278 results about "Pulse energy" patented technology

The invention discloses a single crystal turbine blade crystal orientation defect detection system based on adaptive optics, particularly relates to the field of nondestructive testing, and is used for solving the problem that thermal damage and signal consistency are difficult to consider in acoustic imaging of complex structural parts. Through partition energy threshold setting, dynamic pulse planning, photoacoustic processing and unified coordinate cross-subarea data synthesis, local thermal damage caused by excessive concentration of energy is effectively avoided in the material detection process, and the requirement for collecting high-bandwidth signals can be met in a large range. The signal-to-noise ratio and the detection efficiency are improved by regulating and controlling pulse energy and a scanning path, the amplitude comparability and the image coherence among regions are ensured through signal normalization correction and subregion image set splicing, high-resolution and comprehensive-coverage acoustic mapping is output, the crystal orientation defects of the single crystal turbine blade are positioned and evaluated, the detection precision is improved, the measurement period is shortened, and the method is suitable for large-scale popularization and application. And the method has an applicable value for aero-engine parts requiring rapid and high-precision nondestructive detection.

The invention discloses a high-power picosecond pulse train laser with programmable sub-pulse energy and a method, and relates to the related technical field of lasers, the high-power picosecond pulse train laser comprises a mode-locked fiber laser, an acousto-optic modulator and a solid amplification chain which are sequentially arranged along an optical transmission path; the mode-locked fiber laser generates a mode-locked picosecond pulse sequence; the acousto-optic modulator performs pulse selection and pulse string grouping on the mode-locked picosecond pulse sequence, and performs pre-programming shaping on sub-pulse energy in a pulse string according to set intensity distribution to generate a pre-shaped pulse string; the solid amplification chain comprises at least one stage of solid amplifier, and the solid amplifier comprises a dichroscope, a laser gain crystal, a coupling optical assembly and an LD pumping source; and the dichroscope is used for focusing the pre-shaped pulse string amplified at the previous stage and the LD pump light transmitted by the coupling optical assembly into the laser gain crystal. Independent programmable regulation and control of the energy of each sub-pulse in the pulse string are realized, and the energy distribution of each sub-pulse in the pulse string can be flexibly adjusted.

A method of laser bonding glass to metal foil includes contacting a first glass substrate with a first metal foil to create a first contact location; directing a laser beam on the first contact location to bond the first glass substrate to the first metal foil; contacting a second glass substrate with a second metal foil to create a second contact location; and directing the laser beam on the second contact location to bond the second glass substrate to the second metal foil, wherein the first metal foil and the second metal foil each have a thickness from 5 μm to 100 μm, and wherein the laser beam comprises a pulsed laser comprising: a pulse energy from 2.8 μJ to 1000 μJ; and a wavelength such that the first and second glass substrates are substantially transparent to the wavelength.

The invention relates to the field of ultrafast laser, and discloses a nonlinear femtosecond pulse energy self-stabilizing device. Comprising a nonlinear self-phase modulation module, a reflector, a grating, a lens and a filter which are arranged in sequence, and the nonlinear self-phase modulation module, the reflector, the grating, the lens and the filter form a light beam transmission path; the nonlinear self-phase modulation module comprises a conical lens, a low-dispersion lens and a nonlinear medium; the reflecting mirrors are reflecting mirrors with consistent reflection spectrums; the grating is used for expanding a spectrum carrying energy fluctuation information in a spatial domain to form frequency domain spatial distribution related to energy; the lens is used for focusing or collimating the light beam expanded by the grating; the filter is a liquid crystal filter and is used for dynamically setting a filtering range; abnormal disturbance in the light path is identified by using the generative adversarial network, and a compensation strategy is generated; the abnormal disturbance comprises sudden mechanical vibration and nonlinear coefficient mutation at the initial stage of medium damage.

