175 results about "Laser scribing" patented technology

The invention relates to the technical field of laser precision machining, and particularly discloses a focus following control method and device for laser scribing. The method comprises the steps that processing parameters are set through upper software, and a two-way range finder is positioned; collecting material surface height data in real time, wherein analog voltage signals of the range finder and distance values are mapped according to a quantitative conversion relation; dynamically compensating the focus height deviation based on a PID algorithm; a voice coil motor is driven by a bus motion control card to adjust the position of a focus lens, and motor displacement and pulse are converted according to 10000 pulse / mm; and forward / reverse scribing respectively adopts independent range finder data to eliminate control lag errors. The device correspondingly comprises a two-way distance measuring module, a data processing module, an axis control module and a bus motion control card supporting multi-channel expansion. According to the invention, bidirectional ranging is combined with PID closed-loop control, and the line width error is controlled to be less than or equal to 20 [mu] m; 24-path synchronous focusing is supported, the focusing period is smaller than or equal to 10 ms, and the machining speed is larger than or equal to 2000 mm / s.

The invention discloses a solar cell laser scribing track control method, a scribing method and a scribing system.The control method comprises the following steps that a first camera is used for obtaining datum line data at the position L away from the front of a laser device and sending the datum line data and corresponding position data to a control device; when the control device controls the laser to move to the position corresponding to the position data in the first direction, compensation and lineation are carried out based on the datum line data and the preset line spacing, so that the laser carries out lineation along with the datum line; the second camera is used for acquiring a current line spacing between a current processing line and a reference line and sending the current line spacing to the control device, the control device compares the current line spacing with a preset line spacing, the control device obtains correction data according to a comparison result, and the correction data is used for correcting the current processing line according to the correction data. And controlling the movement of the laser based on the correction data and the datum line data of the first camera.

The invention discloses a perovskite solar cell module based on insulation layer protection and a packaging process optimization method thereof, through adding an insulation protection layer on the surface of a metal electrode layer and combining a specific deposition process and a packaging process, the risk of short circuit is effectively avoided, and the stability of the cell module is improved at the same time. The perovskite solar cell module sequentially comprises a glass substrate, a transparent conductive oxide layer, a first functional layer, a perovskite layer, a second functional layer, a metal electrode layer, an insulating layer, an adhesive film and a packaging cover plate from bottom to top, and efficient packaging is realized by optimizing laser scribing and insulating layer deposition processes. According to the invention, the long-term stability and the electrical performance of the perovskite assembly are obviously improved, and the perovskite assembly has a wide application prospect.

The invention relates to the technical field of optoelectronic devices, in particular to a back electrode, a perovskite photovoltaic cell and a laser scribing method thereof. The back electrode comprises a first electrode layer and a second electrode layer which are sequentially stacked and arranged in a contact mode, at least one third electrode layer is arranged in the first electrode layer in the layer thickness direction, and the third electrode layer divides the first electrode layer into a plurality of first sub-electrode layers distributed at intervals; the hardness of the second electrode layer and the hardness of the third electrode layer are both higher than the hardness of the first electrode layer. And / or the brittleness of the second electrode layer and the third electrode layer is higher than the brittleness of the first electrode layer. The back electrode provided by the invention is used in a perovskite photovoltaic cell, can ensure the effect of laser P3 scribing without reducing the overall thickness of the back electrode and the conductivity of the back electrode, effectively reduces the difficulty of laser scribing, improves the effect of laser P3 scribing, and forms laser scribing lines without edge breakage.

The present application discloses a laser scribing device and a laser scribing method. The laser scribing device is used to laser scribing the substrate of a thin-film solar cell, and includes a mobile scribing module and a control module. The mobile scribing module includes a laser emitting unit, a reflector, a reflector driving unit and a rangefinder. The reflector is used to reflect the laser from the laser emitting unit and direct the reflected laser vertically onto the processing surface of the substrate. The reflector driving unit is used to drive the reflector to move in the current scribing direction, and adjust the focal position of the laser by adjusting the position of the reflector in the current scribing direction. The rangefinder is used to measure the current position to be scribed on the processing surface to obtain a distance value. The control module is used to control the reflector driving unit to adjust the position of the reflector in the current scribing direction according to the distance value of the current position to be scribed. The structure of adjusting the laser focus of the present application is simple, which is conducive to reducing the cost of the scribing device.

