of the lifting assembly is connected with a second conveying line and can be in butt joint with any first conveying line; the conveying mechanism comprises a first transfer assembly, a third conveying line, a first adsorption assembly, a first transfer assembly, a second transfer assembly and a first detection assembly, and the first transfer assembly and the second transfer assembly are both arranged on one side of the first conveying line; the scribing mechanism comprises a restoration assembly and a laser scribing assembly. Through the arrangement, high-speed scribing of the scribing device on the battery piece is achieved, and meanwhile high compatibility and high utilization rate of the device are guaranteed.

The utility model provides a perovskite laser scribing machine based on glass surface scribing. In order to solve the problem of low scribing efficiency of a large-size perovskite cell substrate, the device comprises a laser generation module which specifically comprises a laser and a reflector path system, and a laser splitting module which specifically comprises a laser splitting box, a multi-beam focusing scribing module and a cell substrate supporting and moving module, the device specifically comprises at least one focusing ruling head assembly and a ruling head movement module, and a dust extraction system can be configured for synchronous dust removal. Through multi-beam synchronous scribing, simultaneous processing of at most 48 beams of laser is realized, the scribing efficiency of the perovskite cell is remarkably improved, and the high-efficiency production requirement of a large-scale production line is met.

The clamp for the laser scribing machine comprises a base and a limiting ring plate which are distributed in parallel, the base and the limiting ring plate are connected through a supporting piece, a plurality of vacuum adsorption pipes are arranged on the base, and the tops of the vacuum adsorption pipes are located in the limiting ring plate; a plurality of limiting grooves distributed in the circumferential direction are formed in the limiting ring plate, positioning plates capable of generating displacement in the radial direction of the limiting ring plate are arranged in the limiting grooves, and a limiting block used for positioning a silicon wafer is arranged at the inner end of at least one positioning plate; a plurality of first scale grooves distributed in the radial direction are formed in the two sides of the limiting groove, and second scale grooves corresponding to the first scale grooves are formed in the positioning plate. According to the utility model, silicon wafers can be positioned when being placed, the placement precision is improved, and rapid placement is facilitated; and meanwhile, the magnet sheet can move according to scales, so that silicon wafers with different ruler diameters can be conveniently placed, the silicon wafers can be clamped, the silicon wafers are prevented from deviating, the cutting precision of the silicon wafers is ensured, and the material loss is reduced.

1. The name of the design product: perovskite solar thin film cell laser processing equipment. 2. The use of the design product: for perovskite solar thin film cell laser cleaning, laser scribing, laser edge cleaning, substrate cutting, glass punching, laser sealing, etc. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: design 1 perspective view 1. 5. Design 1 is designated as the basic design.

The application discloses a kind of dimming cadmium telluride power generation glass and preparation method thereof, belong to adjustable light photovoltaic module production technical field.The preparation method includes: on FTO conductive substrate, CdSe / CdTe power generation layer and ZnTe doped composite back contact / complex back electrode layer are prepared in sequence, single time perforating is carried out using laser, the discrete micropore array with aperture 1 μm~5 μm, hole spacing 5 μm~15 μm, optical opening rate 10%~60% is formed, then solid-state electrolyte layer, electrochromic layer and transparent top electrode are deposited, and the product is obtained by laser scribing electrode isolation and glass packaging.Product is divided into high efficiency HP, balanced type ST and high light HT three series according to opening rate.The application realizes the effect of light path self-alignment, process simplification and no moire interference, and the power generation efficiency loss is small, the light transmittance and power generation efficiency matching can be flexibly customized, suitable for building photovoltaic integrated scene, with high efficiency power generation, dynamic dimming and excellent visual effect.

The utility model discloses a scribing machine for photovoltaic assembly production, which relates to the technical field of photovoltaic assemblies and comprises a platform, a groove is arranged in the middle of the platform, two guide rails are arranged in the groove, a laser scribing assembly is arranged at the top end of the platform, bearing tables are mounted above the two guide rails, and the laser scribing assembly is arranged on the bearing tables. Center clamps are installed at the top ends of the two bearing tables correspondingly, screw rods are installed in the two center clamps correspondingly, threads formed in the outer surfaces of the two ends of each screw rod are opposite, the outer surfaces of the two ends of each screw rod are in threaded connection with supports correspondingly, one ends of the two supports extend out of the center clamps correspondingly, and the other ends of the two supports extend out of the center clamps correspondingly. The extension ends of the two supports are each provided with two side clamps. According to the utility model, a series of structures are arranged, feeding and discharging operations are far away from the scribing assembly, the operation space is large, scratch caused by mistaken touch of workers is avoided, the safety is higher, the scribing accuracy is guaranteed, and the photovoltaic assembly is clamped, so that the phenomenon of deviation during scribing is avoided.