The invention relates to the technical field of laser control, and discloses a laser control method and device for an ultra-pulse thulium-doped fiber laser operation system, and the method comprises the steps: generating a PWM time-base waveform through an FPGA, and generating a reference duty ratio instruction based on a target pumping current value; the total response delay time of the acousto-optic modulator is calculated, the FPGA sends a trigger pulse to the acousto-optic modulator according to the total response delay time, the gated modulation laser is output to the optical fiber output end to obtain an analog voltage signal, and the analog voltage signal and the numerical value of the target power register are used for calculating a duty ratio correction increment; the duty ratio correction increment and the reference duty ratio instruction are updated to a duty ratio register of a PWM time base waveform, and multiple paths of pump cooperative driving waveforms are output. The technical problems of pump current response lag, acousto-optic modulator triggering jitter and optical power nonlinear saturation in an ultra-pulse thulium-doped fiber laser operation system are solved; and the laser pulse energy stability, the response speed and the long-term reliability are improved.

The invention discloses a near-infrared wide-spectrum pulse light source generator, belongs to the technical field of laser light source manufacturing, and aims to solve the problems of complex system structure and high cost due to the fact that a supercontinuum laser generates supercontinuum through multi-stage power amplification in the prior art. The device is composed of a first semiconductor pump laser, a first wavelength division multiplexer, a first gain optical fiber, a first filter, a first dispersion compensation optical fiber, a first high-nonlinearity optical fiber, a first isolator, an optical fiber coupler, a second semiconductor pump laser, a second wavelength division multiplexer, a second gain optical fiber, a second filter, a second dispersion compensation optical fiber, a second high-nonlinearity optical fiber and a second isolator. According to the invention, the characteristic of high mode-locked pulse energy of the Mmyshev oscillator is utilized, multi-stage power amplification is not needed, and the super-continuum spectrum can be directly generated, so that the system structure is simplified, and the cost is reduced; the laser light source can be applied to multiple fields of laser sensing, photoelectric countermeasure, remote sensing detection, optical imaging and the like.

The invention relates to a double-optical-comb laser and a laser spectrum measurement system, and the double-optical-comb laser comprises a pumping source which is used for generating pumping light. The optical fiber amplifier is connected with the output end of the pumping source, and the output end of the optical fiber amplifier is connected with the first optical fiber coupler. The first optical fiber coupler is connected with the first mode-locked laser cavity and the second mode-locked laser cavity. An output light path of the first mode-locked laser cavity is connected with the second optical fiber coupler, an output light path of the second mode-locked laser cavity is connected with the second optical fiber coupler, and the second optical fiber coupler is used for carrying out beam combination and frequency beating on the two paths of laser. The optical path delay line is used for adjusting the laser repetition frequency difference between the first mode-locked laser cavity and the second mode-locked laser cavity. The double-optical-comb laser not only overcomes the defects that an existing double-optical-comb system is complex, expensive and inconvenient to tune, but also has the advantages of being compact in structure, high in stability, high in output pulse energy and tunable in repetition frequency difference.

The invention is suitable for the technical field of circuit board manufacturing, and provides a blind hole processing method and system for a PCB, and the method comprises the steps: obtaining the parameter information of the PCB and the coordinates of a plurality of to-be-processed blind holes; calculating an optimal processing path according to the coordinates of the plurality of blind holes; laser pulse energy is calculated according to the parameter information, and then the blind hole is machined; the predicted machining depth of the blind hole is calculated based on the reflected signal intensity and the material response time when the blind hole is machined; dynamically correcting the magnitude of the laser pulse energy or the duration of processing the blind hole by the laser pulse energy according to the predicted processing depth of the blind hole; the roughness of the hole wall of the blind hole is detected, and fine trimming is conducted on the hole wall of the blind hole according to the roughness; therefore, multi-point high-precision, low-energy-consumption and thermal control optimized blind hole machining is achieved, the blind hole machining quality is greatly improved, and then the user experience is improved.