The invention relates to the field of display screen production, in particular to intelligent cutting equipment for display screen production. Comprising a console and a laser transmitter. And a laser transmitter is mounted on the console. According to the laser scribing device, the function of synchronously cracking after laser scribing is achieved, and the specific process is that when a laser transmitter resets after scribing is completed, an electric push rod drives a cutting head to move downwards, so that the cutting head makes contact with a stress groove formed after scribing cutting, and then when the laser transmitter moves and resets, the cutting head is driven by the electric push rod to move downwards; the mechanical force is applied to the formed laser cutting stress groove through the cutting head, so that the laser cutting stress groove is completely cracked, splitting is achieved, and the problems that in traditional display screen cutting, due to the fact that laser scribing and mechanical splitting serve as independent working procedures, the machining efficiency is low, and damage is likely to be generated in secondary alignment and machining are solved.

The embodiment of the invention provides a laser scribing control method, electronic equipment, a storage medium and a program product, and the method comprises the steps: obtaining a first image of a target workpiece, and determining the workpiece information of the target workpiece and a target path on the target workpiece according to the first image; according to the workpiece information, the laser emitting assembly is controlled to conduct scribing on the plating layer along the target path; acquiring a second image of the target workpiece, and determining a quality detection result of the lineation on the coating according to the second image; and under the condition that the lineation quality detection result does not meet the lineation requirement, the laser emitting assembly is controlled to lineate again along the target path until the lineation quality detection result meets the lineation requirement. The scribing result is monitored in real time, repeated scribing is conducted in combination with the scribing result, and the precision of the final scribing result is improved; and the subsequent repeated scribing is used as the supplement of the first scribing, so that the power of the first scribing can be properly reduced, the substrate is prevented from being damaged, and the scribing success rate is improved.

The invention relates to the technical field of solar cells, in particular to an interface regulation and control method for inhibiting electrode failure of a perovskite device, which comprises the following steps: (1) cleaning a transparent conductive layer with P1 laser scribing to obtain a clean transparent conductive substrate; sequentially preparing a first carrier transport layer, a perovskite layer and a second carrier transport layer on the transparent conductive substrate from bottom to top, and then performing P2 laser scribing; (2) preparing an interface buffer layer on the second carrier transport layer; and (3) depositing a metal electrode on the interface buffer layer and then carrying out P3 laser scribing. According to the regulation and control method, through preparation of a core interface buffer layer and full-flow process regulation and control, an optimized nucleation interface is provided for metal electrode densification and film formation, and the electrode deposition quality is improved; meanwhile, good energy level matching of the carrier transport layer and the metal electrode is achieved, interface ion migration and diffusion are restrained, and the problems of thin film splashing and edge curling in the laser scribing process are solved.

The present application provides a solar cell and a preparation method therefor, an electric apparatus, and a power generation apparatus. The solar cell comprises a first electrode, a functional layer, and a second electrode that are sequentially stacked, and a P3 groove formed through the second electrode and the functional layer, wherein the surface of the side of the second electrode away from the functional layer, and the surfaces of the inner wall and the bottom end of the P3 groove are covered with an insulating layer, and the resistance value of the insulating layer ranges from 2,000 Ω to 108 Ω. The insulating layer can reduce the short circuit caused by the contact between burrs formed by laser scribing of the second electrode and the first electrode, thereby improving the photoelectric conversion efficiency of the solar cell.

The invention provides a high-yield low-capacitance TVS (Transient Voltage Suppressor) diode packaging process, which comprises the following steps: S1, back metallization: a sputtering table is adopted, the thickness of Ti / Ni / Ag is 50 / 200 / 800nm, and the back temperature is lt; the contact resistance is less than or equal to 0.05 m omega.mm < 2 > and the resistance is gt; 0.08, sputtering again; s2, wafer thinning and stress release are carried out; s3, front passivation / low-k dielectric layer preparation; s4, preparing an aluminum-copper bump; s5, performing laser scribing; s6, inversely mounting a patch; s7, performing vacuum reflow soldering; s8, plasma cleaning and plasma underfilling are carried out; and S9, laser marking is carried out. According to the process, five contradictions of'extreme low capacitance, extreme yield, low temperature drift, zero cavity and green manufacturing 'are simultaneously grounded in the same package, so that the TVS device really meets the dual requirements of a 40Gbps high-speed interface and a vehicle gauge for the first time.