The invention provides a dry-type transformer epoxy resin insulating layer laser modification method and system, and the method comprises the steps: determining the thickness of a to-be-degraded epoxy resin insulating layer in a workpiece, and determining the configuration parameter value of a to-be-used laser and the specification of a to-be-used field lens according to the thickness and the thermosetting property of epoxy resin; and according to the set scanning path parameter value, focusing the focus of laser generated based on a laser device and a field lens to be used on the surface of the workpiece for scribing, putting the scribed workpiece into a pre-prepared epoxy resin degradation solution, and respectively recovering metal in the winding structure and degraded epoxy resin. According to the method and the system, laser scribing can be implemented in a customized manner according to different epoxy resin formulas or application scenes by adjusting laser and laser parameter treatment modes, so that a porous structure is generated in a heat affected zone of a scribed surface, the contact area with a chemical solvent is increased, and the degradation reaction is more sufficient.

The application discloses a multi-channel laser scribing processing system with adjustable interval, adopts an octahedral beam splitter designed in a structure to replace a traditional polarization beam splitter, realizes efficient beam splitting, and only four optical elements are needed to complete multi-beam output, so that the optical path structure is obviously simplified, energy loss and manufacturing cost are reduced. Secondly, the controller is integrated to control a first displacement driving device (adjusting the position of incident light), a second displacement driving device (adjusting the interval between split laser beams) and a lens interval adjusting device, real-time monitoring of displacement precision is combined with a laser range finder, and the displacement amount is fed back by using the resistance change of a ball screw, so that a closed loop control is formed, continuous dynamic adjustment of the interval (Delta d) between laser beams is realized, the precision can reach the micron level, and the strict process requirement of minimizing the dead zone of perovskite batteries and the like is met.

The application discloses a perovskite laser scribing device, which comprises a base (1), wherein the base (1) is provided with a Y-axis driving part (2) and a mounting rack (3), and the moving end of the Y-axis driving part (2) is provided with a workbench (4); the mounting rack (3) is provided with an X-axis driving part (5), the moving end of the X-axis driving part (5) is provided with a Z-axis driving part (6), and the moving end of the Z-axis driving part (6) is provided with an infrared laser scribing module (7) and a green laser scribing module (8); the infrared laser scribing module (7) is used for emitting infrared laser to perform scribing processing on a workpiece on the workbench (4); the infrared laser scribing module and the green laser scribing module are used for double-light-path processing, the processing efficiency is improved, and meanwhile, the optical path positioning mechanism is used to drive a collection camera to move, so that the collection camera is accurately corresponded with a scribing point, and the processing accuracy is ensured.

This invention discloses a flexible perovskite solar cell and its fabrication method, relating to the field of solar cell technology. The fabrication method of a flexible perovskite solar cell includes the following steps: attaching one side of a UV-reducing double-sided adhesive tape to a rigid substrate; attaching the other side of the UV-reducing double-sided adhesive tape to a flexible substrate; performing a first laser scribing on the flexible substrate; fabricating a first charge transport layer, a perovskite layer, and a second charge transport layer on the surface of the substrate after the first laser scribing; performing a second laser scribing on the device; fabricating a metal electrode layer on the surface of the second charge transport layer; performing a third laser scribing on the device to obtain a perovskite solar cell; irradiating the perovskite solar cell with UV light; and separating the flexible substrate and the rigid substrate to obtain the flexible perovskite solar cell. This invention ensures that the flexible and rigid substrates are undamaged during the peeling process, and that no adhesive residue remains after peeling, without affecting the performance and encapsulation of the flexible device.

