2162 results about "Ultrapure water" patented technology

A method for efficiently and safely cleaning an apparatus for tin compound and a highly purified tin compound apparatus are provided. A cleaning method for an apparatus that has been in contact with a tin compound having formula (1) below includes at least steps (A) to (C), in which step (B) is performed after step (A), and step (C) is performed after step (B):(A) a step of cleaning the apparatus with a non-protic solvent,(B) a step of cleaning the apparatus with alcohol, and(C) a step of cleaning the apparatus with ultrapure water having a resistivity value of 17 MΩ·cm at 25° C.RpSnXm  (1)In formula (1), R is a hydrocarbon group, p is an integer from 1 to 3, X is a hydrolyzable substituent, and m=4−p.

The invention provides a method for cleaning organic glue residues on the surface of a carrier plate, which comprises the following steps of: acquiring surface cleanliness data in a cleaning process in real time by adopting a carrier plate surface cleanliness online monitoring device, analyzing a cleanliness change trend in real time through an algorithm, and dynamically adjusting soaking, oscillating and flushing treatment parameters and a circulation path, so as to realize cleaning of the organic glue residues on the surface of the carrier plate. Adaptively optimizing a cleaning scheme, and predicting a cleaning end point; deploying a colloidal particle agglomeration degree analyzer in the water tank, monitoring the agglomeration state data of colloidal particles in real time, analyzing the relevance between the agglomeration state and water quality parameters through an algorithm model, dynamically adjusting the pH value and ionic strength of ultrapure water, optimizing the water quality environment, and inhibiting redeposition of the colloidal particles.

A method for efficiently and safely cleaning an apparatus for a tin compound and a highly purified apparatus for a tin compound are provided. A method of cleaning an apparatus that has been in contact with a tin compound having formula (1) includes at least steps (A) to (C) in this order:(A) a step of cleaning the apparatus with a non-protonic solvent,(B) a step of cleaning the apparatus with an acidic aqueous solution and / or alkaline aqueous solution, and(C) a step of cleaning the apparatus with ultrapure water having a resistivity of 17 MΩ·cm at 25° C.RpSnXm  (1)R is a hydrocarbon group, p is an integer of 0 to 3, X is a hydrolyzable substituent, and m=4-p.

The method comprises the following steps: (1) putting 1-vinyl imidazole into a flask containing N, N-dimethylformamide and D314 type resin, adding an initiator, carrying out a grafting reaction under the action of the initiator, and obtaining imidazolyl anion exchange resin after the reaction is finished; (2) pre-treating the imidazolyl anion exchange resin, and then adsorbing a rhenium-containing solution to be treated by adopting the pre-treated imidazolyl anion exchange resin; and (3) washing the imidazolyl anion exchange resin subjected to saturated adsorption in the step (2) by using ultrapure water, and then analyzing by using ammonia water to obtain a high-purity rhenium-containing solution. According to the method, the imidazolyl anion exchange resin is synthesized, the imidazolyl anion exchange resin has excellent selective adsorption capacity on rhenate ions, and efficient separation of rhenium and other impurities can be achieved when the imidazolyl anion exchange resin is applied to the rhenium-containing solution.

The invention discloses a paclitaxel drug resistance SERS (Surface Enhanced Raman Scattering) substrate and a detection method. Belongs to the technical field of drug resistance detection. The SERS substrate is mixed with ultrapure water after centrifuging a silver nanoparticle-sodium citrate suspension, and the mixture is dropwise added to a silicon wafer and dried to form a coffee ring structure. During detection, cancer tissue crushing liquid is dropwise added to the center of the substrate, SERS signals are collected through a Raman spectrometer and compared with a pre-established drug resistance / sensitivity spectrum database, and drug resistance is judged according to characteristic peaks at 820 cm <-1 >, 1180 cm <-1 >, 1270 cm <-1 > and 1450 cm <-1 >. The method is easy and convenient to operate, short in detection time (within 10 minutes), high in sensitivity and suitable for rapid screening of paclitaxel drug resistance of breast cancer patients.

