The invention relates to the technical field of micro-electro-
mechanical system sensors, in particular to an
MEMS pressure sensor which comprises a shell, an induction diaphragm and an ASIC
signal processing unit, an induction mounting cavity and a
signal processing cavity are formed in the shell, an air inlet is formed in the lower end face of the shell, a detection channel and a buffer cavity are formed in the shell, and the detection channel is communicated with the
signal processing cavity. The buffer cavity is designed to be gradually expanded from bottom to top; pulse
airflow firstly enters the detection channel through the air inlet, and direct disordered
impact of the
airflow is avoided; then the
airflow enters the buffer cavity, the airflow speed and the pressure
peak value are gradually reduced and the
pulse energy is dispersed by utilizing the characteristic that the cross sectional area of the cavity is gradually increased, and the originally concentrated strong
impact force is converted into gentle
pressure transmission, so that the abrasion and damage risks caused by the fact that the sensing diaphragm frequently bears the violent pressure are reduced; the structure stability and the sensing sensitivity of the sensing diaphragm can be maintained, and the accuracy of
pressure detection and the reliability of long-term work of the
MEMS pressure sensor can be guaranteed.