The invention provides an automatic marking method for a silicon rod throwing-cutting thick piece, which comprises the following steps of: acquiring picture information of a silicon rod cutting section and outer wall surfaces on two sides of the silicon rod cutting section, processing the picture information, and acquiring an end part and / or an abutted seam and / or a defect position of the silicon rod; and based on the marking standard, marking at the end part and / or the abutted seam and / or the defect position of the silicon rod. According to the automatic marking method for the silicon rod throwing-cutting thick piece, the positions of the outer end face and the splicing face of the silicon rod and the width size of the splicing seam can be rapidly recognized, and accurate marking can be conducted; the scribing position can be quickly verified so as to judge whether the scribing is successful or not; according to the method, the throwing-cutting scribing efficiency can be improved, and the scribing time of a single silicon rod is shortened from 300 s to 60 s; the accuracy of laser scribing is improved, the wafer yield of the silicon rods is improved, and the wafer yield of a single crystal rod is increased by 6-8 on average.

This utility model discloses a laser engraving and alignment platform, comprising: a first propulsion component, a second propulsion component, a first positioning component, and a second positioning component sequentially disposed on the four outer sides of a support platform, wherein the first propulsion component corresponds to the first positioning component, and the second propulsion component corresponds to the second positioning component; a vision component is disposed on the outer side of the support platform; each of the first and second propulsion components includes: a first fixed seat connected to the side of the support platform; a first lifting cylinder connected to the first fixed seat; a servo motor connected to the output end of the first lifting cylinder; a first support plate connected to the moving end of the servo motor; and a propulsion column connected to the surface of the first support plate. This utility model utilizes a servo motor as the alignment power source, ensuring smooth alignment, avoiding rebound and wear, and guaranteeing alignment accuracy; the alignment method employing two-sided fixing and corresponding two-sided propulsion ensures uniform force on the battery cells and high alignment accuracy.

The invention provides a closed-loop laser power self-checking correction method and system, which are applied to a laser scribing machine, and the method comprises the following steps: arranging an embedded power sensing module at the periphery of a process position of a laser processing head in the laser scribing machine, and monitoring equivalent laser power acting on the surface of a workpiece in real time; target laser power is dynamically generated according to motion parameters of the laser scribing machine, and the motion parameters at least comprise the scanning speed; calculating the power deviation of the laser output power according to the target laser power and the equivalent laser power; according to the power deviation, the correction amount of the laser output power is generated through a control algorithm; and outputting the correction quantity to an actuator corresponding to the laser, so as to adjust the output power of the laser, form closed-loop control and enable the laser output power to be stabilized in a target range. By forming full-automatic real-time monitoring, intelligent decision making and rapid execution closed-loop control, the production efficiency and the equipment utilization rate can be improved.

The invention discloses a large-area flexible perovskite solar cell and a preparation method thereof. The flexible perovskite solar cell sequentially comprises an ultrathin flexible tempered glass substrate, a bottom electrode, a NiOx hole transport layer, a PNPP and Me-4PACz common self-assembly molecular layer, a perovskite light absorption layer, an electron transport layer, a buffer layer, a top electrode and a bus bar from bottom to top. The preparation method comprises the steps of substrate fixing and cleaning, deposition of the bottom electrode and the hole transport layer, coating of the co-self-assembly molecular layer, preparation of the perovskite light absorption layer, evaporation of the electron transport layer and the tunneling layer, deposition of the top electrode, laser scribing, packaging and the like. The ultra-thin flexible tempered glass is adopted to solve the problem that a traditional substrate is insufficient in high temperature resistance and barrier property, interface defects are passivated through a PNPP and Me-4PACz co-self-assembly molecular layer, charge transfer is optimized, meanwhile, the mechanical flexibility of the device is improved, the efficiency of the prepared large-area device reaches 14.22%, the performance is stable after the device is bent for 6000 times, and the device is suitable for industrial application.

The invention relates to a laser scribing motion platform for a large-size perovskite thin-film solar cell. The first X-axis module drives a plurality of second X-axis modules which are uniformly distributed in the left-right direction to move in the left-right direction, and each second X-axis module drives one Z-axis laser lens group to move in the left-right direction; a Y-axis module is installed on the granite base and drives a jig assembly above the Y-axis module to move in the front-back direction. A lower X-axis module is installed at the bottom of at least one of the left side and the right side of the granite cross beam and drives the visual inspection assembly to move in the left-right direction. Multi-head laser parallel machining is adopted, the machining efficiency is greatly improved, the single plate machining time is greatly shortened, and the strict requirement of large-scale industrial production for productivity is greatly met.