The invention discloses a modularized ultrapure water preparation and on-line monitoring system, which comprises a pretreatment module, a purification module, a monitoring module and a control module, and is characterized in that a dynamic monitoring end is arranged, and when ultrapure water preparation is monitored in real time, a multi-parameter fusion detection mechanism and self-adaptive threshold analysis are integrated; meanwhile, the abnormal state of the water quality is dynamically judged based on the conductivity, TOC and particulate matter data collected in real time, the sudden change risk of the water quality output by the purification module can be recognized in real time, error accumulation caused by traditional single-point monitoring is avoided, and therefore the purity detection reliability of the ultrapure water is improved; and the reverse osmosis unit and the electrode deionization unit of the purification module can immediately respond to the effluent parameter change of the pretreatment module, so that the hidden dangers of membrane blockage and recovery rate reduction caused by water quality fluctuation are reduced, and the energy consumption redundancy is reduced while the water quality stability is ensured.

The utility model belongs to the technical field of water treatment, and particularly discloses a movable semiconductor ultrapure water preparation device which comprises a water tank part, a pretreatment part, a primary treatment part, a secondary treatment part, a functional treatment part, a terminal treatment part and a dosing part. All the parts are integrated, convenient to disassemble and assemble and compact in structure. The ultrapure water preparation device capable of integrating various cleaning and purifying functions comprises all process equipment for controlling the water quality index of the ultrapure water, strictly ensures that the water quality of produced water reaches the standard, and is designed with online detection equipment, so that the water quality of the ultrapure water is fully ensured. The whole device is convenient to move, and can be quickly conveyed to a factory for preparing ultrapure water for water preparation, so that the construction cost and the operation and maintenance cost are reduced while the requirements of the production process and the water quality are met. All functional parts in the device are recombined, disassembled and assembled, the market change requirements are met, the equipment cost is reduced by adopting the reasonable and integrated device, and the quality and efficiency of preparing ultrapure water are improved.

The invention discloses a method for preparing synthetic quartz sand by a sol-gel method, which comprises the following steps: mixing silicon alkoxide and an alcohol solvent, and stirring to form a homogeneous solution marked as L1; mixing an acidic catalyst, an alcohol solvent and ultrapure water to form a mixed solution, and recording the mixed solution as L2; dropwise adding the L1 solution into the L2 solution, and continuously stirring and hydrolyzing to obtain sol; dropwise adding ammonia water into the sol until the pH value is 5-10, and standing in a vacuum drying oven to obtain wet gel; and drying and sintering the wet gel to obtain the high-purity synthetic quartz sand. The gelation time is accurately controlled through acid-base two-step catalysis, the production period is shortened, and the production efficiency is improved; meanwhile, the size and uniformity of silicon dioxide particles are controlled by controlling the dripping speed of a silicon source, so that the sintering temperature of the synthesized quartz sand is greatly reduced, and the solvent is recycled through distillation when wet gel is dried, so that the production cost is reduced, and the pollution to the environment is reduced.

The invention discloses a monitoring method and system for identifying crop drought based on leaf morphology, and relates to the field of agricultural drought monitoring, and the method comprises the following steps: selecting a completely unfolded healthy leaf, cleaning with ultrapure water, blow-drying with nitrogen, and fixing on a standard objective table to obtain a standardized leaf sample; based on the standardized leaf sample, a high-resolution scanner is used for obtaining a front gray image and a back gray image of the leaf, and a binary image with a clear vein network is obtained through image splicing and binarization processing; skeletonizing the binary image with the clear vein network, and calculating the vein fractal dimension by adopting a box counting method to obtain a fractal dimension change rate; the method is in a fixed detection area of a standardized leaf sample. Through innovative leaf vein fractal dimension analysis and contact angle dynamic measurement, a crop drought monitoring system is constructed, and in the aspect of leaf vein analysis, skeletonization processing and a box counting method are adopted to realize accurate quantification of a leaf vein network topological structure.

