The invention discloses a
manganese cobalt oxide and
zirconium oxide composite
plasma developing material, and belongs to the field of
plasma process detection and visual developing materials. In order to solve the problems that an existing
plasma indicating material is high in reversibility, unstable in color development, not resistant to high temperature and prone to generating organic
pollution, the invention provides a full-inorganic composite color development
system which is resistant to high temperature and irreversible in color development. The material is formed by compounding
manganese oxide (MnO),
cobalt oxide (CoO) and
zirconium oxide (ZrO), the
molar ratio of Mn to Co is (3-7): 1, and the content of ZrO is 10-40 wt%. Under the action of plasmas, synergistic valence transition from Mn to Mn and from Co to Co occurs in the material, and
zirconium oxide is used as a lattice
stable phase and an
oxygen vacancy buffer phase, so that the high-temperature
structural stability and the color development retentivity are remarkably improved. The material still keeps stable color development under the condition of 300-400 DEG C, the color development contrast
delta E is larger than or equal to 30, and the material can be prepared through a
sol-gel or
physical vapor deposition (PVD) method. According to the invention, a high-contrast, irreversible,
pollution-free and long-term stable plasma developing indication function is realized, and the device is suitable for
visual detection and
verification of semiconductors, medical sterilization and high-cleanliness processes.