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1577 results about "Low leakage" patented technology

Pillar-type field effect transistor having low leakage current

InactiveUS20080251825A1Reduced cell device areaGood miniaturization characteristicTransistorSolid-state devicesGate leakage currentWork function
A pillar-type field effect transistor having low leakage current is provided. The pillar-type field effect transistor includes a semiconductor pillar, a gate insulating layer formed on a portion of a surface of the semiconductor pillar, a gate electrode formed on the gate insulating layer, and source / drain regions formed on portions of the semiconductor pillar where the gate electrode is not formed, in which the gate electrode includes a first gate electrode, a second gate electrode, and an inter-gate insulating layer, in which the first gate electrode has a work function higher than that of the second gate electrode, in which the inter-gate insulating layer is formed between the first gate electrode and the second gate electrode, and in which the first gate electrode and the second gate electrode are electrically connected by a contact or a metal interconnection line. A portion of the second gate electrode having the work function lower than that of the first gate electrode is overlapped by the drain region. Accordingly, the gate electrode of the pillar-type FET is formed using a material having a high work function, so that the threshold voltage can be increased and the work function of the portion of the gate electrode overlapped by the drain region can be decreased. Therefore, gate induced drain leakage is reduced, so that off-state leakage current can likewise be greatly reduced.
Owner:SEOUL NAT UNIV R&DB FOUND
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