The invention discloses a purification method for removing quartz inclusion, which comprises the following steps: calcining a quartz sand raw material at high temperature for a certain time, then taking out and quickly putting into cold water for cold quenching; dehydrating quartz sand, feeding into a microwave reactor, heating to a set temperature, and keeping for a period of time; after the reaction is finished, cleaning the quartz sand with ultrapure water; filling the quartz sand into a high-temperature and high-pressure reactor, introducing supercritical carbon dioxide and hydrogen fluoride mixed gas, and keeping the temperature and the pressure for a period of time; and after the reaction is finished, discharging gas to obtain the high-purity quartz. Through two-stage heat treatment, a channel between gas-liquid inclusions in quartz particles and the outside can be efficiently opened, and meanwhile, the supercritical method ensures that impurities in the inclusions can be effectively dissolved out; the treatment time is short, the required temperature is low, the acid consumption is less than 10%, and the method has the advantages of high efficiency and low cost.

The invention relates to a preparation method of monodisperse spherical alumina powder with uniform granularity. The preparation method comprises the following steps: dissolving and stirring an aluminum source, a precipitator and a dispersing agent in ultrapure water to prepare an aluminum oxide precursor solution; transferring the prepared aluminum oxide precursor solution into a hydrothermal reaction kettle, carrying out heating reaction, after the hydrothermal reaction is finished, naturally cooling to room temperature, alternately and respectively washing with ultrapure water and ethanol, and drying to obtain aluminum oxide precursor powder; and sintering the prepared aluminum oxide precursor powder in a muffle furnace in an air atmosphere to obtain the spherical aluminum oxide powder. The hydrothermal method is adopted to react in a high-temperature and high-pressure environment, so that the reaction uniformity is improved, and the spherical aluminum oxide precursor with uniform granularity and consistent morphology is obtained. The bending strength of the obtained ceramic material is remarkably improved, and the highest bending strength reaches 245MPa. The method has wide application prospects in the fields of heat-conducting composite materials, integrated circuit films, substrate materials, 3D printing materials, precision polishing materials and the like.

The invention relates to the technical field of preparation of metal organic frameworks, and particularly discloses a preparation method and application of a porous MOF (Metal Organic Frame.The method comprises the following steps: dissolving a triblock copolymer PluronicF-127 in ultrapure water, adding acetic acid and sodium chloride, and uniformly stirring to form a solution; adding zirconyl nitrate into the solution, and adjusting temperature and reaction time through a metal ion diffusion optimization model to ensure uniform distribution of metal ions; organic ligands are introduced to adjust the pore size distribution of the MOF; carrying out surface functionalization on the synthesized MOF material, and introducing amino and carboxyl; washing and filtering the synthesized MOF material to remove impurities and residues, and then drying the MOF material under a vacuum condition to remove moisture and an organic solvent. According to the invention, the performance of the MOF material in the application of the electrochemical luminescence sensor is effectively improved.

The invention discloses a non-derivatization quantitative detection method for amino acid in a high-concentration protein preparation, which comprises the following steps: separating by using a graphitized carbon chromatographic column, adding an ion pair reagent trifluoroacetic acid into a mobile phase, and detecting by using an electric fog detector (CAD); the method comprises the following steps: preparing a plurality of groups of amino acid standard substance solutions with different concentration groups, wherein the concentration range is 1mmol / L-20mmol / L; drawing a quadratic equation standard curve of the amino acid standard product concentration and the peak area as a detection equation for detecting the amino acid concentration; the method comprises the following steps: diluting a test sample by using ultrapure water for multiple times, carrying out ultrafiltration centrifugal treatment, removing protein, introducing the sample, obtaining a corresponding peak area according to the spectrum integral of the test sample, and substituting the peak area into the detection equation to obtain the concentration of amino acid in the test sample. The method has the advantages of high detection precision, high detection efficiency and simple operation, and greatly reduces the adverse effect of high-concentration protein on the chromatographic column.

