The invention provides an FRD device and a preparation method thereof, and the preparation method of the FRD device comprises the following steps: providing a
semiconductor layer at least comprising a cellular region and a terminal region, and forming a patterned
dielectric layer on the upper surface of the
semiconductor layer; forming a base region located in the cellular region and a
voltage-withstanding region located in the terminal region based on the patterned
dielectric layer; forming a protective layer on the exposed surfaces of the base region and the
voltage-withstanding region, forming a
platinum layer covering the bottom surface of the
semiconductor layer, and annealing to diffuse
platinum into the semiconductor layer; and forming an upper
electrode electrically connected with the base region and a
metal field plate electrically connected with the semiconductor layer at the edge of one side, far away from the cellular region, of the terminal region above the semiconductor layer, wherein the
contact type of the
metal field plate and the semiconductor layer is Schottky contact. The manufacturing process of the device is improved, the step of forming a first
conduction type field
cut-off region is omitted, Schottky contact is formed between the
metal field plate and the edge of the device, the performance of the device is guaranteed, meanwhile, the cost is reduced, and the production period is shortened.