The utility model discloses a laser scribing device which comprises a working table, a support installed on the working table, an infrared laser assembly and a green laser assembly which can be independently in sliding fit with the support, and a carrying table in sliding fit with the working table. Wherein the sliding directions of the infrared laser assembly and the green laser assembly are perpendicular to the working surface of the carrying table, and the infrared laser assembly and the green laser assembly are used for adjusting the position of a focal plane; the carrying table is used for carrying a product and can be controlled to move to the position matched with the output end of the infrared laser assembly or the output end of the green laser assembly. When the laser scribing equipment is used, the infrared laser assembly and the green laser assembly are independently controlled to move along the working surface perpendicular to the carrying table, and the focal plane positions of the corresponding assemblies can be accurately adjusted, so that operation steps can be simplified, and four laser scribing procedures of P1, P2, P3 and P4 of solar cells can be efficiently completed in a matched mode.

The utility model discloses transparent conductive glass and a perovskite thin film battery assembly. The transparent conductive glass comprises a transparent substrate, the transparent substrate is provided with a first surface and a second surface which are opposite, and a first direction and a second direction which are perpendicular to each other, a plurality of grooves extending in the second direction are formed in the second surface in parallel, and diffuse reflection patterns are arranged at the bottoms of the grooves; and the transparent conducting layer is stacked on the non-groove area on the second surface and stacked on the bottom and at least one side wall of the groove so as to form a continuous or discontinuous transparent conducting layer structure in the first direction. When the transparent conductive glass disclosed by the utility model is used for manufacturing a perovskite thin film battery assembly, the laser scribing passes can be obviously reduced, so that the process is simplified, and the ablation damage to the perovskite thin film battery caused by multiple laser scribing is avoided, thereby reducing the dead zone area; the stability and the power generation efficiency of the assembly are improved; and the service life of the assembly is prolonged.

The invention relates to the technical field of solar thin film cell manufacturing, and provides a solar thin film cell laser scribing detection and repair system and method. Aiming at the problems of lack of probe contact verification, low detection efficiency and asynchronous repair in the prior art, the system comprises a loading and unloading module, a probe module, a state detection circuit, a cross measurement circuit and a repair unit. The method comprises the steps of substrate transfer and fixation, probe contact, state detection, cross measurement and defect repair. Detection-positioning-repairing integration is realized through modularization cooperation, the detection accuracy and efficiency and the battery yield are improved, and the method is suitable for large-scale production of solar thin film batteries.

The invention relates to the technical field of solar cells, in particular to a wide-band-gap organic-inorganic hybrid perovskite cell module driven by indoor light to degrade organic pollutants. The structure of the wide-band-gap organic-inorganic hybrid perovskite battery module is n-i-p type or p-i-n type, and the wide-band-gap organic-inorganic hybrid perovskite battery module is formed by connecting single batteries in series through laser scribing of P1-P2-P3; the wide-band-gap organic-inorganic hybrid perovskite battery module comprises a wide-band-gap perovskite thin film light absorption layer, and is prepared by spin-coating a PbI2 precursor solution on the surface of an n-type electron transport layer or a p-type electron transport layer, annealing 1, spin-coating a perovskite precursor solution, and annealing 2. The perovskite solar cell module has a good visible light utilization rate, and still has high photoelectric conversion efficiency even under the indoor weak light illumination conditions that the color temperature is 3000K and the illumination is 1000lux. The photovoltaic driven catalytic degradation organic pollutant system has an excellent organic pollutant degradation effect.

The present invention discloses a roll-to-roll semi-automatic preparation method and system for flexible optoelectronic devices, relating to the technical field of flexible optoelectronic device manufacturing. The method comprises: using a roll-to-roll slit coater to slit-coat a functional material onto a laser P1 patterned coil, obtaining a flexible coil coated with a light absorbing layer and an interface layer; performing machine vision inspection using a physical coil archive to obtain a coil digital twin archive; transferring the flexible coil coated with the light absorbing layer and the interface layer to a roll-to-roll laser scribing device for laser P2 scribing to obtain a P2 patterned coil; and packaging and cutting the P3 patterned coil using a laminated packaging method based on coil packaging instructions and electrical cutting instructions to obtain a flexible optoelectronic device. Through process flow design, the present invention improves device processing accuracy and performance, enhances process flexibility, and is more suitable for industrial production.