The invention relates to the technical field of food processing, and discloses casein-tea polysaccharide-polyphenol composite nanoparticles and a preparation method of the casein-tea polysaccharide-polyphenol composite nanoparticles, and the preparation method comprises the following steps: mixing large yellow tea polysaccharide with a casein solution to obtain a CS / TPS mixed solution; performing glycosylation modification on casein in the CS / TPS mixed solution by adopting a Maillard reaction to prepare a casein-polysaccharide copolymer solution; the preparation method comprises the following steps: mixing a plurality of catechins, dissolving the catechins in ultrapure water to obtain a mixture stock solution, mixing the mixture stock solution and a casein-polysaccharide copolymer solution according to a volume ratio of 1: 16, stirring for 1 hour for self-assembly, pre-freezing the stirred solution at-80 DEG C, and freeze-drying for 48 hours to obtain CS-TPS-MIX nano-composite powder. According to the invention, a polyphenol delivery system with a dual antioxidant synergistic mechanism is constructed through a Maillard reaction mediated nano-composite technology, and the system is stable in structure, so that the release of polyphenol is more controllable.

The invention discloses a marine radiance meter immersion factor measurement method, which belongs to the technical field of radiation value measurement, and comprises the following steps: controlling a stable halogen tungsten lamp to irradiate towards a calibration container below the calibration container, the bottom of the calibration container is a diffuse transmission plate to generate a uniform light field, and the calibration container is filled with ultrapure water; the method comprises the following steps: firstly, measuring the radiance value of the optical window of the radiance meter just immersed under the water surface, then discharging ultrapure water in a calibration container in sequence, and obtaining the radiance value when the distance between the optical window of the radiance meter and the water surface is zi; performing water attenuation correction on a measured value in the air of the radiance meter, and extrapolating to calculate radiance when zi is equal to 0; the refractive index of the water body is calculated, and the immersion factor of the to-be-measured radiometer is calculated. According to the marine radiance meter immersion factor measuring device, the problem that in theoretical calculation, only the radiance meter optical window refractive index is considered, and different radiance meter light path design influences are ignored, so that the deviation between a theoretical calculation result and an actual value is large is solved.

The system comprises a raw water tank, a multi-medium filter, a bag filter, a plate heat exchanger, an ultrafiltration device, an ultrafiltration water tank, a primary reverse osmosis device, a secondary reverse osmosis device, a UV (ultraviolet) sterilization device, an EDI (electrodeionization) device, a TOC (total organic carbon) remover, a polishing mixed bed and a terminal filter which are sequentially connected, the RO concentrated water tank is connected with the reverse osmosis concentrated water outlet ends of the primary reverse osmosis device and the secondary reverse osmosis device, the electric driving membrane device is connected with the RO concentrated water tank, and the drainage concentrated water tank is connected with the electric driving membrane device. The reverse osmosis (RO) and electrodeionization (EDI) combined process adopted in the invention comprehensively solves a series of problems of acid and alkali consumption, environmental pollution, poor automation degree, complex system and the like in ultrapure water production. The process equipment disclosed by the invention is relatively high in automation degree, saves the cost required by acid-base regeneration, and does not cause any pollution to the environment.

The invention provides a photo-thermal evaporation material based on black titanium dioxide as well as a preparation method and application of the photo-thermal evaporation material. The preparation method comprises the following steps: mixing urea, absolute ethyl alcohol and tetrabutyl titanate into a solution A, mixing absolute ethyl alcohol, ultrapure water and hydrochloric acid into a solution B, dropwise adding the solution B into the solution A, mixing to form a white colloid, heating in a water bath, drying, and calcining in a nitrogen atmosphere to obtain black titanium dioxide powder; the preparation method comprises the following steps: fully mixing a certain amount of black titanium dioxide, sodium alginate and ultrapure water to form a uniform dispersion liquid, dipping the pretreated polyurethane sponge in the dispersion liquid, and crosslinking with a calcium chloride solution to prepare the photo-thermal evaporation material of the black titanium dioxide-calcium alginate composite hydrogel. The photo-thermal evaporation material breaks through the photo-thermal application bottleneck of traditional titanium dioxide, has excellent evaporation rate and seawater desalination performance, and can effectively remove various printing and dyeing wastewater to obtain clean water.