The application discloses a disk medium high-energy ultra-short pulse laser regenerative amplifier based on CPA technology, comprising: a femtosecond laser seed light source for providing femtosecond seed light; a chirped Bragg fiber grating for expanding the femtosecond seed light into nanosecond laser pulses; an optical coupling input and output device for coupling input of the nanosecond laser pulses and coupling output of the nanosecond laser pulses after amplification processing; a regenerative amplification laser cavity for regenerative amplification processing of the coupled-in nanosecond laser pulses; the optical coupling input and output device comprises a fiber coupling collimation module, an optical isolator, a first 1 / 2 wave plate and a thin film polarizer; the regenerative amplification laser cavity comprises a Pockels cell, a second 1 / 2 wave plate, a first reflection module, a second reflection module, a first telescope module, a second telescope module, a first disk gain medium, a second disk gain medium and a third reflection module; the regenerative amplifier can realize high-repetition-frequency and high-pulse-energy laser pulse output.

The invention discloses a roundness detection device and method for a finished aluminum alloy pipe, and relates to the technical field of pipe detection, and the method comprises the steps: constructing a multi-mode sensing array, calibrating and mapping the array to the axis of the pipe, triggering a constant-speed sliding table, and synchronously collecting a section point cloud and a vibration signal, an attractor feature matrix is generated based on phase-space reconstruction and a coding dictionary, a weighted directed graph is constructed to extract pulse energy distribution so as to accurately position a deviation node, a judgment threshold is adaptively corrected in combination with an energy gradient and connectivity change, and enhancement precision, rapid detection and a steady state tracking mode are dynamically switched. Model parameters are continuously optimized by comparing measured values of the high-precision roundness measuring instrument on line, a quality report containing deviation distribution, grade statistics and unique tracing identification is finally generated, and batch tracing and remote query are supported. Through combination of phase-space reconstruction attractor coding, pulse energy density analysis and dynamic mode switching, efficient identification of tiny deviation, precise positioning and balance between precision and efficiency are realized.

The invention relates to the technical field of wind driven generator control, in particular to a wind driven generator blade electric pulse deicing device thyristor control method, which comprises the following steps of: acquiring multi-dimensional data and fusing the multi-dimensional data into a blade working condition sensing data set to provide a rich and comprehensive information basis; the method comprises the following steps: acquiring blade surface icing thickness distribution data by acquiring a multi-time-sequence data training model and combining calibration data; differentiated division of energy demands is realized by dividing pulse energy demand levels and outputting a distribution matrix; the accuracy of the control parameters is improved by calculating the thyristor conduction angle adjusting quantity and the pulse width modulation parameters; low-temperature compensation correction is performed on the thyristor, so that the reliability of a trigger pulse sequence in a low-temperature environment is ensured; by executing differential electric pulse deicing operation, the deicing efficiency and pertinence are improved; the self-adaptive optimization control of the deicing process is realized by acquiring the deicing completion degree in real time and dynamically updating the regional energy density distribution matrix.

The invention provides composite laser shock peening equipment and a turbine blade laser shock peening method. The composite laser shock peening equipment comprises a first laser, a second laser, a third laser and a fourth laser, wherein the first laser outputs large-energy laser shock with single pulse energy larger than 1J to a first target area; the second laser outputs small-energy laser shock with single pulse energy at dozens of to hundreds of mJ levels to a second target area; the movement system is used for clamping and moving the to-be-machined part to the first target area or the second target area; the water restraint loading system is used for applying a water restraint layer; and the control system is used for adjusting working parameters of the modules. The invention further provides a turbine blade composite laser shock peening method implemented through the equipment, and the problem that double requirements of improvement of deep residual compressive stress and improvement of high surface residual compressive stress cannot be considered in a single process mode is solved through a large-energy and small-energy composite laser shock peening process.