The utility model relates to a chamfering laser ruling machine which is used for chamfering forming of the end portion of a pipe and comprises a machining box, the machining box is provided with a machining bin and a driving bin, the driving bin is provided with a feeding assembly and a clamping assembly, and the clamping assembly drives the pipe entering through the feeding assembly to clamp. A first moving module is further fixedly connected into the machining bin, and the first moving module is fixedly connected with a chamfering block used for chamfering forming of the ends of the pipes. The pipe is driven by the feeding assembly to enter the machining bin, meanwhile, the plastic pipe is driven by the clamping assembly to be clamped, the chamfering block is driven by the first moving module to be matched with the plastic pipe to achieve chamfering forming of the end of the pipe, the working efficiency is improved, and the machining cost is reduced.

The application provides a perovskite laminated battery laser scribing and slicing all-in-one machine and a processing technology thereof, which comprises a workbench, a moving mechanism arranged on the workbench, a suction stage arranged at the moving end of the moving mechanism, a laser assembly comprising a laser, an external light path structure and a galvanometer unit, a visual assembly comprising a detection unit for detecting a battery piece and a positioning unit for positioning the battery piece, and the detection unit, the positioning unit, the external light path structure and the galvanometer unit are all located above the workbench. The application has the functions of scribing and slicing, reduces intermediate transfer, secondary feeding and positioning time, greatly improves productivity, and in addition, the processing steps of the technology can effectively protect the material performance of the perovskite battery assembly, and avoid damage to the perovskite performance due to local overheating.

The invention discloses a battery assembly and a forming method thereof. The battery assembly comprises a first substrate; a bottom electrode layer on the first substrate; the first electric energy transmission layer is located on the bottom electrode layer and comprises first electron transmission layers and first hole transmission layers which are alternately arranged; a perovskite layer; a second substrate; a top electrode layer on the second substrate; the second electric energy transmission layer is located on the top electrode layer and comprises second electron transmission layers and second hole transmission layers which are alternately arranged; the first electron transport layer is aligned with the second hole transport layer, and the first hole transport layer is aligned with the second electron transport layer. The complete perovskite layer is located between the first electric energy transmission layer and the second electric energy transmission layer, scribing segmentation does not need to be carried out on the first electric energy transmission layer, the perovskite layer and the second electric energy transmission layer, and dead zones caused by laser scribing in the first electric energy transmission layer, the perovskite layer and the second electric energy transmission layer are eliminated. And the perovskite layer is not damaged by laser scribing, so that the stability and the reliability of each sub-cell module are improved.

The application provides a laser scribing height measuring method, comprising the following steps: controlling a horizontal motion platform to move in a horizontal plane, wherein the movement of the horizontal motion platform in the horizontal plane at least comprises an acceleration stage and a deceleration stage; when the horizontal motion platform starts to move, controlling a height measuring instrument to start to sample at a predetermined period, so that the height measuring instrument obtains height data of a measuring target at multiple positions at least in one of the acceleration stage and the deceleration stage; performing function approximation processing on the height data obtained by the height measuring instrument, to obtain a function formed by the height data and motion coordinates; and determining the height of the measuring target on the function according to processing coordinates of laser scribing. The laser scribing height measuring method provided by the application can measure in the whole movement process of the horizontal motion platform, and is beneficial to improving the efficiency and precision of laser scribing.

The invention relates to a battery piece scribing device and method, and the device comprises a feeding mechanism which comprises at least two first conveying lines and a lifting assembly, the first conveying lines are used for conveying a battery piece to be scribed and a battery box, and the output end of the lifting assembly is connected with a second conveying line and can be in butt joint with any first conveying line; the conveying mechanism comprises a first transfer assembly, a third conveying line, a first adsorption assembly, a first transfer assembly, a second transfer assembly and a first detection assembly, and the first transfer assembly and the second transfer assembly are both arranged on one side of the first conveying line; the scribing mechanism comprises a restoration assembly and a laser scribing assembly. Through the arrangement, high-speed scribing of the scribing device on the battery piece is achieved, and meanwhile high compatibility and high utilization rate of the device are guaranteed.

