The application belongs to the technical field of
crystalline silicon solar cells, and particularly relates to an HBC
solar cell structure and a non-amorphous damage preparation method thereof, which comprises the following steps: step S1,
polishing both sides of a
silicon wafer; step S2, depositing an i:a-Si layer, a P:a-Si layer, a high
work function TCO layer and an i:a-Si
mask layer on the back of the
silicon wafer from top to bottom; step S3,
laser oxidizing the P area of the back of the
silicon wafer; step S4,
wet cleaning the back of the silicon wafer; step S5, depositing an i:a-Si layer, an N:a-Si layer, a
low work function TCO layer and an i:a-Si
mask layer on the back of the silicon wafer from top to bottom; step S6,
laser oxidizing the N area of the back of the silicon wafer; step S7, cleaning the back of the silicon wafer and texturing the front of the silicon wafer; step S8, preparing an aluminum
oxide layer and a
silicon nitride layer on the front and back of the silicon wafer, and filling an isolation area of an isolation interdigital arrangement structure; step S9,
laser opening a
mask on the back of the silicon wafer; and step S10, printing
metal paste in a windowed area to complete the preparation of the
solar cell.