The application provides a
semiconductor vertical field effect device preparation method, which comprises the following steps: S100,
processing a
wafer to form a
vertical field effect device prototype with exposed gate part, performing
isotropic etching on the exposed gate part to form a gate trench; S200, forming an
oxide layer on the gate by oxidation growth; S300, filling
metal in the gate trench to form a self-aligned word line; and S400, forming a drain on the upper part of the
silicon surface of the
wafer by epitaxial growth process. In the preparation process, the length and
diameter of the
transistor channel and the height and thickness of the gate word line can be accurately adjusted according to the requirement, meanwhile, the flatness of the bottom of the
gate oxide layer and the
bit line metal is better, so that the current can be adjusted and the leakage current can be reduced, and due to the overall integration of the
bit line, the process flow is simplified and the preparation cost is reduced.