The utility model provides a perovskite laser scribing machine based on glass surface scribing. In order to solve the problem of low scribing efficiency of a large-size perovskite cell substrate, the device comprises a laser generation module which specifically comprises a laser and a reflector path system, and a laser splitting module which specifically comprises a laser splitting box, a multi-beam focusing scribing module and a cell substrate supporting and moving module, the device specifically comprises at least one focusing ruling head assembly and a ruling head movement module, and a dust extraction system can be configured for synchronous dust removal. Through multi-beam synchronous scribing, simultaneous processing of at most 48 beams of laser is realized, the scribing efficiency of the perovskite cell is remarkably improved, and the high-efficiency production requirement of a large-scale production line is met.

The clamp for the laser scribing machine comprises a base and a limiting ring plate which are distributed in parallel, the base and the limiting ring plate are connected through a supporting piece, a plurality of vacuum adsorption pipes are arranged on the base, and the tops of the vacuum adsorption pipes are located in the limiting ring plate; a plurality of limiting grooves distributed in the circumferential direction are formed in the limiting ring plate, positioning plates capable of generating displacement in the radial direction of the limiting ring plate are arranged in the limiting grooves, and a limiting block used for positioning a silicon wafer is arranged at the inner end of at least one positioning plate; a plurality of first scale grooves distributed in the radial direction are formed in the two sides of the limiting groove, and second scale grooves corresponding to the first scale grooves are formed in the positioning plate. According to the utility model, silicon wafers can be positioned when being placed, the placement precision is improved, and rapid placement is facilitated; and meanwhile, the magnet sheet can move according to scales, so that silicon wafers with different ruler diameters can be conveniently placed, the silicon wafers can be clamped, the silicon wafers are prevented from deviating, the cutting precision of the silicon wafers is ensured, and the material loss is reduced.

1. The name of the design product: perovskite solar thin film cell laser processing equipment. 2. The use of the design product: for perovskite solar thin film cell laser cleaning, laser scribing, laser edge cleaning, substrate cutting, glass punching, laser sealing, etc. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: design 1 perspective view 1. 5. Design 1 is designated as the basic design.

The application discloses a kind of dimming cadmium telluride power generation glass and preparation method thereof, belong to adjustable light photovoltaic module production technical field.The preparation method includes: on FTO conductive substrate, CdSe / CdTe power generation layer and ZnTe doped composite back contact / complex back electrode layer are prepared in sequence, single time perforating is carried out using laser, the discrete micropore array with aperture 1 μm~5 μm, hole spacing 5 μm~15 μm, optical opening rate 10%~60% is formed, then solid-state electrolyte layer, electrochromic layer and transparent top electrode are deposited, and the product is obtained by laser scribing electrode isolation and glass packaging.Product is divided into high efficiency HP, balanced type ST and high light HT three series according to opening rate.The application realizes the effect of light path self-alignment, process simplification and no moire interference, and the power generation efficiency loss is small, the light transmittance and power generation efficiency matching can be flexibly customized, suitable for building photovoltaic integrated scene, with high efficiency power generation, dynamic dimming and excellent visual effect.

The invention belongs to the technical field of photovoltaic materials, and particularly relates to a preparation method and application of a C60 material containing tetrazole olefinic bonds. The preparation method of the C60 material containing the tetrazole olefinic bond comprises the following steps: (1) mixing tetrazole and halogenated olefin to obtain tetrazolyl halogenated olefin; and (2) mixing halogenated C60 and tetrazolyl halogenated olefin, and carrying out Sonogashira coupling reaction to obtain the C60 material containing the tetrazolyl olefin bond. The beneficial effects of the invention are that the C60 material containing tetrazole olefinic bonds is used as the electron transport layer, and in the P2 and P3 laser scribing process, dynamically broken tetrazole halide can be bonded with Pb ions in perovskite, thereby effectively self-repairing possible damage of laser scribing to the perovskite thin film, and improving the performance of the perovskite thin film. A laser scribing area is well protected; meanwhile, non-radiative recombination of a perovskite electron transmission interface can be effectively reduced, and the efficiency and the stability of a device are improved.