The invention relates to a non-noble metal fuel cell oxygen reduction catalyst based on a self-assembled semi-interpenetrating polymer network and a preparation method and application thereof, and belongs to the technical field of fuel cell oxygen reduction catalysts. The preparation method of the catalyst comprises the following steps: S1, dissolving polysaccharide in ultrapure water, heating and stirring, then adding a polymer monomer, a polymerization initiator, a salt template and a non-noble metal source solution, heating and stirring until uniform orange red hydrogel is obtained, then adding a nitrogen source, continuously heating and stirring, and evaporating a solvent to dryness, so as to obtain a polysaccharide solution; freezing and drying to obtain an orange powder sample; s2, performing pyrolysis treatment on the orange powder sample to obtain a black powder sample, and performing acid pickling, suction filtration and drying to obtain a precursor product; s3, pyrolyzing the precursor product again to obtain the catalyst. The semi-interpenetrating polymer network hydrogel is synthesized in a self-assembly mode, and the catalyst with high loading capacity and atomic-scale dispersion is formed through pyrolysis.

The invention relates to the field of lithium ion batteries, and discloses a high-heat-resistance and low-water-absorption lithium battery diaphragm and a preparation method thereof, and the high-heat-resistance and low-water-absorption lithium battery diaphragm is prepared from the following components by mass: 40-60 parts of alumina; 25 to 42 parts by mass of sodium perfluorooctanoate; 65 to 85 parts by mass of ultrapure water; 0.5-1.2 parts by mass of a dispersant; 1.3 to 2.9 parts by mass of a pore forming agent; 2.6 to 3.8 parts by mass of an adhesive; the base film is a polypropylene base film or a polyethylene base film, and the thickness of the base film is 7 to 9 [mu] m. Through aluminum oxide surface modification, base membrane treatment and optimized coating and drying processes, the water absorption of the diaphragm is remarkably reduced, the binding force of the coating and the base membrane is improved, the uniformity and microporous structure of the coating are improved, and excellent heat resistance, air permeability and electrochemical performance of the diaphragm are realized; the problems of poor thermal stability, high water absorption and insufficient coating adhesion in the prior art are solved.

The invention discloses SOEC modules and an SOEC water electrolysis hydrogen production device based on multiple reactor core modules. The SOEC water electrolysis hydrogen production device comprises a skid-mounted cabinet body, a steam generator, a mixer, an air electric heater and a plurality of SOEC modules, wherein the skid-mounted cabinet body is provided with a deionized ultrapure water inlet, a cathode protection hydrogen inlet, a cold air inlet, a product crude hydrogen outlet and an oxygen-enriched air outlet; the SOEC module comprises a thermal insulation shell and a plurality of electrolytic tank reactor cores; the thermal insulation shell is provided with a high-temperature air module inlet, a hydrogen-containing mixed steam module inlet, an oxygen-enriched air module outlet and a product crude hydrogen module outlet; the electrolytic tank core comprises a high-temperature air single-pile inlet, a hydrogen-containing mixed steam single-pile inlet, an oxygen-enriched air single-pile outlet and a product crude hydrogen single-pile outlet; the mixer is used for mixing cathode protection hydrogen and steam generated by the steam generator into hydrogen-containing mixed steam; the working environment temperature of the air electric heater can be effectively reduced, so that the fault probability of the electric heater is reduced; and further, the operation stability of the SOEC water electrolysis hydrogen production equipment is improved.

The invention discloses a method for enriching light metal ions in a pore channel based on carbon nanofiber / carbon fiber nano confinement, and belongs to the technical field of sample pretreatment, and the method comprises the following steps: S1, preparing a carbon nanofiber / carbon fiber confinement material; and S2, putting the carbon nanofiber / carbon fiber confinement material obtained in S1 into a light metal ion solution, and stirring. According to the method for enriching the light metal ions in the pore channel based on the carbon nanofiber / carbon fiber nano confinement, the carbon nanofiber / carbon fiber is used as a confinement fluid carrier, ultrapure water, methanol or n-hexane is used as an extracting agent, a chelating agent does not need to be introduced, the method is green and environmentally friendly, the mass transfer rate is increased, and the method is suitable for large-scale industrial production. Therefore, high enrichment of light metal ions in water is realized.