The invention discloses an intelligent water meter and a water meter metering data transmission method and system, which are applied to the field of intelligent water meters and comprise the steps that when water flow pushes an impeller to rotate, a permanent magnet generates a periodic alternating magnetic field; the magnetic induction energy taking element is used for generating pulse energy when the periodic alternating magnetic field is generated; the water flow meter is used for obtaining water flow metering data; the energy conditioning module is used for processing the pulse energy to obtain electric energy with stable voltage; the electric energy is used for supplying power to the storage module, the data identification module and the wireless transmission module; the storage module is used for storing water flow metering data; and the wireless transmission module is used for transmitting the water flow metering data in the storage module to a client. Electric energy generated by the magnetic induction energy taking element is used for supplying power to the wireless transmission module, the data identification module and the storage module, and battery-free water meter metering and data transmission are achieved. And a battery-free, maintenance-free and power-consumption-free solution is provided for the flow metering terminal.

The application relates to a local polarization enhanced nonlinear ionization nanolithography system and method, and belongs to the technical field of femtosecond laser processing. The nanolithography method has the capability of large-area processing, can process a large-area nanohole array on a material through a 'flying dotting' mode, can control the distance between adjacent points in the nanohole array by controlling the speed of a high-precision displacement table and the repetition frequency of femtosecond laser pulses, can control the size of the nanohole by controlling the pulse energy, can control the characteristic line width of a nanowire by controlling the pulse energy and the speed of the high-precision displacement table, and can realize the patterning processing of the nanowire by designing a pattern and introducing the high-precision displacement table.

The invention relates to the technical field of traditional Chinese medicine medical instruments and intelligent diagnosis, and discloses a portable pulse diagnosis auxiliary device based on feature acquisition, which comprises a main body shell, a base and a main control board are arranged in the main body shell, a three-channel servo array is mounted on the base, the three-channel servo array comprises three mutually independent servo modules, and the three servo modules are connected with the main control board. Each servo module comprises a driving motor, a displacement sensor and a homologous and co-located sensing head integrated with a piezoresistive sensor and a photoelectric volume pulse wave (PPG) sensor pair, and a pulse diagnosis logic system is constructed on the main control board; the pulse diagnosis logic system comprises a self-adaptive locating module, a data acquisition module, a diagnosis analysis module and a result output module. The pulse energy gradient algorithm is used for automatically locking the middle depth, the three-channel servo array is combined with the homologous and co-located sensing head to achieve multi-part multi-mode signal synchronous collection, and objectivity and accuracy of pulse diagnosis auxiliary diagnosis are improved.

A class D amplifier including a pulse width modulation (PWM) control loop, an H-bridge driver, a PWM controller having a PWM pulse generator to generate PWM pulses supplied to the H-bridge driver in response to an ADC value output by an analog-to-digital converter of the PWM control loop, and a comparator. The comparator is configured to trigger a cutoff of a PWM pulse generated by the PWM pulse generator during a respective loop cycle of the PWM control loop and to trigger generation of at least one counter PWM pulse with an opposite polarity in the respective loop cycle such that a net pulse energy of the cutoff PWM pulse and of the at least one generated counter PWM pulse corresponds to a pulse energy representing the ADC value provided by the analog-to-digital converter of the PWM control loop during the respective loop cycle.

The utility model relates to the technical field of medical equipment, and particularly discloses a bipolar nanosecond pulse synchronous output circuit and ablation equipment, which comprise a positive pulse output circuit and a negative pulse output circuit, the positive pulse output circuit comprises a positive pulse charging unit, a positive pulse output control unit, a positive pulse transmission unit and a positive pulse output electrode wire which are electrically connected in sequence; the negative pulse output circuit comprises a negative pulse charging unit, a negative pulse output control unit, a negative pulse transmission unit and a negative pulse output electrode wire which are electrically connected in sequence; the positive pulse transmission unit at least comprises a forward multiplication transmission unit which is used for performing forward voltage multiplication or forward current multiplication on the forward output pulse signal; the negative pulse transmission unit at least comprises a negative multiplication transmission unit which is used for carrying out negative voltage multiplication or negative current multiplication on the negative output pulse signal. The bipolar nanosecond pulse synchronous output circuit provided by the utility model can improve instant pulse energy of nanosecond pulse tumor ablation equipment.