The utility model discloses a scribing machine for photovoltaic assembly production, which relates to the technical field of photovoltaic assemblies and comprises a platform, a groove is arranged in the middle of the platform, two guide rails are arranged in the groove, a laser scribing assembly is arranged at the top end of the platform, bearing tables are mounted above the two guide rails, and the laser scribing assembly is arranged on the bearing tables. Center clamps are installed at the top ends of the two bearing tables correspondingly, screw rods are installed in the two center clamps correspondingly, threads formed in the outer surfaces of the two ends of each screw rod are opposite, the outer surfaces of the two ends of each screw rod are in threaded connection with supports correspondingly, one ends of the two supports extend out of the center clamps correspondingly, and the other ends of the two supports extend out of the center clamps correspondingly. The extension ends of the two supports are each provided with two side clamps. According to the utility model, a series of structures are arranged, feeding and discharging operations are far away from the scribing assembly, the operation space is large, scratch caused by mistaken touch of workers is avoided, the safety is higher, the scribing accuracy is guaranteed, and the photovoltaic assembly is clamped, so that the phenomenon of deviation during scribing is avoided.

The invention provides a dry-type transformer epoxy resin insulating layer laser modification method and system, and the method comprises the steps: determining the thickness of a to-be-degraded epoxy resin insulating layer in a workpiece, and determining the configuration parameter value of a to-be-used laser and the specification of a to-be-used field lens according to the thickness and the thermosetting property of epoxy resin; and according to the set scanning path parameter value, focusing the focus of laser generated based on a laser device and a field lens to be used on the surface of the workpiece for scribing, putting the scribed workpiece into a pre-prepared epoxy resin degradation solution, and respectively recovering metal in the winding structure and degraded epoxy resin. According to the method and the system, laser scribing can be implemented in a customized manner according to different epoxy resin formulas or application scenes by adjusting laser and laser parameter treatment modes, so that a porous structure is generated in a heat affected zone of a scribed surface, the contact area with a chemical solvent is increased, and the degradation reaction is more sufficient.

The application discloses a multi-channel laser scribing processing system with adjustable interval, adopts an octahedral beam splitter designed in a structure to replace a traditional polarization beam splitter, realizes efficient beam splitting, and only four optical elements are needed to complete multi-beam output, so that the optical path structure is obviously simplified, energy loss and manufacturing cost are reduced. Secondly, the controller is integrated to control a first displacement driving device (adjusting the position of incident light), a second displacement driving device (adjusting the interval between split laser beams) and a lens interval adjusting device, real-time monitoring of displacement precision is combined with a laser range finder, and the displacement amount is fed back by using the resistance change of a ball screw, so that a closed loop control is formed, continuous dynamic adjustment of the interval (Delta d) between laser beams is realized, the precision can reach the micron level, and the strict process requirement of minimizing the dead zone of perovskite batteries and the like is met.

The invention discloses an irregular curved surface laser scribing robot positioning method and device, and relates to the field of robot positioning, and the method comprises the steps: extracting feature points of an irregular curved surface workpiece based on profile point cloud data, and obtaining an actually measured feature point set; on the basis of the actually measured feature point set, the preset lineation path and the irregular curved surface workpiece are matched; selecting coordinate point sets of an X axis and a Y axis of movement of the laser scribing robot on the XY plane mapping of the matched scribing path, and searching a coordinate point set of a corresponding Z axis to obtain a coordinate point set of the matched scribing path; determining a moving path point set of the laser scribing robot based on the matched coordinate point set of the scribing path; the laser scribing robot is controlled to move based on the moving path point set, and positioning of the laser scribing robot is achieved. According to the method, the laser scribing robot can adaptively plan the moving path along with the irregular curved surface, and the problems that a traditional scribing robot is low in programming efficiency and cannot accurately follow the scribing position are solved.

The application discloses a perovskite laser scribing device, which comprises a base (1), wherein the base (1) is provided with a Y-axis driving part (2) and a mounting rack (3), and the moving end of the Y-axis driving part (2) is provided with a workbench (4); the mounting rack (3) is provided with an X-axis driving part (5), the moving end of the X-axis driving part (5) is provided with a Z-axis driving part (6), and the moving end of the Z-axis driving part (6) is provided with an infrared laser scribing module (7) and a green laser scribing module (8); the infrared laser scribing module (7) is used for emitting infrared laser to perform scribing processing on a workpiece on the workbench (4); the infrared laser scribing module and the green laser scribing module are used for double-light-path processing, the processing efficiency is improved, and meanwhile, the optical path positioning mechanism is used to drive a collection camera to move, so that the collection camera is accurately corresponded with a scribing point, and the processing accuracy is ensured.