The invention discloses a master batch with a food fresh-keeping function. The master batch comprises the following components: 40-80 parts of PE resin; 5 to 30 parts of a nano composite antibacterial agent; 0.1 to 5 parts of a surfactant; 2-10 parts of a polyolefin elastomer; 5-25 parts of an organic gas adsorption material; 5-20 parts of a microporous modified atmosphere material; 1-25 parts of an antifogging agent; 0.1 to 10 parts of a lubricant; 0.1-5 parts of a dispersant; 0.1 to 1 part of an antioxidant; 0.1 to 3 parts of absolute ethyl alcohol; and 80 to 300 parts of ultrapure water. The master batch with the food fresh-keeping function has a broad-spectrum antibacterial effect, can reduce the rotting rate, the weight loss rate and the loss rate of fruits and vegetables in the production circulation link, adsorbs organic gas generated by respiration of the fruits and the vegetables, spontaneously adjusts the gas concentration content, and prolongs the fresh-keeping time and the shelf life of the fruits and the vegetables.

The invention discloses a cathode roller with a honeycomb surface structure. A precise honeycomb micro-pattern structure is arranged on the surface of the cathode roller. The invention also discloses a method for manufacturing alloy foil by using the cathode roller, which comprises the following steps: dissolving ferric salt in ultrapure water to obtain a ferric salt solution; dissolving nickel salt in ultrapure water to obtain a nickel salt solution; mixing the two solutions and filtering; preparing various additive solutions, mixing all the additive solutions with the obtained iron-nickel solution to obtain an electrolyte, filtering the electrolyte, and transferring the filtered electrolyte into an electrolytic cell of a crude foil engine; and applying current to a cathode roller and an anode plate which are separately arranged in the electrolytic bath, electrically depositing iron and nickel on the surface of the cathode roller, and rolling through a roll-to-roll process to obtain the iron-nickel alloy foil. The alloy foil manufactured by the method has the characteristics of low surface roughness, high tensile strength and high ductility.

The invention relates to the technical field of membrane electrodes, in particular to a membrane electrode catalyst layer with a gradient aperture structure and a manufacturing method thereof.The catalyst layer is attached to the side face of a proton exchange membrane through hot pressing, and the catalyst layer at least comprises three catalyst sub-layers; the catalytic sublayer comprises ultrapure water, an organic solvent, a catalyst, a foaming agent and an ionomer; in the direction far away from the proton exchange membrane, the mass ratio of the catalyst to the foaming agent in different catalytic sub-layers is gradually reduced, and the pore diameter and the porosity in the catalytic layers are gradually increased. The membrane electrode catalyst layer provided by the embodiment of the invention can reduce the probability of'flooding 'of the gas diffusion layer (GDL) and improve the transmission performance of battery gas and reactants.

The invention relates to a purification method of high-purity diamond, and relates to the technical field of diamond purification. The purification method comprises raw material pretreatment, microwave-assisted ionic liquid stripping, solid-liquid separation and ionic liquid recovery, deep purification, separation and drying, and the raw material pretreatment comprises the following steps: crushing an impurity-containing coarse diamond raw material into particles of 2-5mm, then carrying out wet ball milling in ethanol for 4-6 hours, refining the particles to 50-200 microns, and carrying out microwave-assisted ionic liquid stripping on the particles to obtain refined particles; immersing the particles into a mixed solution of 10% diluted hydrochloric acid and 2% ammonium bifluoride, performing ultrasonic treatment for 2 hours, and performing centrifugal washing with ultrapure water until the particles are neutral; the microwave-assisted ionic liquid stripping method comprises the following steps: mixing the pretreated raw material with an ionic liquid according to a mass ratio of 1: (5-10), and carrying out microwave treatment for 10-30 minutes to obtain a reaction mixture. According to the purification method, diamond impurities are efficiently removed, meanwhile, the surface structure of the diamond can be protected against damage, waste liquid can be recycled, and the influence on the environment is small.