The invention provides a multi-channel graphene far-infrared pulse modulation method and system, electronic equipment and a storage medium, and relates to the technical field of far-infrared pulse modulation.The thermal distribution data of a graphene heating unit is captured through an integrated temperature sensor array, the thermal distribution data is imported into a thermal-mechanical coupling analysis model, and the thermal-mechanical coupling analysis model is analyzed; and analyzing the non-uniform physical expansion to generate equivalent lens curvature distribution. Based on the curvature distribution, the path offset of the far-infrared light beam after penetrating through the deformation film is simulated, and a space distortion vector field is constructed. And the vector field is used as input, a collaborative redistribution algorithm is operated, and an optimal pulse energy adjustment value is calculated. A pulse modulation instruction adaptive to hardware is generated according to the adjustment value and is applied to each channel, so that the light field nonuniformity introduced by thermally induced deformation is actively counteracted, and the stability and the consistency of a far infrared radiation field pattern of the multi-channel graphene device can be improved.

The invention discloses a pulse laser parameter adjusting method and a related device, and relates to the technical field of laser, and the method comprises the steps: calculating the peak power density based on the pulse width and pulse energy of pulse laser, and the diameter of a light spot formed on ice when the pulse laser passes through a corresponding laser focusing device; based on the wavelength of the pulse laser, calculating the minimum peak power density corresponding to ionization generated when the pulse laser acts on ice and the maximum peak power density corresponding to non-ionization generated when the pulse laser is transmitted in the air; judging whether the peak power density is smaller than the minimum peak power density and larger than the maximum peak power density; if any condition is smaller than the preset condition, the wavelength, the pulse width and the pulse energy of the pulse laser and / or the diameter of a light spot formed on the ice by the pulse laser through a corresponding laser focusing device are adjusted; through feedback adjustment of at least one adjustable parameter, the pulse laser is dynamically pulled back to a safe and effective working area, and the deicing effect of the pulse laser is ensured.

This invention discloses a high-speed sweeping fiber optic light source. The specific device includes: a mode-locked pulse light source, an optical fiber amplifier, a highly nonlinear optical fiber, and a dispersion-compensating optical fiber. The passively mode-locked pulse light source outputs a high repetition rate, wide-spectrum mode-locked pulse. Its dispersion propagation follows a parabolic differential equation similar to one-dimensional paraxial diffraction, analogous to Fraunhofer diffraction. The pulse is amplified outside the cavity by an optical fiber amplifier to increase the laser pulse energy and peak power. Then, it is broadened by the highly nonlinear optical fiber to obtain a supercontinuum light source. Finally, the pulse is stretched by a highly dispersive medium provided by the dispersive optical fiber, and the pulse frequency domain spectrum is mapped to a time domain waveform, thereby realizing a high-speed sweeping frequency light source in the time domain.

The invention provides a portable mid-infrared pulse fiber laser, a working method and a laser system thereof. The portable mid-infrared pulse fiber laser comprises a pumping source, a first convex lens, a dichroic mirror, a second convex lens, a rare earth ion doped fiber, a third convex lens, a fourth convex lens, a vanadium dioxide saturable absorber, a semiconductor heating sheet, a direct current power supply and a wire which are sequentially arranged along an optical axis. According to the working method, the temperature of the vanadium dioxide saturable absorber is controlled by starting electric control of the semiconductor heating sheet and adjusting the control voltage of the direct-current power supply; when the temperature reaches heat balance, a pumping source is started; the power of the pumping source is increased until the power threshold of the passive Q-switched pumping light is reached, and the dichroscope outputs mid-infrared passive Q-switched pulse laser. The laser system comprises the laser and a control circuit. Under the condition of low pumping power, high-peak-power, high-pulse-energy and nanosecond-level narrow-pulse-width mid-infrared passive Q-switched pulse fiber laser output is achieved; and the portability and the practicability of the laser are improved due to the portability and long-endurance design.

