A pillar-type
field effect transistor having
low leakage current is provided. The pillar-type
field effect transistor includes a
semiconductor pillar, a gate insulating layer formed on a portion of a surface of the
semiconductor pillar, a gate
electrode formed on the gate insulating layer, and source / drain regions formed on portions of the
semiconductor pillar where the gate
electrode is not formed, in which the gate
electrode includes a first gate electrode, a second gate electrode, and an inter-gate insulating layer, in which the first gate electrode has a
work function higher than that of the second gate electrode, in which the inter-gate insulating layer is formed between the first gate electrode and the second gate electrode, and in which the first gate electrode and the second gate electrode are electrically connected by a contact or a
metal interconnection line. A portion of the second gate electrode having the
work function lower than that of the first gate electrode is overlapped by the drain region. Accordingly, the gate electrode of the pillar-type FET is formed using a material having a high
work function, so that the
threshold voltage can be increased and the work function of the portion of the gate electrode overlapped by the drain region can be decreased. Therefore, gate induced drain leakage is reduced, so that off-state leakage current can likewise be greatly reduced.