The invention provides a preparation method and application of red nano-selenium particles, and relates to the technical field of nano-medicines.The preparation method comprises the steps that sodium selenite is dissolved in ultrapure water, silicate microspheres containing copper, zinc and aluminum are added, the pH value is 4.8, 1.5 M of ascorbic acid solution is dropwise added while stirring, the temperature is increased till solid ascorbic acid is added, the pH value is adjusted through NaOH, and nano-selenium suspension liquid is obtained through stirring reaction; the preparation method comprises the following steps: mixing and stirring a nano-selenium suspension, a sodium alginate sulfydryl graphene oxide mixture and a chitosan oligosaccharide citric acid buffer solution, centrifugally washing, and freeze-drying to obtain red nano-selenium particles, and preparing the copper-zinc-containing aluminosilicate microspheres through mesoporous template calcination and copper-zinc co-doping. The red nano-selenium particles prepared by the method have a core-shell structure, uniform particle size, high oxidation resistance and remarkable interface bonding strength.

The utility model relates to the technical field of water treatment, and discloses a boron removal system for reverse osmosis ultrapure water and water treatment equipment, boron in ultrapure water can be effectively removed under the synergistic effect of a reverse osmosis membrane module, TOC removal devices and boron removal devices, meanwhile, the boron removal effect is improved by combining the two stages of boron removal devices with the two stages of TOC devices, and the service life of the water treatment equipment is prolonged. Therefore, the limit requirement of the industry on the boron content in the ultrapure water is met.

The invention provides semiconductor process equipment and a use method thereof. The semiconductor process equipment comprises a reaction cavity; the evaporator comprises an evaporation cavity, a premixing head, a gas outlet, a carrier gas inlet and an ultrapure water inlet; the premixing head is located at the top of the evaporation cavity, and the carrier gas inlet and the ultrapure water inlet are communicated with the evaporation cavity through the premixing head; the gas outlet is positioned at the bottom of the evaporation cavity; wherein a sleeve structure with a heating function is arranged in the evaporation cavity; the sleeve structure comprises a first sleeve, a second sleeve and a third sleeve; the first sleeve is connected with the top of the evaporation cavity, the lower portion of the first sleeve is located in the evaporation cavity and suspended, and an opening of the premixing head is located in the first sleeve. The second sleeve is connected with the bottom of the evaporation cavity, the upper portion of the second sleeve is located in the evaporation cavity and suspended, and the air outlet is located in the second sleeve. The third sleeve is located in the middle of the evaporation cavity, the upper portion of the third sleeve is inserted into the first sleeve, the lower portion of the third sleeve is inserted into the second sleeve, and the upper portion and the lower portion of the third sleeve are not communicated.

The present invention discloses a platinum electroplating solution, a preparation method thereof and an application in semiconductors, which comprises the following raw materials: 0.5-10 g / L of platinum salt PEP, 15-35 g / L of ethylenediamine sulfate, 5.0-29 g / L of malonic acid, 5.0-40 g / L of ammonium acetate, the balance being ultrapure water and ammonia water; the pH value of the platinum electroplating solution is adjusted to 7.0 with ammonia water; the method for preparing the coating comprises the following steps: S1, degreasing and pickling the semiconductor device to be processed; S2, selecting corresponding electroplating conditions and configuring a corresponding anode and its anode mask; S3, performing electroplating; S4, automatically adding the platinum salt PEP solution in a linked manner; S5, adjusting the pH value of the platinum electroplating solution; S6, stopping electroplating after reaching the target coating thickness or the preset electroplating time. The platinum metal film formed by the present invention has excellent morphology, uniform distribution, high wear resistance and excellent compactness.

The invention belongs to the field of environmental analytical chemistry, and provides a method for preparing micro / nano plastic based on stable isotope labeling and application of the micro / nano plastic. Specifically, an initiator, a pH buffer solution, ultrapure water, an emulsifier and a deuterated styrene monomer are mixed and emulsified through an emulsion polymerization method, a polymerization reaction is performed after emulsification, and then the deuterated polystyrene microspheres are obtained through cleaning and drying. According to the method, high sensitivity, high accuracy and safety of deuterium labeling are utilized, and a new research thought is provided for deeply researching the migration and transformation rule of the micro / nano plastic in the environment and long-term influence of the micro / nano plastic on organisms. The method is expected to promote the wide application of a hydrogen stable isotope labeling quantitative technology in the field of environmental science, and provides a scientific basis for evaluating the influence of the micro / nano plastic on the ecological environment and human health.