The invention discloses a processing method for a copper-clad ceramic substrate, which relates to the technical field of copper-clad ceramic substrate processing, and comprises the following steps of: taking a pre-treated copper-clad ceramic substrate, introducing nitrogen, and carrying out layered progressive micropore processing on an exposed aluminum oxide ceramic substrate of the pre-treated copper-clad ceramic substrate through picosecond laser to form micropores; each micropore is divided into an inlet layer, a middle layer and an outlet layer from top to bottom; the layer number of the micropores, the thickness of each layer of the micropores and the pulse width are controlled, and a light spot and long-focal-depth lens is adopted; adjusting monopulse energy and frequency parameters of picosecond laser, and punching an inlet layer; adjusting monopulse energy and frequency parameters of picosecond laser, and punching the middle layer; and adjusting monopulse energy and frequency parameters of the picosecond laser, and punching the outlet layer to obtain the copper-clad ceramic substrate. In the middle layer, the monopulse energy is gradually increased, and it is ensured that the material is evenly removed; at the inlet layer and the outlet layer, energy is reduced, and cracks caused by stress generated instantly when the material is punctured are avoided.

This invention discloses a steep-pulse perforation ablation emergency stop energy release control system and method, relating to the field of perforation manufacturing technology. The system, through a comprehensive energy release analysis module, calculates the energy diffusion rate Ks and the heat-affected zone area Ry, and combines this with the perforation temperature Ckwd to obtain the energy release control index Snkz, predicting the heat diffusion behavior and temperature change trend in the material. The system sets a pulse frequency threshold F2 and generates an optimized energy release strategy by comparing it with the energy release control index Snkz. When the energy release control index Snkz exceeds the pulse frequency threshold F2, the system reduces and adjusts the pulse energy E and pulse frequency f to reduce heat output and prevent material overheating; when the energy release control index Snkz is below the pulse frequency threshold F2, the system appropriately increases the pulse energy E and pulse frequency f to improve processing efficiency. The system can maximize processing efficiency and heat control effect while ensuring safety.

The invention discloses a resonant cavity and an air suspension air supply system with the resonant cavity. The resonant cavity comprises a resonant cavity shell, a closed cavity structure is arranged in the resonant cavity shell, at least one arc plate is arranged in the resonant cavity shell, and the arc plate divides an inner cavity of the resonant cavity shell into at least two arc channels with different path lengths. According to the invention, the space in the resonant cavity shell is divided by the arc plates, so that gas entering the cavity passes through different path lengths, air energy entering the resonant cavity shell is cut, and due to different path lengths of the arc channels, pulse gas can be cut off after entering the arc channels with different path lengths. And although the pulse energy has the same initial speed, the time for reaching the air outlet is different, so that a uniform energy group cannot be formed any more, high-frequency vibration of the system cannot be caused by the pulse energy, and excitation caused by other parts is avoided.

In certain embodiments, an ophthalmic laser surgical system for treating a target tissue in an eye includes a target detection system and a laser device. The target tissue has an optical breakdown threshold. The target detection system directs detection beams along a detection beam path towards the target tissue in a vitreous of the eye, and determines a location of the target tissue within the vitreous. The laser device includes a femtosecond laser that generates subthreshold laser pulses that have a pulse energy below the optical breakdown threshold of the tissue. The laser device directs a laser beam comprising the subthreshold laser pulses along a laser beam path towards the target tissue.