The application discloses a processing method and control method and device of a thin-film solar cell. The processing method comprises the following steps: collecting an optical picture of the thin-film solar cell after laser scribing processing; identifying etching lines formed by the laser scribing processing in the optical picture; generating a processing path of laser edge cleaning processing according to the etching lines; and driving a laser processing unit to perform the laser edge cleaning processing along the processing path. The application has the beneficial effect of providing a processing method and control method and device of a thin-film solar cell capable of effectively providing accurate positioning for laser edge cleaning processing.

The invention provides a coaxial visual feedback laser scribing dynamic control method, device, equipment and system, and relates to a photovoltaic device manufacturing technology. The method comprises the following steps: generating a planned path of an (n + 1) th type of lineation based on an actual path of the nth type of lineation acquired by coaxial vision equipment; the coaxial vision equipment is coaxial with the laser processing light path; executing the (n + 1) th type of lineation according to the planned path, and in the execution process, monitoring the relative position between the (n + 1) th type of lineation which is being formed and the adjacent nth type of lineation in real time through coaxial vision equipment; and dynamically adjusting the planning path according to the deviation between the relative position and a preset relative position. According to the invention, the dead zone can be effectively compressed to ensure the power generation efficiency.

This application provides a laser scribing method and system for perovskite solar modules, and a solar cell, belonging to the field of solar cell technology. The method includes: after forming various functional layers on a transparent conductive oxide layer, firstly performing P2 scribing to form P2 channels in each functional layer, exposing a local area of ​​the transparent conductive oxide layer at the bottom of the P2 channels; the functional layers include: an electron transport layer, a perovskite active layer, and a hole transport layer; forming a top electrode layer on the functional layers with P2 scribing completed, and filling the P2 channels with the top electrode layer, contacting the exposed local area of ​​the transparent conductive oxide layer; after forming the top electrode layer, simultaneously performing P1 and P3 scribing while controlling the relative positions of the laser beams for P1 and P3 scribing to be fixed. This application eliminates systematic alignment errors, significantly improving yield, increasing module efficiency, and reducing costs.

The invention discloses a bionic soft-bodied robot and a preparation method thereof, and relates to the field of bionic soft-bodied robots, the bionic soft-bodied robot comprises a carbon precursor layer formed by polyimide paper; an LIG functional layer formed on the carbon precursor layer by graded laser processing; the LIG functional layer has regionalized resistance distribution regulated and controlled by differential laser energy processing and regionalized rigidity distribution regulated and controlled by directional laser scribing; the Kapton adhesive tape substrate layer is adhered to the bottom of the carbon precursor layer; the electrode is arranged in a preset area of the LIG functional layer; the PDMS thermal expansion layer is spin-coated on the surface of the LIG functional layer; and the electrode is packaged between the LIG functional layer and the PDMS thermal expansion layer. The bionic soft robot provided by the invention has good deformability.

The utility model belongs to the technical field of wire performance detection, and particularly relates to a positioning device for sample laser scribing, which comprises two square tubes, the two square tubes are oppositely arranged, a plurality of grooves are uniformly formed in the top end of one square tube along the length direction, and the grooves extend downwards from the top to the middle of the side wall. A groove is formed in the opposite position of the other square pipe from the top to the middle of the side wall downwards. The positioning device is simple in structure and convenient to operate, a sample is fixed through the opposite grooves, the placing direction of the sample is convenient to be perpendicular to the scribing direction in the sample laser scribing process, the detection accuracy is improved, meanwhile, manual intervention is not needed, and the working efficiency of the scribing process is improved; the two ends are arranged through the square pipes, and each end achieves double positioning, so that the stability of sample positioning is improved.

The utility model discloses a thin film laser scribing device, which belongs to the technical field of laser scribing and comprises a bottom plate, a sliding plate fixedly mounted on the bottom plate, a dust suction mechanism arranged on the bottom plate and used for sucking dust on a thin film material, and a scribing mechanism arranged on the bottom plate and used for scribing the thin film material. The dust collection mechanism comprises a dust collection cover arranged on the bottom plate, a collection box fixedly installed on the bottom plate, a collection box movably installed in the collection box, a dust collector fixedly installed on the top of the collection box, a dust collection pipe fixedly installed on the dust collector and a dust collection cover fixedly installed at the end, away from the dust collector, of the dust collection pipe. Through cooperative use of the devices, a film material can firstly pass through the bottom of the dust suction hood on the device, dust on the film material is sucked away by the dust collector, and then the film material is subjected to scribing operation, so that the possibility that the dust affects the laser scribing effect is reduced.