The present invention relates to MSM photodetectors based on the 
high electron mobility 
transistor (HEMT) structure. More specifically, the present invention relates to MSM photodetectors based on the 
high electron mobility 
transistor (HEMT) structure that use a 
barrier layer of the HEMT structure as a 
Schottky barrier layer of the 
photodetector and use the channel layer of the HEMT structure as an 
absorption layer of the 
photodetector by 
doping the bottom part of the channel layer with a p-type 
dopant. Modification of the HEMT structure for the MSM 
photodetector can enhance 
electron current and suppress hole current, resulting in an impulse 
photocurrent response having a narrow pulse width. The present invention comprises an undoped buffer layer grown on the semi-insulating substrate, a p-doped channel layer that is used as an 
absorption layer grown on the said buffer layer, an undoped channel layer that is used as an 
absorption layer grown on the said channel layer, an undoped 
barrier layer that is composed of a material having a larger 
band gap energy than the said channel 
layers grown on the said undoped channel layer, a heavily n-type 
delta-doped 
barrier layer that is composed of a material having a larger 
band gap energy than the said channel 
layers grown on the said undoped barrier layer, and an undoped barrier layer that is composed of a material having a larger 
band gap energy than the said channel 
layers grown on the said heavily n-type 
delta-doped barrier layer.