The invention discloses a composite optical thin film with intrinsic hydrophobicity and a preparation method thereof. The composite optical thin film comprises a substrate and an optical film system arranged on the substrate, wherein the optical film system comprises an organic-inorganic hybrid hydrophobic film layer. The organic-inorganic hybrid hydrophobic membrane layer is composed of an inorganic porous skeleton and an organic nano dispersed phase dispersed in the inorganic porous skeleton, and the inorganic porous skeleton has micro porosity gradually increased from the inner side surface to the outer side surface. The micro pores are filled with the organic nano dispersed phase in situ to form a space embedded structure with gradually increased distribution concentration gradient. According to the invention, covalent bonding and spatial embedding of organic components and an inorganic framework are utilized, so that the mechanical wear resistance and the hydrophobic antifouling life of the film layer are remarkably improved. According to the preparation method, double-source co-deposition is combined with a pulse type ion beam technology, and precise construction of a gradient distribution structure is achieved by dynamically modulating a deposition rate ratio and a pulse energy phase.

The application provides a kind of preparation method of femtosecond laser-induced graphene microtaper based on pre-structure assistance, forms ablation pit pre-structure on the surface of polyimide by front femtosecond pulse, and the energy deposition of subsequent pulse is enhanced by using the multiple reflection and light trapping effect of the pre-structure, so as to realize the growth of graphene microtaper induced by heat-chemical-force coupling through the structure formation path of "ablation pit pre-structure-local light trapping-energy accumulation-microtaper growth". Therefore, the application utilizes the light trapping effect and local energy enhancement effect of ablation pit pre-structure to improve the energy deposition efficiency of subsequent laser pulse in local area, thereby facilitating the continuous carbonization reconstruction of material and the formation of three-dimensional microtaper.

To provide a chamber device for a gas laser device capable of outputting laser light with stable pulse energy even at a high repetition frequency.SOLUTION: A chamber device of a gas laser device includes: a chamber body; an anode extending along a Z direction; a cathode extending along the Z direction and including a base portion 401 and a discharge portion 403 protruding from the base portion; a cathode side sound absorbing portion 470 including a base facing portion 453 spaced apart from the base portion in a V direction and overlapped partially and spaced apart from the discharge portion in an H direction and overlapped partially, and arranged in a space between a cathode side cover portion 450 covering the base portion and the base portion; and an inclined portion 480a arranged in a space on the base portion side than the base facing portion in the V direction and on the discharge portion side than the base facing portion in the H direction, expanding in a direction away from the discharge portion when progressing in a direction from the discharge portion side toward the base portion side along the V direction, and having an inclined surface extending in the Z direction.SELECTED DRAWING: Figure 6

This invention provides a method for eliminating bonding interface defects, a module for eliminating bonding interface defects, a semiconductor device processing apparatus, and a computer-readable storage medium. The method for eliminating bonding interface defects includes the following steps: locating at least one bubble defect on the bonding interface of a grain-wafer bond; and applying a pulsed high-energy beam from the grain side of the bonding interface to the at least one bubble defect to form at least one venting micro-via penetrating the corresponding grain above the bubble defect, wherein the peak power of the pulsed high-energy beam is not less than 10 kW, and its single-pulse energy is not greater than 1 mJ.

The application relates to the technical field of micro-electro-mechanical system sensors, in particular to a MEMS pressure sensor which comprises a shell, a sensing diaphragm and an ASIC signal processing unit, the shell is internally provided with a sensing installation cavity and a signal processing cavity, an air inlet is formed in the lower end face of the shell, a detection channel and a buffer cavity are formed in the shell, and the buffer cavity is designed in a gradually expanding mode from bottom to top; pulse airflow first enters the detection channel through the air inlet to avoid direct and disordered airflow impact; then the airflow enters the buffer cavity, the gradually increasing cross-sectional area of the cavity body is utilized to gradually reduce airflow speed and pressure peak value, disperse pulse energy, convert the originally concentrated strong impact force into gentle pressure transmission, thereby reducing the abrasion and damage risk of the sensing diaphragm caused by frequently bearing intense pressure, helping to maintain the structural stability and sensing sensitivity of the sensing diaphragm, and guaranteeing the accuracy of the MEMS pressure sensor in pressure detection and the reliability of long-term work.