The invention discloses a
bulk acoustic wave resonator, a preparation method thereof and a filter, and relates to the technical field of resonators. The
bulk acoustic wave resonator comprises a substrate, a bottom
electrode, a piezoelectric layer and a top
electrode, the bottom
electrode, the piezoelectric layer and the top electrode are sequentially arranged on the substrate, a groove is formed in the substrate, and the overlapping area of the bottom electrode, the piezoelectric layer and the top electrode in the stacking direction serves as a
resonance area. The top electrode comprises a first electrode pattern located in the
resonance area and a second electrode pattern located outside the
resonance area, the second electrode pattern and the first electrode pattern are arranged at an interval, a
dielectric layer and a third electrode pattern are sequentially arranged on the second electrode pattern, and the second electrode pattern, the
dielectric layer and the third electrode pattern form a
capacitor. According to the
bulk acoustic wave resonator, the preparation method thereof and the filter, the problems that in the prior art, extra leads are needed and the device area is large due to the fact that an external
capacitor of a bulk
acoustic wave resonator is additionally arranged can be solved, corresponding electrical
parasitism is avoided, and then the device performance can be improved.